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CN-122007601-A - Automatic mask switching device installed vertically

CN122007601ACN 122007601 ACN122007601 ACN 122007601ACN-122007601-A

Abstract

The invention relates to an automatic mask switching device which is vertically installed, comprising a fixed frame, wherein a bin-structured conveying mechanism is connected above the fixed frame, a fixed bracket is connected to the side edge of the fixed frame, a conveying lifting mechanism for conveying a mask plate in the bin-structured conveying mechanism is connected to one side of the fixed bracket, a fixed plate is connected to the other side of the fixed bracket, an alignment adjustment platform mechanism is connected to one side of the fixed plate, opposite to the conveying lifting mechanism, of the mask plate on the abutting conveying lifting mechanism, an image hole is formed in the fixed plate, and an image assembly for identifying the shape of the mask plate through the image hole is connected to the other side of the fixed plate. The invention can improve the replacement efficiency.

Inventors

  • GAO FENG
  • ZHAO YUXING

Assignees

  • 苏州德龙激光股份有限公司

Dates

Publication Date
20260512
Application Date
20260211

Claims (10)

  1. 1. The automatic mask plate switching device is characterized by comprising a fixed frame (5), wherein a bin-adjusting conveying mechanism (1) is connected above the fixed frame (5), a fixed support (6) is connected to the side edge of the fixed frame (5), a conveying lifting mechanism (2) for conveying a mask plate in the bin-adjusting conveying mechanism (1) is connected to one side of the fixed support (6), a fixed plate (7) is connected to the other side of the fixed support (6), an alignment adjusting platform mechanism (3) is connected to one side of the fixed plate (7) opposite to the conveying lifting mechanism (2) and abutting against the mask plate on the conveying lifting mechanism (2), an image hole is formed in the fixed plate (7), and an image assembly (4) for identifying the shape of the mask plate through the image hole is connected to the other side of the fixed plate (7).
  2. 2. The automatic mask switching device for vertical installation according to claim 1, wherein the bin-arrangement conveying mechanism (1) comprises a bin-horizontal-movement screw rod module (11), a sliding block of the bin-horizontal-movement screw rod module (11) is connected with a bin sliding plate (12) in a sliding manner, and a bin-arrangement conveying assembly (13) is connected to the bin sliding plate (12).
  3. 3. The automatic mask switching device vertically installed according to claim 2, wherein the storage bin regulation carrying assembly (13) comprises a storage bin box (131) with an opening at the top, a plurality of storage tanks (132) which are equidistantly spaced and are used for placing the mask are formed in the storage bin box (131), push rod grooves communicated with the storage tanks are formed in the outer wall of the storage bin box (131), push rod regulation assemblies (133) are movably connected in the push rod grooves, a plurality of pushing holes are formed in the left side wall and the right side wall of the storage bin box (131) respectively, each pushing hole corresponds to each storage tank (132) one by one and is communicated with each storage tank, a left pushing cylinder assembly (134) and a right pushing cylinder assembly (135) which are used for pushing the mask tightly are respectively connected to the left side and the right side of the storage bin box (131) through the pushing holes, a stop lever (136) is connected to the bottom of the storage bin box (131), and an inductor is connected to the bottom of the storage bin box (131).
  4. 4. The automatic vertical reticle switching device according to claim 3, wherein the push rod regulating assembly (133) comprises a front push rod side plate (1331), a rear push rod side plate (1332) and a regulating push rod (1333), the regulating push rod (1333) is slidably connected in the push rod groove, the front end and the rear end of the regulating push rod (1333) are respectively connected with the front push rod side plate (1331) and the rear push rod side plate (1332), a pushing regulating cylinder (1334) is connected to the outer side of the front push rod side plate (1331), a driving shaft of the pushing regulating cylinder (1334) penetrates through the front push rod side plate (1331) to be connected with the storage bin (131), a plunger fixing block (1335) moving in the placing groove (132) is connected to the regulating push rod (1333), a plunger (1336) used for pressing the reticle is connected to the plunger fixing block (1335), and a guide rod is connected between the front push rod side plate (1331) and the rear push rod side plate (1332) and the storage bin (131) corresponding to the end face.
  5. 5. The automatic vertical reticle switching device according to claim 3, wherein the left pushing cylinder assembly (134) comprises a pushing cylinder (1341), a pushing sliding block (1342) is slidably connected to the pushing cylinder (1341), a pushing plate (1343) is connected to the pushing sliding block (1342), a plurality of roller fixing blocks (1344) corresponding to the pushing holes one by one are connected to the pushing plate (1343), and pushing rollers (1345) penetrating through the pushing holes and moving in the placing groove are connected to the roller fixing blocks (1344).
  6. 6. The automatic mask switching device vertically installed according to claim 1, wherein the carrying lifting mechanism (2) comprises a carrying lifting fixing plate (21), the carrying lifting fixing plate (21) is vertically connected to the fixing support (6), a vertical moving screw rod module (22) is connected to the carrying lifting fixing plate (21), a carrying sliding plate (23) is connected to the vertical moving screw rod module (22) in a sliding mode, a carrying fixing plate (24) is connected to the carrying sliding plate (23), a sucker fixing plate (25) is connected to the carrying fixing plate (24), a sucker (26) for absorbing a template is connected to the sucker fixing plate (25), and an anti-falling assembly (27) is connected to the sucker fixing plate (25) above the sucker (26).
  7. 7. The automatic mask switching device vertically installed according to claim 6, wherein the anti-falling assembly (27) comprises an anti-falling air cylinder (271), an anti-falling movable hole is formed in the sucker fixing plate (25), the anti-falling air cylinder (271) is connected to the upper end of the sucker fixing plate (25), an anti-falling rotating shaft (272) is connected to the anti-falling movable hole, an anti-falling hook (273) rotating around the anti-falling rotating shaft (272) is connected to the anti-falling rotating shaft (272), an anti-falling hole is formed in the upper end of the anti-falling hook (273), and a driving shaft of the anti-falling air cylinder (271) is movably connected to the anti-falling hole.
  8. 8. The automatic mask switching device for vertical installation according to claim 1, wherein the alignment adjustment platform mechanism (3) comprises an alignment platform (31), the alignment platform (31) is connected to the fixing plate (7), and an adsorption clamping assembly (32) butted with the carrying lifting mechanism (2) is connected to the working end of the alignment platform (31).
  9. 9. The automatic mask switching device installed vertically according to claim 8, wherein the adsorption clamping assembly (32) comprises an adsorption clamping fixing plate (321), a through hole aligned with the image hole is formed in the adsorption clamping fixing plate (321), a soft sucker (322) is connected to the adsorption clamping fixing plate (321) located at the periphery of the through hole, clamping cylinders (323) are connected to the adsorption clamping fixing plate (321) located at the left side, the lower side and the right side of the soft sucker (322), a driving gear of the clamping cylinders (323) is connected with a clamping pressing block (324), and a tension spring (325) is connected between the clamping pressing block (324) and the adsorption clamping fixing plate (321).
  10. 10. The automatic mask switching device for vertical installation according to claim 1, wherein the image assembly (4) comprises an image moving screw module (41), an image moving block (42) is connected to the image moving screw module (41) in a sliding manner, an image connecting plate moving in an image hole is connected to the image moving block (42), a camera (44) is connected to the image connecting plate through a lens clamping block (43), and a light source (45) matched with the camera is connected to the image connecting plate.

