CN-122013124-A - Sputtering distance adjustable coating equipment

CN122013124ACN 122013124 ACN122013124 ACN 122013124ACN-122013124-A

Abstract

The invention discloses a coating device with adjustable sputtering distance, which aims to complete the rotation and distance adjustment of a target assembly through the matching of a distance adjustment module and a driving mechanism so as to improve the quality of coating, and the technical scheme comprises a device main body and the driving mechanism; the vacuum coating equipment comprises an equipment main body, wherein a process cavity is formed in the equipment main body, a conveying mechanism and a target assembly are arranged in the process cavity, a coating position is arranged on the conveying mechanism, the conveying mechanism is used for conveying a substrate frame to the coating position, the target assembly is used for coating a substrate on the substrate frame on the coating position along the Y-axis direction, a driving mechanism is in transmission connection with the target assembly and is used for driving the target assembly to rotate, a distance adjusting module is arranged on the equipment main body and is in transmission connection with the target assembly and the driving mechanism, and the distance adjusting module is used for driving the target assembly and the driving mechanism to move along the Y-axis direction so as to adjust the distance between the target assembly and the conveying mechanism, and belongs to the technical field of vacuum coating.

Inventors

PENG YI
REN XIAODONG
SONG XINGUO
Cen Fuda

Assignees

广东先导稀材股份有限公司

Dates

Publication Date: 20260512
Application Date: 20260129

Claims (9)

1. The sputtering distance-adjustable film plating equipment is characterized by comprising an equipment main body and a driving mechanism, wherein a process cavity is arranged in the equipment main body, a conveying mechanism and a target assembly are arranged in the process cavity, a film plating position is arranged on the conveying mechanism, the conveying mechanism is used for conveying a substrate frame to the film plating position, and the target assembly is used for plating films on the substrate frame at the film plating position along the Y-axis direction; the driving mechanism is in transmission connection with the target assembly and is used for driving the target assembly to rotate; The device comprises a device main body, wherein the device main body is provided with a distance adjusting module, the distance adjusting module is in transmission connection with the target assembly and the driving mechanism, and the distance adjusting module is used for driving the target assembly and the driving mechanism to move along the Y-axis direction so as to adjust the distance between the target assembly and the conveying mechanism.
2. The sputtering distance-adjustable coating apparatus according to claim 1, wherein the driving mechanism comprises a first motor, a first bellows, and a first transmission member; The first motor is positioned outside the process cavity and connected with the distance adjusting module, one end of the first corrugated pipe is connected with the outer wall of the equipment main body, and the other end of the first corrugated pipe is connected with the first motor; one end of a rotating shaft of the first motor penetrates through the first corrugated pipe and the equipment main body along the Y-axis direction and then stretches into the process cavity, and the rotating shaft of the first motor is movably connected with the equipment main body; the first transmission piece is arranged in the process cavity, one end of the first transmission piece is connected with a rotating shaft of the first motor, the other end of the first transmission piece is in transmission connection with a target base of the target assembly, and the first motor drives the target base of the target assembly to rotate through transmission of the first transmission piece.
3. The sputtering distance-adjustable coating apparatus according to claim 2, wherein the first transmission member comprises a first guide rail, a first decelerator, and a first synchronization belt; The first guide rail is arranged in the process cavity, the length direction of the first guide rail extends along the Y-axis direction, one end of the first guide rail is connected with the inner wall, close to the target assembly, of the process cavity, and a first sliding block is arranged on the first guide rail; The first speed reducer is fixedly arranged on the first sliding block, a rotating shaft of the first motor is connected with the first speed reducer, and the first synchronous belt is sleeved on a target base of the target assembly and a power output end of the first speed reducer.
4. The sputtering distance-adjustable coating apparatus according to claim 3, wherein the driving mechanism further comprises a second motor, a second bellows, and a second transmission member; the second motor is positioned outside the process cavity and connected with the distance adjusting module, the second motor is positioned below the first motor, one end of the second corrugated pipe is connected with the outer wall of the equipment main body, and the other end of the second corrugated pipe is connected with the second motor; one end of a rotating shaft of the second motor penetrates through the second corrugated pipe and the equipment main body along the Y-axis direction and then stretches into the process cavity, and the rotating shaft of the second motor is movably connected with the equipment main body; The second transmission piece is arranged in the process cavity, two ends of the second transmission piece are connected with a rotating shaft of the second motor, the other end of the second transmission piece is in transmission connection with the magnetic rod base of the target assembly, and the second motor drives the magnetic rod base of the target assembly to rotate through transmission of the second transmission piece.
5. The sputtering distance-adjustable coating apparatus according to claim 4, wherein the second transmission member comprises a second guide rail, a second decelerator, and a second timing belt; The second guide rail is arranged in the process cavity and is positioned below the first guide rail, the length direction of the second guide rail extends along the Y-axis direction, one end of the second guide rail is connected with the inner wall of the process cavity, which is close to the target assembly, the second guide rail is positioned below the first guide rail, and a second sliding block is arranged on the second guide rail; The second speed reducer is fixedly arranged on the second sliding block, a rotating shaft of the second motor is connected with the second speed reducer, and the second synchronous belt is sleeved on the magnetic rod base of the target assembly and the power output end of the second speed reducer.
6. The sputtering distance-adjustable coating equipment according to claim 4, wherein the target assembly is vertically arranged, the distance-adjusting module comprises a first linear module, a second linear module, a third linear module and a third corrugated pipe which are arranged on the equipment main body, and the first linear module, the second linear module and the third linear module are sequentially arranged from top to bottom; a sliding piece is arranged on the first linear module, one end of the third corrugated pipe is connected with the outer wall of the equipment main body, and the other end of the third corrugated pipe is connected with the sliding piece; The device comprises a target assembly, a first linear module, a second linear module, a third corrugated pipe, a device main body, a process cavity, a connecting piece, a first linear module, a second corrugated pipe, a third corrugated pipe, a first linear module, a second linear module, a third linear module, a fourth linear module, a third linear module and a third linear module, wherein the connecting piece is arranged on the sliding piece, one end of the connecting piece penetrates through the third corrugated pipe and the device main body in the Y-axis direction and then stretches into the process cavity, the connecting piece is movably connected with the device main body, and the upper end of the target assembly is rotationally connected with the bottom of the connecting piece; the first motor is connected to the second linear module, the second linear module is used for driving the first motor to move along the Y-axis direction, the second motor is connected to the third linear module, and the third linear module is used for driving the second motor to move along the Y-axis direction.
7. The sputtering distance-adjustable coating apparatus according to claim 6, wherein the bottom wall of the process chamber is further provided with a slide rail, the length direction of the slide rail extends along the Y-axis direction, a sliding seat is provided on the slide rail, and the lower end of the magnetic rod base of the target assembly is rotatably connected with the sliding seat.
8. The sputtering distance-adjustable coating apparatus according to claim 1, wherein the number of the target assemblies is plural, the plural target assemblies are arranged at intervals along the X-axis direction, the driving mechanisms are in one-to-one correspondence with the target assemblies, and the distance adjusting modules are in one-to-one correspondence with the driving mechanisms.
9. The sputtering distance-adjustable coating apparatus according to claim 1, wherein a vacuum system is further provided on the apparatus main body, the vacuum system being configured to form a vacuum environment in the process chamber.

