CN-122006537-A - Continuous flow TOC on-line dilution system with wide dynamic range

CN122006537ACN 122006537 ACN122006537 ACN 122006537ACN-122006537-A

Abstract

The invention relates to the technical field of automatic liquid preparation and discloses a continuous flow TOC online dilution system with a wide dynamic range, which comprises a mixing and input module, an ultrapure water path module, a high-concentration standard liquid injection module and a high-concentration standard liquid injection module, wherein the mixing and input module is provided with a three-way pipe and a main buffer tank communicated with a first pipeline of the three-way pipe, the ultrapure water path module is communicated with a second pipeline of the three-way pipe and is used for conveying diluted background pure water to the main buffer tank, the high-concentration standard liquid injection module is communicated with a third pipeline of the three-way pipe and is used for conveying high-concentration TOC standard solution to the main buffer tank, and the main buffer tank is used for mixing and forming TOC standard solution with preset concentration. The main buffer tank is introduced into the mixing and input module, and the fluid is buffered by utilizing the larger volume of the main buffer tank, so that the concentration fluctuation of the fluid is effectively smoothed, and the high-stability concentration output under the large dilution ratio is ensured. The shearing force of the diluted background pure water is utilized to drive the high-concentration TOC standard solution to flow, thereby reducing the fluid stagnation area generated by the corner of the pipeline and avoiding the local residue or uneven mixing of the high-concentration TOC standard solution.

Inventors

FU XIN
LIN YANG
XU CHANNA
WANG JING
SHEN YINGNAN
SU RUI
HU LIANG
RUAN XIAODONG

Assignees

浙江大学

Dates

Publication Date: 20260512
Application Date: 20260331

Claims (8)

1. A wide dynamic range continuous flow TOC online dilution system, comprising: The mixing and inputting module is provided with a three-way pipe (10) and a main buffer tank (13) communicated with a first pipeline of the three-way pipe (10); The ultrapure water path module is communicated with a second pipeline of the three-way pipe (10) and is used for conveying diluted background pure water to the main buffer tank (13); The high-concentration standard solution injection module is communicated with a third pipeline of the three-way pipe (10) and is used for conveying high-concentration TOC standard solution to the main buffer tank (13), and the main buffer tank (13) is used for mixing diluted background pure water and the high-concentration TOC standard solution to form TOC standard solution with preset concentration; the TOC equipment module (16), the main buffer tank (13) is communicated with the TOC equipment module (16) and is used for inputting TOC standard solution with preset concentration into the TOC equipment module (16); And the control center (17) is respectively and electrically connected with the ultrapure water path module and the high-concentration standard solution injection module and is used for controlling the flow of the diluted background pure water and the high-concentration TOC standard solution.
2. The wide dynamic range continuous flow TOC online dilution system according to claim 1, wherein the first conduit and the second conduit are in-line.
3. The wide dynamic range continuous flow TOC online dilution system according to claim 1, wherein the mixing and input module comprises a first pre-buffer tank (11), a second pre-buffer tank (12) and a main buffer tank (13) in sequential communication, the first pre-buffer tank (11) being in communication with the first pipeline.
4. The continuous flow TOC online dilution system with the wide dynamic range according to claim 1, wherein the ultrapure water path module comprises a booster pump (1), a filter (2), an electric regulating valve (3), a first pressure gauge (4), a deionized resin tank (5) and a flowmeter (6) which are sequentially communicated, the booster pump (1) is communicated with dilute background pure water, the flowmeter (6) is communicated with a second pipeline, and the booster pump (1), the electric regulating valve (3), the flowmeter (6) and the first pressure gauge (4) are all electrically connected with a control center (17).
5. The wide dynamic range continuous flow TOC online dilution system according to claim 1, wherein said high concentration standard solution injection module comprises: the three valve ports of the electric three-way valve (8) are respectively communicated with the standard liquid bottle (7), the microinjection pump (9) and the third pipeline, and the electric three-way valve (8) and the microinjection pump (9) are electrically connected with the control center (17).
6. A continuous flow TOC on-line dilution system according to claim 1, wherein the main buffer tank (13) is a flat cylindrical structure with an aspect ratio less than 1.
7. A wide dynamic range continuous flow TOC online dilution system according to claim 6, wherein the main buffer tank (13) has a volume of 2L-10L.
8. A continuous flow TOC on-line dilution system with wide dynamic range according to claim 3, characterized in that the main buffer tank (13) has a liquid inlet (1301) and a liquid outlet (1302), the liquid inlet (1301) is communicated with the second pre-buffer tank (12), the liquid outlet (1302) is communicated with the TOC equipment module (16) through a connecting pipeline, an overflow valve (14) and a second pressure gauge (15) are arranged on the connecting pipeline, and the overflow valve (14), the second pressure gauge (15) are electrically connected with the control center (17).