Description

Automatic mask switching device installed vertically Technical Field The invention relates to an automatic mask switching device installed vertically. Background In the laser processing light path of the semiconductor industry, the mask plate is replaced by adopting a manual mode, so that the operation is inconvenient and quick, and the operation is complicated. And the machine is replaced by operators, so that the time is long, the difficulty is high, the machine is also required to be accessed, and the machine is unsafe. In view of the above-mentioned drawbacks, the present inventors have actively studied and innovated to create a novel structure of a vertically mounted automatic reticle switching device, which is more industrially valuable. Disclosure of Invention In order to solve the technical problems, the invention aims to provide an automatic mask switching device which is vertically installed. In order to achieve the above purpose, the invention adopts the following technical scheme: the utility model provides a mask automatic switching control equipment of perpendicular installation, includes the fixed frame, fixed frame top is connected with the regular transport mechanism of feed bin, the side of fixed frame is connected with the fixed bolster, one side of fixed bolster is connected with the transport elevating system that is used for carrying the interior mask of the regular transport mechanism of feed bin, the opposite side of fixed bolster is connected with the fixed plate, with the transport elevating system relative and dock the transport elevating system on the mask be connected with counterpoint adjustment platform mechanism on one side of fixed plate, the image hole has been seted up on the fixed plate, be connected with the image subassembly that is used for discernment mask pattern shape through the image hole on the opposite side of fixed plate. Preferably, the automatic mask plate switching device is installed vertically, the regular transporting mechanism of feed bin comprises a feed bin horizontal movement screw rod module, a sliding block of the feed bin horizontal movement screw rod module is connected with a feed bin sliding plate in a sliding mode, and a regular transporting assembly of feed bin is connected to the feed bin sliding plate. Preferably, a perpendicular mask automatic switching control equipment of installation, regular transport subassembly of feed bin include open-top's feed bin box, set up a plurality of equidistance intervals and be used for the standing groove that the mask placed in the feed bin box, set up the push rod groove that is linked together with the standing groove on the outer wall of feed bin box, the regular subassembly of push rod in the push rod inslot swing joint, a plurality of push holes have been seted up respectively on the left side wall and the right side wall of feed bin box, each the push hole is one-to-one and is linked together between them and set up with each standing groove, pass the push hole the left side and the right side of feed bin box are connected with left push cylinder subassembly and the right push cylinder subassembly that is used for pushing tightly the mask respectively, the bottom of feed bin box is connected with the pin, the bottom of feed bin box is connected with the inductor. Preferably, a perpendicular mask automatic switching control equipment of installation, regular subassembly of push rod include preceding push rod curb plate, rear push rod curb plate and regular push rod, regular push rod sliding connection is in the push rod inslot, the front end and the rear end of regular push rod respectively with preceding push rod curb plate and rear push rod curb plate, the outside of preceding push rod curb plate is connected with the regular cylinder of pushing away the material, the drive shaft of pushing away the regular cylinder of pushing away the material passes preceding push rod curb plate and links to each other with the feed bin box, be connected with the plunger fixed block at the standing groove internal activity on the regular push rod, be connected with the plunger that is used for compressing tightly the mask on the plunger fixed block, cross-under has the guide bar between preceding push rod curb plate and rear push rod curb plate and the terminal surface of the feed bin box that corresponds for oneself. Preferably, the automatic switching device of the vertically installed mask plate, the left pushing cylinder assembly comprises pushing air, the pushing cylinder is connected with a pushing sliding block in a sliding manner, the pushing sliding block is connected with a pushing plate, the pushing plate is connected with a plurality of roller fixing blocks in one-to-one correspondence with the pushing holes, and the roller fixing blocks are connected with pushing rollers penetrating through the pushing holes and moving in the placing grooves. Preferably, a mask automatic switching control equipment