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CN-122007680-A - Laser coupling system and laser processing equipment

CN122007680ACN 122007680 ACN122007680 ACN 122007680ACN-122007680-A

Abstract

The application discloses a laser coupling system and laser processing equipment. The laser coupling system comprises a laser source, a polarization preprocessing module, an electric control polarization switching module, a polarization splitting module and a polarization splitting module, wherein the laser source comprises a first laser source, a second laser source and a third laser source and is used for providing three laser beams, the polarization preprocessing module is used for modulating the polarization states of the laser beams emitted by the first laser source and the second laser source to a preset relation and combining the laser beams into first combined light, the first combined light comprises laser components of the first polarization state and the second polarization state, the electric control polarization switching module is arranged on an optical path of the first combined light and is used for modulating the overall polarization state of the first combined light by a receiving signal, the polarization splitting module is provided with a main input end, an auxiliary input end and an output end, the main input end is used for receiving the modulated laser beams, the auxiliary input end is used for receiving the laser beams emitted by the third laser source, and the second combined light is formed by selective coupling. According to the technical scheme, the coupling of the main laser and the auxiliary laser can be flexibly switched, and the nonlinear absorption and modification of the material can be efficiently triggered under the condition that the total energy is lower than the energy required by the single main laser to reach the threshold value, so that the breakthrough of the precision machining threshold value under lower energy input is realized.

Inventors

  • WANG XUEMEI

Assignees

  • 硅来半导体(武汉)有限公司

Dates

Publication Date
20260512
Application Date
20251229

Claims (10)

  1. 1.A laser coupling system, comprising: A laser source (10) comprising a first laser source (110), a second laser source (120) and a third laser source (130) for providing three laser beams; A polarization preprocessing module (20) for adjusting the polarization states of the lasers emitted by the first laser source (110) and the second laser source (120) to a preset relation, and combining the lasers into first combined light, wherein the first combined light comprises a first laser component with a first polarization state and a second laser component with a second polarization state, and the first polarization state and the second polarization state are different; the electric control polarization switching module (30) is arranged on the optical path of the first combined beam light and is used for receiving a control signal and responsively modulating the overall polarization state of the first combined beam light; The polarization beam splitting module (40) is provided with a main input end, a secondary input end and an output end, wherein the main input end receives the light beam modulated by the electric control polarization switching module (30), the secondary input end receives the laser from the third laser source (130), and the polarization beam splitting module (40) is used for selectively coupling the first laser component or the second laser component and the laser incident from the secondary input end to the output end according to the polarization state of the light beam incident from the main input end to form second combined beam.
  2. 2. The laser coupling system of claim 1, wherein the first and second polarization states are orthogonal linear polarization states, and wherein the polarization splitting optical splitting module (40) comprises a polarization beam splitter that reflects laser light in one of the orthogonal linear polarization states and transmits the other laser light.
  3. 3. The laser coupling system according to claim 2, wherein the polarization preprocessing module (20) comprises a first polarization adjustment unit (210) disposed on an output optical path of the first laser source (110) and configured to adjust a polarization state of laser light emitted from the first laser source (110) to the first polarization state, a second polarization adjustment unit (220) disposed on an output optical path of the first laser source (110) and configured to adjust a polarization state of laser light emitted from the second laser source (120) to the second polarization state, and a beam combining device (230) disposed at an intersection point of an output optical path of the first laser source (110) and an output optical path of the second laser source (120) and configured to spatially combine two laser beams respectively having the first polarization state and the second polarization state.
  4. 4. A laser coupling system according to claim 3, wherein the beam combining device (230) comprises a first polarizing beam splitter, the transmission axis and the reflection axis of which correspond to the directions of the first polarization state and the second polarization state, respectively.
  5. 5. The laser coupling system of claim 2, wherein the electronically controlled polarization switching module (30) comprises a dynamically adjustable waveplate configured to switch between a first position and a second position; When the first position is located, keeping the first polarization state and the second polarization state in the first combined beam unchanged; and when the first combined beam is positioned at the second position, exchanging the first polarization state and the second polarization state in the first combined beam.
  6. 6. The laser coupling system of claim 5, wherein the dynamically adjustable waveplate is an electrically rotated half-waveplate; the first position corresponds to a direction in which a fast axis direction of the electrically rotated half-wave plate is parallel to the first polarization state; The second position corresponds to a direction of a fast axis of the electrically rotated half wave plate at an angle of 45 ° to a direction of the first polarization state.
  7. 7. The laser coupling system according to claim 2, wherein the polarization splitting beam combining module (40) directs the reflected light path of the light beam modulated by the electronically controlled polarization switching module (30) to the output end, and the transmitted light path is directed out of the path, and the polarization state of the laser light emitted from the third laser source (130) is preset to the second polarization state, so that the laser light can reach the output end through the polarization splitting beam combining module (40).
  8. 8. The laser coupling system according to claim 7, further comprising a third polarization adjustment unit (50), wherein the third polarization adjustment unit (50) is disposed on the optical path of the third laser source (130) and is configured to adjust the polarization state of the laser light emitted therefrom to the second polarization state.
  9. 9. The laser coupling system according to claim 1, wherein the first laser source (110) is a nanosecond pulse laser, the second laser source (120) is a picosecond pulse laser, the third laser source (130) is a continuous or pulsed laser, and the wavelengths of the laser light emitted from the first laser source (110), the second laser source (120), and the third laser source (130) are all in the infrared band.
  10. 10. A laser machining apparatus incorporating the laser coupling system of any one of claims 1 to 9, and further comprising a machining optic disposed on the second link Shu Guangguang.

