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CN-122013112-A - High-temperature-resistant composite lubricating film in vacuum environment and preparation method thereof

CN122013112ACN 122013112 ACN122013112 ACN 122013112ACN-122013112-A

Abstract

The invention provides a preparation method of a high-temperature-resistant composite lubricating film in a vacuum environment, and relates to the technical field of functional materials. And depositing a titanium (Ti) transition layer on the surface of the metal substrate by a magnetron sputtering process, and sequentially and alternately depositing a silver (Ag) layer and a molybdenum disulfide (MoS 2 ) layer on the surface of the transition layer. The bonding strength between the film and the metal matrix is obviously improved through the gradient heterojunction constructed by interface engineering, and the critical load of scratches is more than 30N. Under severe conditions at 300 ℃ in vacuum, the wear-resistant alloy exhibits an ultra-low friction coefficient (< 0.15) and a wear life of >5×105r. The invention is particularly suitable for long-life lubrication of key kinematic pairs of a high-temperature transmission mechanism of a spacecraft.

Inventors

  • WANG KELIANG
  • CAO ZHEN
  • ZHANG KAIFENG
  • ZHOU HUI
  • HAO HONG
  • ZHAO MENG
  • FENG XINGGUO
  • ZHENG YUGANG

Assignees

  • 兰州空间技术物理研究所

Dates

Publication Date
20260512
Application Date
20251109

Claims (11)

  1. 1. A high-temperature resistant composite lubricating film in a vacuum environment is characterized by comprising a transition layer and a lubricating layer, wherein, The transition layer is deposited on the surface of the substrate, and the lubricating layer is deposited on the surface of the transition layer; the first lubricating layer and the second lubricating layer are sequentially and alternately laminated, and the first lubricating layer is close to the transition layer, and the second lubricating layer is far away from the transition layer; and the adjacent first lubricating layer and the adjacent second lubricating layer are one unit, and the lubricating layers comprise 10-15 units.
  2. 2. The high temperature resistant composite lubricating film in a vacuum environment of claim 1, wherein the substrate is a metal substrate.
  3. 3. The high temperature resistant composite lubricating film in a vacuum environment according to claim 1, wherein the raw material of the transition layer is titanium (Ti) and the thickness is 0.3-0.5 μm.
  4. 4. The high temperature resistant composite lubricating film in a vacuum environment according to claim 1, wherein the raw material of the first lubricating layer is silver (Ag), the raw material of the second lubricating layer is molybdenum disulfide (MoS 2 ), and the thickness ratio of the first lubricating layer to the second lubricating layer in the one unit is (2:1) - (1:2).
  5. 5. The high temperature resistant composite lubricating film in a vacuum environment of claim 1, wherein the average coefficient of friction is less than 0.15 and the wear life exceeds 50 ten thousand revolutions under a vacuum environment (< 5 x 10 -3 Pa) at 300 ℃.
  6. 6. The method for preparing the high-temperature-resistant composite lubricating film in the vacuum environment according to claims 1 to 4, which is characterized by comprising the following steps: step 1, preprocessing a substrate; step 2, depositing a transition layer on the surface of the substrate by utilizing a high-power magnetron sputtering technology; And 3, utilizing a magnetron sputtering technology, adopting a sequential alternate deposition mode, sequentially depositing a first lubricating layer and a second lubricating layer on the surface of the transition layer in an alternate manner, and forming an alternate lamination structure to obtain the high-temperature-resistant composite lubricating film in a vacuum environment.
  7. 7. The method according to claim 6, wherein the pretreatment of the substrate in step 1 comprises grinding and polishing the surface of the substrate, then washing and drying in acetone solution and alcohol solution in sequence, and finally bombarding the surface of the substrate with the cation layer ion source under vacuum condition to remove impurities.
  8. 8. The method according to claim 6 or 7, wherein the bombarding the surface of the substrate with the cation layer ion source under vacuum condition comprises the steps of placing the dried substrate into a vacuum furnace chamber, vacuumizing to below 5 x 10 -3 Pa, heating the vacuum furnace chamber to 70-90 ℃, starting the cation layer ion source to bombard the surface of the substrate, introducing argon into the vacuum furnace chamber at a voltage of 1000-1200V to enable the vacuum degree to be 0.3-1 Pa, and enabling the substrate bias voltage to be-300-500V, wherein the bombarding time is 20-30 min.
  9. 9. The preparation method of the high-power magnetron sputtering device according to claim 6, wherein in the step 2, the high-power magnetron sputtering condition is that the purity of a high-power magnetron sputtering target is more than or equal to 99.9%, the target voltage is 600-650V, the working environment is argon atmosphere (pressure is 0.5-1 Pa), the sputtering power is 5-8 kW, the substrate bias is-70-100V, and the deposition time is 10-12 min.
  10. 10. The method according to claim 6, wherein in the step 3, the magnetron sputtering condition of the first lubrication layer is that the working environment is argon atmosphere (pressure is 0.5-1 Pa), the sputtering target voltage of the first lubrication layer is 500-600V, the sputtering power is 3-6 kW, the substrate bias is-70 to-100V, and the deposition time is 2-5 min; the magnetron sputtering condition of the second lubricating layer is that the working environment is argon atmosphere (the pressure is 0.5-1 Pa), the sputtering target voltage of the second lubricating layer is 900-1100V, the sputtering power is 2-4 kW, the substrate bias is-50 to-70V, and the deposition time is 2-5 min.
  11. 11. The method of claim 6, wherein the preparing is performed in a vacuum oven chamber, wherein a workpiece table is disposed in the vacuum oven chamber, and wherein a high-power magnetron sputtering target, a first lubrication layer magnetron sputtering target, a second lubrication layer magnetron sputtering target, and an anode layer ion source are disposed on a side surface of the vacuum oven chamber, respectively.

