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CN-122003983-A - Pickup device

CN122003983ACN 122003983 ACN122003983 ACN 122003983ACN-122003983-A

Abstract

A pickup device is disclosed. The disclosed pickup device includes a device body portion in which a housing space is formed, a pickup shaft provided in the device body portion so as to be linearly reciprocable, one end of which is exposed to the outside of the device body portion to pick up an object in vacuum, a linear movement driving portion for linearly reciprocatingly moving the pickup shaft, a rotation driving portion for rotationally driving the pickup shaft, the rotation driving portion having a rotation shaft member coaxially connected to the pickup shaft without using a gear type connection member, a vacuum chamber defining portion for defining a vacuum chamber in which a part of the pickup shaft is housed, the vacuum chamber defining portion being connected to an external vacuum device, and transmitting a negative pressure from the external vacuum device to the one end of the pickup shaft, and a bushing member made of a metal material and being coated so that the pickup shaft is respectively penetratingly provided at both ends of the vacuum chamber defining portion for preventing or suppressing vacuum leakage from the vacuum chamber defining portion.

Inventors

  • Pu Xinggui

Assignees

  • 雅理富有限公司

Dates

Publication Date
20260508
Application Date
20240924
Priority Date
20231011

Claims (11)

  1. 1. A pickup device, comprising: a device body part forming an accommodation space inside; a pickup shaft provided in the apparatus body so as to be linearly reciprocable, one end of which is exposed to the outside of the apparatus body to pick up an object in vacuum; a linear movement driving part for linear reciprocation of the pick-up shaft; a rotation driving part for rotationally driving the pick-up shaft, having a rotation shaft member coaxially connected with the pick-up shaft without using a gear type connection member; A vacuum chamber defining part for defining a vacuum chamber for accommodating a part of the pick-up shaft, connected to an external vacuum device, for transmitting negative pressure from the external vacuum device to the one end of the pick-up shaft, and And a bushing member made of a metal material and coated so that the pick-up shafts are respectively penetrated through both ends of the vacuum chamber defining part for preventing or suppressing vacuum leakage from the vacuum chamber defining part.
  2. 2. The pickup apparatus according to claim 1, wherein, The device also comprises a coupling part which is in a circular cylinder structure and is used for connecting the pick-up shaft and the rotating shaft part, The rotation shaft member is fastened to one end portion of the coupling member in the length direction, and the pickup shaft is fastened to the other end portion of the coupling member in the length direction.
  3. 3. The pickup device according to claim 2, wherein the pickup shaft, the coupling member, and the rotation shaft member are disposed on the same shaft.
  4. 4. The pickup device of claim 1, wherein the bushing member comprises a stainless steel material.
  5. 5. A pick-up device according to claim 1 or 4, wherein the sleeve member is diamond coated.
  6. 6. The pickup device according to claim 1, wherein a flexible vacuum tube connected to the vacuum chamber defining portion is not included in the device body portion.
  7. 7. The pickup apparatus according to claim 1, wherein, A fixed vacuum forming flow path is formed in the device body, One end of the fixed vacuum forming flow path is connected with the vacuum cavity limiting part, The other end of the fixed vacuum forming flow path is connected to the external vacuum device.
  8. 8. The pickup device according to claim 7, wherein the stationary vacuum forming flow path comprises: a first flow path portion extending along a side surface portion of the device body portion, and And a second channel portion connecting the first channel portion and the vacuum chamber defining portion, and extending so as to form a predetermined angle with the first channel portion.
  9. 9. The pickup device according to claim 1, wherein the vacuum chamber defining portion includes: a first portion having a prescribed thickness and extending in a direction parallel to an extending direction of the pickup shaft, and And a second portion connected to and overlapping the first portion, and offset with respect to the first portion in a direction perpendicular to an extending direction of the pickup shaft, and forming a protruding portion.
  10. 10. The pickup apparatus according to claim 9, wherein, A fixed vacuum forming flow path is formed in the device body, The fixed vacuum forming flow path is connected to an inner surface of the protruding portion adjacent to the first portion.
  11. 11. The pickup device according to claim 1, wherein the vacuum chamber defining portion is in contact with a lower surface of an interior of the device body portion.

