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CN-122003728-A - Transmitter

CN122003728ACN 122003728 ACN122003728 ACN 122003728ACN-122003728-A

Abstract

An emitter (1) having an electron source tip (10), a 1 st filament (50) connected to a 1 st position (10 a) of a side surface of the electron source tip (10), a 2 nd filament (60) connected to a 2 nd position (10 b) of a side surface of the electron source tip (10), 2 upper positive terminals (20 a, b) respectively connected to a 1 st side surface (50 a, b) of 2 parts of the 1 st filament (50), 2 upper negative terminals (20 c, d) respectively connected to a 2 nd side surface (60 a, b) of the 2 nd filament (60), 1 lower positive terminal (30 a) electrically connected to a 2 nd positive terminal (20 a, b), 1 lower negative terminal (30 b) electrically connected to a 2 nd negative terminal (20 c, d), a insulator (30 b) carrying the upper positive terminals (20 a, b), the upper negative terminals (20 c, d), the lower positive terminals (30 a) and the negative terminals (30 b) respectively connected to the 2 nd positive terminals (30 a, 30 b) at positions other than the positions (50 a, 50 b) of the 2 nd filament (60 a, 30 b) which are respectively connected to the positions (50 a, 50 b) of the side surfaces (20 a, 30 b) of the 2 nd filament (20 a, 30 b) of the upper positive terminals, d) Is provided.

Inventors

  • ISHIKAWA DAISUKE

Assignees

  • 电化株式会社

Dates

Publication Date
20260508
Application Date
20240911
Priority Date
20230928

Claims (14)

  1. 1. A transmitter, having: an electron source tip; a1 st filament connected to a1 st position of a side surface of the electron source tip; a2 nd filament connected to a2 nd position of a side surface of the electron source tip; 2 upper positive terminals respectively connected with the 1 st side face of the 2 parts of the 1 st filament; 2 upper negative terminals respectively connected with the 2 nd side surfaces of 2 parts of the 2 nd filament; 1 lower positive terminal electrically connected to 2 upper positive terminals; 1 lower negative terminal electrically connected to 2 of the upper negative terminals, and An insulator carrying the upper positive terminal, the upper negative terminal, the lower positive terminal, and the lower negative terminal, The 1 st position and the 2 nd position are different positions, The 1 st side of the 1 st filament is connected to the side of the upper positive terminal, The 2 nd side faces of the 2 nd filament are connected to the side faces of the upper negative terminal, respectively.
  2. 2. The transmitter of claim 1, wherein, In a plan view of the 1 st plane orthogonal to the front end direction of the electron source tip, the 2 upper positive terminals and the 2 upper negative terminals are arranged so that a line segment connecting centers of the 2 upper positive terminals intersects a line segment connecting centers of the 2 upper negative terminals.
  3. 3. The transmitter of claim 1, wherein, In a plan view of a1 st surface orthogonal to a distal direction of the electron source tip, the 1 st filament and the 2 nd filament are arranged so as to intersect with a projection line of the 1 st surface.
  4. 4. The transmitter of claim 3, wherein, In a plan view of the 1 st surface, an angle θ1 formed by projection lines of the 1 st filament and the 2 nd filament is 80 ° to 90 °.
  5. 5. The transmitter of claim 3, wherein, And in a plan view of the 1 st surface, an angle theta 1 formed by projection lines of the 1 st filament and the 2 nd filament is smaller than 80 degrees.
  6. 6. The transmitter of claim 1, wherein, In a plan view of a 1 st surface orthogonal to a distal direction of the electron source tip, the 1 st filament is arranged such that a line segment connecting the side surfaces of the 2 upper positive terminals to which the 1 st side surfaces of the 1 st filament are connected intersects with a line segment connecting centers of the 2 upper positive terminals.
  7. 7. The transmitter of claim 1, wherein, The 2 nd filament is arranged so that a line segment connecting the side surfaces of 2 pieces of the upper negative terminal to which the 2 nd side surfaces of the 2 nd filament are connected intersects a line segment connecting the centers of 2 pieces of the upper negative terminal in a plan view of the 1 st surface orthogonal to the front end direction of the electron source tip.
  8. 8. The transmitter of claim 1, wherein, In a plan view of a1 st surface orthogonal to a distal direction of the electron source tip, the 1 st filament is arranged such that a line segment connecting the side surfaces of the 2 upper positive terminals to which the 1 st side surfaces of the 1 st filament are connected does not intersect with a line segment connecting centers of the 2 upper positive terminals.
  9. 9. The transmitter of claim 1, wherein, The 2 nd filament is arranged so that a line segment connecting the side surfaces of the 2 nd filaments to which the 2 nd side surfaces of the upper negative terminals are connected does not intersect with a line segment connecting the centers of the 2 upper negative terminals in a plan view of the 1 st surface orthogonal to the front end direction of the electron source tip.
  10. 10. The transmitter of claim 1, wherein, The 1 st filament and the 2 nd filament are arranged such that the side face of the upper positive terminal to which the 1 st side face of the 1 st filament is connected is at least opposite to the side face of the upper negative terminal to which the 2 nd side face of the 2 nd filament is connected, in a plan view of the 1 st face orthogonal to the front end direction of the electron source tip.
  11. 11. The transmitter of claim 1, wherein, The 1 st filament and the 2 nd filament are arranged such that the side face of the upper positive terminal to which the 1 st side face of the 1 st filament is connected is not opposed to the side face of the upper negative terminal to which the 2 nd side face of the 2 nd filament is connected, in a plan view of the 1 st face orthogonal to the front end direction of the electron source tip.
  12. 12. The transmitter of claim 1, wherein, The 1 st filament is joined to a position closer to the front end of the electron source tip than the 2 nd filament.
  13. 13. The transmitter of claim 1, wherein, The 2 nd filament is joined to a position closer to the front end of the electron source tip than the 1 st filament.
  14. 14. The transmitter of claim 1, wherein, The pair of upper positive terminals has a positive terminal connecting portion for electrically connecting the pair of upper positive terminals, A pair of the upper negative terminals has a negative terminal connection electrically connecting the pair of the upper negative terminals.

