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CN-122009842-A - Vacuum conveying platform

CN122009842ACN 122009842 ACN122009842 ACN 122009842ACN-122009842-A

Abstract

The application discloses a vacuum conveying platform, which relates to the technical field of semiconductors and comprises a vacuum conveying chamber, a magnetic levitation base, a movable carrying platform and a bearing adjusting mechanism, wherein the magnetic levitation base can generate a magnetic field in the vacuum conveying chamber, the movable carrying platform comprises at least one bearing station, the movable carrying platform can respond to the magnetic field to move in a suspended manner in the vacuum conveying chamber, the bearing adjusting mechanism is arranged on the movable carrying platform, and the bearing adjusting mechanism can adjust the horizontal angle and/or the height of the bearing station. According to the application, the mobile carrier can freely move in the vacuum chamber by adopting a magnetic suspension trackless conveying mode, so that the mobile carrier is compatible with processing chambers of different types and different specifications, the suitability of conveying materials such as wafers is improved, the layout of the processing chambers is more flexible, the materials are efficiently circulated among the processing chambers by a plurality of mobile carriers, and the conveying efficiency of the materials such as wafers is improved.

Inventors

  • LI LI
  • LUO JUN
  • JI GUOJUN

Assignees

  • 宸微设备科技(苏州)有限公司

Dates

Publication Date
20260512
Application Date
20260413

Claims (10)

  1. 1. A vacuum transfer platform, comprising: A vacuum transfer chamber (10); -a magnetic levitation base (20), the magnetic levitation base (20) being capable of generating a magnetic field within the vacuum transfer chamber (10); -a mobile carrier (30), said mobile carrier (30) being at least one, and said mobile carrier (30) comprising at least one carrying station (31) for carrying a material (80), said mobile carrier (30) being capable of moving in suspension within said vacuum transfer chamber (10) in response to said magnetic field; The bearing adjusting mechanism (40), the bearing adjusting mechanism (40) is arranged on the movable carrying platform (30), and the bearing adjusting mechanism (40) is used for adjusting the horizontal angle and/or the height of the bearing station (31).
  2. 2. The vacuum transfer platform of claim 1, wherein the load adjustment mechanism (40) comprises a turntable capable of horizontally rotating the material (80) and a material lift capable of vertically lifting the material (80).
  3. 3. Vacuum transfer platform according to claim 1, characterized in that the number of carrying stations (31) is plural, and that the mobile carrier (30) is provided with a distance adjusting assembly (32) capable of adjusting the relative position between the carrying stations (31).
  4. 4. Vacuum transfer platform according to claim 1, characterized in that at least one of the magnetic levitation base (20) and the mobile carrier (30) is provided with a position sensing element capable of monitoring the position of the mobile carrier (30).
  5. 5. Vacuum transfer platform according to claim 1, characterized in that the mobile carrier (30) is further provided with a number of obstacle avoidance sensing elements (33).
  6. 6. The vacuum transfer platform according to any one of claims 1 to 5, further comprising an atmospheric transfer module (50), a conversion module (60) and a plurality of reaction modules (70), wherein the atmospheric transfer module (50) is in communication with the conversion module (60), and the reaction modules (70) and the conversion modules (60) are respectively enclosed on the outer side of the vacuum transfer chamber (10) and are in communication with the vacuum transfer chamber (10).
  7. 7. The vacuum transfer platform of claim 6, wherein the conversion module (60) comprises a number of conversion chambers (61), and the conversion chambers (61) are used for pressure transition of the material (80).
  8. 8. The vacuum transfer platform of claim 6, wherein the reaction module (70) comprises a number of reaction chambers (71), the reaction chambers (71) being configured to process the material (80).
  9. 9. Vacuum transfer platform according to claim 8, characterized in that the reaction chamber (71) comprises a plurality of carrying tables (711) capable of carrying the material (80), and that each carrying table (711) is arranged in a stacked manner.
  10. 10. The vacuum transfer platform of claim 9, wherein the reaction chamber (71) further comprises a stage lift capable of vertically lifting the stage (711).

