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CN-122007094-A - Plasma cleaning equipment

CN122007094ACN 122007094 ACN122007094 ACN 122007094ACN-122007094-A

Abstract

The application relates to the technical field of semiconductor chip manufacturing, and discloses plasma cleaning equipment which comprises two vertical plates, a fixed table, a dust collecting box, a inferior product collecting box, a qualified product collecting box, a driving transportation assembly, a cleaning mechanism, a dust removing mechanism and a visual detection assembly, wherein the front side wall of the dust collecting box is provided with an opening, a plurality of rotating shafts are connected between the two vertical plates in an equidistant rotating manner, the outer parts of the rotating shafts are sleeved with a transportation belt together, and the visual detection assembly in the scheme is matched with the inferior product collecting box and the qualified product collecting box, so that automatic quality detection and sorting of cleaned products can be realized. The visual inspection head can accurately discern unqualified product fast, pushes away the flitch through the electronic telescopic link drive of second and carries inferior goods to inferior goods collecting box, and the conforming goods then carries to the tip along with the conveyer belt and falls into conforming goods collecting box, need not manual intervention, has not only reduced the human cost, has still promoted detection letter sorting efficiency and accuracy by a wide margin, satisfies the scale production demand.

Inventors

  • YU BING
  • ZHANG CHENGZHE
  • JIN YUNLONG

Assignees

  • 合肥芯宏创科技有限公司

Dates

Publication Date
20260512
Application Date
20260410

Claims (7)

  1. 1. The utility model provides a plasma cleaning equipment, includes two risers (1), fixed station (2), preceding lateral wall are established to open-ended dust collecting box (3), inferior product collecting box (4), qualified products collecting box (5), drive transportation subassembly, wiper mechanism, dust removal mechanism and visual detection subassembly, two equidistant rotation is connected with many pivots (6) between riser (1), many the outside of pivot (6) overlaps jointly and is equipped with conveyer belt (7).
  2. 2. A plasma cleaning device according to claim 1, wherein the driving and transporting assembly comprises a servo motor (8) fixedly connected to the outer portion of one of the risers (1), a half gear (9) is fixedly connected to the outer portion of the servo motor (8) through a coupling, a driven gear (10) is meshed to the outer portion of the half gear (9), and one end of one rotating shaft (6) penetrates through the riser (1) and is fixedly connected with the driven gear (10).
  3. 3. The plasma cleaning device according to claim 1, wherein the cleaning mechanism comprises an L-shaped supporting table (11) fixedly connected to the surface of the fixed table (2), a first electric telescopic rod (12) is arranged at the top of the L-shaped supporting table (11) and above the conveyor belt (7), and a plasma cleaning machine (13) is arranged at the output end of the first electric telescopic rod (12).
  4. 4. The plasma cleaning device according to claim 1, wherein the dust removing mechanism comprises a dust removing fan (14) fixedly connected to the top of one of the vertical plates (1), an exhaust pipe (15) is arranged at the exhaust port of the dust removing fan (14) in a communicated manner, and one end, far away from the dust removing fan (14), of the exhaust pipe (15) extends to the inside of the dust collecting box (3).
  5. 5. The plasma cleaning device according to claim 1, wherein the visual detection assembly comprises an L-shaped plate (16) fixedly connected to the top of the fixed table (2), a visual detection head (17) is arranged on the inner wall of the top of the L-shaped plate (16) and right above the conveyor belt (7), a second electric telescopic rod (18) is fixedly connected to the inner side wall of the L-shaped plate (16), and a pushing plate (19) is arranged at the output end of the second electric telescopic rod (18).
  6. 6. A plasma cleaning apparatus according to claim 1, wherein the acceptable product collection box (5) is located below one of the ends of the conveyor belt (7).
  7. 7. The plasma cleaning equipment according to claim 1, wherein the front side wall of the dust collection box (3) is hinged with a box door (20), a notch is formed in the surface of the box door (20), and an observation window (21) is arranged in the inner portion of the notch formed in the surface of the box door (20).

