CN-122003120-A - Go up unloading box device and semiconductor processing system

CN122003120ACN 122003120 ACN122003120 ACN 122003120ACN-122003120-A

Abstract

The invention relates to the technical field of semiconductor processing equipment, in particular to an upper and lower material box device and a semiconductor processing system. The loading and unloading box device comprises a first carrying moving platform, a second carrying moving platform, a transfer platform, a first mechanical arm and a second mechanical arm, and through the adoption of an integrated structure of the first carrying moving platform, the second carrying moving platform, the transfer platform and the two mechanical arms, the loading and unloading box device can replace a traditional loading machine and a traditional unloading machine which are matched with sorting equipment, and simultaneously can also form an automatic closed loop of feeding conveying, pushing and taking sheets, empty box transferring, unloading splicing and finished product conveying through the cooperation of the first carrying moving platform, the first mechanical arm, the second carrying moving platform, the second mechanical arm and the transfer platform, so that the problem that the sheets and the material boxes are easy to trace and confuse is solved.

Inventors

CHEN QIANG
ZHAN ZHIGANG
ZHANG MINGMING
Wu Hongbai
LI YUAN
LIU JIAMENG
LI JIABIN
LONG HAO

Assignees

沈阳和研科技股份有限公司

Dates

Publication Date: 20260508
Application Date: 20260410

Claims (11)

1. The feeding and discharging box device is characterized by comprising a first carrying moving platform, a second carrying moving platform, a transferring platform, a first mechanical arm and a second mechanical arm, The first carrying moving platform is arranged close to the pushing station and is used for placing a material box filled with material sheets to be sorted and conveying the material boxes to a position close to the pushing station; The first mechanical arm is used for carrying the material boxes which are positioned on the first carrying moving platform and are close to the pushing station, and after all the material sheets to be sorted in the material boxes positioned on the pushing station are transferred to the feeding station in the sorting equipment, the first mechanical arm is also used for carrying the material boxes positioned on the pushing station to the second carrying moving platform; The second carrying moving platform is arranged close to the feeding station and is used for conveying the material box conveyed by the first mechanical arm to a position close to the feeding station; The second mechanical arm is used for carrying the material box which is positioned on the second carrying moving platform and is close to the feeding station, and after the material box which is positioned on the feeding station is filled with the material sheets which are sorted by the sorting equipment, the second mechanical arm is also used for carrying the material box on the feeding station to the transfer platform.
2. The loading and unloading magazine assembly of claim 1, wherein the first load moving platform comprises: the first side of the first platform body is close to the pushing station; the first platform body is used for placing at least one material box; The first driving assembly is arranged on the first platform body and is used for conveying the material box positioned on the first platform body to the first side of the first platform body so that the material box moves to a position close to the material pushing station.
3. The loading and unloading magazine apparatus of claim 2, wherein when at least two magazines are placed on the first platform body, the at least two magazines are placed in sequence along a length direction of the first platform body, and the first driving assembly comprises: The pushing mechanism is arranged on the first platform body and is used for applying a force to the material boxes close to the second side of the first platform body to move towards the first side of the first platform body so that all the material boxes on the first platform body move towards the first side of the first platform body under the force; The position detection module is arranged at the edge of the first side of the first platform body and is used for detecting whether the material box moves to a position of the first platform body, which is close to the material pushing station; The first driving control module is used for controlling the pushing mechanism to stop applying acting force when the position detection module detects that one material box moves to a position close to the pushing station on the first platform body.
4. A loading and unloading magazine assembly as defined in claim 3 wherein the first drive control module is further configured to control the pushing mechanism to resume applying force to the magazine adjacent the second side of the first platform body after the first robotic arm has carried a magazine located on the first platform body and adjacent the pushing station to the pushing station.
5. A loading and unloading magazine assembly as defined in claim 3, wherein the pushing mechanism comprises: the pushing plate is movably arranged on the first platform body; The sliding table cylinder is arranged at the bottom of the first platform body and is in driving connection with the push plate, and the sliding table cylinder is used for driving the push plate to reciprocate along the length direction of the first platform body.
6. A loading and unloading magazine assembly as defined in claim 3 wherein a stop is further provided at an edge of the first side of the first platform body for abutting against a bottom of the magazine to limit movement of the magazine on the first platform body as the magazine moves on the first platform body to a position adjacent the pushing station.
7. The loading and unloading magazine assembly of claim 1, wherein the second load moving platform comprises: The second platform body is positioned below the first carrying moving platform, the first side of the second platform body is close to the pushing station, and the second side of the second platform body is close to the feeding station; the second driving assembly comprises a conveyor belt and a driving wheel set, the conveyor belt is arranged along the length direction of the second platform body, the driving wheel set is installed on the second platform body, and the driving wheel set is used for driving the conveyor belt to operate so as to convey the first mechanical arm to the material box on the conveyor belt to a position close to the feeding station.
8. The loading and unloading magazine assembly of claim 1, wherein the transfer platform comprises: The third platform body is positioned above the first carrying moving platform and is used for placing the material box carried by the second mechanical arm; the detection module is arranged on the third platform body and is used for detecting the number of the material boxes positioned on the third platform body; and the second driving control module is used for controlling the first carrying moving platform and the second carrying moving platform to stop running when the detection module detects that the number of the material boxes on the third platform body is the same as the number of the material boxes initially placed on the first carrying moving platform.
9. The feeding and discharging cartridge apparatus as claimed in any one of claims 1 to 8, wherein both ends of the cartridge are opened, and both opposite inner side walls of the cartridge are provided with mounting grooves; when the material box is positioned on the first carrying moving platform, two ends of the material box are positioned on two sides of the axis of the first carrying moving platform; the feeding and discharging box device further comprises: The pushing assembly is close to the pushing station, the pushing assembly comprises a pushing arm plate and a third driving assembly, and the third driving assembly is used for adjusting the pushing arm plate to move so that the carrier substrates located in the material box are pushed to the feeding stations in the sorting equipment one by one.
10. The loading and unloading box device according to any one of claims 1 to 8, further comprising a machine table, wherein the first carrying moving platform, the second carrying moving platform and the transferring platform are all arranged on the machine table, the pushing station and the feeding station are both arranged on the machine table, and the first mechanical arm and the second mechanical arm are both movably arranged on the machine table.
11. A semiconductor processing system comprising a sorting apparatus, an upper and lower magazine apparatus according to any one of claims 1 to 10; The loading and unloading box device is used for transferring the material sheets to be sorted in the material box to a loading station in the sorting equipment; The sorting equipment is used for transferring the loading and unloading box device to the material sheets on the loading station for sorting; the sorting equipment is also used for transferring the material sheets subjected to sorting to a position close to a feeding station of the upper and lower material box device; the loading and unloading box device is also used for collecting the material sheets which are transferred to the feeding station and are sorted by the sorting equipment into the material boxes.

