CN-122008064-A - Grinding fixed disc, grinding equipment and grinding method

CN122008064ACN 122008064 ACN122008064 ACN 122008064ACN-122008064-A

Abstract

The embodiment of the disclosure provides a grinding fixed disc, grinding equipment and a grinding method, wherein the grinding fixed disc comprises a fixed disc main body, a sealing assembly and a sealing assembly, wherein the fixed disc main body is provided with a grinding surface and a bottom surface which are arranged in a back-to-back mode, flow guide grooves are distributed on the grinding surface, a plurality of cleaning grooves are formed in the bottom surface, the cleaning grooves penetrate through the grinding surface and are communicated with the flow guide grooves, the sealing assembly is movably connected to the fixed disc main body and can be switched between a sealing state and a non-sealing state, the sealing assembly seals the cleaning grooves in the sealing state so as to seal the cleaning grooves on the bottom surface, and the sealing assembly is separated from the cleaning grooves in the non-sealing state so as to enable the cleaning grooves to completely penetrate through. The grinding fixed disc, the grinding equipment and the grinding method can solve the problems that the grinding effect is poor, the grinding time is long, the service life of the fixed disc is shortened, the groove is difficult to clean and the like caused by the blockage of the groove of the fixed disc.

Inventors

ZHANG XIAODONG

Assignees

西安奕斯伟材料科技股份有限公司
西安奕斯伟硅片技术有限公司

Dates

Publication Date: 20260512
Application Date: 20260320

Claims (10)

1. A lapping surface plate comprising: The fixed disk main body is provided with a grinding surface and a bottom surface which are arranged in a back-to-back manner, the grinding surface is provided with flow guide grooves, the bottom surface is provided with a plurality of cleaning grooves, the cleaning grooves penetrate from the bottom surface to the grinding surface and are communicated with the flow guide grooves, and A sealing assembly configured to be movably coupled to the stator body, switchable between a sealed state and a non-sealed state, wherein, In the sealing state, the sealing assembly seals the cleaning groove from the side where the bottom surface is located; In the unsealed state, the sealing assembly is disengaged from the cleaning groove so that the cleaning groove is completely penetrated.
2. The grinding stator according to claim 1, wherein the flow guiding grooves comprise a first groove part and a second groove part which are arranged in a crossing way, and a plurality of cleaning grooves are distributed at equal intervals along the first groove part and/or the second groove part.
3. The grinding stator according to claim 2, wherein the flow guiding groove comprises a plurality of sub-groove units, each sub-groove unit comprises a first groove part and a second groove part which are arranged in a crossing manner, and one sub-groove unit corresponds to a plurality of cleaning grooves.
4. The abrasive surface plate of claim 1, wherein the cleaning groove has opposed first and second ends, the first end being in communication with the flow guide channel and the second end being in communication with the bottom surface, and wherein the cleaning groove has an inner diameter of equal or progressively increasing size from the first end to the second end.
5. The grinding stator of claim 1, wherein the stator body has a through hole in the middle, and the seal assembly comprises: Removable membranous seal A connecting member including a first connecting piece provided on an inner peripheral side of the through hole, and a second connecting piece provided on an outer peripheral side of the fixed disk main body, In the sealed state, the film-like sealing member covers at least the cleaning groove, and one end of the film-like sealing member is detachably connected to the first connecting member, and the other end is detachably connected to the second connecting member.
6. The grinding stator according to claim 5, wherein the film-like seal has an adhesive layer, and in the sealed state, the film-like seal is adhered to the bottom surface through the adhesive layer.
7. The grinding stator of claim 5, wherein at least one of the first and second connectors is a snap-fit connection with the membranous seal.
8. The abrasive surface disk of claim 1, wherein the seal assembly comprises a magnetic seal configured to magnetically attract or separate from the bottom surface.
9. A grinding apparatus comprising a grinding table according to any one of claims 1 to 8.
10. A grinding method, characterized by being applied to the grinding apparatus according to claim 9; the method comprises the following steps: when the grinding operation is executed, the sealing assembly is controlled to be switched to a sealing state so as to seal the cleaning groove from the bottom surface side, and grinding liquid only flows in the diversion groove of the grinding surface; When cleaning maintenance operation is performed, the sealing assembly is controlled to be switched to a non-sealing state, so that the sealing assembly is separated from the cleaning groove from the bottom surface side, and the cleaning groove is kept through for cleaning tools to clean the cleaning groove; Wherein, the When the seal assembly includes a removable film-like seal, adhering the film-like seal to the bottom surface by applying a mechanical external force to block the cleaning groove from the bottom surface side or removing the film-like seal from the bottom surface side to keep the cleaning groove penetrating; when the sealing assembly comprises a magnetic sealing member, the film sealing member is magnetically attracted on the bottom surface by applying or removing magnetic force to seal the cleaning groove from the bottom surface side, or the film sealing member is separated from the bottom surface to keep the cleaning groove penetrating.

