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CN-122013132-A - Carrier mechanism and coating equipment

CN122013132ACN 122013132 ACN122013132 ACN 122013132ACN-122013132-A

Abstract

The invention provides a carrier mechanism and coating equipment, and belongs to the technical field of semiconductor material surface treatment equipment. The magnetic fluid cooling device comprises a mounting plate, a bearing assembly, a magnetic fluid rotating shaft assembly, a cooling piece, a lifting driving mechanism, a cooling piece, a bearing assembly and a cooling period reduction device, wherein the mounting plate is provided with a first side which is positioned in a vacuum environment and a second side which is positioned in an atmospheric environment, the bearing assembly is positioned on the first side of the mounting plate, the magnetic fluid rotating shaft assembly penetrates through the mounting plate and comprises a first rotor and a first stator, the first stator is fixedly connected with the mounting plate, one end of the first rotor is connected with the bearing assembly, the other end of the first rotor is connected with a rotation driving mechanism which is positioned on the second side of the mounting plate, the cooling piece is positioned between the mounting plate and the bearing assembly, the lifting driving mechanism is positioned on the second side of the mounting plate so as to drive the cooling piece to move between a first position and a second position, the cooling piece is thermally coupled with the mounting plate so as to cool the magnetic fluid rotating shaft assembly, and the bearing assembly is thermally coupled with the bearing assembly at the second position so as to cool different objects in different periods, failure of the magnetic fluid structure due to high-temperature conduction can be avoided, and the cooling period of the bearing assembly is shortened.

Inventors

  • GAO SHENGXIANG
  • Feng ce
  • MU FENGWEN
  • TAN XIANGHU

Assignees

  • 天津中科晶禾电子科技有限责任公司

Dates

Publication Date
20260512
Application Date
20260409

Claims (10)

  1. 1. A carrier mechanism, comprising: A mounting plate (11) having a first side located in a vacuum environment and a second side located in an atmospheric environment; A carrier assembly (2) disposed on a first side of the mounting plate (11); The magnetic fluid rotation shaft assembly (71) penetrates through the mounting plate (11) and comprises a first rotor and a first stator which are in sealing rotation fit, the first stator is fixedly connected with the mounting plate (11), one end of the first rotor is connected with the bearing assembly (2), and the other end of the first rotor is connected with the rotation driving mechanism (72) positioned on the second side of the mounting plate (11); A cooling element (3) arranged between the first side of the mounting plate (11) and the carrier assembly (2); A lifting driving mechanism (5) which is configured on the second side of the mounting plate (11) and is used for driving the cooling piece (3) to move between a first position and a second position; in the first position the cooling element (3) is thermally coupled to a first side of the mounting plate (11) for cooling the magnetic fluid spin shaft assembly (71), and in the second position the cooling element (3) is thermally coupled to the carrier assembly (2) for cooling the carrier assembly (2).
  2. 2. The carrier mechanism according to claim 1, further comprising a cover (12) disposed on the second side of the mounting plate (11), wherein the cover (12) and the mounting plate (11) enclose an inner cavity (13), the inner cavity (13) is in communication with the atmosphere, and the lifting driving mechanism (5) and the rotation driving mechanism (72) are disposed in the inner cavity (13).
  3. 3. The stage mechanism according to claim 1, wherein the rotation driving mechanism (72) includes a motor fixedly connected to the second side of the mounting plate (11) and a belt transmission assembly through which the motor is in transmission connection with the first rotor.
  4. 4. The carrier mechanism according to claim 1, wherein the lifting driving mechanism (5) comprises a cylinder (51), a lifting column (52) and a corrugated pipe (53), one end of the lifting column (52) is connected with the cylinder (51), the other end of the lifting column is connected with the cooling piece (3), the corrugated pipe (53) is sleeved on the periphery of the lifting column (52), one end of the corrugated pipe (53) is in sealing connection with the mounting plate (11), and the other end of the corrugated pipe is in sealing connection with the lifting column (52).
  5. 5. The carrier mechanism according to claim 1, wherein the cooling member (3) is an annular member, a cooling channel (31) is provided inside the cooling member (3), and the cooling member (3) is annularly provided on the outer periphery of the magnetic fluid rotation shaft assembly (71).
  6. 6. The carrier mechanism according to claim 1, characterized in that the first rotor is connected with the carrier assembly (2) by a flange, a heat insulation pad being arranged between the flange and the carrier assembly (2).
  7. 7. The carrier mechanism according to claim 1, further comprising a thimble assembly (4), wherein the thimble assembly (4) is connected with the carrier assembly (2), the thimble assembly (4) comprises a thimble body (42), the upper end surface of the thimble body (42) is flush with or lower than the upper end surface of the carrier assembly (2) when the cooling member (3) is in the first position, and the cooling member (3) is abutted with the thimble assembly (4) when the cooling member (3) is in the second position, and the upper end surface of the thimble body (42) is higher than the upper end surface of the carrier assembly (2) to support a wafer to leave the carrier assembly (2).
  8. 8. Coating apparatus comprising a vacuum chamber and a stage mechanism according to any one of claims 1 to 7, said stage mechanism being located within said vacuum chamber.
  9. 9. The plating apparatus according to claim 8, further comprising a magnetic fluid turnover shaft assembly (61), the magnetic fluid turnover shaft assembly (61) comprising a second stator and a second rotor, the second stator being fixedly connected to a cavity wall of the vacuum chamber, the second rotor being fixedly connected to the stage mechanism located in the vacuum chamber.
  10. 10. The plating apparatus according to claim 9, further comprising a turnover driving mechanism (62) drivingly connected to said second rotor for driving the second rotor to rotate to turn said stage mechanism over.

