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CN-122007633-A - Cathode roller surface processing device and copper foil preparation method

CN122007633ACN 122007633 ACN122007633 ACN 122007633ACN-122007633-A

Abstract

The application provides a cathode roller surface processing device and a copper foil preparation method. The cathode roller surface machining device comprises a roller body, a laser machining structure, a detection structure and a control structure, wherein the laser machining structure is arranged on one side of the roller body and used for emitting laser beams to the surface of the roller body, the detection structure is arranged on the laser machining structure and used for acquiring surface parameters of the roller body, the control structure is respectively and electrically connected with the laser machining structure and the detection structure, and the control structure is used for adjusting the machining state of the laser machining structure according to preset machining paths and surface parameters. According to the application, accurate control of the morphology of the ravines on the surface of the cathode roller is realized, the production quality of the copper foil is improved, and the impedance fluctuation and reflection interference in the electric signal transmission process are reduced.

Inventors

  • ZHANG YU
  • ZHU XIAOTING
  • ZHOU XINYUE
  • LIU SHITAO
  • LIU XINXIN
  • SONG WENWU
  • ZHANG QUNMEI
  • WANG WEI
  • WANG WENFEI
  • ZHU XIAOQIN
  • QU WENHUI

Assignees

  • 江东电子材料有限公司

Dates

Publication Date
20260512
Application Date
20260323

Claims (10)

  1. 1. A cathode roll finishing apparatus, comprising: a roller body (100); a laser processing structure (200), wherein the laser processing structure (200) is arranged at one side of the roller body (100), and the laser processing structure (200) is used for emitting laser beams to the surface of the roller body (100); -a detection structure (300), the detection structure (300) being arranged on the laser machining structure (200), the detection structure (300) being adapted to obtain a surface parameter of the roll body (100); The control structure (400), control structure (400) respectively with laser processing structure (200) with detect structure (300) electricity and be connected, control structure (400) are used for according to preset processing route with the surface parameter, the adjustment laser processing structure (200)'s processing state.
  2. 2. The cathode roll finishing device of claim 1, wherein the laser machining structure (200) comprises: a laser emitter for emitting a laser beam toward a surface of the roller body (100); A diffractive optical element for shaping the laser beam into a flat top line beam; a telecentric lens for projecting the flat-top linear beam onto a surface of the roller body (100); a scanning member for moving the flat-top line beam in an axial direction of the roller body (100); The control structure (400) is electrically connected to the laser transmitter and the scanning component, respectively.
  3. 3. The cathode roll finishing device of claim 2, wherein the scanning means comprises a scanning galvanometer for driving the flat-top beam of light to move in an axial direction of the roll body (100).
  4. 4. The cathode roll finishing device according to claim 2, characterized in that the scanning member comprises a linear motion structure for driving the laser machining structure (200) to move in the axial direction of the roll body (100).
  5. 5. The cathode roll finishing device of claim 2, wherein the detection structure (300) comprises: the laser confocal sensor is arranged on one side of the laser transmitter, and a measuring light path of the laser confocal sensor is intersected with a processing light path of the laser transmitter; The dichroic mirror is arranged at the junction of the measuring light path and the processing light path, and an included angle exists between the dichroic mirror and the measuring light path and between the dichroic mirror and the processing light path respectively; An optical shutter disposed between the laser confocal sensor and the dichroic mirror; Wherein the dichroic mirror is arranged between the laser transmitter and the diffractive optical element, and the control structure (400) is electrically connected with the laser confocal sensor and the optical shutter, respectively.
  6. 6. The cathode roll finishing device of claim 1, wherein said control structure (400) comprises: The path generation unit is used for receiving the forming parameters of the roller body (100) and calculating a laser processing path according to the forming parameters; And a controller electrically connected to the path generating unit, the laser processing structure (200), and the detection structure (300), respectively.
  7. 7. The cathode roll finishing device of claim 2, further comprising: the nitrogen curtains are arranged on two sides of the laser transmitter, and an included angle exists between the nitrogen curtains and the laser transmitter; The intersection points of the nitrogen curtains on two sides of the laser emitter are positioned above the flat-top linear light beam.
  8. 8. The cathode roll finishing device of claim 1, further comprising: The roller body (100) is rotatably arranged in the mounting groove (500), and one end of the roller body (100) is connected to the output end of the driving device; a cage (600), the cage (600) being movably mounted on the mounting groove (500), the cage (600) being adapted to form a closed area with the mounting groove (500) closing the roll body (100); The extraction opening (601) is formed in the isolation cover (600), and the isolation cover (600) is communicated with the negative pressure device through the extraction opening (601); Wherein the laser processing structure (200) and the detection structure (300) are arranged in the enclosed area; and a spraying structure and a purging structure are further arranged in the isolation cover (600).
  9. 9. A method for producing a copper foil, characterized by using the cathode roll surface treating apparatus according to any one of claims 1 to 8, comprising: acquiring a laser processing path of a roller body (100) to be processed; polishing the surface of the roller body (100) according to the laser processing path; And in response to the completion of the polishing processing of the roller body (100), electrolytically generating copper foil on the surface of the roller body (100).
  10. 10. The method of producing a copper foil according to claim 9, wherein said electrolytic formation of a copper foil on the surface of said roll body (100) in response to completion of said polishing process of said roll body (100) comprises: Generating a first layer of copper foil on the surface of the roller body (100) at a first current density, generating a second layer of copper foil on the surface of the first layer of copper foil at a second current density, wherein the first current density is smaller than the second current density.

