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CN-122008415-A - Alumina ceramic arm production method and system

CN122008415ACN 122008415 ACN122008415 ACN 122008415ACN-122008415-A

Abstract

The invention relates to the technical field of ceramic arm production, in particular to a method and a system for producing an alumina ceramic arm, which comprise a machining center and a tool assembly, wherein the machining center comprises a workbench, the tool assembly is detachably arranged on the workbench, the tool assembly comprises a plurality of fixed point rods and a placing table, the placing table supports an arm body, the placing table is provided with a plurality of guide grooves in a penetrating mode, the guide grooves are distributed in a circumferential array mode by taking the center of the placing table as a circle center, the fixed point rods penetrate through the guide grooves and move along the guide grooves, the fixed point rods relatively move towards the center point of the placing table to position and clamp the arm body, the bottom of the placing table is provided with a locking mechanism for fixing the positions of the fixed point rods, and the tool table is provided with a plurality of sliding grooves in a penetrating mode.

Inventors

  • GU YIFENG
  • WANG XIANGMING

Assignees

  • 常州锆芯科技有限公司

Dates

Publication Date
20260512
Application Date
20260313

Claims (10)

  1. 1. The alumina ceramic arm production system is characterized by comprising a machining center (11) and a tool assembly (1); The machining center (11) comprises a workbench, and the tool assembly (1) is detachably arranged on the workbench; The tool assembly (1) comprises a plurality of fixed-point rods (102) and a placing table (101), wherein the placing table (101) supports the arm body (6); The placing table (101) is provided with a plurality of guide grooves (103) in a penetrating mode, the guide grooves (103) are distributed in a circumferential array by taking the center of the placing table (101) as a circle center, a plurality of fixed point rods (102) penetrate through the guide grooves (103) and move along the guide grooves, and the fixed point rods (102) enable the arm body (6) to be positioned and clamped through relative displacement towards the center point of the placing table (101); The bottom of the placing table (101) is provided with a locking mechanism for fixing the positions of a plurality of fixed-point rods (102).
  2. 2. The alumina ceramic arm production system according to claim 1, wherein a tooling table (2) is arranged at the bottom of the placement table (101), a plurality of sliding grooves (201) are formed in the tooling table (2) in a penetrating mode, the sliding grooves (201) correspond to the guide grooves (103) in position, guide blocks (202) are slidably matched in the sliding grooves (201), the guide blocks (202) are rectangular, one ends of the guide blocks extend to form strip-shaped protrusions, one ends of the strip-shaped protrusions face the center of the placement table (101), and the fixed point rods (102) penetrate through the strip-shaped protrusion ends of the guide blocks (202) and are fixedly connected with the strip-shaped protrusion ends.
  3. 3. The alumina ceramic arm production system according to claim 2, wherein the guide block (202) is provided with a clamping groove (203) at one end far away from the strip-shaped protrusion, a spring member (204) is arranged between the clamping groove (203) and one end of the sliding groove (201), and a clamping mechanism for fixing the initial position of the fixed point rod (102) is arranged at one end of the sliding groove (201) far away from the center of the placing table (101).
  4. 4. The alumina ceramic arm production system according to claim 3, wherein the clamping mechanism comprises a wedge block (3), a sinking groove (301) is formed in the bottom of the guide block (202), the wedge block (3) is in sliding fit with the sinking groove (301), a spring telescopic rod (302) is arranged at the top of the wedge block (3), and the spring telescopic rod (302) is connected with the bottom of the sinking groove (301); The tool table is characterized in that a lifting locking plate (4) is arranged at the bottom of the tool table (2), a plurality of buckling grooves (401) are formed in the edge, away from the center of the placing table (101), of the locking plate (4) in a penetrating mode, the buckling grooves (401) are clamped with the wedge blocks (3) in a mutually clamping mode, and the locking plate (4) is driven to lift by a linear driving mechanism.
  5. 5. The alumina ceramic arm production system according to claim 4, wherein the linear driving mechanism comprises a plurality of screws (5), the top ends of the screws (5) are rotatably connected with the bottom of the tooling table (2), the locking plate (4) is penetrated by four sides and fixedly connected with nuts (402), and the screws (5) are penetrated by the nuts (402).
  6. 6. The alumina ceramic arm production system according to claim 5, wherein a fixed column (7) is fixedly connected to the bottom of the tooling table (2), a mounting seat (8) is fixedly connected to the bottom of the fixed column (7), a plurality of supporting seats (801) are fixedly connected to the inner side of the mounting seat (8), the bottom of the screw (5) is rotationally connected with the supporting seats (801), the screw (5) penetrates through and is fixedly connected with a gear (501), an inner gear ring (502) is connected to the outer side of the gear (501) in a meshed mode, the bottom of the inner gear ring (502) is rotationally connected with the mounting seat (8), and a hand wheel ring (9) is fixedly connected to the outer side of the inner gear ring (502).
  7. 7. The alumina ceramic arm production system according to claim 4, wherein the locking mechanism comprises a locking end (104), the diameter of the locking end (104) is larger than that of the fixed point rod (102), the locking plate (4) is provided with a guide groove (103) which is the same as that of the placing table (101), the bottom of the fixed point rod (102) penetrates through the guide groove (103), and the locking end (104) is fixed at the bottom of the fixed point rod (102).
  8. 8. An alumina ceramic arm production system according to claim 1, wherein the top of the fixed point bar (102) is provided with a detachable hold-down cap (10), the diameter of the hold-down cap (10) being larger than the fixed point bar (102).
  9. 9. The alumina ceramic arm production system according to claim 8, wherein the upper end of the fixed point rod (102) is provided with a threaded hole, and the pressing cover (10) is connected with the top of the fixed point rod (102) through a bolt.
  10. 10. An alumina ceramic arm production method for an alumina ceramic arm production system according to any one of claims 1 to 9, comprising the steps of: Selecting high-purity alumina powder, adding a small amount of auxiliary agent, mixing, refining and drying to obtain uniform powder; Pressing the powder into a ceramic arm primary blank by a dry pressing method; Forming a compact ceramic blank by high-temperature sintering of the primary blank; The tool assembly (1) is fixed on a workbench of a machining center (11) through bolts, and positioning is completed through a T-shaped groove of the workbench; The ceramic arm body (6) is placed in the center of the placing table (101) by a worker, the fixed point rod (102) is pushed to synchronously displace towards the center along the guide groove (103) of the circumferential array according to the arm specification until the ceramic arm body (6) is tightly attached, and then the position of the fixed point rod (102) is fixed through the bottom locking mechanism, so that positioning and clamping are completed; and (3) polishing, drilling and air passage machining are performed on the blank by using a machining center (11), and the blank is machined to the design size.

