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CN-122009829-A - Belt clamping type conveying mechanism and method for transferring glass substrates across chambers

CN122009829ACN 122009829 ACN122009829 ACN 122009829ACN-122009829-A

Abstract

The invention discloses a belt clamping type conveying mechanism and a method for transferring glass substrates across chambers, and relates to the technical field of glass substrate conveying, wherein the mechanism comprises a feeding assembly and a conveying assembly; the feeding assembly comprises a feeding frame and feeding pieces arranged on two sides of the feeding frame, and the feeding pieces are used for feeding the glass substrates to the conveying assembly at intervals. According to the invention, the glass substrates are put on the conveying assembly at intervals through the feeding assembly, the conveying assembly is provided with the clamping pieces which automatically clamp when the glass substrates fall, the edges of the glass substrates are clamped and fixed, and then the glass substrates are conveyed along the track by the conveying trolley in a cross-chamber manner.

Inventors

  • Wan Kunjun
  • PAN MINGHUA
  • ZHENG YUANHAO
  • DONG HUANXIANG

Assignees

  • 江苏美客鼎嵘智能装备制造有限公司

Dates

Publication Date
20260512
Application Date
20260302

Claims (9)

  1. 1. A belt clamping type conveying mechanism for transferring glass substrates across a chamber is characterized by comprising a feeding assembly (1) and a conveying assembly (2); The feeding assembly (1) comprises a feeding frame (11) and feeding pieces (12) arranged at two sides of the feeding frame (11), and the feeding pieces (12) are used for feeding glass substrates onto the conveying assembly (2) at intervals; the conveying assembly (2) comprises a track (21) and conveying vehicles (22) arranged on the track (21), frame plates (23) are arranged on two sides of the top of each conveying vehicle (22), and clamping pieces (24) are arranged at two ends of each frame plate (23); The frame plate (23) of the conveying assembly (2) is used for bearing the glass substrate put in by the feeding assembly (1), and is clamped and fixed by the clamping piece (24) and then conveyed.
  2. 2. The belt clamping type conveying mechanism for transferring glass substrates across a chamber according to claim 1, wherein the feeding piece (12) comprises feeding belts (121) arranged on two sides of the feeding frame (11) and rolling shafts (122) penetrating through two ends of the inner side of the feeding belts (121), bearing seats (123) are connected to two ends of each rolling shaft (122) in penetrating mode, and the bearing seats (123) are arranged on the feeding frame (11).
  3. 3. The belt clamping type conveying mechanism for transferring glass substrates across a chamber according to claim 2, wherein a plurality of clamping grooves (1211) are formed in the outer side of the feeding belt (121) in an equidistant annular manner, and the width of each clamping groove (1211) is matched with the thickness of the glass substrates.
  4. 4. The belt clamping type conveying mechanism for transferring glass substrates across a chamber according to claim 2, wherein worm gears (124) are arranged at one ends of two rollers (122) at the lower layer, a driving shaft (125) is arranged above the worm gears (124), worm gears (126) are arranged at two sides of the driving shaft (125), and the worm gears (126) on the driving shaft (125) are meshed with the worm gears (124) of the rollers (122); The driving shaft (125) is located at the outer sides of the two worms (126) and is also connected with a bearing seat (127) in a penetrating mode, one end of the driving shaft (125) is connected with a motor (128), and the bearing seat (127) and the motor (128) are both arranged on the feeding frame (11).
  5. 5. The belt clamping type conveying mechanism for transferring glass substrates across a chamber according to claim 4, wherein worm wheels (124) and worms (126) on two sides of the feeding frame (11) are arranged in a mirror image mode, supports (13) are further arranged on two sides of the feeding frame (11), and the supports (13) are used for supporting the feeding frame (11).
  6. 6. The belt clamping type conveying mechanism for transferring glass substrates across a chamber according to claim 5, wherein the clamping piece (24) comprises a clamping plate (241) rotatably mounted on a frame plate (23), a rubber backing plate (231) is arranged at the top of the frame plate (23), a spring (242) and a rubber pressing plate (243) are arranged on the inner side of the clamping plate (241), one end of the spring (242) is connected with the clamping plate (241), and the other end of the spring (242) is connected with the rubber pressing plate (243).
  7. 7. The transport mechanism with grip for transporting glass substrates across a chamber according to claim 6, wherein the pressing plate includes a bending portion (2411) and a pressing portion (2412), the pressing portion (2412) is located outside the frame plate (23), and the pressing portion (2412) is of an S-shaped bent structure.
  8. 8. The conveying mechanism with clamping type for transferring glass substrates across the chamber according to claim 7, wherein a rotating shaft (244) is arranged at one end of the bending part (2411) in a penetrating manner, two ends of the rotating shaft (244) are connected with supporting seats (245), and the supporting seats (245) are fixed on the frame plate (23); the rotating shaft (244) is positioned at two sides of the bending part (2411) and is sleeved with a torsion spring (246), one end of the torsion spring (246) is clamped at the inner side of the bending part (2411), and the other end of the torsion spring (246) is abutted to the top of the frame plate (23).
  9. 9. The method for transporting a glass substrate across a chamber with a gripper-type transport mechanism according to claim 8, comprising the steps of: S1, stacking a glass substrate into a feeding frame (11), and controlling a conveying vehicle (22) to move the glass substrate below the feeding frame (11); S2, starting a motor (128), driving a driving shaft (125) to rotate through the motor (128), driving two rollers (122) at the lower layer to rotate in opposite directions towards the inner side of a feeding frame (11) through transmission of a worm (126) of a worm wheel (124) by the driving shaft (125), and driving a feeding belt (121) to rotate in opposite directions towards the inner side of the feeding frame (11) through the rollers (122); s3, sequentially clamping the glass substrates stacked in the feeding frame (11) into a clamping groove (1211) of the feeding belt (121), conveying the glass substrates downwards at intervals until the glass substrate at the lowest layer falls on a frame plate (23) of the conveying vehicle (22), and stopping a motor (128); S4, when the glass substrate falls, the glass substrate is contacted with a pressure-bearing part (2412) of a pressing plate, the pressure-bearing part (2412) and the whole pressing plate are pushed to turn inwards under the action of pressure, and a rubber pressing plate (243) on the inner side of the pressing plate is tightly pressed on the glass substrate through a spring (242), so that the glass substrate is clamped and fixed; S5, controlling the conveying vehicle (22) to carry the glass substrate to move along the track (21) to carry the glass substrate across the cavity, lifting the glass substrate after the glass substrate is conveyed to a designated place, overturning and opening the pressing plate under the action of the torsion spring (246), taking out the glass substrate, and finally resetting the conveying vehicle (22) for next round of conveying.

