CN-122007993-A - Annular groove machining method and annular groove machining system

CN122007993ACN 122007993 ACN122007993 ACN 122007993ACN-122007993-A

Abstract

The present disclosure provides an annular groove processing method and an annular groove processing system. The annular groove machining method includes providing a workpiece to be machined, the workpiece to be machined with an annular groove, providing a rotary cutter having an annular grinding portion with a width in a radial direction of the rotary cutter being smaller than a radial width of the annular groove, arranging a rotation axis of spin of the rotary cutter parallel to a central axis of the annular groove and offset by a certain distance, spinning the rotary cutter around the rotation axis while relatively moving the rotary cutter and the workpiece so that the rotation axis moves in a circular manner with respect to the central axis, so that a movement locus of the grinding portion covers an entire radial width range of the annular groove, and feeding the rotary cutter with respect to the workpiece in a direction of the rotation axis to machine the annular groove on the workpiece. Thus, tool wear can be reduced, thereby shortening machining time and reducing tool consumption.

Inventors

Shi Yuechuan
Request for anonymity

Assignees

重庆欣晖材料技术有限公司

Dates

Publication Date: 20260512
Application Date: 20260408

Claims (10)

1. A method of machining an annular groove, comprising: Providing a workpiece to be processed, wherein the workpiece is to be processed into an annular groove; providing a rotary cutter having an annular grinding portion, the width of the grinding portion in the radial direction of the rotary cutter being smaller than the radial width of the annular groove; Configuring a rotational axis of the rotary cutter spin to be parallel to a central axis of the annular groove and offset by a distance; Spinning the rotary tool about the rotation axis while relatively moving the rotary tool and the workpiece to cause the rotation axis to perform a circular motion with respect to the central axis so that the movement locus of the grinding portion covers the entire radial width range of the annular groove, and The rotary cutter is fed relative to the workpiece in the direction of the rotation axis to machine the annular groove on the workpiece.
2. The method for machining an annular groove according to claim 1, wherein the relative movement includes spinning the workpiece about the central axis while maintaining a position of the rotation axis fixed, or maintaining the workpiece fixed while revolving the rotation axis about the central axis.
3. The method for machining an annular groove according to claim 1, further comprising adjusting the distance according to a radial width of the annular groove to be machined to machine the annular grooves having different radial widths using the same rotary cutter.
4. A method of machining an annular groove as claimed in claim 3, wherein the distance is half of the sum of the radial width of the grinding portion and the radial width of the annular groove.
5. The method of claim 1, wherein the rotary cutter is a hollow tubular structure, and the grinding portion is located at an end of the hollow tubular structure.
6. The method of machining an annular groove according to claim 1, wherein the grinding portion is made of diamond particles and a sintering binder through a sintering process.
7. The annular groove machining method according to claim 1, wherein the rotary cutter has a plurality of concentrically arranged annular grinding portions, and the plurality of grinding portions are arranged at intervals in a radial direction for simultaneously machining the respective plurality of concentric annular grooves.
8. The method of machining an annular groove according to claim 7, wherein cutting edges of adjacent grinding portions are aligned in the same radial direction.
9. The method of claim 1, wherein the workpiece is made of silicon carbide and is fixed to the tooling by means of wax adhesion.
10. An annular groove machining system, comprising: the bearing device is used for bearing a workpiece to be processed, and an annular groove is formed in the workpiece to be processed; a driving device for mounting and driving a rotary cutter to rotate, the rotary cutter having an annular grinding portion having a width in a radial direction of the rotary cutter smaller than a radial width of the annular groove, and A controller configured to control the driving device and the carrying device such that: the rotating axis of the spin of the rotary cutter is parallel to the central axis of the annular groove and offset by a certain distance; The rotary tool spins around the rotation axis while the rotary tool and the workpiece are relatively moved to make the rotation axis perform a circular motion with respect to the central axis so that the movement locus of the grinding part covers the entire radial width range of the annular groove, and The rotary cutter is fed relative to the workpiece in the direction of the rotation axis to machine the annular groove on the workpiece.

