CN-122006830-A - Optical-thermal-acoustic micro-flow pump based on metamaterial absorber and preparation method thereof

Abstract

The invention relates to the technical field of microfluidics, in particular to an optical-thermal-acoustic microfluidic pump based on a metamaterial absorber and a preparation method thereof; the technical key points are that a bottom metal film, a dielectric layer and a top metal structure array are sequentially formed on a substrate to obtain a metamaterial absorber chip with a plasmon photo-thermal effect, polydimethylsiloxane is spin-coated on the metamaterial absorber chip, the metamaterial absorber chip with a photo-effective effect is obtained through drying and curing treatment, and the laser irradiates the metamaterial absorber chip with the photo-effective effect to obtain the photo-thermal-acoustic micro-fluidic pump with driving and mixing fluid capability, so that non-contact, remote and high-precision driving of microfluid is realized, and the technical effects of simple structure, high driving efficiency, high response speed and no need of complex external equipment are achieved.

Inventors

• CAO LELE
• YU PENG
• He muyang
• ZHAO CHENGJING
• WANG JINLIN
• HOU WENRUI
• ZENG CHUAN
• CHEN PENG

Assignees

• 电子科技大学

Dates

Publication Date

20260512

Application Date

20260409

Claims (10)

1. 1. A method for preparing an optical-thermal-acoustic micro-fluidic pump based on a metamaterial absorber, which is characterized by comprising the following steps: A. sequentially forming a bottom metal film, a dielectric layer and a top metal structure array on a substrate to prepare a metamaterial absorber chip with a plasmon photo-thermal effect; B. spin-coating polydimethylsiloxane on the metamaterial absorber chip, and drying and curing to obtain the metamaterial absorber chip with the light effect; C. and B, irradiating the metamaterial absorber chip with the photoeffect obtained in the step B by using laser to obtain the photo-thermal-acoustic microfluidic pump with driving and mixing fluid capabilities.
2. 2. The method for preparing an optical-thermal-acoustic micro-fluidic pump based on a metamaterial absorber according to claim 1, wherein in the step a, the method comprises the following steps: A1, cleaning a substrate and drying; A2, forming a bottom metal film on the substrate through magnetron sputtering; A3, forming a dielectric layer on the bottom metal film through plasma enhanced atomic layer deposition; And A4, forming a top layer structure array on the dielectric layer through electron beam lithography and magnetron sputtering, and performing ultrasonic stripping, cleaning and drying to obtain the metamaterial absorber chip with the plasmon photo-thermal effect.
3. 3. The method of producing a metamaterial absorber based optical-thermal-acoustic microfluidic pump according to claim 2, wherein in step A2, before depositing the underlying metal film, further comprising the step of depositing an adhesion layer on the substrate; The adhesion layer is made of chromium or titanium, and the thickness is 8-20 nm.
4. 4. The method for preparing an optical-thermal-acoustic micro-fluidic pump based on a metamaterial absorber according to claim 2, wherein in the step A2, the bottom metal film is made of gold, and the thickness is 90-150nm.
5. 5. The method for preparing an optical-thermal-acoustic micro-fluidic pump based on a metamaterial absorber according to claim 2, wherein in the step A3, the dielectric layer is made of Al 2 O 3 or SiO 2 , and the thickness is 5-10nm.
6. 6. The method of producing a metamaterial absorber-based optical-thermal-acoustic microfluidic pump according to claim 2, wherein in step A4, the top layer metal structure array is an array composed of gold cylinders; The gold cylinders have the height of 50-100 nm, the diameter of 50-100 nm and the spacing between adjacent gold cylinders of 300-600 nm.
7. 7. The method for preparing an optical-thermal-acoustic micro-fluidic pump based on a metamaterial absorber according to claim 1, wherein in the step B, the ratio of polydimethylsiloxane to curing agent is 10:1, the spin-coating rotating speed is controlled to be 500-2000 rpm, and the curing temperature is controlled to be 60-80 ℃.
8. 8. The method for producing an optical-thermal-acoustic microfluidic pump based on a metamaterial absorber according to claim 1, wherein in the step B, the thickness of the polydimethylsiloxane film formed after spin coating is 100-400 nm.
9. 9. The method of claim 1, wherein in the step C, the laser has a wavelength of 400-700 nm and a power of 5-50 mW.
10. 10. An optical-thermal-acoustic microfluidic pump based on a metamaterial absorber, wherein the microfluidic pump is manufactured according to the manufacturing method of an optical-thermal-acoustic microfluidic pump based on a metamaterial absorber as set forth in claim 1, the microfluidic pump comprising: A metamaterial absorber chip for generating localized heat energy under laser irradiation; A polydimethylsiloxane film covering the surface of the metamaterial absorber chip and used for converting the localized heat energy into mechanical vibration so as to generate ultrasonic waves; The metamaterial absorber chip is composed of a substrate, a bottom metal film formed on the substrate, a dielectric layer formed on the bottom metal film and a top metal structure array formed on the dielectric layer.

