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CN-122007082-A - Shower head cleaning device and cleaning method

CN122007082ACN 122007082 ACN122007082 ACN 122007082ACN-122007082-A

Abstract

The application provides a spray header cleaning device and a cleaning method, wherein the cleaning device comprises a base, a carrying platform and a top seat which are sequentially arranged at intervals, the carrying platform is provided with a hollowed-out part, the carrying platform is used for placing a spray header, a first cleaning component is arranged between the carrying platform and the top seat and comprises a first spraying module which moves back and forth and a first driving source used for driving the first spraying module, the first spraying module can be in butt joint with the first opening to provide a cleaning medium, a second cleaning component is arranged between the carrying platform and the base and comprises a second spraying module which moves back and forth and a second driving source used for driving the second spraying module, the second spraying module can be in butt joint with the second opening to provide the cleaning medium, and a locking structure is arranged on the carrying platform to ensure the stability when the first spraying module is connected with the first driving source, the first cleaning device is suitable for a high-pressure cleaning scene, and the thoroughness and convenience of spray header cleaning are finally improved.

Inventors

  • SHI JUNWEI
  • CUI RENQUAN
  • WANG TAOJIE

Assignees

  • 无锡金源半导体科技有限公司

Dates

Publication Date
20260512
Application Date
20260416

Claims (10)

  1. 1. The utility model provides a shower head belt cleaning device, has first direction (Z), shower head (100) are located the both ends of first direction (Z) have first through-hole and second through-hole, first through-hole the second through-hole all with the inside runner intercommunication of shower head (100), its characterized in that, shower head belt cleaning device includes: The shower head comprises a base (1), a carrying platform (2) and a top seat (3), wherein the carrying platform (2) is provided with a hollowed-out part (20 a) and is arranged at intervals along the first direction (Z), and the carrying platform (2) is used for placing the shower head (100); A first cleaning assembly (4) arranged between the carrying platform (2) and the top seat (3) and comprising a first spraying module (41) which moves reciprocally along the first direction (Z) and a first driving source (42) for driving the first spraying module (41), wherein the first spraying module (41) and the first through hole can be in butt joint to provide cleaning medium; The second cleaning assembly (5) is arranged between the carrying platform (2) and the base (1), and comprises a second spraying module (51) which moves back and forth along the first direction (Z) and a second driving source (52) used for driving the second spraying module (51), and the second spraying module (51) and the second port can be in butt joint to provide cleaning media.
  2. 2. The showerhead cleaning apparatus of claim 1, further comprising a second direction (X) and a third direction (Y), the first direction (Z), the second direction (X) and the third direction (Y) intersecting each other, and further comprising a locking structure (6), the locking structure (6) comprising a mating member (61) disposed on the first spray module (41), a latch member (62) sliding on the carrier (2) along the second direction (X), and a driving assembly (63) for driving the latch member (62) to move, wherein the driving assembly (63) drives the latch member (62) to be in a plug-in engagement with the mating member (61) after the first spray module (41) is moved to a predetermined position, so as to limit displacement of the first spray module (41) along the first direction (Z).
  3. 3. The shower head cleaning device according to claim 2, wherein the matching piece (61) comprises a sleeve fixed on one side of the first shower module (41) close to the carrying platform (2), a matching groove (20 b) for the sleeve to be in plug-in matching is formed in the carrying platform (2), a limit groove (20 c) for the plug pin piece (62) to slide is formed in the carrying platform (2), and an opening (20 d) is formed in at least one section of the limit groove (20 c) for the plug pin piece (62) to be installed.
  4. 4. The showerhead cleaning apparatus of claim 3, wherein the drive assembly (63) comprises: The gear sets (631) are arranged in a one-to-one correspondence with the plug pin pieces (62), each gear set (631) is provided with a driving tooth (6311), the driving teeth (6311) are in transmission connection with the plug pin pieces (62), and tooth parts in transmission fit with the driving teeth (6311) are arranged on the plug pin pieces (62); A timing belt (632), each gear set (631) further having a drive tooth (6312), the timing belt (632) being in driving connection with a plurality of the drive teeth (6312); The driving motor (633) is arranged on the carrying platform (2), and the driving motor (633) is in transmission connection with at least one transmission tooth (6312) so as to drive the bolt piece (62) to synchronously move.
  5. 5. The shower head cleaning device according to claim 4, wherein the carrier (2) is further provided with a plurality of accommodating grooves (20 e), the driving teeth (6311) are disposed in the accommodating grooves (20 e), and the timing belt (632) and the driving teeth (6312) are disposed on one side of the carrier (2) away from the first shower module (41).
  6. 6. The shower head cleaning device according to claim 2, wherein the mating members (61) are provided with four rectangular corners arranged on the carrier (2), the second direction (X) and the third direction (Y) are rectangular in length and width corresponding to the mating members (61), the latch members (62) are provided with four corresponding to the mating members (61), and the driving assembly (63) comprises: The first sliding blocks (71) are arranged in two and are close to or far away from each other along the third direction (Y), and one end of each first sliding block (71) is hinged with the corresponding two bolt pieces (62); And the second sliding blocks (72) reciprocate along the second direction (X), and one ends of the second sliding blocks (72) are respectively hinged with one ends of the two first sliding blocks (71) away from a hinge point.
  7. 7. The shower head cleaning device according to claim 6, wherein the driving assembly (63) further comprises a driving handle (73), one end of the driving handle (73) is rotatably connected to the second slider (72), a containing hole (20 f) for sliding the driving handle (73) is formed in the carrying platform (2), a threaded column (75) is arranged on the periphery of the containing hole (20 f) of the carrying platform (2), a threaded sleeve (74) is arranged at one end, deviating from the second slider (72), of the driving handle (73), and the threaded sleeve (74) is in threaded connection with the threaded column (75).
  8. 8. The shower head cleaning device according to any one of claims 2 to 7, further comprising a magnetic attraction member (8) disposed on a peripheral side of the stage (2), wherein the latch member (62) is disposed through the mating member (61), and an end of the latch member (62) is magnetically attracted to and fixed to the magnetic attraction member (8).
  9. 9. The spray header cleaning device according to claim 8, wherein the magnetic attraction piece (8) comprises a mounting column (81) and a magnetic attraction block (82) embedded at the end part of the mounting column (81), and the mounting column (81) is in threaded connection with the carrier (2).
  10. 10. A method of cleaning a showerhead (100) based on the showerhead cleaning apparatus of any one of claims 1-9, comprising: Operating a second driving source (52) to control a second spraying module (51) to be far away from the carrying platform (2), starting a first driving source (42) to drive a first spraying module (41) to be in sealing butt joint with a first through hole, starting a first driving assembly (63) to drive a latch component (62) to be in plug-in fit with a matching component (61) to complete fixation, and starting liquid supply to perform forward cleaning; And (3) reverse cleaning, namely starting a first driving assembly (63) to drive a latch component (62) to be separated from a matching component (61) so as to unlock a locking structure (6), operating a first driving source (42) to drive a first spraying module (41) to be far away from a carrying platform (2), starting a second driving source (52) to drive a second spraying module (51) to be in sealing butt joint with a second port, and starting liquid supply to perform reverse cleaning.

