CN-122007113-A - Semi-wrapping dust collector

Abstract

The invention relates to a semi-wrapped dust collecting device, which comprises a dust collecting cover, wherein one side of the dust collecting cover is connected with one side of a bridging adapter flange, the other side of the bridging adapter flange is connected with one side of a corrugated pipe adapter flange, the other side of the corrugated pipe adapter flange is connected with an external corrugated pipe, the dust collecting cover is communicated with the corrugated pipe through the bridging adapter flange and the corrugated pipe adapter flange, an air blowing adjusting block is connected to the side of the dust collecting cover, a rotating shaft is connected to the air blowing adjusting block in a penetrating way, an air blowing fixing block synchronously rotating with the rotating shaft is sleeved on the rotating shaft, an air pipe joint is connected to the air blowing fixing block, a through hole is formed in the dust collecting cover on the same side as the air blowing adjusting block, a fan-shaped air blowing head communicated with the air pipe joint is connected to the air blowing fixing block, and the working end of the fan-shaped air blowing head penetrates through the through hole and stretches into the dust collecting cover. The invention can realize automatic ash removal, reduce the manual maintenance cost, and has small volume and low cost.

Inventors

• LIN ENMIN
• DING XUEJIAN
• ZHAO YUXING

Assignees

• 苏州德龙激光股份有限公司

Dates

Publication Date

20260512

Application Date

20260211

Claims (10)

1. 1. The semi-wrapped dust collection device is characterized by comprising a dust collection cover (1), one side of the dust collection cover (1) is connected with one side of a bridging adapter flange (2), the other side of the bridging adapter flange (2) is connected with one side of a corrugated pipe adapter flange (3), the other side of the corrugated pipe adapter flange (3) is connected with an external corrugated pipe, the dust collection cover (1) is communicated with the corrugated pipe through the bridging adapter flange (2) and the corrugated pipe adapter flange (3), an air blowing adjusting block (8) is connected to the side edge of the dust collection cover (1) adjacent to the bridging adapter flange (2), a rotating shaft (10) is connected to the air blowing adjusting block (8) in a penetrating way, an air blowing fixing block (7) which rotates synchronously with the rotating shaft is sleeved on the rotating shaft (10), a through hole is formed in the dust collection cover (1) on the same side as the air blowing adjusting block (8), a fan-shaped head (9) which is communicated with the air blowing fixing block (7) is connected to the corrugated pipe adapter (6), and the air blowing fixing block (7) penetrates through the fan-shaped air blowing end (1).
2. 2. Semi-wrapped dust collector according to claim 1, characterized in that the bridging adapter flange (2) is bolted to the dust hood (1).
3. 3. Semi-wrapped dust collector according to claim 1, characterized in that the bellows adapter flange (3) is bolted to the bridging adapter flange (2).
4. 4. A semi-wrapped dust collector as claimed in claim 1, wherein the bellows is attached to the bellows adapter flange (3) by means of a hose clamp.
5. 5. Semi-wrapped dust collector according to claim 1, characterized in that the bridging adapter flange (2) is connected to a dust collection adjusting plate (5).
6. 6. The semi-wrapped dust collector according to claim 5, wherein the dust collection adjusting plate (5) is provided with a fixed adjusting hole for connecting and fixing the bridging adapter flange (2), and the bridging adapter flange (2) is connected to the adjusting hole through a bolt.
7. 7. A semi-wrapped dust collector according to claim 5, wherein the dust collecting adjusting plate (5) is connected with dust collecting reinforcing ribs (4).
8. 8. The semi-wrapped dust collector according to claim 1, wherein the air blowing adjusting block (8) is provided with an adjusting hole, the air blowing fixing block (7) is connected with a fixing screw moving in the adjusting hole, and the end part of the rotating shaft (10) is connected with a retaining ring (11).
9. 9. The semi-enclosed dust collector as set forth in claim 8, wherein said retaining ring (11) is an E-shaped retaining ring (11).
10. 10. Semi-wrapped dust collector according to claim 1, characterized in that the air blowing adjusting block (8) is connected to the dust hood (1) by means of bolts.

