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CN-122007079-A - Shower head cleaning equipment

CN122007079ACN 122007079 ACN122007079 ACN 122007079ACN-122007079-A

Abstract

The application provides spray header cleaning equipment which comprises a first groove, a groove cover and a lifting piece, wherein an avoidance hole penetrating through the first groove is formed in the bottom wall of a cleaning cavity, the output end of the lifting piece is connected with the groove cover in a power mode, the groove cover is driven to move in a first direction, the cleaning cavity is switched between an open state and a closed state, a sealing piece is arranged in the cleaning cavity and is abutted against the side wall of a spray header to form a sealing environment, cleaning liquid in the cleaning cavity is sprayed out of the first groove through a small hole of the spray header, a plurality of liquid outlet ends of a liquid supply system are arranged, the liquid outlet ends penetrate through the groove cover to point to the cleaning cavity along the first direction, a pushing piece is arranged below the first groove, the top wall of the pushing piece penetrates through the avoidance hole and extends into the cleaning cavity to bear the spray header, one end of a transmission piece is connected with the groove cover or connected with the output end of the lifting piece, and the other end of the transmission piece is connected with the pushing piece, so that the pushing piece and the groove cover moves synchronously along the first direction, and the spray header is convenient to detach from the first groove.

Inventors

  • LI SHUAI
  • GUO JIEYU
  • FAN MINGMING
  • Bao Panqi

Assignees

  • 浙江盾源聚芯半导体科技有限公司

Dates

Publication Date
20260512
Application Date
20260304

Claims (10)

  1. 1. The spray header cleaning equipment is characterized by comprising a first groove (1), wherein a cleaning cavity (10) for placing a spray header (100) is formed upwards in an opening of the first groove (1), and an avoidance hole (101) penetrating through the first groove (1) is formed in the bottom wall of the cleaning cavity (10); The cleaning device comprises a tank cover (2) and a lifting piece (3), wherein the output end of the lifting piece (3) is in power connection with the tank cover (2), and the tank cover (2) is driven to move in a first direction (X) so that a cleaning cavity (10) is switched between an open state and a closed state; The sealing piece (4) is arranged in the cleaning cavity (10), the sealing piece (4) is abutted with the side wall of the spray header (100) to form a sealing environment, and cleaning liquid in the cleaning cavity (10) is sprayed out of the first groove (1) through a small hole of the spray header (100); the liquid supply system (5), the liquid outlet end (50) of the liquid supply system (5) is provided with a plurality of liquid outlet ends (50) which penetrate through the tank cover (2) and are directed to the cleaning cavity (10) along the first direction (X); the pushing piece (6), the pushing piece (6) is arranged below the first groove (1), and the top wall of the pushing piece (6) penetrates through the avoidance hole (101) and extends into the cleaning cavity (10) to bear the spray header (100); One end of the transmission piece (7) is connected with the groove cover (2) or the output end of the lifting piece (3), and the other end of the transmission piece (7) is connected with the pushing piece (6) so as to realize synchronous movement of the pushing piece (6) and the groove cover (2) along the first direction (X).
  2. 2. The shower head cleaning equipment according to claim 1, comprising a bearing jig (8), wherein the bearing jig (8) is arranged on the bottom wall of the cleaning cavity (10), the sealing element (4) is arranged on the top wall of the bearing jig (8), a through hole (81) is arranged on the bearing jig (8), and the inner diameter of the through hole (81) is smaller than the inner diameter of the avoidance hole (101).
  3. 3. The shower head cleaning equipment according to claim 2, wherein the sealing member (4) comprises a first sealing ring (41) and a second sealing ring (42), the first sealing ring (41) and the second sealing ring (42) are coaxially arranged, a first bearing groove (82) and a second bearing groove (83) are formed in the top wall of the bearing jig (8), and the first sealing ring (41) and the second sealing ring (42) are respectively arranged in the first bearing groove (82) and the second bearing groove (83).
  4. 4. The shower head cleaning equipment according to claim 3, wherein an isolation area (84) is formed between the first bearing groove (82) and the second bearing groove (83), a plurality of penetrating grooves (85) which are uniformly distributed along the circumferential direction of the bearing jig (8) are formed in the isolation area (84), the pushing piece (6) comprises a plurality of jacking blocks (61), the jacking blocks (61) are in one-to-one correspondence with the penetrating grooves (85), the jacking blocks (61) penetrate through the penetrating grooves (85) to extend to the cleaning cavity (10), the side walls of the jacking blocks (61) are in butt joint with the inner walls of the penetrating grooves (85), and the top walls of the jacking blocks (61) are in butt joint with the bottom walls of the shower heads (100).
  5. 5. The shower head cleaning apparatus according to claim 4, wherein the pushing member (6) further comprises a supporting ring (62), the supporting ring (62) is located below the top blocks (61), and the plurality of top blocks (61) are fixedly connected with the supporting ring (62).
  6. 6. A shower head cleaning apparatus according to claim 1 or 5, characterized in that the transmission member (7) comprises a connecting rod (71), one end of the connecting rod (71) is fixedly connected with the tank cover (2), and the other end of the connecting rod (71) is fixedly connected with the pushing member (6).
  7. 7. A shower head cleaning apparatus according to claim 6, characterized in that the liquid supply system (5) comprises a second tank (51) and a pumping structure (52), the second tank (51) being arranged below the first tank (1) for receiving cleaning liquid flowing out from the dodging hole (101), one end of the pumping structure (52) extending into the inner cavity of the second tank (51), the other end of the pumping structure (52) being connected to the liquid outlet end (50) of the liquid supply system (5).
  8. 8. A showerhead cleaning apparatus according to claim 7, wherein the liquid supply system (5) comprises a heating structure (53), the heating structure (53) being arranged in the second tank (51) for heating the cleaning liquid in the second tank (51).
  9. 9. The shower head cleaning apparatus according to claim 8, wherein the liquid supply system (5) further comprises a blowdown chamber (54), an overflow tank (55), the second tank (51) is located in the blowdown chamber (54), the overflow tank (55) is located at an upper portion of the blowdown chamber (54) and outside the second tank (51), and the overflow tank (55) is communicated with the blowdown chamber (54) through an overflow hole (56).
  10. 10. The shower head cleaning apparatus according to claim 7, wherein the pumping structure (52) comprises a pump body (521) and a filter (522), an output end of the filter (522) is connected to an input end of the pump body (521), the input end of the filter (522) is communicated with an inner cavity of the second tank (51) through a pipe (523), and an input port of the pipe (523) is disposed on a side wall of the second tank (51) and has a predetermined height from a bottom wall of the second tank (51).

