CN-122007925-A - Flexible directional decoupling connection structure, double-gantry motion platform and application

Abstract

The invention discloses a flexible directional decoupling connecting structure which is arranged on a double gantry moving platform and used for respectively connecting two ends of an X-axis beam to a Y-axis driving side, wherein the connecting structure comprises a first flexible connecting unit and a second flexible connecting unit, the first flexible connecting unit is arranged at the first end of the X-axis beam and is configured to provide low rigidity in the axial direction of the X-axis beam, allow the beam to axially float and simultaneously maintain high rigidity constraint in the Z-axis direction and the Y-axis direction, the second flexible connecting unit is arranged at the second end of the X-axis beam and is configured to provide low rigidity in the rotating direction around the Z-axis, allow the beam to elastically deflect around the Z-axis and simultaneously maintain high rigidity constraint in the Z-axis direction and the X-axis direction, and the flexible connecting unit maintains high rigidity in other directions while releasing specific degrees of freedom so as to ensure that the bearing rigidity and the positioning precision are not lost.

Inventors

• ZENG ZHIHUI
• SUN HAIWEI
• Niu Deshu
• WANG XUERONG

Assignees

• 海炬智能科技(宁波)有限公司

Dates

Publication Date

20260512

Application Date

20260331

Claims (10)

1. 1. The flexible directional decoupling connection structure is arranged on the double gantry motion platform and is used for respectively connecting two ends of the X-axis beam to the Y-axis driving side, and is characterized by comprising a first flexible connection unit and a second flexible connection unit; the first flexible connection unit is arranged at a first end of the X-axis beam and is configured to provide low rigidity in the axial direction of the X-axis beam, allow the beam to axially float, and simultaneously maintain high rigidity constraint in the Z-axis direction and the Y-axis direction; The second flexible connection unit is disposed at a second end of the X-axis beam and is configured to provide low stiffness in a direction of rotation about the Z-axis, allowing the beam to elastically deflect about the Z-axis while maintaining high stiffness constraints in the Z-direction and the X-axis.
2. 2. The flexible directional decoupling structure of claim 1, wherein the first flexible connection unit and the second flexible connection unit each comprise a beam fixing plate, a base plate, and flexible steel sheets disposed therebetween, the flexible steel sheets being clamped between two steel sheet pressing plates.
3. 3. The flexible directional decoupling connection of claim 2, wherein the flexible steel sheets in the first flexible connection unit are configured to provide low stiffness in the axial direction of the X-axis beam, allowing the beam to float axially while maintaining high stiffness constraints in the Z-axis direction and the Y-axis direction.
4. 4. The flexible directional decoupling connection of claim 2, wherein the flexible steel sheets in the second flexible connection unit are configured to provide low stiffness in the direction of rotation about the Z-axis, allowing the beam to elastically deflect about the Z-axis while maintaining high stiffness constraints in the Z-direction and X-axis directions.
5. 5. The flexible directional decoupling structure of claim 2, wherein the X-axis beam is further positionally coupled to a flexible plate in the flexible coupling unit by at least one pin that forms a circular hole fit with a pin hole for applying a rigid constraint to the X-axis beam in the Z-axis direction, and wherein the circular hole fit while preserving a spring allowance in the X-direction or around the Z-axis direction.
6. 6. The utility model provides a two longmen motion platform, includes the frame, has Y axle fixed side and Y axle flexible side in the frame, still includes to span and connects the X axle crossbeam between Y axle fixed side and Y axle flexible side to and actuating system, its characterized in that: The X-axis beam is connected with the Y-axis fixed side and the Y-axis flexible side through the flexible directional decoupling structure according to any one of claims 1-5, the first flexible connecting unit is connected between the X-axis beam and the Y-axis flexible side, and the second flexible connecting unit is connected between the X-axis beam and the Y-axis fixed side.
7. 7. The double gantry motion platform according to claim 6, wherein the X-axis beam is provided with at least 6 temperature measuring points in total at a position close to the first flexible connection unit, a position close to the middle of the beam, and a position close to the second flexible connection unit along the length direction of the X-axis beam.
8. 8. The dual gantry motion platform of claim 6, wherein the X-axis beam is mounted with a working side mover plate and a counterweight side mover plate on its working side and a counterweight side facing away from the working side, respectively, the mass and moment of inertia of the counterweight side mover plate being matched to the working side mover plate and its nominal load.
9. 9. The dual gantry motion platform of claim 8, wherein the drive system includes a first drive assembly for driving the working side mover plate and a second drive assembly for driving the counterweight side mover plate, the first drive assembly being mirror symmetrically disposed with the second drive assembly to generate the oppositely directed drive force.
10. 10. Use of a double gantry motion platform according to any one of claims 6-9 in industrial processing.

