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CN-122003125-A - Bearing device

CN122003125ACN 122003125 ACN122003125 ACN 122003125ACN-122003125-A

Abstract

The bearing device comprises a bearing disc, a first lifting piece, a second lifting piece, a third lifting piece, a driving assembly and a blank pressing assembly, wherein the first lifting piece, the second lifting piece and the third lifting piece are respectively arranged in the bearing disc, the blank pressing assembly is arranged on the periphery of the bearing disc, and the driving assembly is used for selectively driving the first lifting piece, the second lifting piece and the third lifting piece to lift relative to the bearing disc so as to enable the bearing device to be switched between different states. The front bearing of the two different types of measured pieces can be completed based on the same bearing device by utilizing the second lifting piece and the third lifting piece, the first lifting piece is utilized to support the contactable front surfaces of the measured pieces such as standard wafers and the like, and the pressing pressure is applied to the measured pieces through the edge pressing assembly, so that the front surfaces of the measured pieces are prevented from being contacted with the bearing disc, and the measured pieces are borne and fixed in a back surface placed posture, and therefore, the bearing device not only has the bearing function of the different types of measured pieces, but also has the functions of bearing the front surfaces and the back surfaces.

Inventors

  • CHEN LU
  • ZHANG PENGBIN
  • CHEN GUILONG

Assignees

  • 飞测思凯浦(上海)半导体科技有限公司

Dates

Publication Date
20260508
Application Date
20260114

Claims (11)

  1. 1. The bearing device is characterized by comprising a bearing disc, a first lifting piece, a second lifting piece, a third lifting piece, a driving assembly and a blank pressing assembly, wherein the first lifting piece, the second lifting piece and the third lifting piece are respectively arranged in the bearing disc, the second lifting piece is close to the center of the bearing disc relative to the first lifting piece, the third lifting piece is far away from the center of the bearing disc relative to the first lifting piece, and the blank pressing assembly is arranged on the periphery of the bearing disc; the bearing device has a first state, a second state and a third state; The driving assembly is used for driving the first lifting piece to lift relative to the bearing disc in the first state so as to support the contactable front surface of the first tested piece through the first lifting piece to enable the first tested piece to be spaced from the bearing disc; In the second state, the driving assembly is used for driving the second lifting piece to lift relative to the bearing disc so as to support the back surface of the first tested piece through the second lifting piece and release the first tested piece onto the bearing disc; And in the third state, the driving assembly is used for driving the third lifting piece to lift relative to the bearing disc so as to support the back surface of the second tested piece through the third lifting piece and release the second tested piece to the bearing disc, wherein the type of the first tested piece is different from that of the second tested piece.
  2. 2. The carrier of claim 1, wherein the drive assembly comprises a plurality of drive mechanisms independent of one another, wherein: The plurality of driving mechanisms comprise a first driving mechanism and a second driving mechanism, the first driving mechanism is configured to drive the first lifting piece to lift, and the second driving mechanism is configured to selectively drive the second lifting piece and the third lifting piece to lift; Or a plurality of the driving mechanisms comprise a first driving mechanism, a third driving mechanism and a fourth driving mechanism, wherein the first driving mechanism is configured to drive the first lifting member to lift, the third driving mechanism is configured to drive the second lifting member to lift, and the fourth driving mechanism is configured to drive the third lifting member to lift.
  3. 3. The bearing device of claim 2, wherein the first driving mechanism comprises a first driving piece and a first lifting plate, wherein the first lifting plate is arranged below the bearing disc, and the first lifting piece penetrates through the bearing disc and is fixedly connected with the first lifting plate; And/or the second driving mechanism comprises a second driving piece and a second lifting plate, the second lifting piece and the third lifting piece can respectively lift and penetrate through the bearing disc, the second lifting plate is arranged below the bearing disc, a first pushing part is arranged at the position, corresponding to the second lifting piece, of the second lifting plate, a second pushing part is arranged at the position, corresponding to the third lifting piece, of the second lifting plate, the height of the first pushing part is lower than that of the second pushing part, the second driving piece is used for driving the second lifting plate to drive the first pushing part and the second pushing part to lift, the first pushing part pushes the second lifting piece to lift, and the second pushing part pushes the third lifting piece to lift.
  4. 4. The carrier of claim 3, wherein the number of the first lifting members is plural, the first lifting members are distributed around the center of the carrier plate at intervals, and the first lifting members are fixedly connected to the first lifting plate.
  5. 5. The carrier of claim 3, wherein the second driving mechanism further comprises a first elastic member and a second elastic member, one end of the first elastic member is connected to the carrier plate, the other end of the first elastic member is connected to the second lifting member for providing an elastic force for driving the second lifting member to descend, and one end of the second elastic member is connected to the carrier plate, the other end of the second elastic member is connected to the third lifting member for providing an elastic force for driving the third lifting member to descend.
  6. 6. The carrier of claim 2, wherein the carrier tray includes an adsorption portion, a transition portion surrounding the adsorption portion, and a carrier portion surrounding the transition portion, an upper surface of the transition portion being flush with an upper surface of the adsorption portion, an upper surface of the carrier portion being lower than an upper surface of the adsorption portion, wherein the first lifter is disposed in the transition portion, the second lifter is disposed in the adsorption portion adjacent to the transition portion, and the third lifter is disposed in the carrier portion.
  7. 7. The carrier of claim 6, further comprising a fourth state in which the third elevating member is elevated to a position higher than the upper surface of the suction portion to space the second test member from the carrier tray by supporting the front surface of the second test member.
  8. 8. The carrier as claimed in any one of claims 1 to 7, wherein the first lifting member is provided with a first anti-slip pad at a portion thereof for contacting the first member under test, and the edge pressing assembly is provided with a second anti-slip pad at a portion thereof for contacting the first member under test.
  9. 9. The carrier of claim 8, wherein the edge pressing assembly comprises an edge pressing driving piece and an abutting piece, wherein the edge pressing driving piece is arranged on the carrier disc and connected with the abutting piece and used for driving the abutting piece to be close to or far away from the first tested piece in a state that the first lifting piece supports the first tested piece; The pressing block is provided with a pressing part and a limiting part which are connected, the second anti-slip pad is arranged on the pressing part, in the first state, the pressing part presses the back surface of the first measured piece through the second anti-slip pad, and the limiting part is used for limiting the first measured piece.
  10. 10. The carrier of claim 8, further comprising a detection assembly for detecting status information of the first test piece on the carrier in the first state, wherein the detection assembly comprises two detection pieces arranged on the carrier tray, the detection pieces comprise signal emitting portions and signal receiving portions which are arranged oppositely, and a connecting line of the signal emitting portion and the signal receiving portion of one detection piece intersects a connecting line of the signal emitting portion and the signal receiving portion of the other detection piece.
  11. 11. The carrier of claim 1, wherein the accessible front face of the first part is an area extending from 2mm to 5mm from the front face edge of the first part toward the center.