Description

Continuous flow TOC on-line dilution system with wide dynamic range Technical Field The invention relates to the technical field of automatic liquid preparation, in particular to a continuous flow TOC online dilution system with a wide dynamic range. Background In the tip fields of semiconductor ultrapure water manufacture, pharmaceutical water monitoring and the like, the detection lower limit of the TOC analyzer reaches ppb or even ppt level. To calibrate such high sensitivity instruments, it is necessary to provide TOC standard solutions at low concentrations or even trace levels (ppt level to 1000 ppb). At present, the standard liquid is mainly manually diluted step by step. However, the manual preparation has the obvious defects that firstly, the preparation process of extremely low concentration is complicated, manual operation errors are easy to be introduced to cause inaccurate concentration, secondly, the preparation process is extremely easy to contact with air to cause precipitation of TOC (the TOC of a container is precipitated in a solution, and the TOC of the prepared solution is too high, so that the background conductivity or background TOC of the prepared solution is directly interfered with a calibration baseline of an analyzer. In order to overcome the defect of manually configuring the standard liquid, the prior art adopts an online dilution device to configure the standard liquid, however, when the existing online dilution device is used for dealing with working conditions of large span and high dilution ratio, the fluid output is often not stable enough, because a pump body inevitably has mechanical stepping, the fluid pulsation can be amplified under extremely low flow velocity, so that the concentration of sample liquid entering an analyzer can be fluctuated, and in addition, when a pipeline mixing structure adopted by the online dilution device faces a large difference of flow rates of a main and a secondary paths, a mixing non-uniformity or a fluid stagnation area is easy to generate. In view of this, how to make the fluid output stable, mix evenly in TOC standard liquid configuration process to realize high accuracy trace liquid preparation is the problem that the skilled person needs to solve. Disclosure of Invention The invention aims to provide a continuous flow TOC online dilution system with a wide dynamic range, so as to solve the problems in the prior art. To achieve the above object, the present invention provides a continuous flow TOC online dilution system with a wide dynamic range, comprising: the mixing and inputting module is provided with a three-way pipe and a main buffer tank communicated with a first pipeline of the three-way pipe; the ultrapure water path module is communicated with the second pipeline of the three-way pipe and is used for conveying diluted background pure water to the main buffer tank; The high-concentration standard liquid injection module is communicated with a third pipeline of the three-way pipe and is used for conveying high-concentration TOC standard solution to the main buffer tank, and the main buffer tank is used for mixing diluted background pure water and the high-concentration TOC standard solution to form TOC standard solution with preset concentration; The TOC equipment module is communicated with the main buffer tank and used for inputting TOC standard solution with preset concentration into the TOC equipment module; And the control center is respectively and electrically connected with the ultra-pure water channel module and the high-concentration standard solution injection module and is used for controlling the flow of the diluted background pure water and the high-concentration TOC standard solution. Further, the first pipeline and the second pipeline are positioned on the same straight line. Further, the mixing and inputting module comprises a first front-stage buffer tank, a second front-stage buffer tank and a main buffer tank which are sequentially communicated, and the first front-stage buffer tank is communicated with a first pipeline. Further, the main buffer tank is provided with a liquid inlet and a liquid outlet, the liquid inlet is communicated with the second front-stage buffer tank, the liquid outlet is communicated with the TOC equipment module through a connecting pipeline, an overflow valve and a second pressure gauge are arranged on the connecting pipeline, and the overflow valve, the second pressure gauge and the control center are electrically connected. Further, ultrapure water route module is including booster pump, filter, electric control valve, first manometer, deionized resin jar and the flowmeter of intercommunication in proper order, booster pump intercommunication dilution background pure water, the flowmeter intercommunication second pipeline, booster pump, electric control valve, flowmeter and first manometer all are connected with the control center electricity. Further, the high concentration st