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CN-122007661-A - Processing method of ultrathin tantalum sheet precise part

CN122007661ACN 122007661 ACN122007661 ACN 122007661ACN-122007661-A

Abstract

The invention discloses a processing method of an ultrathin tantalum sheet precise part, which belongs to the field of mechanical precise processing, and aims at ultrathin tantalum sheets with thickness less than or equal to 0.1mm and strict dimensional precision requirement, wherein the ultrathin tantalum sheets are temporarily fixed without deformation by matching a fixed bottom plate with positioning glue, and then the precise part processing is completed by high-precision laser cutting, mixed acid liquid degumming separation and surface polishing cleaning. The invention effectively solves the problems of deformation, displacement, adhesion and out-of-tolerance size of ultrathin tantalum sheets caused by traditional numerical control, linear cutting and conventional laser cutting, the dimensional tolerance of processed finished products is less than or equal to +/-0.02 mm, the surface roughness is less than or equal to 0.8 mu m, the requirements of high-end precision instruments such as glow discharge mass spectrometers and the like are completely met, the process is simple, the efficiency is high, the yield is stable, and the invention is suitable for industrial production of ultrathin tantalum sheet precision parts.

Inventors

  • LIU HUIJIANG
  • MAO JIAN
  • WANG CHANGWEN
  • HU JINHUI

Assignees

  • 湖南同创普润新材料有限公司
  • 上海同创普润新材料股份有限公司

Dates

Publication Date
20260512
Application Date
20260327

Claims (10)

  1. 1. A processing method of an ultrathin tantalum sheet precise part is characterized by comprising the following steps of (1) selecting a flat metal plate with the thickness of 0.8-2 mm as a fixed bottom plate, (2) coating glue on the ultrathin tantalum sheet, pasting the ultrathin tantalum sheet on the fixed bottom plate, flattening, pasting, standing and solidifying at room temperature for 15-25 min, (3) fixing the fixed bottom plate pasted with the ultrathin tantalum sheet on a laser cutting table, guiding a cutting pattern into the fixed bottom plate, then conducting laser cutting, (4) placing a cut workpiece into mixed acid liquid for soaking, dissolving a glue layer, separating the ultrathin tantalum sheet from the fixed bottom plate, washing and drying, and (5) conducting surface polishing and cleaning on the ultrathin tantalum sheet, wherein the surface roughness is controlled to be less than or equal to 0.8 mu m.
  2. 2. The method according to claim 1, wherein the fixing base plate in the step (1) is a SUS304 stainless steel plate having a thickness of 1mm.
  3. 3. The method of claim 1, wherein the laser cutting table in step (3) has a cutting power of 1800W and a cutting speed of 12m/min.
  4. 4. The method according to claim 1, wherein the glue in step (2) is an acid-soluble temporary positioning glue or a nano tantalum powder modified acid-soluble temporary positioning glue.
  5. 5. The method according to claim 4, wherein the acid-soluble temporary positioning adhesive comprises (by weight) acid-soluble carboxyl acrylate copolymer (44-50%), absolute ethyl alcohol (41-46%), dioctyl adipate (5-8%), fumed silica (1-3%), silane coupling agent KH-550 (0.5-1.5%), silicone defoamer (0.3-0.7%) and phenolic heat stabilizer (0.3-0.7%).
  6. 6. The processing method of the acid-soluble temporary positioning adhesive is characterized in that absolute ethyl alcohol is firstly added into a closed stirring kettle, then acid-soluble carboxyl acrylic ester copolymer is slowly added, stirring is carried out at a constant speed of 300-500r/min at room temperature until the copolymer is completely dissolved to form a uniform adhesive solution matrix, dioctyl adipate, fumed silica, silane coupling agent KH-550, organosilicon antifoaming agent and phenolic heat stabilizer are sequentially added, and stirring is maintained for 1-1.5 h until the system has no particle aggregation and no layering.
  7. 7. The processing method of claim 4, wherein the nano tantalum powder modified acid-soluble temporary positioning adhesive comprises (by weight) acid-soluble carboxyl acrylate copolymer (42-48%), absolute ethyl alcohol (40-45%), dioctyl adipate (5-7%), fumed silica (1-2.5%), high-purity nano tantalum powder (0.5-2%), silane coupling agent KH-550 (0.5-1.5%), organosilicon defoamer (0.3-0.7%) and phenolic heat stabilizer (0.3-0.7%).
  8. 8. The processing method of the nano tantalum powder acid-soluble temporary positioning adhesive is characterized in that absolute ethyl alcohol is firstly added into a closed stirring kettle, then acid-soluble carboxyl acrylic ester copolymer is slowly added, stirring is carried out at a constant speed of 300-500r/min at room temperature until the copolymer is completely dissolved to form a uniform adhesive solution matrix, and then dioctyl adipate, fumed silica, high-purity nano tantalum powder, silane coupling agent KH-550, organosilicon defoamer and phenolic heat stabilizer are sequentially added, and stirring is maintained for 1-1.5 h until the system has no particle aggregation and no layering.
  9. 9. The processing method of claim 1, wherein the mixed acid solution in the step (4) is HCl, HNO 3 ：HF：H 2 O= (6-8), 1-3, 0.5-1.5 and 9-11.
  10. 10. The processing method according to claim 1, wherein the soaking time in the step (4) is 15-25 min, the temperature is room temperature, and the taken ultrathin tantalum sheet is washed 3-5 times with deionized water and then dried.