Description

Semi-wrapping dust collector Technical Field The invention relates to a semi-wrapped dust collecting device, in particular to a semi-wrapped dust collecting device applicable to an F100 environment. Background The semiconductor high-precision equipment is a core base stone for supporting modern wafer processing, and is a key enabling technology for advanced process node evolution, advanced process realization and chip yield guarantee. The level of development directly determines the upper performance limit of semiconductor manufacturing equipment. At present, the field is facing the serious challenges of approaching physical limits, complex coupling of multiple physical fields, high system control difficulty and the like, but also shows strong development trends in the aspects of materials, control algorithms, intellectualization, localization and the like. Breaks through the technical bottleneck of a high-precision platform, and has extremely important strategic significance for the sustainable development of the global semiconductor industry and ensuring the safety of regional supply chains. The continuous research and development and the overcoming of the core technology are key to the competition of related enterprises and countries. Along with the refined development of industrial production and the continuous improvement of environmental protection requirements, dust cleaning has become an important link in the production management of enterprises. The traditional dust treatment mode often has the problems of incomplete collection, limited applicable scene and the like, and the professional industrial dust collector can effectively solve the pain points. . In view of the above-mentioned drawbacks, the present inventors have actively studied and innovated to create a semi-wrapped dust collector with a novel structure, which has a more industrial utility. Disclosure of Invention In order to solve the technical problems, the invention aims to provide a semi-wrapped dust collecting device. In order to achieve the above purpose, the invention adopts the following technical scheme: The semi-wrapped dust collecting device comprises a dust collecting cover, one side of the dust collecting cover is connected with one side of a bridging adapter flange, the other side of the bridging adapter flange is connected with one side of a corrugated pipe adapter flange, the other side of the corrugated pipe adapter flange is connected with an external corrugated pipe, the dust collecting cover is communicated with the corrugated pipe through the bridging adapter flange and the corrugated pipe adapter flange, an air blowing adjusting block is connected to the side edge of the dust collecting cover adjacent to the bridging adapter flange, a rotating shaft is connected to the air blowing adjusting block in a penetrating manner, an air blowing fixing block capable of synchronously rotating with the rotating shaft is sleeved on the rotating shaft, an air pipe joint is connected to the air blowing fixing block, a through hole is formed in the dust collecting cover on the same side as the air blowing adjusting block, a fan-shaped air blowing head communicated with the air pipe joint is connected to the air blowing fixing block, and the working end of the fan-shaped air blowing head penetrates through the through hole and stretches into the dust collecting cover. Preferably, in the semi-wrapped dust collecting device, the bridging adapter flange is connected to the dust collecting cover through bolts. Preferably, in the semi-wrapped dust collecting device, the corrugated pipe adapter flange is connected with the bridging adapter flange through bolts. Preferably, in the semi-wrapped dust collecting device, the corrugated pipe is connected to the corrugated pipe adapter flange through a hose clamp. Preferably, the half-wrapped dust collecting device is characterized in that the bridging adapter flange is connected to the dust collecting adjusting plate. Preferably, in the semi-wrapped dust collecting device, the dust collecting adjusting plate is provided with a fixed adjusting hole for connecting and fixing a bridging adapter flange, and the bridging adapter flange is connected to the adjusting hole through a bolt. Preferably, in the semi-wrapped dust collecting device, the dust collecting reinforcing ribs are connected to the dust collecting adjusting plate. Preferably, in the semi-wrapped dust collecting device, the air blowing adjusting block is provided with an adjusting hole, the air blowing fixing block is connected with a fixing screw moving in the adjusting hole, and the end part of the rotating shaft is connected with a retaining ring. Preferably, the semi-wrapped dust collecting device is characterized in that the retaining ring is an E-shaped retaining ring. Preferably, in the semi-wrapped dust collecting device, the air blowing adjusting block is connected to the dust collecting cover through a bolt. By means of the s