Description

Sputtering distance adjustable coating equipment Technical Field The invention belongs to the field of vacuum coating, and particularly relates to coating equipment with an adjustable sputtering distance. Background The magnetron sputtering coating is a coating technology which takes a coating material as a target cathode, bombards the target material by utilizing argon ions to generate cathode sputtering and deposits target material atoms on a workpiece by sputtering to form a deposition layer. CN108774731a discloses a vacuum chamber substrate frame lifting mechanism of a vacuum coating machine, two cylinders are fixed below a bottom plate of the vacuum chamber, piston rod ends of the two cylinders are connected to the same end plate, two ends of the end plate are respectively provided with a support rod, the support rods penetrate through the bottom plate of the vacuum chamber and extend into the vacuum chamber, top ends of the support rods are connected with a support seat, a sealing plate is arranged at the position of the support rods penetrating through the bottom plate of the vacuum chamber, a corrugated pipe is sleeved outside the support rods between the vacuum chamber and the end plate, and two ends of the corrugated pipe are respectively connected with the sealing plate and the end plate in a sealing manner. In the above technical scheme, mainly utilize two sets of cylinders to stretch or shrink simultaneously, drive bellows tensile or shrink and inside bracing piece decline or rise, the supporting seat is along guide bar upper and lower rectilinear motion, the supporting seat rises and can jack up the substrate frame and make substrate frame and transport mechanism break away from, because when the coating film to the substrate of different materials have different requirements to the thickness of coating film, and in the above-mentioned technical scheme, the distance between substrate frame and the target is fixed when the coating film, this makes the workman be difficult to with the distance between adjustment substrate frame and the target according to the material of substrate, be difficult to satisfy diversified coating film technology demand. Disclosure of Invention The invention mainly aims to provide a coating device with an adjustable sputtering distance, which aims to complete rotation and distance adjustment of a target assembly through matching of a distance adjustment module and a driving mechanism so as to improve the quality of coating. According to a first aspect of the invention, a coating device with an adjustable sputtering distance is provided, which comprises a device main body and a driving mechanism, wherein a process cavity is arranged in the device main body, a conveying mechanism and a target assembly are arranged in the process cavity, a coating position is arranged on the conveying mechanism, the conveying mechanism is used for conveying a substrate frame to the coating position, and the target assembly is used for coating a substrate on the substrate frame on the coating position along the Y-axis direction; the driving mechanism is in transmission connection with the target assembly and is used for driving the target assembly to rotate; The device comprises a device main body, wherein a distance adjusting module is arranged on the device main body and is in transmission connection with a target assembly and a driving mechanism, and the distance adjusting module is used for driving the target assembly and the driving mechanism to move along the Y-axis direction so as to adjust the distance between the target assembly and a conveying mechanism. In the above-mentioned sputtering distance-adjustable film plating apparatus, the driving mechanism includes a first motor, a first bellows, and a first transmission member; the first motor is positioned outside the process cavity and connected with the distance adjusting module, one end of the first corrugated pipe is connected with the outer wall of the equipment main body, and the other end of the first corrugated pipe is connected with the first motor; One end of a rotating shaft of the first motor penetrates through the first corrugated pipe and the equipment main body along the Y-axis direction and then stretches into the process cavity, and the rotating shaft of the first motor is movably connected with the equipment main body; The first transmission piece is arranged in the process cavity, one end of the first transmission piece is connected with a rotating shaft of the first motor, the other end of the first transmission piece is in transmission connection with a target base of the target assembly, and the first motor drives the target base of the target assembly to rotate through transmission of the first transmission piece. In the above-mentioned sputtering distance-adjustable coating apparatus, the first transmission member includes a first guide rail, a first decelerator, and a first synchronization belt; The first