Description

Go up unloading box device and semiconductor processing system Technical Field The invention relates to the technical field of semiconductor processing equipment, in particular to an upper and lower material box device and a semiconductor processing system. Background At present, in a semiconductor processing system, a sorting device for sorting and transferring semiconductor webs needs to be matched with a feeding machine and a discharging machine so as to realize feeding and discharging of the sorting device. However, after the feeding machine finishes feeding the sorting equipment, the empty material box cannot be automatically conveyed to the blanking machine, so that the material sheets which cannot be transported by the sorting equipment cannot be bound with the material box, that is, the same-in and same-out of the material sheets and the material boxes in the same batch cannot be realized, and abnormal conditions such as tracing confusion of the material sheets and the material boxes are easily caused. Disclosure of Invention The present invention aims to solve at least one of the technical problems existing in the prior art or related art. Therefore, the invention provides the loading and unloading box device, which can replace a traditional loading machine and a traditional unloading machine which are matched with sorting equipment, can realize the binding of the material sheets and the material boxes to enter and exit simultaneously, and solves the problem that the material sheets and the material boxes are easy to trace and confuse. The invention also provides a semiconductor processing system comprising the upper and lower material box device. An upper and lower magazine apparatus according to an embodiment of the first aspect of the present invention includes a first load moving platform, a second load moving platform, a transfer platform, a first mechanical arm and a second mechanical arm, The first carrying moving platform is arranged close to the pushing station and is used for placing a material box with the material sheets to be sorted and conveying the material box to a position close to the pushing station; The first mechanical arm is used for carrying the material box which is positioned on the first carrying moving platform and is close to the pushing station, and after the material sheets to be sorted in the material box which is positioned on the pushing station are transferred to the feeding station in the sorting equipment, the first mechanical arm is also used for carrying the material box on the pushing station to the second carrying moving platform; The second carrying moving platform is arranged close to the feeding station and is used for conveying the material box conveyed by the first mechanical arm to a position close to the feeding station; The second mechanical arm is used for carrying the material box which is positioned on the second carrying moving platform and is close to the feeding station, and the second mechanical arm is also used for carrying the material box on the feeding station to the transferring platform after the material box on the feeding station is filled with the material sheets which are separated by the separating equipment. Optionally, the first carrier moving platform includes: the first platform body is used for placing at least one material box; The first driving assembly is arranged on the first platform body and used for conveying the material box positioned on the first platform body to the first side of the first platform body so as to enable the material box to move to a position close to the material pushing station. Optionally, when at least two cartridges are placed on the first platform body, the at least two cartridges are placed in sequence along the length direction of the first platform body, and the first driving assembly comprises: The pushing mechanism is arranged on the first platform body and is used for applying a force to the material boxes close to the second side of the first platform body to move towards the first side of the first platform body so that all the material boxes on the first platform body move towards the first side of the first platform body under the force; the position detection module is arranged at the edge of the first side of the first platform body and is used for detecting whether the material box moves to a position of the first platform body, which is close to the pushing station; And the first driving control module is used for controlling the pushing mechanism to stop applying the acting force when the position detection module detects that the first platform body moves to a position close to the pushing station. Optionally, after the first mechanical arm carries the material box located on the first platform body and close to the pushing station, the first driving control module is further used for controlling the pushing mechanism to resume applying the acting force to the material box close to