CN-122009530-A - Micro propeller and manufacturing method thereof

CN122009530ACN 122009530 ACN122009530 ACN 122009530ACN-122009530-A

Abstract

The invention discloses a micro propeller and a preparation method thereof. The micro-propeller comprises a silicon substrate, a heating electrode, a glass substrate and a glass substrate, wherein the silicon substrate is provided with a heating chamber and a Laval nozzle, an outlet of the heating chamber is communicated with the Laval nozzle, the heating chamber is used for containing ultrapure water, the heating electrode is arranged on the silicon substrate and at least partially positioned on the heating chamber so as to be in contact with the ultrapure water in the heating chamber, the heating electrode is electrically connected with an external power supply, and the glass substrate is arranged on the silicon substrate and the heating electrode. In the invention, the heating chamber and the Laval nozzle are directly integrated on the silicon substrate, and the heating electrode is arranged above the heating chamber for containing the ultrapure water, so that the controlled phase-change evaporation of the ultrapure water is realized, corresponding thrust is generated, and stable attitude control impulse can be provided on the premise of not remarkably increasing the volume and the quality of small satellites such as a cube satellite or a nano satellite platform.

Inventors

ZHANG SHIWU
ZHOU QIXUAN
WANG ERLONG
JIN HU
CHEN GONGYU
OUYANG YIMING
BAO BINGLIANG

Assignees

中国科学技术大学

Dates

Publication Date: 20260512
Application Date: 20260213

Claims (10)

1. A micro-propeller, comprising: a silicon substrate provided with a heating chamber and a Laval nozzle, wherein an outlet of the heating chamber is communicated with the Laval nozzle, and the heating chamber is used for containing ultrapure water; A heating electrode provided on the silicon substrate and at least partially located on the heating chamber to be in contact with ultrapure water in the heating chamber, the heating electrode being electrically connected to an external power supply; and a glass substrate disposed on the silicon substrate and the heating electrode.
2. The micro-propeller according to claim 1, wherein the laval nozzle comprises a tapered section, a throat section and a diverging section in the extending direction in this order, one end of the throat section is connected to the tapered section, the other end of the throat section is connected to the diverging section, the width of the tapered section in the extending direction is gradually reduced, and the width of the diverging section in the extending direction is gradually increased.
3. The micro-propeller according to claim 1, further comprising an elastic membrane and an induction electrode group, wherein the glass substrate is arranged on the elastic membrane and is provided with a hollowed-out part, the hollowed-out part and the elastic membrane form a liquid metal groove, the liquid metal groove is arranged corresponding to the laval nozzle and is used for placing liquid metal, the induction electrode group comprises a first liquid metal induction electrode and a second liquid metal induction electrode, the first liquid metal induction electrode is arranged above the glass substrate, and the second liquid metal induction electrode is arranged below the silicon substrate and is arranged corresponding to the laval nozzle.
4. A micro-propeller according to claim 3, wherein the liquid metal tank comprises a storage tank and a descending channel tank communicating with each other, the descending channel tank being located below the storage tank.
5. The micro-mover of claim 3, further comprising an adhesive layer, wherein the heating electrode is adhered to the bottom of the elastic membrane through the adhesive layer.
6. The micro-propeller according to claim 1, further comprising a liquid metal pressurized water reservoir comprising a liquid metal vertical pump having an ultrapure water storage area for storing ultrapure water therein, and further having a liquid outlet in communication with the ultrapure water storage area, the liquid metal pressurized water reservoir being for providing ultrapure water to the inlet of the propeller through the liquid outlet.
7. The micro-propeller according to claim 6, wherein a liquid metal storage area and an inert gas isolation layer are further arranged in the liquid metal vertical pump, the liquid metal storage area is used for storing liquid metal and is located at the bottom of the liquid metal vertical pump, inert gas is arranged in the inert gas isolation layer, and the inert gas isolation layer is located between the ultrapure water storage area and the liquid metal storage area.
8. The micro-propeller according to claim 1, wherein the silicon substrate is provided with electrical connection grooves and electrical connection holes, the electrical connection grooves and the electrical connection holes are arranged in one-to-one correspondence and are communicated with each other, the electrical connection grooves are used for accommodating part of the heating electrode, and the electrical connection holes are used for connecting the electrical connection mechanism.
9. The preparation method of the micro propeller is characterized by comprising the following steps: Forming an electric connection groove, a Laval nozzle, a heating chamber and a liquid inlet on a silicon wafer in sequence through photoetching and etching processes so as to form a wafer intermediate; performing film plating, photoetching and etching processes on the wafer intermediate to form an electrical connection port so as to obtain a silicon substrate; obtaining a glass wafer, and sequentially carrying out photoetching, coating and stripping processes on the glass wafer to form an adhesion layer and a heating electrode below the glass wafer, so as to obtain a glass substrate adhered with the heating electrode; And bonding the silicon substrate and the glass substrate adhered with the heating electrode into a whole, cutting, then injecting liquid metal into a liquid metal groove of the glass substrate, and correspondingly bonding a first liquid metal induction electrode and a second liquid metal induction electrode on the upper surface and the lower surface to obtain the micro-propeller.
10. The preparation method of the micro propeller is characterized by comprising the following steps: forming a Laval nozzle throat region on a silicon wafer sequentially through photoetching and etching processes; forming an electric connection groove on the silicon wafer through photoetching and etching processes in sequence; forming a heating chamber and a nozzle inlet communicated with the heating chamber on the silicon wafer sequentially through photoetching and etching processes; forming a liquid inlet on the silicon wafer through photoetching and etching processes in sequence; Sequentially performing film coating, photoetching and etching processes on the silicon wafer to form an electric connection hole penetrating through the silicon wafer and a nozzle outlet so as to obtain a silicon substrate; sequentially carrying out photoetching, coating and stripping processes on a glass wafer to form an adhesion layer and a heating electrode below the glass wafer, thereby obtaining a glass substrate adhered with the heating electrode; And bonding the silicon substrate and the glass substrate adhered with the heating electrode into a whole, cutting, then injecting liquid metal into a liquid metal groove of the glass substrate, and correspondingly bonding a first liquid metal induction electrode and a second liquid metal induction electrode on the upper surface and the lower surface to obtain the micro-propeller.