Description

High-temperature-resistant composite lubricating film in vacuum environment and preparation method thereof Technical Field The invention relates to the technical field of functional materials, in particular to a high-temperature-resistant composite lubricating film in a vacuum environment and a preparation method thereof. Background In the application field of extreme environments (vacuum and high temperature) of a spacecraft transmission system, the lubrication and abrasion control of the surface of a friction pair are one of the core technical problems for guaranteeing the long-term stable operation of the equipment. The conventional liquid lubricant has problems of leakage risk, high-temperature gasification, failure in a vacuum environment, etc. (for example, a stable oil film state cannot be maintained in a space environment), and the applicability thereof is greatly limited. Solid lubricating films have been widely studied as alternatives, but there is still a key challenge that pure MoS 2 undergoes pyrolysis at high temperatures, and evaporation of surface sulfur atoms directly leads to a reduction in the lubricating layer thickness, with a sharp rise in the coefficient of friction. Therefore, development of a solid lubricating film having a long life in a vacuum high-temperature environment is a technical problem to be solved by those skilled in the art. Disclosure of Invention In order to achieve the above purpose, the application provides a high-temperature resistant composite lubricating film in a vacuum environment and a preparation method thereof, wherein the high-temperature resistant composite lubricating film has long service life in the vacuum high-temperature environment and is suitable for movable parts in the aerospace vacuum high-temperature environment. In order to achieve the above purpose, the present invention provides the following technical solutions: in a first aspect, the invention provides a high-temperature resistant composite lubricating film in a vacuum environment, which comprises a transition layer and a lubricating layer, wherein, The transition layer is deposited on the surface of the substrate, and the lubricating layer is deposited on the surface of the transition layer; the first lubricating layer and the second lubricating layer are sequentially and alternately laminated, and the first lubricating layer is close to the transition layer, and the second lubricating layer is far away from the transition layer; and the adjacent first lubricating layer and the adjacent second lubricating layer are one unit, and the lubricating layers comprise 10-15 units. Further, the substrate is preferably a metal substrate. Further, the raw material of the transition layer is titanium (Ti) with the thickness of 0.3-0.5 μm. Further, the raw material of the first lubricating layer is silver (Ag), and the raw material of the second lubricating layer is molybdenum disulfide (MoS 2). Further, in the unit, the thickness ratio of the first lubricating layer to the second lubricating layer is (2:1) - (1:2). Further, the high-temperature resistant composite lubricating film in the vacuum environment has an average friction coefficient of less than 0.15 and a wear life of more than 50 ten thousand revolutions under the vacuum environment (< 5×10 -3 Pa) at 300 ℃. Further, the hardness of the MoS 2 -based composite lubricating film is 4-5 GPa (GB/T25898). In a second aspect, the invention provides a method for preparing a high-temperature-resistant composite lubricating film in a vacuum environment, which comprises the following steps: step 1, preprocessing a substrate; step 2, depositing a transition layer on the surface of the substrate by utilizing a high-power magnetron sputtering technology; And 3, utilizing a magnetron sputtering technology, adopting a sequential alternate deposition mode, sequentially depositing a first lubricating layer and a second lubricating layer on the surface of the transition layer in an alternate manner, and forming an alternate lamination structure to obtain the high-temperature-resistant composite lubricating film in a vacuum environment. Further, in the step 1, the substrate pretreatment comprises grinding and polishing the surface of the substrate, then cleaning and drying in acetone solution and alcohol solution in sequence, and finally bombarding the surface of the substrate by utilizing the cation layer ion source under vacuum condition to remove impurities. Further, the method for bombarding the surface of the substrate by utilizing the cationic layer ion source under the vacuum condition comprises the steps of placing the dried substrate into a vacuum furnace chamber, vacuumizing to below 5 multiplied by 10 -3 Pa, heating the vacuum furnace chamber to 70-90 ℃, starting the cationic layer ion source to bombard the surface of the substrate, and introducing argon into the vacuum furnace chamber to enable the vacuum degree to be 0.3-1 Pa, the substrate bias vo