Description

Bearing device Technical Field The application relates to the technical field of semiconductor process flow equipment, in particular to a bearing device. Background In the semiconductor process flow, a carrier is commonly used for carrying and fixing a semiconductor workpiece so as to realize the processing, transportation, detection and the like of the semiconductor workpiece. In addition, as the inspection requirements become higher, not only the front surface of the wafer but also the back surface of the wafer need to be inspected, and the front surface of the wafer cannot be directly contacted with the carrier, so that the carrier adopted in the front inspection and the back inspection of the same wafer is different in the related art. Obviously, this increases the cost of configuring the carrying device and reduces the production efficiency. Disclosure of Invention The present application is directed to a carrying device, which at least partially solves the above-mentioned problems. In order to achieve the above object, an embodiment provides a bearing device, which includes a bearing disc, a first lifting member, a second lifting member, a third lifting member, a driving assembly and a blank holder assembly, wherein the first lifting member, the second lifting member and the third lifting member are respectively disposed in the bearing disc, the second lifting member is close to the center of the bearing disc relative to the first lifting member, the third lifting member is far away from the center of the bearing disc relative to the first lifting member, and the blank holder assembly is disposed at the periphery of the bearing disc; the bearing device has a first state, a second state and a third state; The driving assembly is used for driving the first lifting piece to lift relative to the bearing disc in the first state so as to support the contactable front surface of the first tested piece through the first lifting piece to enable the first tested piece to be spaced from the bearing disc; In the second state, the driving assembly is used for driving the second lifting piece to lift relative to the bearing disc so as to support the back surface of the first tested piece through the second lifting piece and release the first tested piece onto the bearing disc; And in the third state, the driving assembly is used for driving the third lifting piece to lift relative to the bearing disc so as to support the back surface of the second tested piece through the third lifting piece and release the second tested piece to the bearing disc, wherein the type of the first tested piece is different from that of the second tested piece. In one embodiment, the drive assembly comprises a plurality of drive mechanisms independent of each other, wherein: The plurality of driving mechanisms comprise a first driving mechanism and a second driving mechanism, the first driving mechanism is configured to drive the first lifting piece to lift, and the second driving mechanism is configured to selectively drive the second lifting piece and the third lifting piece to lift; Or a plurality of the driving mechanisms comprise a first driving mechanism, a third driving mechanism and a fourth driving mechanism, wherein the first driving mechanism is configured to drive the first lifting member to lift, the third driving mechanism is configured to drive the second lifting member to lift, and the fourth driving mechanism is configured to drive the third lifting member to lift. In one embodiment, the first driving mechanism comprises a first driving piece and a first lifting plate, wherein the first lifting plate is arranged below the bearing disc, and the first lifting piece penetrates through the bearing disc and is fixedly connected with the first lifting plate; And/or the second driving mechanism comprises a second driving piece and a second lifting plate, the second lifting piece and the third lifting piece can respectively lift and penetrate through the bearing disc, the second lifting plate is arranged below the bearing disc, a first pushing part is arranged at the position, corresponding to the second lifting piece, of the second lifting plate, a second pushing part is arranged at the position, corresponding to the third lifting piece, of the second lifting plate, the height of the first pushing part is lower than that of the second pushing part, the second driving piece is used for driving the second lifting plate to drive the first pushing part and the second pushing part to lift, the first pushing part pushes the second lifting piece to lift, and the second pushing part pushes the third lifting piece to lift. In one embodiment, the number of the first lifting members is multiple, the first lifting members are distributed around the center of the bearing plate at intervals, and the first lifting members are fixedly connected to the first lifting plate. In one embodiment, the second driving mechanism further comprises a fir