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CN-122006281-A - Full-automatic production line for preparing high-purity electronic grade nitric acid

CN122006281ACN 122006281 ACN122006281 ACN 122006281ACN-122006281-A

Abstract

The invention discloses a full-automatic production line for preparing high-purity electronic grade nitric acid, which relates to the technical field of electronic grade nitric acid production lines and comprises a purification tower, a liquid distribution anti-hanging device, a feed box, a pipe network component and a tower plate. The invention uses the flow gathering ring to block the falling path of the wall-mounted liquid, and enables the wall-mounted liquid to flow into the flow gathering cavity for collection, and then drives the cone rod to move upwards synchronously through the rising of the floating head under the action of buoyancy, so that the wall-mounted liquid enters the secondary liquid distribution cavity, and the wall-mounted liquid is led obliquely by the liquid distribution chute and the flow guiding head, so that the wall-mounted liquid is far away from the tower wall and flows obliquely, and secondary wall-mounted is avoided. The cone rod adopts the reverse cone design, so that when the cone rod moves upwards along with the floating head, the gap between the cone rod and the falling opening is automatically increased, the water yield is gradually increased along with the increase of the wall built-up liquid, the effects of self-adaptive liquid discharge and timely reducing the accumulation of the wall built-up liquid are formed, meanwhile, the cone rod is limited and prevented from being separated by the limiting ring, a channel is reserved for liquid flow, and the continuous and smooth falling of the liquid in the adjusting process is ensured.

Inventors

  • Request for anonymity
  • Request for anonymity
  • Request for anonymity

Assignees

  • 西安吉利电子新材料股份有限公司
  • 陕西吉利科技有限公司

Dates

Publication Date
20260512
Application Date
20260413

Claims (9)

  1. 1. The full-automatic production line for preparing high-purity electronic grade nitric acid is characterized by comprising a purification tower (1), a liquid distribution anti-hanging device (2), a control system and a pipe network component (4), wherein the purification tower (1) is respectively connected with a reboiler and a condenser through the pipe network component (4); the liquid distribution anti-hanging device (2) comprises a liquid distribution cross beam (21) and a flow gathering ring (24), the liquid distribution cross beam (21) is installed in a purifying tower (1), a plurality of liquid distribution bins (22) are installed at the bottom of the liquid distribution cross beam (21), demisting rings (23) are installed between the liquid distribution bins (22), the flow gathering ring (24) is installed in the purifying tower (1), an inlet and an outlet are arranged in the flow gathering ring (24), a plurality of floating detectors (26) are movably installed in the flow gathering ring (24), a plurality of overflow-preventing backflow mechanisms (25) are installed in the purifying tower (1), the overflow-preventing backflow mechanisms (25) are communicated with the flow gathering ring (24), the flow gathering ring (24) is located below the liquid distribution bins (22), and the overflow-preventing backflow mechanisms (25) and the floating detectors (26) are all electrically connected with a control system.
  2. 2. A fully automatic production line for preparing high purity electronic grade nitric acid according to claim 1, wherein said inlet and outlet comprises a collection port (241) and a plurality of liquid distribution chute (244); The collecting port (241) is arranged on the collecting ring (24), the collecting ring (24) is provided with a collecting cavity (242), the bottom end of the collecting cavity (242) is provided with a plurality of falling ports (243), the floating detector (26) is movably arranged on the falling ports (243), the bottom end of the collecting ring (24) is provided with a secondary liquid distribution cavity (245), the secondary liquid distribution cavity (245) is communicated with the collecting cavity (242) through the falling ports (243), the top end of the secondary liquid distribution cavity (245) is provided with an overflow port (246), the secondary liquid distribution cavity (245) is communicated with an overflow-proof backflow mechanism (25) through the overflow port (246), a plurality of liquid distribution chute (244) are arranged on one side, far away from the overflow-proof backflow mechanism (25), of the secondary liquid distribution chute (244) is provided with a flow guide head (247).
  3. 3. The full-automatic production line for preparing high-purity electronic grade nitric acid according to claim 2, wherein the floating detector (26) comprises a cone rod (264) and a connecting rod (261), the connecting rod (261) is arranged on the flow gathering ring (24), a bulge (262) is arranged on the connecting rod (261), the cone rod (264) is movably arranged at a falling port (243), a limiting ring (265) is arranged at the bottom end of the cone rod (264), a floating head (263) is arranged at the top end of the cone rod (264), a detection element is arranged in the floating head (263), and the cone rod (264) adopts an inverted cone design.
  4. 4. The full-automatic production line for preparing high-purity electronic grade nitric acid according to claim 3, wherein the detecting element comprises flexible contacts (266) and protective elastic films (267), the flexible contacts (266) are arranged at the top ends of the floating heads (263), pressure heads (269) are arranged at the bottom ends of the flexible contacts (266), the protective elastic films (267) are symmetrically arranged in the floating heads (263), and piezoelectric bodies (268) are arranged between the protective elastic films (267).
  5. 5. The full-automatic production line for preparing high-purity electronic grade nitric acid according to claim 2, wherein the anti-overflow reflux mechanism (25) comprises an end shell (251) and a connecting block (255), an elastic bag (252) is arranged at the bottom of the end shell (251), a bottom plate (253) is arranged at the bottom end of the elastic bag (252), an overflow cavity is formed among the elastic bag (252), the end shell (251) and the bottom plate (253), the overflow cavity is communicated with the secondary liquid distribution cavity (245) through an overflow port (246), the connecting block (255) is arranged in the purifying tower (1), a telescopic rod (254) is arranged on the connecting block (255), and an output shaft of the telescopic rod (254) is connected with the bottom plate (253).
  6. 6. A full-automatic production line for preparing high-purity electronic grade nitric acid according to claim 3, wherein the demisting ring (23) comprises connecting pieces (235), wherein the connecting pieces (235) are arranged between the liquid distribution bins (22), a plurality of vertical rings (231) are arranged on the connecting pieces (235), an upper ring piece (232) is arranged on one side of each vertical ring (231), a lower ring piece (233) is arranged on the other side of each vertical ring (231), and an S-shaped demisting flow channel (234) is formed between each adjacent upper ring piece (232) and each lower ring piece (233).
  7. 7. The full-automatic production line for preparing high-purity electronic grade nitric acid according to claim 1, wherein an air outlet (14) is formed in the top end of the purifying tower (1), the air outlet (14) is connected with a condenser through a pipe network component (4), a reflux port (13) is formed in the bottom end of the purifying tower (1), the reflux port (13) is connected with a reboiler through the pipe network component (4), an air inlet (12) is formed in the purifying tower (1), the air inlet (12) is connected with the reboiler through the pipe network component (4), a liquid inlet (11) is formed in the purifying tower (1), one end of the liquid inlet (11) is connected with a feed box (3) through the pipe network component (4), and the other end of the liquid inlet (11) is communicated with a liquid separation beam (21).
  8. 8. The full-automatic production line for preparing high-purity electronic grade nitric acid according to claim 7, wherein a primary liquid distribution cavity (211) is arranged in the liquid distribution beam (21), the primary liquid distribution cavity (211) is communicated with the liquid inlet (11), a plurality of liquid distribution openings (212) are arranged on two sides of the primary liquid distribution cavity (211), and the liquid distribution openings (212) are arranged above the liquid distribution bin (22).
  9. 9. The full-automatic production line for preparing high-purity electronic grade nitric acid according to claim 1, wherein a plurality of leakage openings (221) are formed in the bottom end of the liquid distribution bin (22).

