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CN-122013133-A - Coating system based on inert gas protection

CN122013133ACN 122013133 ACN122013133 ACN 122013133ACN-122013133-A

Abstract

The invention relates to the technical field of physical vapor deposition coating, in particular to a coating system based on inert gas protection, which aims to solve the technical problems of insufficient inert gas protection reliability, uneven quality of a coating layer, low intelligent level, easy oxidation of a sample, low gas utilization rate and the like of the existing coating equipment. The system comprises seven modules, namely a vacuum coating cavity, inert gas protection, coating execution, exhaust and tail gas treatment, temperature control, PLC intelligent control and auxiliary support, and is characterized in that the inert gas protection module constructs an inert gas supply, purification, proportioning, uniform distribution, circulation, monitoring and emergency full-flow closed-loop protection system. The invention obviously improves the reliability and the film quality of inert gas protection, improves the utilization rate of inert gas, has the advantages of high intelligent degree, convenient operation and strong universality, and can be widely suitable for the high-end coating requirements of multiple fields such as semiconductors, lithium batteries, precise optical devices and the like.

Inventors

  • GUO SHUZHOU

Assignees

  • 伊特克斯惰性气体系统（北京）有限公司

Dates

Publication Date
20260512
Application Date
20260211

Claims (10)

  1. 1. The inert gas protection-based film coating system is characterized by comprising a vacuum film coating cavity module, an inert gas protection module, a film coating execution module, an exhaust and tail gas treatment module, a temperature control module, a PLC intelligent control module and an auxiliary support module, wherein the modules are cooperatively matched, the inert gas protection whole process is accurately regulated and controlled through multi-algorithm fusion, and further automatic film coating under the whole inert gas active protection is completed, the inert gas protection module is a core innovation module, and the PLC intelligent control module is a multi-algorithm fusion carrier and is used for integrating various intelligent algorithms and driving the modules to be regulated and controlled in a linkage mode.
  2. 2. The inert gas protection-based coating system according to claim 1, wherein the vacuum coating cavity module is a sealed stainless steel cavity, the inner wall of the vacuum coating cavity module is polished and passivated, the cavity is provided with a front-back double-door, a high-light-transmission quartz glass observation window and a heat insulation partition plate, the heat insulation partition plate divides the interior of the cavity into a substrate installation area and a coating execution area, and the ultimate vacuum degree of the cavity The pressure after shutdown and pressure maintaining for 12 hours is less than or equal to 5Pa, and a tightness real-time monitoring sensor is arranged in the cavity and is linked with an algorithm module of the PLC intelligent control module, so that a leakage early warning and emergency air supplementing mechanism can be triggered.
  3. 3. The coating system based on inert gas protection according to claim 1, wherein the inert gas protection module comprises an inert gas supply unit, a gas purification unit, a dynamic self-adaptive double-channel uniform distribution unit, a multi-source inert gas intelligent proportioning unit, a gas circulation recovery unit, an atmosphere detection unit and a leakage pre-judgment and emergency air supplementing unit, and can realize inert gas purification, accurate proportioning, dynamic uniform distribution, recycling, real-time monitoring, abnormal pre-judgment and emergency remedy.
  4. 4. The inert gas protection-based coating system according to claim 3 is characterized in that the dynamic self-adaptive double-channel uniform distribution unit is integrally designed by adopting an integrated annular structure and an anode, an electromagnetic controllable spray hole, a gas concentration detection array and an active cooling loop are integrated, the aperture of the electromagnetic controllable spray hole can be dynamically adjusted within the range of 0.5-1.5 mm, 16 detection points are uniformly distributed on the gas concentration detection array, and the dynamic self-adaptive double-channel uniform distribution unit fuses a machine vision algorithm and a particle swarm optimization algorithm, so that spray parameters can be dynamically adjusted and controlled, and inert gas concentration deviation in a coating area is ensured to be less than or equal to 0.05Pa.
  5. 5. The inert gas protection-based coating system according to claim 3, wherein the multi-source inert gas intelligent proportioning unit comprises a gas mixing cavity, a proportioning regulating valve and a mixed gas detection sensor, is integrated with a genetic algorithm, can automatically optimize inert gas mixing proportion according to substrate types, film materials and coating power, the mixing proportion regulating range is 70:30-95:5, the proportion precision deviation is less than or equal to 0.5%, the leakage pre-judging and emergency air supplementing unit is integrated with a wavelet analysis algorithm and a Bayesian reasoning algorithm, the leakage pre-judging accuracy is more than or equal to 98%, and is provided with a standby inert gas steel cylinder, so that leakage amount can be automatically calculated, inert gas can be quickly supplemented, and the inert gas protection effect is maintained.
  6. 6. The coating system based on inert gas protection according to claim 1, wherein the coating execution module comprises an evaporation source assembly, a magnetron sputtering target assembly and a substrate clamping assembly, wherein the evaporation source assembly comprises an electron beam evaporation source and tungsten filament heating evaporation boat, the evaporation temperature control range is 500-3000 ℃, the magnetron sputtering target assembly is controlled in a direct current/radio frequency dual-mode and is provided with an independent cooling loop, and a rotating sample table of the substrate clamping assembly can achieve stepless speed regulation of 0-60 r/min and is linked with a particle swarm optimization algorithm to ensure coating uniformity on the surface of a substrate.
  7. 7. The coating system based on inert gas protection according to claim 1, wherein the exhaust and tail gas treatment module comprises a two-stage vacuum air extraction unit formed by connecting a molecular pump and a mechanical pump in series, and a tail gas purification unit sequentially provided with an active carbon filter and a molecular sieve dryer, wherein the air extraction speed of the vacuum air extraction unit is regulated and controlled by a PID-fuzzy self-adaptive algorithm, the processing parameters of the tail gas purification unit are optimized by a machine learning algorithm, and the further recycling of noble inert gas can be realized.
  8. 8. The inert gas protection-based film coating system according to claim 1, wherein the temperature control module comprises a closed-loop water circulation cooling system and an auxiliary heating system, the water temperature of the closed-loop water circulation cooling system is stabilized at 20-25 ℃, inert gas protection parameters are linked and controlled by a PID-fuzzy self-adaptive algorithm, the auxiliary heating system can control the environmental temperature of a cavity within a range of 25-35 ℃, the control precision is +/-2 ℃, and the auxiliary heating system is linked with an LSTM neural network algorithm, so that the risk of water vapor condensation can be prejudged and controlled in advance.
  9. 9. The inert gas protection-based film plating system according to claim 1, wherein the PLC intelligent control module is integrated with a PID-fuzzy self-adaptive algorithm, an LSTM neural network algorithm, a genetic algorithm, a particle swarm optimization algorithm, a machine learning algorithm, a wavelet analysis algorithm and a Bayesian inference algorithm to form a multi-algorithm cooperative regulation system, and has the functions of parameter setting and regulation, real-time monitoring and active early warning, automatic operation, data storage and tracing and safety protection, wherein the parameter repeatability is more than or equal to 98%, and the data storage time is more than or equal to 1 year.
  10. 10. The inert gas protection-based film coating system according to claim 1, wherein the auxiliary supporting module comprises a stainless steel frame with a shock pad and an adjusting foot, a totally-enclosed inert atmosphere glove box integrated assembly and an in-situ film thickness detection assembly, a transition cabin gas purification module is arranged between the glove box and a vacuum film coating cavity and is in linkage regulation and control with an algorithm, the detection precision of the in-situ film thickness detection assembly is less than or equal to 0.1nm, the film thickness uniformity is more than or equal to 98%, and in-situ film coating parameters and gas protection parameters can be adjusted in real time in linkage with a particle swarm optimization algorithm.