Description

Cathode roller surface processing device and copper foil preparation method Technical Field The application relates to the technical field of copper foil preparation, in particular to a cathode roller surface processing device and a copper foil preparation method. Background In the application scenarios of 5G communication, millimeter wave communication, high frequency circuit, etc., the RTF copper foil (reverse copper foil) needs to have a highly uniform surface microstructure to reduce impedance fluctuation and reflection interference in the signal transmission process. The cathode roller is the main equipment in the electrolytic copper foil production process, and copper ions in the electrolyte are deposited and crystallized on the surface of the rotating cathode roller under the action of direct current to form the electrolytic copper foil. Therefore, the quality of the surface microstructure of the RTF copper foil (reverse copper foil) is closely related to the quality of the surface grooves of the cathode roll. In the prior art, a polishing brush is generally adopted to polish the surface of the cathode roller, and the polishing brush removes uneven areas on the surface of the cathode roller through physical friction to form a gully-shaped structure. However, the morphology of the gully formed by polishing with the polishing brush cannot be accurately controlled, the problems of uneven gully depth, deviation of the inclination angle of the side wall and the like are easy to occur, and the requirements of RTF copper foil (reverse copper foil) on signal transmission stability are difficult to meet. Disclosure of Invention The application provides a cathode roller surface processing device and a copper foil preparation method, which realize accurate processing of the surface gully morphology of a cathode roller, improve the production quality of the copper foil and reduce impedance fluctuation and reflection interference in the electric signal transmission process. In order to achieve the above object, the present application adopts the following scheme: In a first aspect, the present application provides a cathode roll finishing apparatus comprising: A roller body; the laser processing structure is arranged on one side of the roller body and is used for emitting laser beams to the surface of the roller body; the detection structure is arranged on the laser processing structure and is used for acquiring surface parameters of the roller body; The control structure is electrically connected with the laser processing structure and the detection structure respectively and is used for adjusting the processing state of the laser processing structure according to a preset processing path and the surface parameters. In one possible embodiment, the laser processing structure comprises: a laser emitter for emitting a laser beam toward a surface of the roller body; A diffractive optical element for shaping the laser beam into a flat top line beam; the telecentric lens is used for projecting the flat-top linear light beam to the surface of the roller body; A scanning part for moving the flat-top line beam in an axial direction of the roller body; the control structure is electrically connected with the laser emitter and the scanning component respectively. In one possible embodiment, the scanning component includes a scanning galvanometer for driving the flat-top line beam to move along an axial direction of the roller body. In one possible embodiment, the scanning component includes a linear motion structure for driving the laser processing structure to move in the axial direction of the roller body. In one possible embodiment, the detection structure comprises: the laser confocal sensor is arranged on one side of the laser transmitter, and a measuring light path of the laser confocal sensor is intersected with a processing light path of the laser transmitter; The dichroic mirror is arranged at the junction of the measuring light path and the processing light path, and an included angle exists between the dichroic mirror and the measuring light path and between the dichroic mirror and the processing light path respectively; An optical shutter disposed between the laser confocal sensor and the dichroic mirror; Wherein the dichroic mirror is disposed between the laser emitter and the diffractive optical element, and the control structure is electrically connected to the laser confocal sensor and the optical shutter, respectively. In one possible embodiment, the control structure includes: the path generation unit is used for receiving the forming parameters of the roller body and calculating to obtain a laser processing path according to the forming parameters; And the controller is respectively and electrically connected with the path generating unit, the laser processing structure and the detection structure. In one possible embodiment, the method further comprises: the nitrogen curtains are arranged on two sides o