Description

Flexible directional decoupling connection structure, double-gantry motion platform and application Technical Field The invention relates to the technical field of high-precision motion control, in particular to a flexible directional decoupling connecting structure, a double-gantry motion platform and application. Background In the precision industrial fields of high-end semiconductor lithography, wafer detection, panel display manufacturing and the like, the requirements on the positioning precision, repeated positioning precision and operation stability of a moving platform are extremely high. The gantry structure is widely used because of its good rigidity and wide range of motion. In order to further improve the rigidity and dynamic performance under high-speed movement, a double-drive gantry scheme, namely that two sides of a gantry beam are synchronously driven by independent linear motors, has become a mainstream technical route. However, the existing double-drive gantry platform has the following three inherent technical difficulties, which restrict the further improvement of the precision and the stability: 1. The problem of double-drive synchronization can cause that the driving forces at two sides cannot be completely synchronized due to the performance difference, control delay or mechanical assembly errors of the drivers at two sides, so that the gantry beam is slightly twisted around a vertical axis (Z axis), namely, torsional vibration phenomenon is caused, and the motion precision is seriously damaged. 2. And the linear motor and the guide rail generate a large amount of heat during high-speed continuous operation, so that structural parts such as the cross beam and the like are thermally expanded. Because the two ends of the cross beam are rigidly restrained, the thermal expansion strain cannot be freely released and converted into internal stress, so that the cross beam generates bending deformation, and the positioning precision and the repetition precision of the end effector are directly affected. This problem is particularly pronounced in continuous high load conditions. 3. The vibration problem, in high-speed start-stop and switching-over in-process, huge inertial force and impact force can cause the whole vibration of platform, and the vibration is conducted to the ground through the frame, not only influences the processing or the measurement stability of this board, can also cause the interference to peripheral precision equipment. At present, the solution to the problems mainly relies on a complex active control algorithm and a real-time compensation strategy, has extremely high requirements on the computing capacity and the sensor precision of a control system, has high system cost, and is difficult to radically eliminate errors caused by mechanical coupling. How to implement basic innovative design on the mechanical structure level, and decouple, compensate and restrain the problems from the source is an important subject to be solved in the field. Disclosure of Invention The invention aims to provide a double-gantry motion platform with double-drive decoupling, thermal compensation and dynamic balance vibration suppression functions, and aims to fundamentally solve the problems of double-drive asynchronous torsional vibration, thermal expansion deformation, large running vibration and the like of the traditional double-drive gantry platform from the mechanical structure level, realize motion control with high precision, high dynamic performance and high environmental adaptability through innovative flexible connection structure and dynamic balance design, reduce the dependence on an active control algorithm and improve the reliability and engineering practicability of a system. In order to achieve the above purpose, the invention adopts the following technical scheme: In one aspect, the invention provides a flexible directional decoupling connection structure, which is configured on a double gantry motion platform and is used for respectively connecting two ends of an X-axis beam to a Y-axis driving side, wherein the connection structure comprises a first flexible connection unit and a second flexible connection unit; the first flexible connection unit is arranged at a first end of the X-axis beam and is configured to provide low rigidity in the axial direction of the X-axis beam, allow the beam to axially float, and simultaneously maintain high rigidity constraint in the Z-axis direction and the Y-axis direction; The second flexible connection unit is disposed at a second end of the X-axis beam and is configured to provide low stiffness in a direction of rotation about the Z-axis, allowing the beam to elastically deflect about the Z-axis while maintaining high stiffness constraints in the Z-direction and the X-axis. Preferably, the first flexible connecting unit and the second flexible connecting unit comprise a beam fixing plate, a bottom plate and flexible steel sheets arra