Description

Processing method of ultrathin tantalum sheet precise part Technical Field The invention belongs to the technical field of precision machining of rare metals, in particular relates to a machining method of an ultrathin tantalum sheet precision part, and particularly aims at a high-purity ultrathin tantalum sheet with the thickness less than or equal to 0.1mm, is suitable for precision cutting and forming machining of a Glow Discharge Mass Spectrometer (GDMS) core precision part, and belongs to the technical field of machining of metal parts matched with high-end analytical instruments. Background Tantalum is a refractory metal with high melting point, corrosion resistance and excellent processability, and is widely applied to the fields of electronics, chemical industry, aerospace, precision instruments and the like. Because of these excellent properties of tantalum, tantalum sheet parts are used in large quantities in Glow Discharge Mass Spectrometers (GDMS), these precision instruments have very high requirements for the shape of the parts, particularly for ultra-thin tantalum sheet parts with a thickness of less than 0.1mm, the conventional dimensional tolerance is within + -0.05 mm, when conventional numerical control machining is adopted, the ultra-thin tantalum sheet has poor rigidity and is easy to deform severely due to stress, the precision cannot be ensured, and when wire cut machining is adopted, the clamping of the ultra-thin tantalum sheet is difficult, and the clamping process generates plastic deformation, so that the machining precision requirement is difficult to meet. The prior art lacks stable clamping and accurate shaping scheme to ultra-thin tantalum piece, leads to the yields low, processing cost is high, inefficiency, is difficult to adapt to the stable production in batches of accurate instrument. Therefore, the development of the high-precision, low-deformation and stable-implementation ultra-thin tantalum sheet precision machining method has important engineering value. Disclosure of Invention Aiming at the defects of the prior art, the invention aims to provide a processing method of an ultrathin tantalum sheet precise part, which solves the technical problems of easy deformation, displacement, difficult degumming and the like of the ultrathin tantalum sheet processing, realizes the precise processing of the ultrathin tantalum sheet with high precision and mass production, and completely meets the use requirements of the core component of a glow discharge mass spectrometer on the dimensional precision and the surface quality of the obtained part. Technical proposal The processing method of the ultrathin tantalum sheet precise part comprises the following steps of: The method comprises the steps of (1) selecting a flat metal plate with the thickness of 0.8-2 mm as a fixed bottom plate, (2) coating glue on an ultrathin tantalum sheet, then pasting the ultrathin tantalum sheet on the fixed bottom plate, flattening, laminating, standing at room temperature, solidifying for 15-25 min, (3) fixing the fixed bottom plate laminated with the ultrathin tantalum sheet on a laser cutting table, guiding a cutting pattern into the fixed bottom plate, then conducting laser cutting, (4) immersing a workpiece after cutting in a mixed acid solution to enable a glue layer to be dissolved, separating the ultrathin tantalum sheet from the fixed bottom plate, washing and drying, and (5) conducting surface polishing and washing on the ultrathin tantalum sheet, wherein the surface roughness is less than or equal to 0.8 mu m. Preferably: The fixed bottom plate is SUS304 corrosion resistant plate, and thickness is 1mm. Preferably: the cutting power of the laser cutting table is 1800W, and the cutting speed is 12m/min. Preferably: the glue is acid-soluble temporary positioning glue or nano tantalum powder modified acid-soluble temporary positioning glue. Preferably: the acid-soluble temporary positioning adhesive comprises 44-50% of acid-soluble carboxyl acrylic ester copolymer, 41-46% of absolute ethyl alcohol, 5-8% of dioctyl adipate, 1-3% of fumed silica, 0.5-1.5% of silane coupling agent KH-550, 0.3-0.7% of organosilicon defoamer and 0.3-0.7% of phenolic heat stabilizer. Preferably: the preparation method of the acid-soluble temporary positioning adhesive comprises the steps of adding absolute ethyl alcohol into a closed stirring kettle, slowly adding the acid-soluble carboxyl acrylic ester copolymer, stirring at a constant speed of 300-500r/min at room temperature until the copolymer is completely dissolved to form a uniform adhesive solution matrix, and sequentially adding dioctyl adipate, fumed silica, a silane coupling agent KH-550, an organosilicon defoaming agent and a phenolic heat stabilizer, and stirring for 1-1.5 h until the system has no particle aggregation and no layering. Preferably: The nanometer tantalum powder modified acid-soluble temporary positioning adhesive comprises (by weight) aci