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CN-122006956-A - Perovskite knife coating equipment and application thereof

CN122006956ACN 122006956 ACN122006956 ACN 122006956ACN-122006956-A

Abstract

The invention provides perovskite knife coating equipment and application thereof, which comprises an operation table, a knife coating assembly, a liquid dripping cleaning assembly, a placing assembly and a control device, wherein a substrate resistance heating wire is arranged on the bottom surface of the placing table to heat the table, a vacuum device provides negative pressure to fix a corresponding substrate, the liquid dripping cleaning assembly is provided with an electric liquid dripping device, a precursor solution storage device, a cleaning water tank, a spraying device and a fan, a scraper assembly of the knife coating assembly is connected to the bottom end of a piston rod of a knife coating push rod through a tension pressure sensor, a lifting frame is provided with a scraper switching motor to drive a star-shaped knife rack to rotate so as to switch a knife coating knife, and a knife head is arranged in the knife coating knife to heat the resistance wire. The invention can realize the integration of automatic tool changing, temperature control and cleaning, and the lower pressure of the blade coating push rod is controlled by introducing the fluid dynamic pressure model, so that the blade coating defect caused by fluid dynamic pressure is overcome.

Inventors

  • WANG YANGPEIHUA
  • YANG RONGGUI
  • ZHANG JIAMIN
  • LI HAIOU
  • SUN TANGYOU

Assignees

  • 桂林电子科技大学

Dates

Publication Date
20260512
Application Date
20260309

Claims (8)