Description

Vacuum conveying platform Technical Field The application relates to the technical field of semiconductors, in particular to a vacuum conveying platform. Background In conventional semiconductor manufacturing equipment, wafer transfer in a vacuum environment is mostly dependent on a stationary or track type vacuum robot, and the transfer platform is typically spread around a central robot, which transfers between the vacuum atmosphere transfer chamber and the peripheral process chamber along a predetermined fixed track. However, this rigid transfer architecture with a robotic arm as the core suffers from significant drawbacks. Firstly, the flexibility is poor, when process chambers of different types or specifications need to be replaced, for example, a single process chamber is replaced by a duplex process chamber, or the center distance of two cavities of the duplex process chamber is changed, the configuration, the stroke and even the whole conveying platform of the mechanical arm often need to be redesigned, so that the universality of equipment is poor, and the upgrading and reconstruction cost is high. And secondly, the transfer efficiency is lower, the motion mode of the mechanical arm is single, point-to-point single-task transfer can be generally only carried out, parallel and efficient transfer of a plurality of wafers among a plurality of chambers is difficult to realize, and part of process chambers are easy to be in an idle waiting state, so that the wafer processing efficiency of the whole machine is limited. Therefore, how to improve the suitability and the transfer efficiency of wafer transfer is a technical problem to be solved by those skilled in the art. Disclosure of Invention Accordingly, the present application is directed to a vacuum transfer platform for improving wafer transfer suitability and transfer efficiency. In order to achieve the above purpose, the present application provides the following technical solutions: A vacuum transfer platform, comprising: A vacuum transfer chamber; A magnetic levitation base capable of generating a magnetic field within the vacuum transfer chamber; A mobile carrier, said mobile carrier being at least one and comprising at least one load station for carrying material, said mobile carrier being responsive to said magnetic field for levitating movement within said vacuum transfer chamber; the bearing adjusting mechanism is arranged on the movable carrying platform and is used for adjusting the horizontal angle and/or the height of the bearing station. Optionally, in the vacuum conveying platform, the load-bearing adjusting mechanism includes a turntable and a material lifting member, the turntable can horizontally rotate the material, and the material lifting member can vertically lift the material. Optionally, in the above vacuum transfer platform, the number of the carrying stations is plural, and a distance adjusting component capable of adjusting the relative positions between the carrying stations is disposed on the moving carrier. Optionally, in the vacuum transfer platform, at least one of the magnetic levitation base and the mobile carrier is provided with a position sensing element capable of monitoring a position of the mobile carrier. Optionally, in the vacuum conveying platform, a plurality of obstacle avoidance sensing elements are further arranged on the mobile carrier. Optionally, in the above vacuum conveying platform, the vacuum conveying device further comprises an atmospheric transmission module, a conversion module and a plurality of reaction modules, wherein the atmospheric transmission module is communicated with the conversion module, and the reaction modules and the conversion modules are respectively enclosed on the outer side of the vacuum conveying chamber and are communicated with the vacuum conveying chamber. Optionally, in the vacuum conveying platform, the conversion module includes a plurality of conversion chambers, and the conversion chambers are used for performing pressure transition on the materials. Optionally, in the vacuum transfer platform, the reaction module includes a plurality of reaction chambers configured to process the material. Optionally, in the vacuum conveying platform, the reaction chamber includes a plurality of carrying tables capable of holding the materials, and each carrying table is stacked and distributed at intervals. Optionally, in the vacuum transfer platform, the reaction chamber further includes a stage lifting member capable of vertically lifting the stage. According to the vacuum conveying platform, the magnetic field is generated in the vacuum conveying cavity through the magnetic levitation base, so that at least one movable carrying platform can move in a levitation mode in the vacuum conveying cavity, and meanwhile, the angle and the height of a carrying station can be adjusted through the carrying adjusting mechanism arranged on the movable carrying platform so as to adapt to p