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CN-122010536-A - Preparation method of electrostatic chuck ceramic disc for optimizing printing process

CN122010536ACN 122010536 ACN122010536 ACN 122010536ACN-122010536-A

Abstract

The invention discloses a preparation method of an electrostatic chuck ceramic disc for optimizing a printing process, which belongs to the technical field of electrostatic chucks and comprises the steps of S1, preparing an adaptive printing slurry, adding organic bentonite and triethanolamine into the basic slurry, continuing ball milling to obtain an improved printing slurry, S2, performing accurate screen printing, printing at a printing speed of 5mm/s to obtain a printing green body, S3, performing three-stage gradient drying, namely placing the printing green body into a drying box, introducing nitrogen with the purity of 99.99%, keeping the pressure in the box to be 0.01MPa, firstly performing constant-temperature drying at 25 ℃ for 30min, then performing constant-temperature drying at a heating rate of 2-3 ℃ per min to reach 40 ℃, performing constant-temperature drying for 30min, finally performing constant-temperature drying at a heating rate of 2-3 ℃ per min to reach 60 ℃, S4, performing lamination, namely placing the dried printing green body and other processed green bodies into a sintering furnace, and sintering the laminated body in an atmosphere.

Inventors

  • SHI ZHEYUAN
  • YANG JIA
  • LI JUN

Assignees

  • 君原电子科技(海宁)有限公司

Dates

Publication Date
20260512
Application Date
20251231

Claims (6)

  1. 1. A method of preparing an electrostatic chuck ceramic disc for optimizing a printing process, the method comprising: s1, preparing adaptive printing paste: preparing basic slurry, namely weighing silver powder, alumina micropowder, ethylcellulose, dibutyl phthalate and terpineol, the surface of which is coated with 1 weight percent of yttrium oxide, and adding the silver powder, the alumina micropowder, the ethylcellulose, the dibutyl phthalate and the terpineol into a planetary ball mill for ball milling to obtain the basic slurry; Thixotropic regulation, namely adding organic bentonite and triethanolamine into the prepared basic slurry, continuously ball milling, regulating the viscosity of the slurry to 15000-20000 mPa.s, and obtaining improved printing slurry; s2, accurate screen printing: Printing by adopting a scraper with an angle of 45 DEG, a pressure of 0.2MPa and a printing speed of 5mm/s, and blowing nitrogen to the surface after printing to obtain a printing green body; s3, three-stage gradient drying: putting the printing green compact into a drying box, introducing nitrogen with the purity of 99.99%, keeping the pressure in the box at 0.01MPa, firstly drying at the constant temperature of 25 ℃ for 30min, then heating to 40 ℃ at the heating rate of 2-3 ℃ per min, drying at the constant temperature for 30min, finally heating to 60 ℃ at the heating rate of 2-3 ℃ per min, and drying at the constant temperature for 30min; S4, laminating: stacking the dried printing green bricks and other processed green bricks together in a positioning and stacking mode to form a complete stacked body, wherein the stacking process controls pressure, time and temperature so as to prevent the green bricks from being incompletely and tightly attached; s5, atmosphere sintering: and (3) putting the laminated body into a sintering furnace, introducing nitrogen to replace air in the sintering furnace, heating to 600 ℃, preserving heat, heating to 1200 ℃, preserving heat after switching the mixed atmosphere of argon and hydrogen, cooling to 600 ℃ after sintering, switching the nitrogen atmosphere, and naturally cooling to room temperature to obtain the alumina electrostatic chuck ceramic disc.
  2. 2. The method for manufacturing an electrostatic chuck ceramic disk for optimizing a printing process according to claim 1, wherein, in the step S1, Preparing basic slurry, namely taking 50 parts by weight of silver powder with the surface coated with 1wt% of yttrium oxide, 10 parts by weight of alumina micropowder, 5 parts by weight of ethylcellulose, 2 parts by weight of dibutyl phthalate and 15 parts by weight of terpineol, adding into a planetary ball mill, and performing ball milling at a speed of 200r/min for 4 hours to obtain the basic slurry, wherein the particle size of the silver powder is 0.5-1 mu m, and the particle size of the alumina micropowder is 0.1-0.2 mu m; thixotropic regulation, namely adding 0.5 part of organic bentonite and 0.3 part of triethanolamine into the prepared basic slurry, continuously ball milling for 30min, regulating the viscosity of the slurry to 15000-20000 mPas at 25 ℃ and obtaining the improved printing slurry.
  3. 3. The method for preparing the electrostatic chuck ceramic disc for optimizing the printing process according to claim 1, wherein in the step S2, a 300-mesh stainless steel screen plate is selected for screen printing, the screen tension is 25N/cm, the thickness of the plate film is 15 μm, the positioning precision error is less than or equal to +/-0.02 mm, and a polyurethane scraper with the Shore hardness of 70A is selected.
  4. 4. The method for preparing an electrostatic chuck ceramic disc for optimizing a printing process according to claim 1, wherein in the step S3, the flow of nitrogen is 0.2L/min, the drying is performed at a constant temperature of 25 ℃ for 30min, the temperature is raised to 40 ℃ at 2 ℃/min, the drying is performed at a constant temperature for 30min, the temperature is raised to 60 ℃ at 2 ℃/min, and the drying is performed at a constant temperature for 30min.
  5. 5. The method for preparing an electrostatic chuck ceramic disc for optimizing a printing process according to claim 1, wherein in the step S4, the pressure is 20 t-200 t, the temperature is 30-80 ℃ and the time is 1-10 min during lamination.
  6. 6. The method for preparing the electrostatic chuck ceramic disc for optimizing the printing process according to claim 1, wherein in the step S5, nitrogen is introduced into a sintering furnace for replacement for 30min, the temperature is raised to 600 ℃ at 5 ℃ per min, the temperature is kept for 90min, the temperature is raised to 1200 ℃ at 3 ℃ per min, the argon-hydrogen mixed atmosphere is switched to be introduced, the temperature is kept for 180min, the volume ratio of argon to hydrogen in the argon-hydrogen mixed atmosphere is 9:1, the flow is 0.5L/min, and after sintering is completed, the nitrogen atmosphere is switched when the temperature is lowered to 600 ℃ at 4 ℃ per min, and the aluminum oxide electrostatic chuck ceramic disc is obtained by naturally cooling to room temperature.