Description

Grinding fixed disc, grinding equipment and grinding method Technical Field The disclosure relates to the technical field of semiconductor processing, in particular to a grinding fixed disc, grinding equipment and a grinding method. Background In the field of semiconductor wafer manufacturing, silicon wafers are the most commonly used semiconductor materials, which are the materials with the highest cost ratio and are indispensable in the chip production process. In the case of rapid developments in chip technology, photovoltaic technology, etc. today, the demand for silicon wafers has increased dramatically. Grinding is an important process link in silicon wafer manufacturing, and the grinding aims to enable the silicon wafer to have a flat surface with a certain geometric dimension precision, and simultaneously, remove a mechanical stress damage layer generated by cutting on the surface of the silicon wafer in the slicing process. The double-sided grinding is to place the cut silicon wafer between an upper grinding fixed disk and a lower grinding fixed disk, and the purposes of rough machining and thinning of the surface of the silicon wafer are achieved under the action of grinding liquid and pressure in the rotating process of the grinding fixed disk. In the grinding process, grinding wastes such as grinding slurry residues and the like can remain in the guide grooves of the lower fixed disk of the grinding equipment, so that grinding fluid cannot effectively enter the guide grooves, and the problems of poor grinding effect, long grinding time, reduced service life of the fixed disk, difficult groove cleaning and the like are caused. Disclosure of Invention In order to solve at least one technical problem in the prior art, an embodiment of the present disclosure provides a polishing platen, a polishing apparatus, and a polishing method. In order to solve the above technical problems, the present disclosure is implemented as follows: in a first aspect, embodiments of the present disclosure provide an abrasive disk comprising: The fixed disk main body is provided with a grinding surface and a bottom surface which are arranged in a back-to-back manner, the grinding surface is provided with flow guide grooves, the bottom surface is provided with a plurality of cleaning grooves, the cleaning grooves penetrate from the bottom surface to the grinding surface and are communicated with the flow guide grooves, and A sealing assembly configured to be movably coupled to the stator body, switchable between a sealed state and a non-sealed state, wherein, In the sealing state, the sealing assembly seals the cleaning groove from the side where the bottom surface is located; In the unsealed state, the sealing assembly is disengaged from the cleaning groove so that the cleaning groove is completely penetrated. The flow guide groove comprises a first groove part and a second groove part which are arranged in a crossing way, and a plurality of cleaning grooves are distributed at equal intervals along the first groove part and/or the second groove part. The flow guiding groove comprises a plurality of sub-groove units, each sub-groove unit comprises a first groove part and a second groove part which are arranged in a crossing mode, and one sub-groove unit corresponds to a plurality of cleaning grooves. Illustratively, the cleaning tank has opposite first and second ends, the first end being in communication with the flow directing channel and the second end being in communication with the bottom surface, and the cleaning tank having an inner diameter of the same or progressively increasing size from the first end to the second end. Illustratively, the middle part of the fixed disc main body is provided with a through hole; the seal assembly includes: Removable membranous seal A connecting member including a first connecting piece provided on an inner peripheral side of the through hole, and a second connecting piece provided on an outer peripheral side of the fixed disk main body, In the sealed state, the film-like sealing member covers at least the cleaning groove, and one end of the film-like sealing member is detachably connected to the first connecting member, and the other end is detachably connected to the second connecting member. Illustratively, the film seal has an adhesive layer by which the film seal adheres to the bottom surface in the sealed state. Illustratively, a snap-fit connection is provided between at least one of the first and second connectors and the membranous seal. Illustratively, the seal assembly includes a magnetic seal configured to magnetically attract or separate from the bottom surface. In a second aspect, embodiments of the present disclosure provide a grinding apparatus including a grinding table as described above. In a third aspect, an embodiment of the present disclosure provides a polishing method applied to the polishing apparatus as described above, the method including: when the grin