CN-122007050-A - Defect detection device and detection method for ceramic substrate

Abstract

The invention relates to the technical field of ceramic substrate detection, in particular to a defect detection device and a defect detection method for a ceramic substrate, wherein the defect detection device for the ceramic substrate comprises a panel, and a first conveyor and a second conveyor are sequentially arranged on the panel along the length direction; the upper span of the first conveyor is provided with a feeding mechanism, the first conveyor and the second conveyor are arranged at intervals, the second conveyor is provided with an appearance detection module I, the tail end of the second conveyor is connected with a vacuum conveyor, and a storage mechanism is arranged below the vacuum conveyor. The detection method relies on a matched defect detection device, realizes continuous feeding of the ceramic substrate through alternate operation of two groups of feeding assemblies, realizes comprehensive and accurate defect identification through primary and secondary double appearance detection, and has smooth connection of all steps and high automation degree.

Inventors

• FANG QIANJUN
• Qin Xungong
• TANG GUOLIANG
• FAN YONGFANG
• SI SHUO
• GUO JIANGPING

Assignees

• 山东中为电子科技有限公司

Dates

Publication Date

20260512

Application Date

20260408

Claims (10)

1. 1. The defect detection device for the ceramic substrate comprises a panel (1) and is characterized in that a first conveyor (2) and a second conveyor (9) are sequentially arranged on the panel (1) along the length direction, a feeding mechanism is arranged on the first conveyor (2) in a straddling mode, the first conveyor (2) and the second conveyor (9) are arranged at intervals, an appearance detection module (3) is arranged on the second conveyor (9), the tail end of the second conveyor (9) is connected with a vacuum conveyor (4), and a storage mechanism is arranged below the vacuum conveyor (4).
2. 2. The defect detection device for the ceramic substrate according to claim 1, wherein the feeding mechanism comprises two groups of feeding components, each group of feeding components comprises two shaft manipulators (5) which are arranged on the left side and the right side of the first conveyor (2) in a crossing mode, and a storage bin (6) is arranged on the two sides of the first conveyor (2) in cooperation with the two shaft manipulators (5).
3. 3. The defect detection device for the ceramic substrate according to claim 2, wherein the two-axis manipulator (5) comprises a first strut (501) fixedly arranged on the panel (1), a fixed plate (502) is arranged on the first strut (501), an X-axis translation unit (503) is arranged on the fixed plate (502), an installation box (504) is arranged on the X-axis translation unit (503), a Y-axis translation unit (505) is arranged in the installation box (504), a straight rod (506) is connected with the Y-axis translation unit (505), and a plurality of sucking disc clamps (507) are uniformly arranged on the straight rod (506) in cooperation with the upper bin (6).
4. 4. The defect detection device for the ceramic substrate according to claim 3, wherein the stock bin (6) comprises a rectangular shell (601) with openings at the upper end and the lower end, the rectangular shell (601) is arranged on the panel (1), a mounting plate (602) is arranged on the bottom surface of the panel (1), an electric push rod (603) is arranged on the mounting plate (602), and the electric push rod (603) can push the ceramic substrate (7) in the rectangular shell (601) to the position below the sucker clamp (507).
5. 5. The defect detection device for the ceramic substrate according to claim 1, wherein an appearance detection module II (8) is arranged between the conveyor I (2) and the conveyor II (9), the appearance detection module II (8) comprises a camera I (801) and a vertical plate I (802) which are mounted on the panel (1), the camera I (801) is arranged between the conveyor I (2) and the conveyor II (9), and three light sources I (803) are arranged on the vertical plate I (802) in a delta shape.
6. 6. The defect detection device for a ceramic substrate according to claim 1, wherein the first appearance detection module (3) comprises a second pillar (301) and a second vertical plate (302) which are arranged on the panel (1), wherein the second pillar (301) is provided with the second camera (303), and the second vertical plate (302) is provided with the third light source (304) in a delta shape.
7. 7. The defect detecting apparatus for ceramic substrates according to claim 4, wherein the head end of the vacuum conveyor (4) is disposed above the tail end of the second conveyor (9).
8. 8. The device for detecting defects of ceramic substrates according to claim 7, characterized in that the storage mechanism comprises a plurality of bins (6) uniformly arranged along the length of the vacuum conveyor (4).
9. 9. A method for inspecting a ceramic substrate, characterized by using the defect inspection apparatus for a ceramic substrate according to any one of claims 1 to 8, comprising the steps of: S1, feeding, namely stacking and placing ceramic substrates (7) to be detected in a rectangular shell (601) of a storage bin (6), lifting an electric push rod (603) upwards, pushing the uppermost ceramic substrate (7) to the lower part of a sucker clamp (507), driving the sucker clamp (507) to move and adsorb the ceramic substrate (7) by the cooperation of an X-axis translation unit (503) and a Y-axis translation unit (505) of a two-axis mechanical arm (5), and then transferring the ceramic substrate (7) to a conveying surface of a first conveyor (2), and conveying the ceramic substrate forward by the first conveyor (2) and a second conveyor (9); s2, primary appearance detection, namely when the ceramic substrate (7) is conveyed to the interval between the conveyor I (2) and the conveyor II (9) along with the conveyor I (2), the three delta-shaped light sources I (803) of the appearance detection module II (8) uniformly supplement light to the surface of the ceramic substrate (7), and the camera I (801) performs image acquisition on the surface of the ceramic substrate (7) to finish primary appearance defect detection of the ceramic substrate (7); s3, secondary appearance detection, namely transferring the ceramic substrate (7) subjected to primary detection to a second conveyor (9) by a first conveyor (2), carrying out secondary light supplementing on the ceramic substrate (7) by three delta-shaped light sources (304) of the first appearance detection module (3) along with the conveying process of the second conveyor (9), and carrying out secondary image acquisition on the surface of the ceramic substrate (7) by a second camera (303), so as to complete secondary appearance defect detection of the ceramic substrate (7), and realizing comprehensive identification of defects by double detection; s4, conveying the ceramic substrate (7) subjected to secondary appearance detection to the tail end of the ceramic substrate by a second conveyor (9), conveying the ceramic substrate to the head end of the vacuum conveyor (4), adsorbing and conveying the ceramic substrate forwards by the vacuum conveyor (4), and conveying the qualified ceramic substrate (7) and the unqualified ceramic substrate (7) with different types of defects to corresponding positions by the vacuum conveyor (4) according to detection results of the first appearance detection module (3) and the second appearance detection module (8) respectively, so that the ceramic substrate falls into a bin (6) correspondingly arranged below the vacuum conveyor (4), and sorting and storing of the ceramic substrate (7) are realized, and the whole detection flow is finished.
10. 10. The method for detecting the ceramic substrate according to claim 9, wherein in the step S2 and the step S3, the surface images of the ceramic substrate (7) collected by the camera one (801) and the camera two (303) are transmitted to a background processing system in real time, the background processing system analyzes and processes the images through a preset image recognition algorithm, automatically judges whether the ceramic substrate (7) has appearance defects such as splinters, dirt, defects and the like, marks the defect types and defect positions, and simultaneously sends a material distribution control signal to the vacuum conveyor (4) to realize linkage control of detection and material distribution.