  1. 1. The perovskite knife coating equipment is characterized by comprising an operation table (1), a knife coating assembly (2), a liquid dripping cleaning assembly (3), a placing assembly (4) and a control device (5), wherein the knife coating assembly (2) is arranged on the operation table (1), the placing assembly (4) is arranged on the top surface of the operation table (1), and the liquid dripping cleaning assembly (3) and the knife coating assembly (2) are erected above the placing assembly (4); The placing assembly (4) comprises a placing table top (41), wherein the middle part of the placing table top (41) is a substrate placing position, two sides of the substrate placing position are provided with glass plates (44) with the thickness being matched with the height of a substrate (6), a substrate resistance heating wire (42) and a temperature sensor III (45) are arranged on the bottom surface of the placing table top (41) to heat and detect the temperature of the table top respectively, the placing table top (41) is provided with a vacuum interlayer (411), the vacuum interlayer is communicated with a vacuum device (43) to obtain negative pressure, and the top of the vacuum interlayer is provided with a plurality of longitudinal vacuum holes (412) corresponding to the substrate placing position; The liquid drop cleaning assembly (3) comprises a liquid drop moving frame (32) which is arranged above the placement assembly (4) through a liquid drop linear module (31) sliding frame, wherein the liquid drop linear module (31) is arranged on the top surface of the operation table (1) along the X-axis direction, an electric liquid drop device (33), a precursor solution storage device (34), a cleaning water tank (35), a spraying device (36) and a fan (37) are arranged on the liquid drop moving frame (32), the precursor solution storage device (34) is connected with the electric liquid drop device (33) to convey a scraping solution, the cleaning water tank (35) is connected with the spraying device (36) to convey cleaning water, and the electric liquid drop device (33); The scraping and coating assembly (2) comprises a scraping and coating moving frame (22) which is arranged above the placing assembly (4) through a scraping and coating linear module (21) sliding frame, the scraping and coating linear module (21) is arranged on the top surface of the operating platform (1) along the X-axis direction, the scraping and coating assembly (24) is longitudinally lifted and arranged below the scraping and coating moving frame (22) through a scraping and coating push rod (23), the scraping and coating assembly (24) comprises a lifting frame (241) which is connected to the bottom end of a piston rod of the scraping and coating push rod (23) through a pulling pressure sensor (25), a star-shaped knife rest (242) which is horizontally rotatably arranged on the lifting frame (241) is provided with scraping and coating knives (243) with different slit heights in a dismountable way, and the lifting frame (241) is provided with a scraping and switching motor (244) which drives the star-shaped knife rest (242) to rotate so as to switch the scraping and coating knives (243); The knife head heating resistance wire (245) and the temperature sensor are arranged in the knife coating knife (243) (246) The section of the cutter head of the knife coating knife (243) is in a structure of an isosceles trapezoid at the bottom of the knife and a semicircular structure at the upper part of the knife coating knife, the inclined plane of the isosceles trapezoid is the working inclined plane of the knife coating knife, the line of the pull pressure sensor (25), the temperature sensor III (45) and the temperature sensor I (246) is connected with the output signal of the control device (5), and the line of the control device (44) is connected with each execution element for control.
  2. 2. The perovskite blade coating equipment as claimed in claim 1, wherein the blade coating linear module (21) comprises screw rods which are respectively arranged at two sides of the placement component (4) along the X-axis direction (211) Polished rod (212) Polished rod (212) Is connected with the output end of a knife coating frame driving motor (213), and the two ends of a knife coating moving frame (22) are respectively connected with a screw rod through corresponding sliding blocks (211) Polished rod (212) Sliding fit to drive the knife coating moving frame (22) to slide along the X-axis direction; The drip straight line module (31) comprises screw rods which are respectively arranged at two sides of the placement component (4) along the X-axis direction (311) Polished rod (312) Polished rod (312) Is connected with the output end of a drip frame driving motor (313), and the bottom of the drip moving frame (32) is connected with a screw rod (311) Polished rod (312) The engagement slides in the X-axis direction.
  3. 3. The perovskite blade coating apparatus as claimed in claim 2, wherein the drop moving rack (32) comprises a top drop mounting plate (321), and two sides of the bottom are respectively connected with a screw rod (311) Polished rod (312) A drip lifting push rod (322) and a drip transverse moving assembly (323) are arranged between the matched slide block and the drip mounting plate (321) in a superposition manner to drive the drip mounting plate (321) to move along the Z, Y axial directions respectively; The dropping liquid lifting push rod (322) is two longitudinal electric push rods which are respectively arranged on sliding blocks at two sides, the dropping liquid transverse moving assembly (323) is a screw rod sliding table which is arranged along the Y axis, the output end at the top of the dropping liquid lifting push rod (322) is connected with a sliding seat of the dropping liquid transverse moving assembly (323), the bottom of the dropping liquid mounting plate (321) is fixedly connected with the sliding blocks of the dropping liquid transverse moving assembly (323), and the dropping liquid transverse moving assembly (323) is driven to move along the Y axis direction.
  4. 4. The perovskite blade coating apparatus as claimed in claim 1, wherein the precursor solution storage device (34) comprises a liquid storage tank (341) and a stirring shaft (342) penetrating the liquid storage tank (341), wherein a liquid storage heating device (343) and a temperature sensor are arranged in the liquid storage tank (341) (345) And the stirring shafts (342) are arranged in a circumferential array to stir the solution in the box body, and the top ends of the stirring shafts (342) are connected with the stirring motor (344).
  5. 5. The perovskite blade coating equipment according to claim 4, wherein the spraying device (36) comprises a spraying pipe (361) horizontally and rotatably arranged at the bottom of the liquid drop moving frame (32), and a spraying swinging device for driving the spraying pipe (361) to swing, and a spraying head pointing to one side of the substrate is arranged at the bottom of the spraying pipe (361) in an array; The spraying swing device comprises a driving bevel gear (362) arranged at the bottom end of a stirring shaft (342), a driven bevel gear (363) meshed with the driving bevel gear (362), a driven bevel gear (363) coaxially connected with a transmission shaft (364), the transmission shaft (364) is connected with a rotating plate (365), a sliding block (366) is eccentrically arranged on the rotating plate (365), a swing plate (367) provided with a long groove is arranged at one end of the spraying pipe (361), and the sliding block (366) is matched with the long groove to drive the spraying pipe (361) to swing periodically.
  6. 6. The perovskite blade coating apparatus according to claim 1, wherein the isosceles trapezoid inclined plane of the blade forms an angle of 100 DEG to 145 DEG with the bottom surface of the blade, and the angle alpha = 180 DEG to theta between the working inclined plane of the blade and the plane of the substrate in operation is 50 DEG to 70 deg.
  7. 7. Use of a perovskite blade coating apparatus according to any one of the preceding claims 1 to 7, comprising the steps of: S1, placing a substrate (6) on a placing table top (41) and starting a vacuum device (43), wherein negative pressure adsorbs and fixes the substrate (6) through a vacuum hole (412), starting a substrate resistance heating wire (42) to heat the substrate (6) to a preset temperature, and starting a cutter head heating resistance wire (245) to heat a knife coating cutter (243) to the preset temperature; S2, starting a liquid dripping cleaning assembly (3), wherein a liquid dripping linear module (31) moves a liquid dripping moving frame (32) to the upper part of a substrate (6), and an electric liquid dripping device (33) drips precursor solution to the substrate (6) according to a set quantity; s3, nucleating and scraping, namely starting a scraping component (2), substituting a set nucleating and scraping speed V 1 into a fluid dynamic pressure model by a control device (5) to calculate a target downward pressure Ftarget of a scraping push rod, and calculating a standard downward pressure Fset according to a gravity compensation pressure formula of the scraper component; The calculation formula of the hydrodynamic model for calculating the target depression force Ftarget is as follows: Wherein, the Is the dynamic pressure coefficient of the fluid, In order to achieve a solution viscosity, In order to set the blade-coating speed, For the width of the substrate, For the included angle between the working inclined plane of the doctor blade and the plane of the substrate, For the slit height of the scraper blade, The coefficient of the gravitational efficiency is set to be, Gravity for the doctor assembly; The effective acting area of the knife head is defined as , For the width of the substrate, The width of the bottom of the scraper; The gravity compensation pressure formula of the scraper component is as follows: Wherein, the Gravity for the doctor assembly; The control device (5) starts the doctor-blade linear module (21) to drive the doctor blade assembly (24) to transversely move for one time at a set nucleation doctor-blade speed V 1 , and meanwhile, the control device (5) controls the doctor-blade push rod (23) to push down the doctor-blade according to the signal of the pull pressure sensor (25) so that the numerical value of the pull pressure sensor (25) is stabilized at the standard lower pressure Fset in the doctor-blade process; S4, filling the hole for thickening and scraping, namely, the step S2 is repeated, the precursor solution is dripped again, the control device (5) drives the scraper switching motor 244 to rotate so as to switch the scraper 243, the step S3 is substituted into the filling hole for thickening and scraping V 2 , the standard lower pressure Fset is calculated, the control device (5) controls the scraper push rod (23) to reciprocate and scrape according to the standard lower pressure Fset obtained by calculation, and after the scraping is carried out for a set number of times, the scraper linear module (21) is scraped, and the scraper push rod (23) drives the scraper assembly (24) to lift and return to an initial waiting position; S5, repeating the step S4 and switching the doctor blade (243) according to the setting to obtain a compact and flat perovskite substrate film; S6, after the doctor-blading is finished, the control device (5) controls the drip moving frame (32) to move to the upper portion of the substrate (6), the spraying device (36) starts to spray and clean the placing table surface (41), and after the cleaning is finished, the fan (37) starts to blow and dry the placing table surface (41) and the substrate (6) to wait for the next doctor-blading.
  8. 8. The method of claim 7, wherein the nucleation doctoring speed V 1 is 0.8-1.2 cm/S in step S3 and the pore-filling thickening doctoring V 2 is 5-10 cm/S in step S4.

