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CN-122006384-A - Double-circuit intelligent filtration system

CN122006384ACN 122006384 ACN122006384 ACN 122006384ACN-122006384-A

Abstract

The two-way intelligent filtering system adopts a two-stage purifying filtering structure to work cooperatively with an intelligent control system, the intelligent control system monitors internal pressure change in real time through pressure detection and automatically switches a first-stage filtering path and a second-stage filtering path to realize efficient and stable operation, the first-stage filtering path is a physical filtering path, namely a high-efficiency filter element is utilized to intensively intercept and adsorb boron oxide solid large-particle dust in tail gas to finish primary purification when the process pressure is higher, the second-stage filtering path is a filler adsorption filtering path, and comprises a water tank, a special adsorption filler and a molecular sieve, water vapor and dust are mixed into the special filler to further intercept residual fine particles, and then the molecular sieve adsorbs moisture and trace gaseous impurities in gas to finish deep adsorption of the dust and removal of the moisture, so that fine filtration is realized.

Inventors

  • Fan Xinting

Assignees

  • 苏州众创阳光新能源科技有限公司

Dates

Publication Date
20260512
Application Date
20260326

Claims (10)

  1. 1. A double-path intelligent filtering system is characterized in that a double-stage purifying filtering structure is adopted to work cooperatively with an intelligent control system, the intelligent control system monitors internal pressure change in real time through pressure detection, a first-stage filtering path and a second-stage filtering path are automatically switched to realize efficient and stable operation, the first-stage filtering path is a physical filtering path, a high-efficiency filter element is utilized to intensively intercept and adsorb large-particle dust of boron oxide solid in tail gas when the process pressure is high, primary purification is completed, the second-stage filtering path is a filler adsorption filtering path, the second-stage filtering path comprises a water tank, special adsorption filler and a molecular sieve, water vapor and dust are mixed into the special filler to further intercept residual fine particles, and then the molecular sieve adsorbs moisture and trace gaseous impurities in gas to complete deep adsorption and moisture removal of dust, so that fine filtration is realized; specifically, the device comprises an air inlet module, wherein a pressure detection part is arranged on the air inlet module, the air inlet module comprises three connecting channels, one connecting channel is communicated with external air supply equipment, the other two connecting channels are communicated with a physical filtering channel, and the other three connecting channels are communicated with a filler adsorption filtering channel; the physical filtering channel and the filler adsorption filtering channel are respectively provided with a trigger type opening and closing valve A and a trigger type opening and closing valve B; the pressure detection piece is used as a physical filtration channel and a filler adsorption filtration channel trigger opening part to detect the incoming gas pressure, so that a double-path intelligent filtration switching structure is formed: the preset pressure value A, the incoming air pressure is greater than the preset pressure value A, wherein the filler adsorption filtration channel is closed, the physical filtration channel operates, coarse filtration is carried out, and gas supply after the coarse filtration is carried out; The gas pressure is smaller than the preset pressure value A, the physical filtering channel is closed, the filler adsorption filtering channel works, the gas enters the filler adsorption filtering channel to be finely filtered, and the gas is supplied after the fine filtration.
  2. 2. A two-way intelligent filter system according to claim 1, wherein the preset pressure A is 100mbar-170mbar.
  3. 3. The two-way intelligent filtering system according to claim 2, wherein the trigger type on-off valve A and the trigger type on-off valve B are electromagnetic valves.
  4. 4. A two-way intelligent filtering system according to claim 3, wherein a filtering box is arranged corresponding to the physical filtering channel and the filler adsorption filtering channel, the filtering box is provided with a physical filtering bin and a filler filtering bin, a physical filtering piece is arranged in the physical filtering bin, and a filtering filler is arranged in the filler filtering bin, and the physical filtering piece and the filtering filler are respectively used as a physical filtering executing part of the physical filtering channel and a filler adsorption filtering executing part of the filler adsorption filtering channel.
  5. 5. A dual-path intelligent filter system as set forth in claim 4, wherein the physical filter actuator is formed from a filter element or a combination of filter plates.
  6. 6. The two-way intelligent filtering system of claim 5, wherein the filtering box comprises a box body, isolating plates are arranged in the box body, and the inner cavity of the box body is partitioned by the isolating plates to form a physical filtering bin and a filler filtering bin.
  7. 7. The two-way intelligent filter system of claim 6, wherein the box body is a square box body and is further connected with a box cover.
  8. 8. The two-way intelligent filter system according to claim 7, wherein a sealing member is arranged at the joint of the box cover and the box body.
  9. 9. The two-way intelligent filter system of claim 8, wherein the housing further comprises a portable hand-held tank.
  10. 10. The two-way intelligent filtering system of claim 9, wherein the pressure detecting member is a pressure sensor and the air inlet module is a tee joint.

