CN-122010034-A - Simple movable backflow device

CN122010034ACN 122010034 ACN122010034 ACN 122010034ACN-122010034-A

Abstract

The invention discloses simple movable backflow equipment which comprises a movable frame, a pipeline assembly, a first electronic scale, a second electronic scale and a second electronic scale, wherein the pipeline assembly comprises a nitrogen inlet, a first air outlet, a first liquid inlet, a first liquid outlet, a first air inlet, an emptying port and a vacuum port, the nitrogen inlet is communicated with an external nitrogen gas source, the vacuum port is communicated with an external vacuum generator, the first electronic scale is arranged adjacent to the movable frame and used for weighing the mass of a large barrel, and the second electronic scale is arranged adjacent to the first electronic scale and used for weighing the mass of a small barrel. The invention can thoroughly remove the air in the pipeline, prevent the air from entering to deteriorate the solution, and is more convenient to move and fill by adopting the movable frame.

Inventors

JIN ZHONGHUA
JIN HUIZHE

Assignees

上海鑫华夏半导体设备有限公司

Dates

Publication Date: 20260512
Application Date: 20260410

Claims (8)

1. A simple mobile back-flow apparatus comprising: A movable frame; The pipeline assembly comprises a nitrogen inlet, a first air outlet, a first liquid inlet, a first liquid outlet, a first air inlet, an evacuation port and a vacuum port; The first electronic scale is arranged adjacent to the movable frame and is used for weighing the mass of the big barrel; And the second electronic scale is arranged adjacent to the first electronic scale and is used for weighing the mass of the small barrel.
2. The easy mobile reverse flow apparatus of claim 1 wherein the tubing assembly further comprises: The first connecting pipe is sequentially connected with a second connecting pipe, a first control valve, a third connecting pipe, a fourth connecting pipe and a fifth connecting pipe; the nitrogen inlet is arranged on the second connecting pipe, and a second control valve is arranged on the second connecting pipe; The third connecting pipe is provided with a third control valve and a first pressure gauge; a fourth control valve is arranged on the fourth connecting pipe; the fifth connecting pipe is provided with a fifth control valve and a sixth control valve, and the first air outlet is arranged at the lower end of the fifth connecting pipe; The sixth connecting pipe is connected with the fourth connecting pipe and the fifth connecting pipe respectively; The seventh connecting pipe is connected with the sixth connecting pipe, and a seventh control valve and an eighth control valve are arranged on the seventh connecting pipe; An eighth connecting pipe, which is communicated with the seventh connecting pipe, and is connected with a ninth connecting pipe and a tenth connecting pipe; A ninth control valve is arranged on the ninth connecting pipe; a tenth control valve and an eleventh control valve are arranged on the tenth connecting pipe; the eleventh connecting pipe is communicated with the sixth connecting pipe, and the eleventh connecting pipe is sequentially connected with a twelfth connecting pipe, a twelfth control valve, a thirteenth connecting pipe, a thirteenth control valve, a fourteenth connecting pipe and a fourteenth control valve; A second pressure gauge is arranged on the fourteenth connecting pipe; the ninth connecting pipe and the tenth connecting pipe are respectively communicated with the eleventh connecting pipe; A fifteenth control valve is arranged on the ninth connecting pipe; A sixteenth control valve and a seventeenth control valve are arranged on the tenth connecting pipe; an eighteenth control valve is arranged on the twelfth connecting pipe, and the emptying port is arranged at the tail part of the twelfth connecting pipe; the thirteenth connecting pipe is provided with a nineteenth control valve.
3. The simple mobile back-flow apparatus as defined in claim 2, wherein a twentieth control valve is further provided on the fourteenth connection pipe.
4. The simple mobile back-flow apparatus as defined in claim 2, wherein a pair of filters for filtering impurities in the solution are further connected to the eighth connection pipe.
5. The simple mobile back-flow apparatus as in claim 4 further comprising a mounting frame removably coupled to said movable frame, said filter being disposed on said mounting frame.
6. The simple mobile backflow device as claimed in claim 2, wherein the eighth connecting pipe is further connected with a sampling pipe, the sampling pipe is provided with a twenty-first control valve, and the lower end of the sampling pipe is provided with a sampling port.
7. The simple mobile back-flowing equipment as set forth in claim 1, wherein a first air inlet pipe and a first liquid outlet pipe are installed on the vat; a twenty-second control valve is arranged on the first air inlet pipe, the lower end of the first air inlet pipe is communicated with the big barrel, a second air inlet is arranged at the upper end of the first air inlet pipe, and the second air inlet can be communicated with the first air outlet; the first liquid outlet pipe is provided with a twenty-third control valve, the lower end of the first liquid outlet pipe is communicated with the big barrel, the upper end of the first liquid outlet pipe is provided with a second liquid outlet, and the second liquid outlet can be communicated with the first liquid inlet.
8. The simple mobile back-flowing equipment as set forth in claim 1, wherein a first liquid inlet pipe and a first air outlet pipe are installed on the keg; a twenty-fourth control valve is arranged on the first liquid inlet pipe, the lower end of the first liquid inlet pipe is communicated with the small barrel, the upper end of the first liquid inlet pipe is provided with a second liquid inlet, and the second liquid inlet can be communicated with the first liquid outlet; The first air outlet pipe is provided with a twenty-fifth control valve, the lower end of the first air outlet pipe is communicated with the small barrel, the upper end of the first air outlet pipe is provided with a second air outlet, and the second air outlet can be communicated with the first air inlet.