Description

Optical-thermal-acoustic micro-flow pump based on metamaterial absorber and preparation method thereof Technical Field The invention relates to the technical field of microfluidics, in particular to an optical-thermal-acoustic microfluidic pump based on a metamaterial absorber and a preparation method thereof. Background The core of the microfluidic technology, which is used as a front-edge crossing field integrating multiple subjects of engineering, physics, chemistry, biology and the like, is to accurately and efficiently control the fluid in a microscale (usually micron-scale) channel. Through decades of development, the technology has shown great application potential in a plurality of fields such as instant diagnosis, high-throughput drug screening, single-cell analysis, environmental monitoring and the like by virtue of the remarkable advantages of low consumption of samples and reagents, high analysis speed, easiness in integration and automation and the like. As a core execution unit of the microfluidic system, the performance of the microfluidic pump directly determines the efficiency and reliability of the whole system, so that the development of a novel and efficient microfluidic driving technology is always a research hotspot in the field. Currently, the mainstream microfluidic pump driving modes mainly include pressure driving, electric field driving, magnetic field driving, sound field driving, thermal field driving, and the like. The traditional sound field driving method is mainly dependent on piezoelectric materials, and has the problems of complex structure and high cost, and the traditional thermal field driving method generally faces the bottleneck of weak driving strength and low control precision. Although the non-contact optical driving technology receives a certain attention due to the potential of remote control, the problems of low energy conversion efficiency, weak generated driving force and the like always restrict the practical application of the non-contact optical driving technology in high-precision and high-efficiency microfluidic scenes. Therefore, developing a novel micro-fluidic driving mechanism with high driving efficiency, excellent controllability, simple structure and strong universality has become a technical problem that the skilled person long desires to solve but has not been successfully solved so far. Disclosure of Invention Aiming at the defects existing in the prior art, the invention provides the optical-thermal-acoustic micro-flow pump based on the metamaterial absorber and the preparation method thereof, which can effectively solve the problems of complex structure, dependence on external equipment, weak driving force, low control precision or poor biocompatibility existing in the conventional micro-flow pump. In order to achieve the above purpose, the invention is realized by the following technical scheme: In a first aspect, the present invention provides a method for preparing an optical-thermal-acoustic microfluidic pump based on a metamaterial absorber, the method comprising: A. sequentially forming a bottom metal film, a dielectric layer and a top metal structure array on a substrate to prepare a metamaterial absorber chip with a plasmon photo-thermal effect; B. spin-coating polydimethylsiloxane on the metamaterial absorber chip, and drying and curing to obtain the metamaterial absorber chip with the light effect; C. and B, irradiating the metamaterial absorber chip with the photoeffect obtained in the step B by using laser to obtain the photo-thermal-acoustic microfluidic pump with driving and mixing fluid capabilities. Further, in the step a, the method includes: A1, cleaning a substrate and drying; A2, forming a bottom metal film on the substrate through magnetron sputtering; A3, forming a dielectric layer on the bottom metal film through plasma enhanced atomic layer deposition; And A4, forming a top layer structure array on the dielectric layer through electron beam lithography and magnetron sputtering, and performing ultrasonic stripping, cleaning and drying to obtain the metamaterial absorber chip with the plasmon photo-thermal effect. In the step A, the air pressure in the sputtering cavity of the bottom metal film on the substrate by magnetron sputtering is 1X 10 -4 - 1×10-3 Pa. The further pressure in the sputtering chamber was 1X 10 -4 Pa. Further, in step A2, before depositing the underlying metal film, a step of depositing an adhesion layer on the substrate is further included; The adhesion layer is made of chromium and has a thickness of 8-20 nm a. In the step A2, the underlying metal film is gold with a thickness of 90-150nm. Further, the thickness of the bottom metal film is 100 nm a. Further, in the step A3, the dielectric layer is made of Al 2O3 or SiO 2, and the thickness is 5-10nm. Further, preferably, in the step A3, the thickness of the dielectric layer is 8nm. Further, in step A4, the top metal structure array is an array forme