Description

Annular groove machining method and annular groove machining system Technical Field The present disclosure relates to the field of machining technology, and in particular, to an annular groove machining method and an annular groove machining system. Background In the field of semiconductor manufacturing and the like, it is often necessary to machine annular grooves in the end faces of solid parts made of hard and brittle materials such as silicon carbide (SiC) and ceramics. In the related art, annular groove machining typically employs a tool (e.g., a diamond-impregnated grinding wheel) that conforms to the width of the annular groove to be machined. During machining, the rotation center of the cutter needs to coincide with the center of the annular groove, and the cutter directly cuts into the workpiece in the axial direction. However, this machining method tends to cause a large tool wear, resulting in a long machining time and a large number of tool consumption. Disclosure of Invention This section provides a general summary of the disclosure, and is not a comprehensive disclosure of its full scope or all of its features. In a first aspect, the present disclosure provides a method of machining an annular groove. The annular groove machining method comprises the steps of providing a workpiece to be machined, and machining an annular groove on the workpiece to be machined; Providing a rotary cutter, wherein the rotary cutter is provided with an annular grinding part, and the width of the grinding part in the radial direction of the rotary cutter is smaller than the radial width of the annular groove; Configuring the rotation axis of the spin of the rotary cutter to be parallel to the central axis of the annular groove and offset by a certain distance; spinning the rotary tool about a rotation axis while relatively moving the rotary tool and the workpiece to cause the rotation axis to perform a circular motion with respect to the central axis so that a motion locus of the grinding portion covers an entire radial width range of the annular groove, and The rotary cutter is fed relative to the workpiece in the direction of the rotation axis to machine an annular groove in the workpiece. In a second aspect, the present disclosure provides an annular groove machining system including a carrier, a drive, and a controller. The bearing device is used for bearing a workpiece to be machined, an annular groove is formed in the workpiece, the driving device is used for installing and driving the rotary cutter to rotate, the rotary cutter is provided with an annular grinding part, the width of the grinding part in the radial direction of the rotary cutter is smaller than the radial width of the annular groove, the controller is used for controlling the driving device and the bearing device to enable the rotating axis of spin of the rotary cutter to be parallel to the central axis of the annular groove and offset a certain distance, the rotary cutter rotates around the rotating axis, meanwhile, the rotary cutter and the workpiece move relatively along the circumferential direction of the annular groove to enable the rotating axis to do circular motion relative to the central axis, and therefore the movement track of the grinding part covers the whole radial width range of the annular groove, and the rotary cutter is fed relative to the workpiece along the direction of the rotating axis to machine the annular groove on the workpiece. Drawings Features and advantages of embodiments of the present disclosure will become more readily appreciated from the following description with reference to the accompanying drawings. The figures are not drawn to scale and some features may be exaggerated or minimized to show details of particular components. In the drawings: Fig. 1 is an exploded view of an annular groove machining system according to an embodiment of the present disclosure. Fig. 2 is a front view of the annular groove machining system shown in fig. 1. Fig. 3 is a flowchart of an annular groove processing method according to an embodiment of the present disclosure. Fig. 4 is a positional relationship diagram of a grinding portion and a workpiece at a certain point in the annular groove processing method according to the embodiment of the present disclosure. Fig. 5 is a schematic view of an annular groove machined by the annular groove machining method of fig. 3. Fig. 6 is a schematic structural view of a rotary cutter according to an embodiment of the present disclosure. Fig. 7 is a schematic structural view of a rotary cutter according to another embodiment of the present disclosure. Fig. 8 is a schematic view of an annular groove machined by the rotary cutter of fig. 7. In the drawings, the same or corresponding technical features or components are denoted by the same or corresponding reference numerals. Detailed Description The technical solutions in the present disclosure will be clearly and completely described below