Description

Double-circuit intelligent filtration system Technical Field The invention relates to a preparation technology of semiconductor silicon wafer P-type and N-type semiconductor regions, in particular to a boron diffusion technology and using equipment thereof, and in particular relates to a double-path intelligent filtering system. Background Boron diffusion refers to the introduction of boron atoms into the silicon lattice by a high temperature process at the surface of a pure silicon wafer. Boron has 3 valence electrons, becomes an acceptor impurity in silicon, and leaves a hole after receiving an electron, so the formed region is a P-type semiconductor in which the hole is the main carrier. The majority carriers in the P-type semiconductor are holes, and the concentration of the majority carriers is high, so that the depletion region boundary is formed, and a PN junction is constructed when the majority carriers are in contact with the N-type region. In the boron diffusion process, a diaphragm pump is used for providing a clean gas environment for the molecular sieve, so that the clean gas supply of the diaphragm pump is ensured, and the diaphragm pump is indispensable to the boron diffusion process. Accordingly, there is a need to provide a two-way smart filtration system that addresses the above-described issues. Disclosure of Invention The invention aims to provide a double-path intelligent filtering system. The technical proposal is as follows: A double-path intelligent filtering system is characterized in that a double-stage purifying filtering structure is adopted to work cooperatively with an intelligent control system, the intelligent control system monitors internal pressure change in real time through pressure detection, a first-stage filtering path and a second-stage filtering path are automatically switched to realize efficient and stable operation, the first-stage filtering path is a physical filtering path, a high-efficiency filter element is utilized to intensively intercept and adsorb large-particle dust of boron oxide solid in tail gas when the process pressure is high, primary purification is completed, the second-stage filtering path is a filler adsorption filtering path, the second-stage filtering path comprises a water tank, special adsorption filler and a molecular sieve, water vapor and dust are mixed into the special filler to further intercept residual fine particles, and then the molecular sieve adsorbs moisture and trace gaseous impurities in gas to complete deep adsorption and moisture removal of dust, so that fine filtration is realized; specifically, the device comprises an air inlet module, wherein a pressure detection part is arranged on the air inlet module, the air inlet module comprises three connecting channels, one connecting channel is communicated with external air supply equipment, the other two connecting channels are communicated with a physical filtering channel, and the other three connecting channels are communicated with a filler adsorption filtering channel; the physical filtering channel and the filler adsorption filtering channel are respectively provided with a trigger type opening and closing valve A and a trigger type opening and closing valve B; the pressure detection piece is used as a physical filtration channel and a filler adsorption filtration channel trigger opening part to detect the incoming gas pressure, so that a double-path intelligent filtration switching structure is formed: the preset pressure value A, the incoming air pressure is greater than the preset pressure value A, wherein the filler adsorption filtration channel is closed, the physical filtration channel operates, coarse filtration is carried out, and gas supply after the coarse filtration is carried out; The gas pressure is smaller than the preset pressure value A, the physical filtering channel is closed, the filler adsorption filtering channel works, the gas enters the filler adsorption filtering channel to be finely filtered, and the gas is supplied after the fine filtration. Further, the preset pressure value A is 100mbar to 170mbar. Further, the trigger-type opening/closing valve a and the trigger-type opening/closing valve B are both solenoid valves. Further, a filter box is arranged corresponding to the physical filter channel and the filler adsorption filter channel, a physical filter bin and a filler filter bin are arranged on the filter box, a physical filter element is arranged in the physical filter bin, a filter filler is arranged in the filler filter bin, and the physical filter element and the filter filler are respectively used as a physical filter executing part of the physical filter channel and a filler adsorption filter executing part of the filler adsorption filter channel. Further, the physical filter actuator is formed by a filter cartridge or a combination of filter sheets. Further, the filter box comprises a box body, wherein a partition plate is arranged in