Description

Shower head cleaning equipment Technical Field The application relates to the field of spray header cleaning, in particular to spray header cleaning equipment. Background The spray header is taken as a key component in the industries of semiconductors, chemical engineering, coating and the like. Wherein, the cleanliness of the inner small holes of the spray header directly influences the uniformity of spraying. The traditional cleaning method of the spray head mainly adopts a high-pressure water flow flushing mode, only a small amount of water flow enters the inside of the small hole in the cleaning process, so that dirt such as particles, crystals (silicon powder remained in the hole after wax is used for processing fixed products and cutting liquid) and the like in the small hole are difficult to clean. The adhesion of the residues affects the plasma penetration through the small Kong Hongji to the wafer surface, thereby creating irreversible defects on the wafer surface. When water flow passes through the small holes of the spray header, the pressure of the water flow is small, the cleaning effect of attachments is poor, the water flow flows through the outer surface of the spray header at a high speed, and the water film between the water on the outer surface of the spray header and the bearing jig has great tension, so that the spray header is adsorbed on the bearing jig, and the cleaned jig is difficult to detach from the bearing jig. Therefore, how to design a cleaning device that is convenient for improving the cleaning effect of the shower head is a technical problem to be solved urgently by those skilled in the art. Disclosure of Invention The application provides a spray header cleaning device which at least solves the technical problems existing in the prior art. The invention provides a spray header cleaning device, which comprises a first groove, wherein a cleaning cavity for placing a spray header is formed upwards in an opening of the first groove, and an avoidance hole penetrating through the first groove is formed in the bottom wall of the cleaning cavity; the output end of the lifting piece is in power connection with the groove cover, and the groove cover is driven to move in a first direction, so that the cleaning cavity is switched between an open state and a closed state; The sealing piece is arranged in the cleaning cavity and is abutted with the side wall of the spray header to form a sealing environment, so that cleaning liquid in the cleaning cavity is sprayed out of the first groove through the small hole of the spray header; the liquid outlet ends of the liquid supply system penetrate through the groove cover and are directed to the cleaning cavity along the first direction; The pushing piece is arranged below the first groove, and the top wall of the pushing piece penetrates through the avoidance hole and extends into the cleaning cavity to bear the spray header; One end of the transmission piece is connected with the groove cover or the output end of the lifting piece, and the other end of the transmission piece is connected with the pushing piece so as to realize synchronous movement of the pushing piece and the groove cover along the first direction. In an embodiment, including bearing the jig, bear the jig setting on the diapire of wasing the chamber, the sealing member setting is on the roof that bears the jig, is provided with the through-hole on bearing the jig, and the internal diameter of through-hole is less than the internal diameter of dodging the hole. In an embodiment, the sealing member includes a first sealing ring and a second sealing ring, the first sealing ring and the second sealing ring are coaxially arranged, a first bearing groove and a second bearing groove are formed in the top wall of the bearing jig, and the first sealing ring and the second sealing ring are respectively installed in the first bearing groove and the second bearing groove. In an implementation manner, an isolation area is formed between the first bearing groove and the second bearing groove, a plurality of penetrating grooves which are uniformly distributed along the circumferential direction of the bearing jig are formed in the isolation area, the pushing piece comprises a plurality of jacking blocks, the jacking blocks are in one-to-one correspondence with the penetrating grooves, the jacking blocks penetrate through the penetrating grooves to extend to the cleaning cavity, the side walls of the jacking blocks are in butt joint with the inner walls of the penetrating grooves, and the top walls of the jacking blocks are in butt joint with the bottom walls of the spray heads. In an embodiment, the pushing member further includes a supporting ring, the supporting ring is located below the top blocks, and the plurality of top blocks are fixedly connected with the supporting ring. In one embodiment, the transmission member includes a link, one end of the link is fixedly connected to the s