Description

Defect detection device and detection method for ceramic substrate Technical Field The invention relates to the technical field of ceramic substrate detection, in particular to a defect detection device and method for a ceramic substrate. Background The alumina ceramic substrate is a core basic carrier of integrated circuits in the fields of electronic industry, new energy, automobile power and the like by virtue of excellent performances such as high heat conductivity, high insulativity, high temperature resistance, high mechanical strength and the like, and the appearance quality directly determines the reliability and the production yield of downstream electronic devices, so that appearance defect detection before the ceramic substrate leaves a factory becomes a key process in a production flow. The defect detection of the ceramic substrate in the current industry is realized by combining a machine vision technology, the surface image of the substrate is acquired by an industrial camera, and the defects such as splinter, dirt, defect and the like are judged by matching with an image recognition algorithm, so that compared with the traditional manual naked eye detection, the detection precision and efficiency are greatly improved, and the method becomes the main technical direction of the ceramic substrate detection. The conventional ceramic substrate machine vision detection device adopts a structural design of a single conveyor and a single detection module, only can complete single image acquisition and defect judgment in a detection process, is easy to cause missed detection due to factors such as light reflection on the surface of a substrate, hidden defect positions and the like, has a comprehensive defect in detection, adopts a vibration disc or a single-station manipulator for feeding in a feeding link of a plurality of devices, is easily influenced by the stacking state of the substrate in feeding rhythm, is difficult to realize continuous feeding, and restricts the overall detection efficiency. In addition, the structure that the pneumatic push rod is matched with the slideway is adopted in the substrate sorting after detection, so that the ceramic substrate is easy to collide and damage in the pushing process, and the product loss is increased. The current ceramic substrate defect detection device still has the technical problems of poor detection continuity, defect identification comprehensiveness deficiency, easiness in substrate loss caused by feeding and distributing links, and the like, and the conveyor layout, the detection module setting and the feeding and storing structural design of the existing device cannot meet multiple requirements of detection efficiency, detection precision and product protection, and are difficult to adapt to the detection requirements of large-scale ceramic substrate production, so that research and development of the ceramic substrate defect detection device which is reasonable in layout, comprehensive in detection, smooth in feeding and distributing and capable of effectively protecting the substrate is needed to solve the technical problems. Disclosure of Invention Aiming at the problems that the layout, the detection module setting and the feeding and storing structure design of the conveyor of the existing device cannot meet multiple requirements of detection efficiency, detection precision and product protection, and the detection requirements of large-scale ceramic substrate production are difficult to adapt, the invention provides a defect detection device and a defect detection method of a ceramic substrate. In order to solve the problems, the invention adopts the technical proposal that, A defect detection device of a ceramic substrate comprises a panel, a first conveyor and a second conveyor are sequentially arranged on the panel along the length direction, a feeding mechanism is arranged on the first conveyor in a crossing mode, the first conveyor and the second conveyor are arranged at intervals, an appearance detection module I is arranged on the second conveyor, the tail end of the second conveyor is connected with a vacuum conveyor, and a storage mechanism is arranged below the vacuum conveyor. The vacuum conveyor is matched with the lower storage mechanism to finish stable conveying and classified storage of the detected substrate, so that the substrate is prevented from being collided and damaged in the conveying and distributing process, meanwhile, the overall layout design along the length direction of the panel is compact and reasonable, the integrated automatic operation of ceramic substrate feeding, detecting and distributing storage is realized, the overall detection efficiency is effectively improved, the product loss is reduced, and the large-scale ceramic substrate detection requirement is adapted. The feeding mechanism comprises two groups of feeding assemblies, each group of feeding assembly comprises two shaft manipulators which a