Description

Belt clamping type conveying mechanism and method for transferring glass substrates across chambers Technical Field The invention relates to the technical field of glass substrate conveying, in particular to a belt clamping type conveying mechanism and method for transferring glass substrates across a chamber. Background In the semiconductor display industry, such as liquid crystal panels, OLEDs, photovoltaic cells or high-end glass coating industries, large and ultra-thin glass substrates need to be transported between a plurality of process chambers with high precision and no pollution, and the following problems exist in traditional roller transport or vacuum adsorption transport: the roller is easy to produce surface pollution and damage, the roller is possibly polluted or locally pressed to cause microcracks, and the vacuum adsorption conveying has the problems of short conveying distance, large equipment floor area and the like. Accordingly, the present invention provides a belt-gripping type conveying mechanism and method for transferring glass substrates across chambers to solve the above-mentioned problems. Disclosure of Invention The invention aims to provide a belt clamping type conveying mechanism and a method for transferring glass substrates across a chamber, so as to solve the problems in the prior art. In order to achieve the aim, the invention provides the technical scheme that the belt clamping type conveying mechanism for transferring the glass substrate across the cavity comprises a feeding assembly and a conveying assembly; The feeding assembly comprises a feeding frame and feeding pieces arranged at two sides of the feeding frame, and the feeding pieces are used for feeding the glass substrates to the conveying assembly at intervals; the conveying assembly comprises a track and a conveying vehicle arranged on the track, wherein frame plates are arranged on two sides of the top of the conveying vehicle, and clamping pieces are arranged at two ends of each frame plate; The frame plate of the conveying assembly is used for bearing the glass substrate put in by the feeding assembly, and is clamped and fixed by the clamping piece and then conveyed. As a preferable scheme of the invention, the feeding part comprises feeding belts arranged on two sides of the feeding frame and rolling shafts arranged on two ends of the inner side of the feeding belts in a penetrating manner, two ends of each rolling shaft are connected with bearing seats in a penetrating manner, and the bearing seats are arranged on the feeding frame. As a preferable scheme of the invention, a plurality of clamping grooves are arranged on the outer side of the feeding belt in an equidistant mode, and the width of each clamping groove is matched with the thickness of the glass substrate. One end of each of the two rollers at the lower layer is provided with a worm wheel, a driving shaft is arranged above the worm wheel, two sides of the driving shaft are provided with worms, and the worms on the driving shaft are meshed with the worm wheels of the rollers; the driving shaft is located outside the two worms and is also connected with a bearing seat in a penetrating mode, one end of the driving shaft is connected with a motor, and the bearing seat and the motor are both installed on the feeding frame. As a preferable scheme of the invention, worm gears and worms on two sides of the feeding frame are arranged in a mirror image mode, and brackets are arranged on two sides of the feeding frame and used for supporting the feeding frame. As a preferable scheme of the invention, the clamping piece comprises a clamping plate rotatably arranged on the frame plate, a rubber backing plate is arranged at the top of the frame plate, a spring and a rubber pressing plate are arranged on the inner side of the clamping plate, one end of the spring is connected with the clamping plate, and the other end of the spring is connected with the rubber pressing plate. As a preferable scheme of the invention, the pressing plate comprises a bending part and a pressure bearing part, wherein the pressure bearing part is positioned on the outer side of the frame plate and is of an S-shaped bending structure. One end of the bending part is provided with a rotating shaft in a penetrating way, two ends of the rotating shaft are connected with supports, and the supports are fixed on the frame plate; the rotating shaft is positioned at two sides of the bending part and is sleeved with a torsion spring, one end of the torsion spring is clamped at the inner side of the bending part, and the other end of the torsion spring is abutted to the top of the frame plate. A method of transporting a glass substrate across a chamber with a gripper-type transport mechanism, comprising the steps of: s1, stacking a glass substrate into a feeding frame, and controlling a conveying vehicle to move the glass substrate to the position below the feeding frame; S2, starting a motor,