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CN-122013128-A - Neodymium iron boron magnetism body surface coating film device

CN122013128ACN 122013128 ACN122013128 ACN 122013128ACN-122013128-A

Abstract

The invention discloses a neodymium iron boron magnet surface coating device, which relates to the technical field of coating, and comprises a coating machine main body, wherein the coating machine main body is provided with a vacuum tank body and a sealing cover, a plurality of sputtering targets are arranged in the vacuum tank body, each sputtering target comprises a target material, a target shell and a pressing ring, a magnetic circuit module is arranged in each target shell, a cooling cavity is arranged in each magnetic circuit module, a diversion water channel is arranged in each cooling cavity to divide the cooling cavity into an upper cavity and a lower cavity, a water outlet is formed in each lower cavity, the diversion water channel is of a spiral downward extending closed-loop structure, an upward-protruding water stopping boss is arranged at the joint of the head and the tail of the diversion water channel, a water inlet is arranged at the upstream side of each water stopping boss, and a drainage through groove is formed at the downstream side and communicated with the lower cavity. The invention accelerates the flow velocity of the cooling liquid by guiding the cooling liquid, effectively eliminates the local stagnation area of the traditional circular water channel, increases the thermal contact area, and simultaneously solves the problem of accumulation and blockage of the magnetic steel corrosion products, so that impurities are smoothly discharged along with the cooling liquid.

Inventors

  • PEI MINGGANG
  • LIU XIANYIN
  • PAN YUHE
  • LI XIAODING

Assignees

  • 大同翔磁科技有限公司

Dates

Publication Date
20260512
Application Date
20260408

Claims (9)

  1. 1. The utility model provides a neodymium iron boron magnetism body surface coating film device, includes coating film machine main part (1), its characterized in that, coating film machine main part (1) is equipped with vacuum tank body (2) and sealed lid (3), and vacuum tank body (2) inside sets up a plurality of sputtering targets (4), sets up rotary sample base (5) on sealed lid (3), sputtering target (4) include target (6), target casing (7) and clamping ring (8), clamping ring (8) press fastening target (6) in target casing (7) upper surface, and clamping ring (8) are established shield (9) with target casing (7) outside cover, fixed connection flange seat (10) below target casing (7), shield (9) and flange seat (10) fixed connection; The utility model discloses a vacuum cooling device for the air conditioner, including target casing (7), vacuum chamber (11) inside, installation magnetic circuit module (12) in vacuum chamber (11), lay cooling chamber (13) in magnetic circuit module (12), set up water conservancy diversion water course (15) in cooling chamber (13), separate cooling chamber (13) into cavity (16) and cavity (17) down, delivery port (18) are seted up to cavity (17) down, and water conservancy diversion water course (15) wholly are spiral downwardly extending's closed loop construction, and its head and the tail meet department is equipped with bellied stagnant water boss (19) that makes progress, the upstream side of stagnant water boss (19) sets up water inlet (20), and drainage through groove (21) are seted up to cavity (17) down to the downstream side, and water inlet (20) are located cavity (16) down, magnetic circuit module (12) are including can reciprocate in order to adjust magnetic seat (24) of cavity (16) size to adapt to different operating mode cooling demands and supplementary impurity in the discharging cooling chamber (13).
  2. 2. The neodymium iron boron magnet surface coating device according to claim 1, wherein the magnetic circuit module (12) comprises an inner magnet (22), an outer magnet (23) and a magnet seat (24), the bottom of the magnet seat (24) is elastically connected with the bottom wall of the vacuum cavity (11) through a spring (25), a mounting groove (26) is formed in the center of the upper surface of the magnet seat (24) and used for mounting the inner magnet (22), the outer magnet (23) and the inner magnet (22) are coaxially arranged, and the outer magnet (23) surrounds the outer side of the inner magnet (22).
  3. 3. The neodymium iron boron magnet surface coating device according to claim 2, wherein the diversion water channel (15) is fixedly connected with the magnet base (24) and takes the central axis of the mounting groove (26) as a spiral center; The surface of the diversion water channel (15) is obliquely arranged towards the spiral center, and the notch of the drainage through groove (21) is arranged on one side, close to the installation groove (26), of the diversion water channel (15).
  4. 4. A neodymium iron boron magnet surface coating device according to claim 3, wherein the water outlet (18) is arranged on the magnet seat (24), a water outlet pipe (27) is fixedly arranged on the water outlet (18), the top end of the water outlet pipe (27) is flush with the upper surface of the magnet seat (24), and the upper surface of the magnet seat (24) is obliquely arranged towards the water outlet (18); The water inlet (20) is fixedly provided with a water inlet pipe (28), the magnetic seat (24) is correspondingly provided with a through hole (29) at the position of the water inlet (20) for the water inlet pipe (28) to pass through, and the top end of the water inlet pipe (28) is flush with the upper surface of the diversion water channel (15).
  5. 5. The neodymium iron boron magnet surface coating device according to claim 4, wherein the target shell (7) comprises an upper shell (30) and a lower shell (31), the upper shell (30) and the lower shell (31) are connected in a threaded sealing manner, and a vacuum cavity (11) is formed in the upper shell and the lower shell together; The water inlet pipe (28) and the water outlet pipe (27) penetrate through the lower shell (31) and the flange seat (10) and are connected with an external water tank, sealing bolts (33) are sleeved at positions of the water inlet pipe (28) and the water outlet pipe (27) penetrating through the lower shell (31) and the flange seat (10), and the sealing bolts (33) are fixedly connected with the lower shell (31) and the flange seat (10).
  6. 6. A neodymium iron boron magnet surface coating device according to claim 5, characterized in that the outer magnet (23) is a ring magnet or a magnet group consisting of a plurality of magnets in a ring array.
  7. 7. The neodymium iron boron magnet surface coating device according to claim 6, wherein a section of elastic corrugated pipe is arranged at the position corresponding to the spring (25) at the part of the water inlet pipe (28) and the water outlet pipe (27) which are positioned in the vacuum cavity (11).
  8. 8. The neodymium iron boron magnet surface coating device according to claim 7, wherein a downward vortex protrusion (14) is arranged on the inner wall of the target shell (7) at a position corresponding to the cooling cavity (13), and the rotation direction of the vortex protrusion (14) is consistent with the spiral trend of the diversion water channel (15).
  9. 9. The neodymium iron boron magnet surface coating device according to claim 8, wherein the compression ring (8) is fixedly connected with the target shell (7) through threads; Insulating pads are arranged between the pressing ring (8) and the shielding cover (9) and between the target shell (7) and the shielding cover (9).