Description

Shower head cleaning device and cleaning method Technical Field The application relates to the technical field of processing of semiconductor thin film deposition equipment, in particular to a spray header cleaning device and a cleaning method. Background The spray header is a core part in the semiconductor film deposition equipment and is used for releasing gas to the surface of the wafer so as to grow a film on the surface of the wafer, and the core performance indexes of the spray header comprise the cleanliness and the ejection uniformity of the gas. In order to ensure the cleanliness of the released gas, the cleaning process in the processing stage needs to be strictly controlled, especially for cleaning the inside of the spray header, the effective cleaning can ensure that the residue of particulate matters (particle) in the flow channel in the spray header is in a standard range, and the pollution caused by the fact that the particulate matters are carried out by the gas when flowing in the flow channel in the inner part and deposited on the wafer is avoided. In the related art, manual cleaning or a designed tool is adopted for flushing, but the cleaning effect is not ideal enough, and long time and cost are required. Especially, for some shower head products of new design, the inside runner structure and hole structure are more complicated meticulous than traditional shower head, and processing is also more complicated, consequently lead to particulate matter to remain more easily, consequently to abluent requirement is higher, adopts traditional cleaning scheme to be difficult to wash clean at present to the operation is comparatively loaded down with trivial details. Disclosure of Invention The application provides a spray header cleaning device and a cleaning method, so as to improve the thoroughness and convenience of spray header cleaning. The application provides a spray header cleaning device which is provided with a first direction, wherein two ends of a spray header, which are positioned in the first direction, are provided with a first through hole and a second through hole, the first through hole and the second through hole are communicated with an internal flow channel of the spray header, the spray header cleaning device comprises a base, a carrying platform and a top seat, the carrying platform is provided with a hollowed-out part, the carrying platform is used for placing the spray header, a first cleaning assembly is arranged between the carrying platform and the top seat and comprises a first spray module and a first driving source, the first spray module and the first driving source are used for driving the first spray module, the first spray module and the first through hole can be in butt joint to provide cleaning media, and a second cleaning assembly is arranged between the carrying platform and the base and comprises a second spray module and a second driving source, the second spray module is used for driving the second spray module to move back and forth along the first direction, and the second spray module can be in butt joint to provide the cleaning media. According to the technical scheme, the first cleaning assembly and the second cleaning assembly are matched to realize continuous and efficient forward cleaning and reverse cleaning of the spray header, the second spraying module is far away from the carrying platform to leave a space during forward cleaning, the first driving source drives the first spraying module to be in sealing butt joint with the first through hole, high-pressure cleaning media are provided for an inner runner of the spray header through the first spraying module and the first through hole, cleaning waste liquid is discharged from the second through hole, the first driving source drives the first spraying module to be far away from the carrying platform to leave a space during reverse cleaning, the second driving source drives the second spraying module to be in sealing butt joint with the second through hole, and high-pressure cleaning media are provided for the spray header through the second spraying module and the second through hole, so that the cleaning waste liquid is finally discharged from the first through hole. So, forward washing and reverse washing synergism can follow the inner space of reverse direction and wash the shower head repeatedly, this makes the inner runner receive the washing effect of different directions, different orbit, increase inside particulate matter and receive unordered medium washing, thereby reduce the residue of particulate matter, improve abluent thoroughness, and the operation process only needs operating personnel to control first actuating source and second actuating source, easy operation is convenient, promote cleaning efficiency by a wide margin, in some embodiments, can consider even to design into computer automatic control with first actuating source and second actuating source, improve degree of aut