Description

Transmitter Technical Field The present invention relates to transmitters. Background The electron source is used in various devices such as an electron beam lithography device, an electron beam drawing device, a multi-electron beam system, a Scanning Electron Microscope (SEM), a Transmission Electron Microscope (TEM), an electron beam micro analyzer, and a micro focusing X-ray device. For example, patent document 1 discloses an electron source for providing an electron source that stably operates for a long period of time, the electron source including a <100> azimuth single crystal rod formed of tungsten or molybdenum having an electron emission surface with a {100} crystal plane exposed at a front end portion, a metal oxide layer covering the {100} crystal plane, a diffusion source that diffuses a material substance of the metal oxide layer, and a passage portion formed in the <100> azimuth single crystal rod and communicating the front end portion or a vicinity of the front end portion from the diffusion source to form a passage through which the material substance from the diffusion source diffuses. In the case of a structure in which the electron source tips are connected to one filament as in the emitter disclosed in patent document 1, there is a possibility that the positions of the electron sources change little by little when a voltage is applied, for example, and that the machining accuracy or the like is lowered due to the change in the positions of the electron source tips. Further, patent document 2 discloses an electron gun having a multifilament heater composed of a1 st filament connected to 2 positive terminals and a2 nd filament connected to 2 negative terminals for the purpose of providing an electron gun which is less susceptible to positional displacement due to magnetism. Prior art literature Patent literature Patent document 1 Japanese patent application laid-open No. 2011-065790 Patent document 2, U.S. Pat. No.2,202, 0076914A Disclosure of Invention Problems to be solved by the invention As in patent document 2, by adopting a multifilament heater structure, it is theoretically possible to suppress positional displacement due to magnetism. However, when each filament is formed on the upper surface of the terminal, the contact point between the filament and the terminal is small and fragile, so that it is difficult to suppress positional displacement due to magnetism for a long period of time. Patent document 2 discloses a system having 4 upper terminals, and the lower terminals in the system are also estimated to be 4. However, since several devices using the transmitter correspond to 2 lower terminals, a new configuration having 4 upper terminals at 2 lower terminals is required. The present invention has been made in view of the above-described problems, and an object thereof is to provide an electron source having excellent positional stability of an electron source tip at the time of use, and a method for manufacturing the same. Means for solving the problems Namely, the present invention is as follows. (1) A transmitter, having: an electron source tip; a1 st filament connected to a1 st position of a side surface of the electron source tip; a2 nd filament connected to a2 nd position of a side surface of the electron source tip; 2 upper positive terminals respectively connected with the 1 st side face of the 2 parts of the 1 st filament; 2 upper negative terminals respectively connected with the 2 nd side surfaces of 2 parts of the 2 nd filament; 1 lower positive terminal electrically connected to 2 upper positive terminals; 1 lower negative terminal electrically connected to 2 of the upper negative terminals, and An insulator carrying the upper positive terminal, the upper negative terminal, the lower positive terminal, and the lower negative terminal, The 1 st position and the 2 nd position are different positions, The 1 st side of the 1 st filament is connected to the side of the upper positive terminal, The 2 nd side faces of the 2 nd filament are connected to the side faces of the upper negative terminal, respectively. (2) In the emitter according to (1), 2 of the upper positive terminals and 2 of the upper negative terminals are arranged so that a line segment connecting centers of the 2 upper positive terminals intersects a line segment connecting centers of the 2 upper negative terminals in a plan view of a1 st plane orthogonal to a front end direction of the electron source tip. (3) The emitter according to (1) or (2), wherein the 1 st filament and the 2 nd filament are arranged so as to intersect each other in a plan view of the 1 st surface orthogonal to the direction of the distal end of the electron source tip. (4) In the emitter according to (3), an angle θ1 between the projection line of the 1 st filament and the 2 nd filament is 80 ° or more and 90 ° or less in a plan view of the 1 st surface. (5) In the emitter according to (3), an angle θ1 between a projection lin