Description

Laser coupling system and laser processing equipment Technical Field The application relates to the technical field of semiconductor material laser processing, in particular to a laser coupling system and laser processing equipment. Background Silicon carbide is widely used as a third-generation semiconductor material in high-temperature, high-frequency and high-power devices. However, the high hardness and brittleness make the traditional mechanical cutting method suffer from large cutting loss, serious surface damage and the like. The laser lift-off technique serves as a non-contact processing scheme, and provides a new path for this. Currently, the mainstream silicon carbide laser lift-off process generally employs a "modification-propagation" scheme that is coordinated by a short pulse width laser and a long pulse width laser. Short pulse width laser is used to form a modified layer inside the ingot, and long pulse width laser is used to extend cracks to achieve separation. However, this approach has significant drawbacks in practical industrial applications, low transmittance limiting processing capability and quality. The conductive silicon carbide has low transmittance to common infrared laser, and in order to reach the modification threshold inside, the incident laser power must be greatly improved. This tends to cause excessive heat damage to the surface layer of the material, resulting in rough spalling and an enlarged heat affected zone, while limiting its effective processing ability for large thickness ingots under low power consumption conditions. Therefore, a laser processing scheme capable of effectively improving the laser utilization rate, reducing the thermal damage of the material surface and simultaneously realizing high-precision modification and controllable expansion is needed in the prior art. Disclosure of Invention The application provides a laser coupling system and laser processing equipment, and aims to solve the problem that laser processing capacity is limited in the silicon carbide laser stripping process in the prior art. In order to achieve the above object, the present application proposes a laser coupling system. The laser coupling system includes: the laser source comprises a first laser source, a second laser source and a third laser source and is used for providing three laser beams; The polarization preprocessing module is used for adjusting the polarization states of the lasers emitted by the first laser source and the second laser source to a preset relation, and combining the lasers into first combined light, wherein the first combined light comprises a first laser component with a first polarization state and a second laser component with a second polarization state, and the first polarization state and the second polarization state are different; The electric control polarization switching module is arranged on the optical path of the first combined beam light and is used for receiving a control signal and responsively modulating the overall polarization state of the first combined beam light; The polarization beam splitting module is provided with a main input end, an auxiliary input end and an output end, wherein the main input end receives the light beam modulated by the electric control polarization switching module, and the auxiliary input end receives the laser from the third laser source; the polarization beam splitting module is used for selectively coupling the first laser component or the second laser component and the laser incident from the auxiliary input end to the output end according to the polarization state of the light beam incident from the main input end to form second combined light. In some embodiments, the first polarization state and the second polarization state are orthogonal linear polarization states, and the polarization beam splitting and combining module comprises a polarization beam splitter, wherein the polarization beam splitter reflects laser light in one of the orthogonal linear polarization states and transmits the other laser light. In some embodiments, the polarization preprocessing module comprises a first polarization adjustment unit, a second polarization adjustment unit and a beam combining device, wherein the first polarization adjustment unit is arranged on an output light path of the first laser source and is used for adjusting the polarization state of laser emitted by the first laser source to be the first polarization state, the second polarization adjustment unit is arranged on the output light path of the first laser source and is used for adjusting the polarization state of laser emitted by the second laser source to be the second polarization state, and the beam combining device is arranged at the intersection point of the output light path of the first laser source and the output light path of the second laser source and is used for spatially combining two laser beams respectively having the first polarizati