Description

Full-automatic production line for preparing high-purity electronic grade nitric acid Technical Field The invention relates to the technical field of electronic grade nitric acid production lines, in particular to a full-automatic production line for preparing high-purity electronic grade nitric acid. Background With the continuous increase of the requirements of integrated circuits, display panels, precision chemical industry and other fields on wet cleaning, etching and surface treatment processes, electronic grade nitric acid is used as one of key chemicals, and the purity stability of the electronic grade nitric acid directly influences the yield and reliability of subsequent processes. Compared with common industrial nitric acid, the electronic grade nitric acid not only requires higher acid concentration control precision, but also puts forward stricter limit requirements on pollutants such as trace metal ions, microparticle particles, soluble organic matters and the like. Currently, electronic grade nitric acid is generally purified and produced by a fully automatic production line. When the existing electronic grade nitric acid production line is used for purifying nitric acid, due to the perpendicularity of the tower wall of the purification tower, liquid is captured once contacting the wall, and the local high void ratio of the tower wall and the edge of the filler is characterized by small liquid resistance and high flow speed at the position, so that the phenomenon of wall hanging is formed, gas-liquid two-phase flow is divided, the central filler layer of the tower is dry-burned due to liquid shortage, the preparation efficiency is reduced, and the increase of byproducts is caused. Disclosure of Invention The invention aims to provide a full-automatic production line for preparing high-purity electronic grade nitric acid, which aims to solve the problem that the wall hanging phenomenon easily occurs at the tower wall of a purification tower in the prior art. In order to achieve the aim, the invention provides the technical scheme that the full-automatic production line for preparing the high-purity electronic grade nitric acid comprises a purification tower, a liquid distribution anti-hanging device, a control system and a pipe network component, wherein the purification tower is respectively connected with a reboiler and a condenser through the pipe network component; The liquid distribution anti-hanging device comprises a liquid distribution cross beam and a flow gathering ring, wherein the liquid distribution cross beam is arranged in a purification tower, a plurality of liquid distribution bins are arranged at the bottom of the liquid distribution cross beam, a demisting ring is arranged between the liquid distribution bins, the flow gathering ring is arranged in the purification tower, an inlet and an outlet are arranged in the flow gathering ring, a plurality of floating detectors are movably arranged in the flow gathering ring, a plurality of anti-overflow backflow mechanisms are arranged in the purification tower and are communicated with the flow gathering ring, the flow gathering ring is arranged below the liquid distribution bins, and the anti-overflow backflow mechanisms are electrically connected with a control system. A control cabinet is arranged in the production line, and a control system for controlling the whole production line is arranged in the control cabinet. The pipe network component comprises a plurality of connecting pipelines, and the connecting pipelines are used for connecting all production components. A plurality of tower plates are arranged in the purifying tower, and the tower plates are provided with fillers. Raw nitric acid raw materials which are not refined are mixed with production reagents in a feed box before operation, so as to form raw acid. The control system controls the pumping device to convey raw material acid to the liquid inlet through the pipe network component, the raw material acid enters a primary liquid distribution cavity in the liquid distribution beam from the liquid inlet, when the raw material acid accumulates in the primary liquid distribution cavity to the height of the liquid distribution port, the raw material acid starts to fall from the liquid distribution port to a liquid distribution bin below, a plurality of leakage ports arranged on the liquid distribution bin uniformly distribute the raw material acid into a plurality of tiny water columns, the water columns fall onto the filler and fall to a reflux port at the bottom of the purification tower, and finally the raw material acid enters a reboiler for heating through the reflux port; During the period, the control system starts the reboiler, the reboiler heats the raw material acid reserved in the interior, nitric acid in the raw material acid absorbs heat to form nitric acid gas, the nitric acid gas is conveyed to the air inlet through the pipe network component, the nitric a