Description

Alumina ceramic arm production method and system Technical Field The invention relates to the technical field of ceramic arm production, in particular to a method and a system for producing an alumina ceramic arm. Background The ceramic arm is also called an end effector, ceramic fingers and the like, mainly plays a role in conveying and carrying in semiconductor equipment, is equivalent to fingers of a semiconductor equipment robot, is responsible for carrying a wafer silicon wafer to a designated position, and mainly adopts a processing method of bonding wax clamping in the traditional processing of the surface flatness of the alumina ceramic arm. The utility model discloses a high-precision alumina ceramic arm positioning fixture and a processing method thereof in the prior patent publication No. CN119748345A, which comprises a sucker base, wherein the sucker base is provided with a vent hole connected with an external vacuum device and a closed air passage cavity communicated with the vent hole, and the sucker base is provided with an adsorption structure communicated with the sealed air passage cavity and a positioning and adjusting structure for realizing positioning adjustment. In the above technical scheme, can connect outside vacuum pump through the air pipe connection, adsorption structure realizes treating the alumina ceramic arm semi-manufactured goods of finish machining and adsorbs the location, however current general machining center is closed operation for this anchor clamps are difficult to switch on the vacuum pump outside machining center, lead to this anchor clamps of current machining center difficult to match, and the location dog on this anchor clamps is fixed with adsorption structure's position relatively, adjustable scope is less, be difficult to carry out centre gripping processing to the ceramic arm of multiple type specification, the commonality is poor. Therefore, there is a need for an alumina ceramic arm manufacturing method and system that solves the above-mentioned problems. Disclosure of Invention The invention aims to provide a production method and a production system for an alumina ceramic arm, which can be adapted to arms with various specifications and shapes and realize stable clamping processing. In order to solve the technical problems, the invention provides the following technical scheme that the method and the system for producing the alumina ceramic arm comprise a processing center and a tool assembly; The machining center comprises a workbench, and the tool assembly is detachably arranged on the workbench; the tool assembly comprises a plurality of fixed point rods and a placing table, and the placing table supports the arm body; The placing table is provided with a plurality of guide grooves in a penetrating way, the guide grooves are distributed in a circumferential array by taking the center of the placing table as the center of a circle, a plurality of fixed point rods penetrate through the guide grooves and displace along the guide grooves, and the fixed point rods position and clamp the arm body by relatively displacing towards the center point of the placing table; the bottom of the placing table is provided with a locking mechanism for fixing the positions of a plurality of fixed-point rods. As a preferable scheme of the invention, a tooling table is arranged at the bottom of the placement table, a plurality of sliding grooves are formed in the tooling table in a penetrating manner, the sliding grooves correspond to the guide grooves in position, guide blocks are in sliding fit in the sliding grooves, the guide blocks are rectangular, one ends of the guide blocks extend to form strip-shaped protrusions, one ends of the strip-shaped protrusions face the center of the placement table, and the fixed point rods penetrate through the strip-shaped protrusion ends of the guide blocks and are fixedly connected with the strip-shaped protrusion ends of the guide blocks. As a preferable scheme of the invention, a clamping groove is formed at one end of the guide block, which is far away from the strip-shaped bulge, a spring piece is arranged between the clamping groove and one end of the sliding groove, and a clamping mechanism for fixing the initial position of the fixed point rod is arranged at one end of the sliding groove, which is far away from the center of the placing table. As a preferable scheme of the invention, the clamping mechanism comprises a wedge block, a sinking groove is formed in the bottom of the guide block, the wedge block is in sliding fit with the sinking groove, a spring telescopic rod is arranged at the top of the wedge block, and the spring telescopic rod is connected with the bottom of the sinking groove; The tool table is characterized in that a lifting locking plate is arranged at the bottom of the tool table, a plurality of buckling grooves are formed in the edge of the locking plate far away from the center of the placing table in