Description

Preparation method of electrostatic chuck ceramic disc for optimizing printing process Technical Field The invention relates to the technical field of electrostatic chucks, in particular to a preparation method of an electrostatic chuck ceramic disc for optimizing a printing process. Background Alumina electrostatic chucks have been a core component in the field of precision electronics manufacturing such as semiconductor wafer processing and liquid crystal panel manufacturing, because of their excellent high temperature resistance, insulation properties, and electrostatic adsorption stability. The screen printing process is a key link for preparing the alumina electrostatic chuck, and is used for printing electrode patterns, insulating layers and other functional structures on the surface of an alumina ceramic matrix, and the drying quality of a printing green body directly determines the subsequent sintering effect, so that the adsorption force uniformity, the service life and the working reliability of the electrostatic chuck are affected. In the prior art, a single-temperature constant-temperature drying or irregular heating drying mode is adopted for drying the printing green body, and the printing green body has the obvious technical defects that firstly, when the temperature is too high, the slurry solvent on the surface of the printing green body is quickly evaporated to form a compact shell to prevent internal solvent from being discharged, so that the solvent remained in the green body after drying is caused, bubbles and cracks are easily generated due to rapid volatilization of the solvent in the subsequent sintering process, and if the temperature is too low, the drying efficiency is low, the solvent is insufficient to volatilize, the sintering quality is also influenced, secondly, the irregular heating drying is easy to cause a larger temperature gradient in the green body, internal stress is caused, and further the defects of pattern deformation, edge cracking and the like are caused. In addition, the existing drying process does not form cooperative matching with the characteristics of printing paste and the pretreatment state of a matrix, so that the generation of drying defects is further aggravated, and the qualification rate of the alumina electrostatic chuck product is lower. Disclosure of Invention The invention aims to provide a preparation method of an electrostatic chuck ceramic disc for optimizing a printing process, so as to solve the problems in the background technology. In order to solve the technical problems, the technical scheme of the invention is as follows: A method of preparing an electrostatic chuck ceramic disc for optimizing a printing process, the method comprising: s1, preparing adaptive printing paste: preparing basic slurry, namely weighing silver powder, alumina micropowder, ethylcellulose, dibutyl phthalate and terpineol, the surface of which is coated with 1 weight percent of yttrium oxide, and adding the silver powder, the alumina micropowder, the ethylcellulose, the dibutyl phthalate and the terpineol into a planetary ball mill for ball milling to obtain the basic slurry; Thixotropic regulation, namely adding organic bentonite and triethanolamine into the prepared basic slurry, continuously ball milling, regulating the viscosity of the slurry to 15000-20000 mPa.s, and obtaining improved printing slurry; s2, accurate screen printing: Printing by adopting a scraper with an angle of 45 DEG, a pressure of 0.2MPa and a printing speed of 5mm/s, and blowing nitrogen to the surface after printing to obtain a printing green body; s3, three-stage gradient drying: putting the printing green compact into a drying box, introducing nitrogen with the purity of 99.99%, keeping the pressure in the box at 0.01MPa, firstly drying at the constant temperature of 25 ℃ for 30min, then heating to 40 ℃ at the heating rate of 2-3 ℃ per min, drying at the constant temperature for 30min, finally heating to 60 ℃ at the heating rate of 2-3 ℃ per min, and drying at the constant temperature for 30min; S4, laminating: stacking the dried printing green bricks and other processed green bricks together in a positioning and stacking mode to form a complete stacked body, wherein the stacking process controls pressure, time and temperature so as to prevent the green bricks from being incompletely and tightly attached; s5, atmosphere sintering: and (3) putting the laminated body into a sintering furnace, introducing nitrogen to replace air in the sintering furnace, heating to 600 ℃, preserving heat, heating to 1200 ℃, preserving heat after switching the mixed atmosphere of argon and hydrogen, cooling to 600 ℃ after sintering, switching the nitrogen atmosphere, and naturally cooling to room temperature to obtain the alumina electrostatic chuck ceramic disc. Preferably, in the step S1, Preparing basic slurry, namely taking 50 parts by weight of silver powder with the surface coated with 1wt% of yttriu