Description

Micro propeller and manufacturing method thereof Technical Field The invention relates to the technical field of propellers, in particular to a micro propeller and a manufacturing method thereof. Background With the continued miniaturization of electronic systems and sensor technology, nano-scale and microsatellites (e.g., cubic satellites) have grown. The platform has extremely low quality and power consumption, and can execute tasks which are quite flexible and even more flexible compared with the traditional large spacecraft at a cost far lower than that of the traditional large spacecraft. Under the background of rapid development of the aerospace industry, economy has become a core driving force for promoting technical evolution, and the novel satellite which is small, light, low in cost and reliable in function is promoted to gradually replace a traditional large, complex and expensive system. The economic advantages of small satellites are increasingly prominent due to the close correlation of the transmission cost with the mass and volume of the load, so that academic institutions, developing countries, initial enterprises and even high and medium emerging user groups have the ability to participate in space tasks. At present, small satellites such as pico-satellites and nano-satellites are widely applied to tasks such as short-term monitoring, communication relay, orbit insertion, shadow region telemetry support, high-level atmospheric mapping and the like in a near-earth orbit, a moon and a planetary orbit, and the small satellites exhibit remarkable advantages of high cost performance and rapid deployment. However, the platform still faces the outstanding challenges in the aspect of propulsion, the existing propulsion technology has the problems of large volume and difficult integration, and the existing propulsion technology cannot provide high-precision attitude control and orbital maneuver capability for small satellites on the premise of not excessively increasing the system quality. Disclosure of Invention The invention aims to solve the technical problems that the structure size is large and integration is difficult to realize in the existing micro satellite propulsion technology. In one aspect of the invention, a micro-propeller is provided. The micro-propeller includes: a silicon substrate provided with a heating chamber and a Laval nozzle, wherein an outlet of the heating chamber is communicated with the Laval nozzle, and the heating chamber is used for containing ultrapure water; A heating electrode provided on the silicon substrate and at least partially located on the heating chamber to be in contact with ultrapure water in the heating chamber, the heating electrode being electrically connected to an external power supply; and a glass substrate disposed on the silicon substrate and the heating electrode. In some embodiments, the laval nozzle comprises a tapered section, a throat and a diverging section in sequence in the extending direction, one end of the throat is connected with the tapered section, the other end of the throat is connected with the diverging section, the width of the tapered section in the extending direction is gradually reduced, and the width of the diverging section in the extending direction is gradually increased. In some embodiments, the micro-propeller further comprises an elastic membrane and an induction electrode group, the glass substrate is arranged on the elastic membrane and is provided with a hollowed part, the hollowed part and the elastic membrane form a liquid metal groove, the liquid metal groove is correspondingly arranged with the laval nozzle and is used for placing liquid metal, the induction electrode group comprises a first liquid metal induction electrode and a second liquid metal induction electrode, the first liquid metal induction electrode is arranged above the glass substrate, and the second liquid metal induction electrode is arranged below the silicon substrate and is correspondingly arranged with the laval nozzle. In some embodiments, the liquid metal tank includes a storage tank and a drop channel tank in communication with each other, the drop channel tank being located below the storage tank. In some embodiments, the micro-mover further comprises an adhesive layer through which the heater electrode is adhered to the bottom of the elastic membrane. In some embodiments, the micro-propeller further comprises a liquid metal pressurized water reservoir comprising a liquid metal vertical pump having an ultrapure water storage area for storing ultrapure water therein, and further having a liquid outlet in communication with the ultrapure water storage area, the liquid metal pressurized water reservoir being configured to provide ultrapure water to the liquid inlet of the propeller through the liquid outlet. In some embodiments, a liquid metal storage area and an inert gas isolation layer are further arranged in the liquid metal vertical