Description

Pickup device Technical Field The present invention relates to a mechanical transfer device/equipment, and more particularly, to a pickup device applicable to a process for manufacturing or assembling a device such as a semiconductor chip. Background In general, in performing a manufacturing and assembling process of a device such as a semiconductor chip, a pick-up (PICK AND PLACE) pick-and-place process of picking up the device and moving and placing it at a desired position is used. In order to perform such a pick-and-place process, a pick-up device is used, which includes a pick-up tool holding and picking up a device and a driving section reciprocally driving the pick-up tool in an up-and-down direction. The pick-up tool for holding and picking up the device can be largely classified into a vacuum suction type by vacuum picking up the surface of the device and a clamp type by holding and picking up the device by a pair of clamps (gripper). Recently, with the integration and miniaturization of devices, a vacuum adsorption method is mainly used in order to minimize damage to the devices. On the other hand, a driving section for reciprocally driving the pick-up tool in the up-down direction may be divided into a pneumatic cylinder (pneumatic cylinder) for driving the pick-up shaft provided with the pick-up tool by vacuum air pressure flowing in through different paths, an electric actuator (electric actuator) for driving the pick-up shaft by electricity, and the like. However, the structure of the air pressure cylinder is complicated by a vacuum joint, a vacuum supply line, and the like, which supply vacuum air pressure, and driving of the pickup shaft becomes unstable during formation and release of vacuum air pressure, and it is difficult to quickly move to a desired position. In response to this, recently, a pickup device using an electric actuator has been actively developed. However, in the conventional pickup device, a gear type connecting member for transmitting power can be used in the process of connecting the pickup shaft and the driving unit, and in this case, a large error in the rotation angle of the gear occurs due to a machining error of the gear, play between gears, and the like, and thus there is a problem in that the driving accuracy is lowered. In addition, in the conventional pickup device, in order to prevent vacuum leakage between the components, a processed product of the Vespel material or a bearing (bearing) member having a rotating element may be used, and in the case of using a processed product of the Vespel material, there is a problem that foreign substances such as particles are generated at the time of driving, and in the case of using a bearing member, vacuum leakage (leak) occurs due to the rotating element and manufacturing tolerance of the bearing, and a required level of vacuum degree cannot be ensured. Therefore, there is a need to develop a high-performance and high-accuracy pickup device that can ensure driving accuracy and can ensure a high vacuum degree, and can prevent problems such as generation of foreign substances. Disclosure of Invention Technical problem The invention provides a high-performance and high-accuracy pickup device capable of ensuring driving accuracy, ensuring high vacuum degree, and preventing generation of foreign matters. Further, the present invention has been made to solve the above-described problems, and an object thereof is to provide a pickup device capable of improving mechanical stability and durability by forming a flow path using a fixed vacuum in the inside, instead of using a flexible vacuum tube. The problems to be solved by the present invention are not limited to the above-mentioned problems, and other problems not mentioned can be understood by those skilled in the art to which the present invention pertains from the following description. Means for solving the problems According to an embodiment of the present invention, there is provided a pickup apparatus including an apparatus body portion in which a housing space is formed, a pickup shaft provided in the apparatus body portion so as to be linearly reciprocable, one end of the pickup shaft being exposed to the outside of the apparatus body portion to pick up an object in vacuum, a linear movement driving portion for linearly reciprocatingly moving the pickup shaft, a rotation driving portion for rotationally driving the pickup shaft, the rotation driving portion having a rotation shaft member coaxially connected to the pickup shaft without using a gear type connection member, a vacuum chamber defining portion for defining a vacuum chamber for housing a part of the pickup shaft, the vacuum chamber defining portion being connected to an external vacuum apparatus to transmit negative pressure from the external vacuum apparatus to the one end of the pickup shaft, and a bushing (mounting) member made of a metal material and being coated so that the pickup shaft is respectively