Description

Neodymium iron boron magnetism body surface coating film device Technical Field The invention relates to the technical field of coating, in particular to a coating device for the surface of a neodymium-iron-boron magnet. Background The sputtering coating on the surface of the NdFeB magnet is a process for preparing a protective coating on the surface of the magnet by utilizing a Physical Vapor Deposition (PVD) technology, and the core principle is that high-energy particles (such as argon ions) bombard a target material (usually metal nickel, chromium, aluminum or alloy) so that target material atoms are sputtered and deposited on the surface of the NdFeB magnet to form a uniform and compact film. The film mainly plays a key protection role in isolating corrosive media and preventing the magnet from being oxidized and corroded, and can improve the appearance (such as providing metallic luster or color decoration), enhance the surface hardness and the wear resistance, and even endow specific conductive performance. Compared with the traditional electroplating, the sputtering coating has the remarkable advantages of denser and uniform film layer, stronger binding force, better environmental protection (no harmful chemical solution) and the like, can be carried out at relatively low temperature, effectively avoids the damage of high temperature to the magnetic performance of the neodymium-iron-boron magnet, is a key surface treatment technology for improving the durability and reliability of the high-performance neodymium-iron-boron magnet in a severe environment, and is widely applied to the fields with higher requirements on the stability and durability of the magnet, such as new energy automobiles, electronic equipment, medical appliances and the like. The core structure of the sputtering coating machine comprises a vacuum cavity (providing a high vacuum or low pressure inert gas environment), a sputtering target (internally provided with a high-purity target material and generating plasma through the action of an electric field and a magnetic field), a sample base (carrying and rotating a workpiece to be coated to ensure uniform film layer), a vacuum system (comprising a mechanical pump, a molecular pump and the like and establishing and maintaining vacuum), a power supply system (providing direct current, radio frequency or pulse power to excite sputtering) and a gas control system (accurately introducing reaction gas such as argon). During the sputtering coating process, a large amount of heat is generated by the sputtering target, and if the temperature of the target is too high, the sputtering rate and the film quality are directly affected. Therefore, a cooling system (a magnetron sputtering target disclosed in related patent reference CN 201520580983.0) is specially arranged in the sputtering target, heat is taken away by circulating cooling liquid, the target is prevented from overheating, the performance stability of the target and the continuous proceeding of the sputtering process are ensured, however, the existing sputtering target cooling system has the following problems that firstly, a circular water channel is adopted in the existing cooling cavity, a local stagnation area is easy to appear, the flow rate of the cooling agent in the cooling cavity is closely related to the cooling effect, the existence of the stagnation area can reduce the cooling efficiency and influence the cooling effect, secondly, the magnetic steel is soaked in the cooling liquid, the water rust and corrosion slag generated by corrosion and decomposition of the magnetic steel cannot be smoothly discharged along with the cooling liquid, and the corrosion slag is easy to accumulate in the cooling cavity, so that the blockage is caused, and the normal operation of the cooling system is influenced. Disclosure of Invention The invention aims to solve the problems in the background art and provides a neodymium iron boron magnet surface coating device. In order to achieve the above purpose, the present invention adopts the following technical scheme: The utility model provides a neodymium iron boron magnetism body surface coating film device, includes the coating film machine main part, the coating film machine main part is equipped with vacuum tank body and sealed lid, the vacuum tank body is inside to be set up a plurality of sputtering targets, set up rotatory sample base station on the sealed lid, the sputtering target includes target, target casing and clamping ring, the clamping ring is pressed the fastening with the target and is fixed in target casing upper surface, the clamping ring overlaps with the target casing outside and establishes the shield cover, fixed connection flange seat below the target casing, shield cover and flange seat fixed connection; The utility model discloses a vacuum cooling device for the air conditioner, including target casing, magnetic circuit module, cooling chamber, lower cavity, upper ch