Description

Simple movable backflow device Technical Field The invention relates to the technical field of backflow equipment, in particular to simple movable backflow equipment. Background In the prior art, part of chemical solution cannot contact air during filling, so the filling is usually carried out in a fixed place, and in the case, most of the chemical solution is filled in a big barrel, however, when a user wants to fill the solution into a small barrel from the big barrel, the solution is always directly filled in the small barrel, so part of air can enter the small barrel to influence the quality of the solution, and the solution in the small barrel can be deteriorated and cannot be used in severe cases. Disclosure of Invention According to an embodiment of the present invention, there is provided a simple mobile backflow apparatus including: A movable frame; The pipeline assembly comprises a nitrogen inlet, a first air outlet, a first liquid inlet, a first liquid outlet, a first air inlet, an emptying port and a vacuum port; the nitrogen inlet is communicated with an external nitrogen source, and the vacuum port is communicated with an external vacuum generator; The first electronic scale is arranged adjacent to the movable frame and is used for weighing the mass of the big barrel; and the second electronic scale is arranged adjacent to the first electronic scale and is used for weighing the mass of the small barrel. Further, the piping component further comprises: The first connecting pipe is sequentially connected with a second connecting pipe, a first control valve, a third connecting pipe, a fourth connecting pipe and a fifth connecting pipe; the nitrogen inlet is arranged on a second connecting pipe, and a second control valve is arranged on the second connecting pipe; the third connecting pipe is provided with a third control valve and a first pressure gauge, and the first pressure gauge is used for measuring the pressure in the first connecting pipe; a fourth control valve is arranged on the fourth connecting pipe; the fifth connecting pipe is provided with a fifth control valve and a sixth control valve, and the first air outlet is arranged at the lower end of the fifth connecting pipe; The sixth connecting pipe is connected with the fourth connecting pipe and the fifth connecting pipe respectively; the seventh connecting pipe is connected with the sixth connecting pipe, and a seventh control valve and an eighth control valve are arranged on the seventh connecting pipe; an eighth connecting pipe which is communicated with the seventh connecting pipe, and is connected with a ninth connecting pipe and a tenth connecting pipe; a ninth control valve is arranged on the ninth connecting pipe; A tenth control valve and an eleventh control valve are arranged on the tenth connecting pipe; An eleventh connecting pipe communicated with the sixth connecting pipe, and sequentially connected with a twelfth connecting pipe, a twelfth control valve, a thirteenth connecting pipe, a thirteenth control valve, a fourteenth connecting pipe and a fourteenth control valve; A second pressure gauge is arranged on the fourteenth connecting pipe; the ninth connecting pipe and the tenth connecting pipe are respectively communicated with the eleventh connecting pipe; A fifteenth control valve is arranged on the ninth connecting pipe; a sixteenth control valve and a seventeenth control valve are arranged on the tenth connecting pipe; an eighteenth control valve is arranged on the twelfth connecting pipe, and an emptying port is arranged at the tail part of the twelfth connecting pipe; the thirteenth connecting pipe is provided with a nineteenth control valve. Further, a twentieth control valve is further provided on the fourteenth connection pipe. Further, a pair of filters for filtering impurities in the solution are further connected to the eighth connection pipe. Further, the filter device comprises a mounting frame which is detachably connected with the movable frame, and the filter is placed on the mounting frame. Further, the eighth connecting pipe is also connected with a sampling pipe, a twenty-first control valve is arranged on the sampling pipe, and a sampling port is arranged at the lower end of the sampling pipe. Further, a first air inlet pipe and a first liquid outlet pipe are arranged on the big barrel; a twenty-second control valve is arranged on the first air inlet pipe, the lower end of the first air inlet pipe is communicated with the big barrel, the upper end of the first air inlet pipe is provided with a second air inlet, and the second air inlet can be communicated with the first air outlet through a corrugated pipe; the first drain pipe is provided with a twenty-third control valve, the lower end of the first drain pipe is communicated with the vat, the upper end of the first drain pipe is provided with a second liquid outlet, and the second liquid outlet can be communicated with the first liquid inlet thr