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CN-122008317-A - Four-axis manipulator test bench and test method

CN122008317ACN 122008317 ACN122008317 ACN 122008317ACN-122008317-A

Abstract

The invention relates to the technical field of mechanical arm testing equipment, in particular to a four-axis mechanical arm testing table and a testing method, wherein a four-axis transmission mechanical arm body comprises a TH1 axis, a TH2 axis, a TH3 axis, a Z axis and a hand fork for clamping a mask plate, and is arranged on an optical platform; the four-axis transmission manipulator body is used for transferring the mask between the simulation outer plate library part, the simulation inner plate library part and the simulation tower part, and the CCD measuring system is respectively arranged on the simulation outer plate library part and the simulation tower part and is used for measuring the repeated positioning accuracy of the picking and placing plates of the manipulator. The manipulator test bench can simulate actual working scenes and realize multi-index comprehensive detection, and complete comprehensive performance test before manipulator integration, so that all indexes of the manipulator test bench reach standards.

Inventors

  • ZHOU TIAN
  • WEN PENG
  • LIU YING

Assignees

  • 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所）

Dates

Publication Date
20260512
Application Date
20260227

Claims (10)

  1. 1. The four-axis manipulator test bench is characterized by comprising an optical platform (3), a four-axis transmission manipulator body, an analog outer edition library part, an analog inner edition library part, an analog tower part, an analog frame part and a CCD measuring system (4); The four-axis transmission manipulator body comprises a TH1 axis, a TH2 axis, a TH3 axis, a Z axis and a fork for clamping a mask plate (6), and is arranged on the optical platform (3), wherein the simulation outer plate library part, the simulation inner plate library part, the simulation tower part and the simulation frame part are all arranged on the optical platform (3), the simulation frame part encloses to form a simulation inner space for manipulator movement and is used for testing space design layout rationality of manipulator movement in advance, the four-axis transmission manipulator body is used for transferring the mask plate (6) among the simulation outer plate library part, the simulation inner plate library part and the simulation tower part, and the CCD measuring system (4) is respectively arranged on the simulation outer plate library part and the simulation tower part and is used for measuring repeated positioning precision of the picking and placing plate of the manipulator.
  2. 2. The four-axis manipulator testing bench according to claim 1, wherein the simulation outer plate warehouse part further comprises a supporting block (1), the supporting block (1) is connected with the simulation outer plate warehouse part through a screw and an inner hexagon tight end flat screw, the simulation outer plate warehouse part is provided with a mask plate supporting plate (5), and Rx and Ry of the mask plate supporting plate (5) can be adjusted through the screw and the inner hexagon tight end flat screw.
  3. 3. The four-axis manipulator test bench according to claim 1, wherein the simulated stencil library part comprises a simulated stencil library support profile frame (7), 4 leveling pads (8), a stencil library support plate (10), a first support plate (9), 2 mask support plates (5) and a calibration ruler (13); The inner plate library supporting plate (10) is connected with the 4 leveling cushion blocks (8) through screws and inner hexagon tight end flat fixing screws and used for adjusting Rx and Ry of the 2 mask supporting plates (5), the calibration ruler (13) is connected with 2 calibration ruler (13) fixing plates through screws and locating pins, and Ry and Rz of the calibration ruler (13) are adjustable and used for calibrating Rz of the manipulator.
  4. 4. The four-axis manipulator test bench according to claim 1, wherein the simulation tower part comprises a simulation tower profile support frame (20), 4 leveling pads (8), a second support plate (21), a mask Y-direction leveling plate (16), a mask X-direction leveling plate (15), and a mask support plate (5); The 4 leveling cushion blocks (8) are connected with the second supporting plate (21) through screws and hexagon socket head cap screws and are used for adjusting Rx and Ry of the mask supporting plate (5), adjusting blocks are arranged in the X direction of the mask X-direction leveling plate (15) and are used for adjusting the X-direction position of the mask supporting plate (5) through pushing and dragging of the screws, and adjusting blocks are arranged in the Y direction of the mask (6) and are used for adjusting the Y-direction position of the mask supporting plate (5) through pushing and dragging of the screws.
  5. 5. The four-axis manipulator test bench according to claim 1, wherein the CCD measurement system (4) comprises a matched lens adjusting bracket cushion block and a CCD lens, the height and the X-direction and Y-direction positions of the lens adjusting bracket cushion block are designed according to the working distance adaptation of the CCD lens, and the measurement precision of the CCD measurement system (4) is 1 micrometer.
  6. 6. The four-axis manipulator testing stand of claim 1, wherein the simulation frame portion comprises a simulation frame profile bracket and a baffle at three stations, the three stations respectively corresponding to a plate taking and placing station of the simulation outer plate warehouse portion, the simulation inner plate warehouse portion and the simulation tower portion.
  7. 7. A four-axis manipulator test bench according to claim 3, wherein the 2 mask support plates (5) of the simulated inner plate library part are correspondingly adapted to the inner plate library support plate (10) and are used for bearing the mask (6) and completing plate taking and placing actions by matching with a manipulator.
  8. 8. The four-axis manipulator test bench according to claim 4, wherein the simulation tower part further comprises three angle adjustment seats, namely a first angle adjustment seat (14), a second angle adjustment seat (17) and a third angle adjustment seat (18), respectively, wherein the angle adjustment seats are used for assisting in adjusting the installation posture of the mask support plate (5).
  9. 9. The four-axis manipulator test bench according to claim 1, further comprising a laser tracker interface configured to connect to a laser tracker to dynamically acquire motion trajectories, velocity curves, and acceleration characteristics of the four-axis manipulator end forks in three-dimensional space, thereby evaluating straightness of the four-axis manipulator end forks in and out of the station, start/stop stability, and multi-axis cooperative control precision.
  10. 10. A testing method based on the four-axis manipulator testing stand of any one of claims 1 to 9, comprising the steps of: S1, mounting a four-axis manipulator to be tested on an optical platform (3) so that a fork of the manipulator can enter corresponding stations of a simulation outer edition library, a simulation inner edition library and a simulation tower; S2, leveling and aligning mask support plates (5) of three stations to theoretical attitude references under a unified coordinate system through multi-degree-of-freedom adjusting mechanisms of the modules respectively; s3, placing a standard mask (6) at a station of an analog outer plate library, starting a manipulator to execute N times of picking and placing cycles, recording the center coordinates of the mask (6) each time by a CCD measuring system (4), and calculating the repeated positioning precision sigma; s4, repeating the step S3 at the station of the simulation tower to obtain the repeated positioning precision of the other station, and carrying out difference analysis with the result of the step S3 to obtain the attitude difference quantity delta Rx and delta Ry between the two stations; s5, starting a laser tracker, tracking the complete motion process of the manipulator from the simulation outer edition library to the simulation tower, and extracting the track straightness error, the maximum offset and the Rz axis rotation stability parameters; and S6, under the constraint of a simulation framework, running full-stroke motion at a rated speed, monitoring whether structural interference, abnormal vibration or limit trigger exists, and outputting a space adaptability evaluation report.