Description

Perovskite knife coating equipment and application thereof Technical Field The invention relates to the technical field of semiconductor film preparation equipment, in particular to perovskite knife coating equipment and application thereof. Background Perovskite thick films are widely applied in the fields of X-ray imaging, radiation detection and the like, and the preparation process of the perovskite thick films generally adopts solution method processes such as knife coating, spin coating and the like. The knife coating method has the advantages of relatively simple equipment structure and good process scalability, and becomes a common method for preparing large-area thick films. The conventional doctor blade apparatus generally includes a substrate placement platform, a doctor blade mechanism, and a driving mechanism that drives the doctor blade mechanism to perform longitudinal and lateral movements to achieve doctor blade on a substrate in order to obtain a uniform film thickness. In the preparation of high quality thick films, multi-stage processes, such as a combination of low speed nuclear doctor blading and high speed hole filling doctor blading, are often required, requiring independent temperature control of the doctor blade and substrate, and cleaning of the placement stage between doctor blading. The existing equipment does not have an automatic tool changing, temperature control and cleaning integrated structure, cannot realize continuous and efficient high-quality thick film knife coating, and is not beneficial to improvement of knife coating efficiency and equipment serialization design. Meanwhile, in the actual blade coating process, the blade is jacked up by fluid dynamic pressure due to the blade coating speed, solution viscosity fluctuation, geometrical shape difference of the blade and fluid dynamic pressure change caused by insufficient motion stability, so that defects such as uneven local film thickness, edge warping or stripes are caused, and the density of a thick film and the performance of a device are affected. In order to avoid the jacking of the scraper by fluid dynamic pressure and ensure the uniformity of film thickness, the prior equipment is structurally added with structures such as spring compensation and the like to ensure the downward pressure of the scraper, but the problems of damage to the scraper, uneven film thickness and substrate damage caused by overlarge downward pressure of the scraper are also easily caused. None of the above structures introduces substantial hydrodynamic pressure into the overall mechanical and control design and does not provide adequate and stable pressure under high speed or multi-stage blade coating conditions to achieve uniform films. Based on the problems, perovskite knife coating equipment and application thereof are required to be provided, automatic knife changing, temperature control and cleaning integration are realized, continuous knife coating efficiency is improved, and defects of uneven local film thickness, edge warping or stripes and the like caused by hydrodynamic pressure are overcome. Disclosure of Invention The perovskite knife coating equipment and the application thereof can realize the integration of automatic knife changing, temperature control and cleaning, improve the thick film knife coating quality and the continuous knife coating efficiency, and overcome the knife coating defect caused by fluid dynamic pressure. In order to achieve the technical purposes and the technical effects, the invention solves the problems through the following technical scheme: the perovskite knife coating equipment comprises an operation table, a knife coating assembly, a drip cleaning assembly, a placing assembly and a control device, wherein the knife coating assembly, the drip cleaning assembly, the placing assembly and the control device are arranged on the operation table; The placing component comprises a placing table top, wherein the middle part of the placing table top is a substrate placing position, and glass plates with the thickness matched with the substrate height are arranged on two sides of the substrate placing position; The liquid drop cleaning assembly comprises a liquid drop moving frame, a liquid drop linear module, a liquid drop cleaning device, a liquid cleaning water tank, a spraying device and a fan, wherein the liquid drop moving frame is arranged above the placing assembly through a liquid drop linear module sliding frame; The scraping assembly comprises a scraping moving frame which is arranged above a placing assembly through a scraping linear module sliding frame, the scraping linear module is arranged on the top surface of an operating platform along the X-axis direction, the scraping assembly is longitudinally installed below the scraping moving frame through a scraping push rod in a lifting mode, the scraping assembly comprises a lifting frame which is connected to the bottom end of a piston rod of