Description

Carrier mechanism and coating equipment Technical Field The invention belongs to the technical field of semiconductor material surface treatment equipment, and particularly relates to a carrier mechanism and coating equipment. Background In the semiconductor material coating equipment, the carrying platform mechanism needs to integrate the overturning and autorotation functions, namely, when the mechanical arm carries out wafer loading, the carrying surface of the carrying platform mechanism needs to be kept horizontal to ensure the loading accuracy, after the loading is finished, the carrying platform mechanism drives the wafer to overturn to a coating station of about 120 degrees (the overturning angle can be adjusted according to the process requirement of 0-180 degrees), and in the coating process, the carrying platform mechanism drives the wafer to rotate to improve the uniformity of the thickness of the coating, and meanwhile, the temperature of the wafer needs to be accurately controlled according to the structural characteristics and the process requirement of the wafer. In the coating process, the carrier assembly of the carrier mechanism is required to heat the wafer to an operating temperature of 350-500 ℃. The high temperature is easily transferred to the mounting plate through the heat conduction path, thereby affecting the magnetic fluid sealing structure thermally coupled with the mounting plate. For the magnetic fluid rotating shaft assembly, the stator is fixedly connected with the mounting plate, heat of the bearing assembly is conducted to the stator through the mounting plate, the magnetic fluid sealing structure is prone to overtemperature, for the magnetic fluid overturning shaft assembly, the rotor is fixedly connected with the mounting plate, heat of the bearing assembly is conducted to the rotor through the mounting plate, and the temperature of the magnetic fluid sealing structure is raised. The applicable temperature of the magnetic fluid sealing structure is only 0-100 ℃, the sealing performance of the magnetic fluid sealing structure is easy to be reduced at high temperature, the stability of the vacuum degree of the vacuum chamber is affected, and the quality of the wafer coating film is further reduced. Meanwhile, after the wafer coating is finished, the heat dissipation efficiency of the bearing assembly in a vacuum environment is low, the cooling time is long, the temperature cannot be quickly reduced to the safe temperature for taking the wafer, the process period is prolonged, and the production efficiency is reduced. Disclosure of Invention Aiming at the defects of the prior art, the invention aims to provide a carrier mechanism and coating equipment, which are used for solving the problems that a magnetic fluid sealing structure in the prior art is invalid due to high temperature of a mounting plate and cooling is slow after coating of a bearing component, and improving the reliability and service life of the magnetic fluid sealing structure, the vacuum degree stability of a vacuum chamber, the quality of wafer coating and the production efficiency. In order to achieve the aim of the invention, the invention adopts the following technical scheme: A carrier mechanism, comprising: a mounting plate having a first side located in a vacuum environment and a second side located in an atmospheric environment; The bearing assembly is configured on the first side of the mounting plate; The magnetic fluid rotation shaft assembly penetrates through the mounting plate and comprises a first rotor and a first stator which are in sealing rotation fit, the first stator is fixedly connected with the mounting plate, one end of the first rotor is connected with the bearing assembly, and the other end of the first rotor is connected with the rotation driving mechanism positioned on the second side of the mounting plate; a cooling element disposed between the first side of the mounting plate and the carrier assembly; the lifting driving mechanism is arranged on the second side of the mounting plate and used for driving the cooling piece to move between a first position and a second position; In the first position, the cooling member is thermally coupled to a first side of the mounting plate for cooling the magnetic fluid spin shaft assembly, and in the second position, the cooling member is thermally coupled to the carrier assembly for cooling the carrier assembly. As an alternative scheme of the carrier mechanism, the carrier mechanism further comprises a cover body arranged on the second side of the mounting plate, wherein the cover body and the mounting plate enclose to form an inner cavity, the inner cavity is communicated with the atmospheric environment, and the lifting driving mechanism and the autorotation driving mechanism are arranged in the inner cavity. As an alternative scheme of the carrier mechanism, the rotation driving mechanism comprises a motor and a belt transmission asse