Description

Four-axis manipulator test bench and test method Technical Field The invention relates to the technical field of mechanical arm testing equipment, in particular to a four-axis mechanical arm testing table and a testing method suitable for carrying semiconductor devices. Background In modern industrial production, especially in the field of semiconductor manufacturing, manipulators are widely applied to carrying operations of precise devices such as wafers, masks and the like, and the operations have extremely high requirements on indexes such as positioning accuracy, motion reliability, repeated positioning accuracy and the like of the manipulators. In the prior art, a method and equipment for testing the stretching, translating and lifting positioning accuracy of a mechanical arm through a mode of matching the mechanical arm, a visual system and a distance sensor are presented, but the existing testing equipment and method have obvious limitations, can only realize single-dimensional positioning accuracy detection, can not simulate a multi-station transfer scene in the actual working of the mechanical arm, and also can not simultaneously complete comprehensive testing of multiple key indexes such as repeated positioning accuracy, station entering and exiting straightness, station horizontal posture difference, movement space suitability and the like, can not complete comprehensive performance verification before the mechanical arm is integrated into actual production equipment, and easily cause the problems of positioning deviation, structural interference, unstable movement and the like after the mechanical arm is integrated, so that the production efficiency and the product processing quality are affected. Aiming at the technical problems, a manipulator test board capable of simulating actual working scenes and realizing multi-index comprehensive detection is needed to be designed, and comprehensive performance test is completed before manipulator integration, so that all indexes of the manipulator test board reach standards. Disclosure of Invention The invention aims to provide a four-axis manipulator test bench which can overcome the defects in the prior art to a certain extent. The technical scheme of the invention is realized as follows: The invention provides a four-axis manipulator test board which comprises an optical platform, a four-axis transmission manipulator body, a simulation outer plate library part, a simulation inner plate library part, a simulation tower part, a simulation frame part and a CCD (charge coupled device) measuring system, wherein the four-axis transmission manipulator body comprises a TH1 axis, a TH2 axis, a TH3 axis, a Z axis and a fork for clamping a mask plate, the four-axis transmission manipulator body is arranged on the optical platform, the simulation outer plate library part, the simulation inner plate library part, the simulation tower part and the simulation frame part are all arranged on the optical platform, the simulation frame part forms a simulation inner space for manipulator movement, the space design layout for testing manipulator movement is reasonable, the four-axis transmission manipulator body is used for transferring the mask plate among the simulation outer plate library part, the simulation inner plate library part and the simulation tower part, the CCD measuring system is respectively arranged on the simulation outer plate library part and the simulation tower part and is used for measuring the repeated positioning precision of the picking and placing plate of the manipulator, and the CCD measuring system is 1 micrometer. Further, the simulation outer plate warehouse part further comprises a supporting block, the supporting block is connected with the simulation outer plate warehouse part through a screw and an inner hexagonal tight end flat screw, the simulation outer plate warehouse part is provided with a mask plate supporting plate, rx and Ry of the mask plate supporting plate can be adjusted through the screw and the inner hexagonal tight end flat screw, and the gesture adjustment of different testing requirements is adapted. The simulation inner plate library part comprises a simulation inner plate library support section bar frame, 4 leveling cushion blocks, an inner plate library support plate, a first support plate, 2 mask support plates and a calibration ruler, wherein the inner plate library support plate is connected with the 4 leveling cushion blocks through screws and inner hexagon tight end flat fixing screws and used for adjusting Rx and Ry of the 2 mask support plates, the calibration ruler is connected with 2 calibration ruler fixing plates through screws and locating pins, ry and Rz of the calibration ruler are adjustable and used for calibrating Rz of a mechanical arm, and the 2 mask support plates are correspondingly matched with the inner plate library support plates and used for bearing mask plates and completing plate taking