Description

Plasma cleaning equipment Technical Field The application relates to the technical field of semiconductor chip manufacturing, in particular to plasma cleaning equipment. Background In the production and processing process of products such as precise electronic elements, optical devices, high polymer materials and the like, oil stain, dust, oxide layers and other impurities are often attached to the surfaces of the products, and the impurities seriously affect the subsequent assembly precision, bonding strength, welding quality and performance stability of the products, so that efficient cleaning treatment is required to be carried out on the surfaces of the products. The plasma cleaning technology is widely applied to the fields by taking the advantages of no chemical reagent, good cleaning effect, small damage to the base material and the like as a green and efficient surface treatment mode. However, the existing plasma cleaning equipment still has a plurality of defects in practical application, namely that firstly, a conveying mechanism of most equipment adopts a continuous uniform-speed driving mode, the problems of insufficient cleaning or missing detection are easily caused by the beat requirements of working procedures such as cleaning and detection, the product treatment quality is affected, secondly, pollutants such as dust and fragments generated in the cleaning process lack of an effective collecting device and are easily diffused into a production environment, the environment of a workshop is polluted, the pollutants are possibly attached to the surface of the product again, the cleaning effect is reduced, thirdly, the cleaned product needs to be subjected to quality detection and sorting manually, the labor cost is increased, the problems of low detection efficiency and large sorting error are also solved, the requirement of large-scale production is difficultly met, and fourthly, the dust collecting structure of part of equipment is poor in sealing, the observation of the internal dust accumulation condition by workers is inconvenient, and the follow-up cleaning and maintenance are also unfavorable. Based on the defects of the prior art, a plasma cleaning device which can realize integration of automatic transportation, cleaning, dust removal, detection and sorting, and has controllable transportation beat, good dust removal effect and convenient maintenance is needed to improve the cleaning quality and the production efficiency of products and reduce the production cost. Disclosure of Invention In order to solve the problems set forth in the background art, the present application provides a plasma cleaning apparatus. The plasma cleaning equipment provided by the application adopts the following technical scheme: The utility model provides a plasma cleaning equipment, includes two risers, fixed station, preceding lateral wall are established to open-ended dust collecting box, inferior product collecting box, qualified products collecting box, drive transportation subassembly, wiper mechanism, dust removal mechanism and visual detection subassembly, two equidistant rotation is connected with many pivots between the riser, many the outside of pivot overlaps jointly and is equipped with the conveyer belt. Preferably, the driving and transporting assembly comprises a servo motor fixedly connected to the outer portion of one of the vertical plates, a half gear is fixedly connected to the outer portion of the servo motor through a coupler, a driven gear is meshed to the outer portion of the half gear, and one end of one rotating shaft penetrates through the vertical plate and is fixedly connected with the driven gear. Preferably, the cleaning mechanism comprises an L-shaped supporting table fixedly connected to the surface of the fixed table, a first electric telescopic rod is arranged at the top of the L-shaped supporting table and above the conveyor belt, and a plasma cleaning machine is arranged at the output end of the first electric telescopic rod. Preferably, the dust removing mechanism comprises a dust removing fan fixedly connected to the top of one of the vertical plates, an exhaust pipe is arranged in communication with an exhaust outlet of the dust removing fan, and one end of the exhaust pipe, far away from the dust removing fan, extends to the inside of the dust collecting box. Preferably, the visual inspection assembly comprises an L-shaped plate fixedly connected to the top of the fixed table, a visual inspection head is arranged on the inner wall of the top of the L-shaped plate and right above the conveyer belt, a second electric telescopic rod is fixedly connected to the inner side wall of the L-shaped plate, and a pushing plate is arranged at the output end of the second electric telescopic rod. Preferably, the acceptable product collection bin is located below one of the ends of the conveyor belt. Preferably, the front side wall of the dust collecting box is hinged with a box do