Description

Coating system based on inert gas protection Technical Field The invention relates to the technical field of physical vapor deposition coating, in particular to a coating system based on inert gas protection. Background As is well known in the technical field of physical vapor deposition coating, the core requirement of film preparation is to ensure the purity and quality of a film layer, avoid oxidation, hydrolysis and other reactions of a substrate and a film layer material in the coating process, and the reactions can cause various defects of the film layer, influence the service performance and service life of a product, and especially for various sensitive substrates, the problem is more remarkable, so that the application of a coating technology in the high-end field is severely limited. The existing inert gas protection film plating equipment has a plurality of technical limitations, and is difficult to meet the severe requirements of high-end film plating scenes. In the aspect of inert gas protection, the gas supply and regulation and control modes of the existing equipment are simpler, uniform distribution of gas cannot be achieved, imbalance of gas atmosphere in a film plating area is easily caused, uniformity of a film layer is further affected, meanwhile, most of gas protection is controlled passively, only after abnormality occurs in parameters, remedy can be carried out, abnormality cannot be prejudged in advance, and protection reliability is insufficient. In the aspect of sample treatment, the prior equipment is difficult to realize the protection of inert gas in the whole process from pretreatment to loading and unloading of samples, the samples are easy to be exposed to the atmosphere in the transfer process, the oxidation pollution of sensitive substrates is initiated, and the quality of a film layer is influenced. In the aspect of thermal management, thermal expansion deformation of key parts of the equipment is easy to occur in a high-power working state, so that the equipment parts can be damaged, the stability of a coating process can be damaged, and the protection effect of inert gas is further influenced. In addition, the inert gas utilization rate of the existing equipment is low, a disposable discharge mode is adopted mostly, the consumable cost in the production process is increased, meanwhile, the regulation and control precision of coating parameters is insufficient, the cooperative regulation and control of multiple algorithms are lacked, the repeatability of the quality of a film layer is poor, and the stable production of a coating product meeting the high-end requirements is difficult. All kinds of technical pain points are mutually overlapped, so that the practicality, economy and intelligent level of the existing coating equipment are to be improved, and the requirements of diversified coating in the high-end field cannot be fully adapted, therefore, the research and development of a novel inert gas protection coating system capable of solving the technical problems is of great significance. Disclosure of Invention (One) solving the technical problems Aiming at the technical problems of insufficient inert gas protection reliability, uneven film quality, low intelligent level, easy oxidation of samples, low gas utilization rate and the like of the existing film plating equipment, the invention provides a film plating system based on inert gas protection. (II) technical scheme The inert gas protection-based film plating system comprises a vacuum film plating cavity module, an inert gas protection module, a film plating execution module, an exhaust and tail gas treatment module, a temperature control module, a PLC intelligent control module and an auxiliary support module, wherein the modules are matched in a cooperative manner, the inert gas protection whole process is accurately regulated and controlled through multi-algorithm fusion, and further automatic film plating under the whole inert gas active protection is completed, the inert gas protection module is a core innovation module, and the PLC intelligent control module is a multi-algorithm fusion carrier and is used for integrating various intelligent algorithms and driving the modules to be regulated and controlled in a linkage manner. The vacuum coating cavity module is a sealed stainless steel cavity, the inner wall of the cavity is subjected to polishing passivation treatment, the cavity is provided with a front door, a rear door, a high-transmittance quartz glass observation window and a heat insulation partition board, the heat insulation partition board divides the interior of the cavity into a substrate installation area and a coating execution area, the ultimate vacuum degree of the cavity is less than or equal to 3 multiplied by 10- 5 Pa, the pressure after shutdown and pressure maintaining for 12 hours is less than or equal to 5Pa, a tightness real-time monitoring sensor is arranged in the cavity, and the s