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CN-122003725-A - Inductor component

CN122003725ACN 122003725 ACN122003725 ACN 122003725ACN-122003725-A

Abstract

The inductor component is provided with a green body, a first interlayer insulating layer (31), an inter-wiring insulating layer (32), and an inductor wiring. The blank has a first major face. The first interlayer insulating layer (31) extends in parallel with the first main surface in the green body. The first interlayer insulating layer (31) is flat. The inter-wiring insulating layer (32) extends from the first interlayer insulating layer in a first positive direction orthogonal to the first main surface. The inductor wiring has a portion adjacent to the inter-wiring insulating layer (32) in a direction parallel to the first main surface, and extends parallel to the first main surface on the first positive direction side with respect to the first interlayer insulating layer (31). The inductor wiring is linear. The first interlayer insulating layer (31) contains an insulating Synthetic Resin (SR) and a plurality of Fillers (FL) dispersed in the Synthetic Resin (SR).

Inventors

  • Guo Senjingjie

Assignees

  • 株式会社村田制作所

Dates

Publication Date
20260508
Application Date
20240626
Priority Date
20231011

Claims (8)

  1. 1. An inductor component, comprising: A green body having a major surface; A flat interlayer insulating layer extending in parallel with the main surface in the green body; an inter-wiring insulating layer extending from the interlayer insulating layer in a first positive direction orthogonal to the main surface, and A linear inductor wiring having a portion adjacent to the inter-wiring insulating layer in a direction parallel to the main surface, extending parallel to the main surface on the first positive direction side with respect to the inter-interlayer insulating layer, The interlayer insulating layer includes an insulating synthetic resin and a plurality of fillers dispersed in the synthetic resin.
  2. 2. The inductor component of claim 1 wherein, The inter-wiring insulating layer contains an insulating synthetic resin and does not contain the filler.
  3. 3. The inductor component according to claim 1 or 2, wherein, The filler is a non-magnetic inorganic oxide, In the particle size distribution of the filler, the median particle diameter (D50) is 0.1 μm or more and 5 μm or less.
  4. 4. An inductor component according to any one of claims 1 to 3, wherein, The volume fraction of the synthetic resin in the interlayer insulating layer is 40vol% or more and 70vol% or less.
  5. 5. The inductor component of any one of claims 1 to 4, wherein, The visible light transmittance of the insulating layer between wirings is 70% or more per 20 μm distance, The interlayer insulating layer has a visible light transmittance of 50% or less per 20 μm distance.
  6. 6. The inductor component of any one of claims 1 to 5, wherein, One or more selected from the group consisting of the reflectivity of the interlayer insulating layer for g-line, the reflectivity for h-line, and the reflectivity for i-line is 80% or less.
  7. 7. The inductor component of any one of claims 1 to 6, wherein, The surface of the interlayer insulating layer facing the first positive direction has a maximum roughness of 0.05 [ mu ] m or more and 1 [ mu ] m or less.
  8. 8. The inductor component of any one of claims 1 to 7, wherein, The inductor wiring has a seed layer in contact with a surface of the interlayer insulating layer facing the first positive direction and extending parallel to the main surface, In a specific cross section orthogonal to the center line of the inductor wiring, the inter-wiring insulating layer includes a plurality of discontinuous portions in a direction along the main surface, In the specific cross section, when the shortest distance between the portions of the inter-wiring insulating layer is defined as a wiring width, and the largest dimension of the seed layer located between the portions of the inter-wiring insulating layer in the same direction as the wiring width is defined as a seed layer width, The seed layer width is 40% to 90% with respect to the wiring width.

Description

Inductor component Technical Field The present disclosure relates to inductor components. Background The inductor component described in patent document 1 includes a green body, a substrate, a resin wall, and a coil. The green body is in a cuboid shape. The blank comprises a magnetic material. The substrate is composed of an insulating material. The substrate is plate-shaped. The substrate is positioned in the blank. The resin wall is located on the main surface of the substrate. The resin wall extends in a normal direction to the main surface. When the inductor component is viewed in a cross-section along a normal line to the main surface of the substrate, the coil is located on the main surface of the substrate. The coil is filled between adjacent resin walls. Patent document 1 Japanese patent No. 6879355 In the inductor component described in patent document 1, when heat is applied during the manufacturing process, the substrate thermally expands and thermally contracts. In the case where the substrate is deformed by heat in this way, the entire inductor member may be bent. On the other hand, in the case of increasing the thickness of the substrate in order to suppress the deformation of the substrate due to heat, miniaturization of the inductor component is hindered. Therefore, a technique of suppressing influence on the size of the inductor component and suppressing bending of the inductor component is demanded. Disclosure of Invention In order to solve the above problems, one embodiment of the present disclosure provides an inductor component including a green body having a main surface, a flat plate-like interlayer insulating layer extending in parallel with the main surface in the green body, an inter-wiring insulating layer extending from the interlayer insulating layer in a first positive direction orthogonal to the main surface, and a linear inductor wiring having a portion adjacent to the inter-wiring insulating layer in a direction parallel to the main surface and extending parallel to the main surface on the first positive direction side with respect to the interlayer insulating layer, the interlayer insulating layer including an insulating synthetic resin, and a plurality of fillers dispersed in the synthetic resin. According to the above configuration, it is possible to suppress the bending of the inductor member while suppressing the influence on the size of the inductor member. Drawings Fig. 1 is a perspective view of an inductor component. Fig. 2 is a perspective side view of an inductor component. Fig. 3 is a perspective top view of an inductor component. Fig. 4 is a cross-sectional view of the inductor component along line 4-4 in fig. 3. Fig. 5 is a schematic diagram enlarged in a specific cross section near the surface of the first interlayer insulating layer. Fig. 6 is an enlarged view of a portion of fig. 4. Fig. 7 is an explanatory diagram of a method of manufacturing an inductor component. Fig. 8 is an explanatory diagram of a method of manufacturing an inductor component. Fig. 9 is an explanatory diagram of a method of manufacturing an inductor component. Fig. 10 is an explanatory diagram of a method of manufacturing an inductor component. Fig. 11 is an explanatory diagram of a method of manufacturing an inductor component. Fig. 12 is an explanatory diagram of a method of manufacturing an inductor component. Fig. 13 is an explanatory diagram of a method of manufacturing an inductor component. Fig. 14 is an explanatory diagram of a method of manufacturing an inductor component. Fig. 15 is an explanatory diagram of a method of manufacturing an inductor component. Fig. 16 is an explanatory diagram of a method of manufacturing an inductor component. Fig. 17 is an explanatory diagram of a method of manufacturing an inductor component. Fig. 18 is an explanatory diagram of a method of manufacturing an inductor component. Fig. 19 is an explanatory diagram of a method of manufacturing an inductor component. Fig. 20 is an explanatory diagram of a method of manufacturing an inductor component. Fig. 21 is an explanatory diagram of a method of manufacturing an inductor component. Fig. 22 is an explanatory diagram of a method of manufacturing an inductor component. Fig. 23 is an explanatory diagram of a method of manufacturing an inductor component. Fig. 24 is an explanatory diagram of a method of manufacturing an inductor component. Detailed Description An embodiment of the inductor component is described below with reference to the drawings. The drawings may show components in an enlarged scale for easy understanding. The dimensional ratios of the constituent elements may be different from the actual cases or from the cases in other drawings. < Concerning the overall constitution > As shown in fig. 1, the entire inductor member 10 has a substantially rectangular parallelepiped shape. As shown in fig. 2, the inductor component 10 includes a green body 11 and an inductor wiring 50. As shown in