Search

CN-122013134-A - Method for cleaning and pre-coating film of film coating equipment and film coating equipment

CN122013134ACN 122013134 ACN122013134 ACN 122013134ACN-122013134-A

Abstract

The application discloses a cleaning and pre-coating method of coating equipment and the coating equipment, relates to the technical field of the coating equipment, and is used for reducing unnecessary carrier transmission time and pre-coating time. The method comprises the steps of enabling inner wall surfaces of m process chambers to be provided with first accumulated film layers, enabling outer wall surfaces of j carriers to be provided with second accumulated film layers, enabling an ith carrier to enter the process chambers when the m process chambers are empty, enabling i to be larger than or equal to 1 and smaller than n and enabling i to be an integer, removing the first accumulated film layers and the second accumulated film layers on the outer wall surfaces of the ith carrier, plating first protective film layers on the inner wall surfaces of the process chambers and the outer wall surfaces of the ith carrier, enabling the ith carrier to exit the process chambers to complete a cleaning pre-plating process of the ith carrier, and executing at least one process plating process, wherein the process plating process is that substrates are placed on the j carriers, and the j carriers sequentially travel through the m process chambers. The method is used for cleaning the carrier and the process chamber and pre-plating films.

Inventors

  • ZHOU SHENGXIN
  • YANG BAOHAI
  • LI YISHENG

Assignees

  • 营口金辰机械股份有限公司
  • 金辰双子太阳能光伏科技(营口)有限公司北京分公司

Dates

Publication Date
20260512
Application Date
20241106

Claims (16)

  1. 1. A cleaning and pre-coating method of coating equipment is characterized in that the coating equipment (01) comprises m process chambers (1), j carriers (2) and a conveying device (3) for conveying the carriers (2), the j carriers (2) are divided into n batches, the number of the carriers (2) in each batch is smaller than or equal to m, n is larger than or equal to 2, and m, j and n are all positive integers, and the method comprises the following steps: The inner wall surfaces of the m process chambers (1) are provided with first accumulated film layers, and the outer wall surfaces of the j carriers (2) are provided with second accumulated film layers; when the m process chambers (1) are empty, an ith batch of carriers (2) drive into the process chambers (1), and one carrier (2) corresponds to one process chamber (1), wherein i is more than or equal to 1 and less than or equal to n, and i is an integer; removing the first accumulated film layer and the second accumulated film layer on the outer wall surface of the ith batch of carriers (2); Plating a first protective film layer on the inner wall surface of the process chamber (1) and the outer wall surface of the ith batch of carriers (2); The ith batch of carriers (2) are driven out of the process chamber (1) to finish the cleaning pre-coating process of the ith batch of carriers (2); And performing at least one process coating procedure, wherein the process coating procedure is to place substrates (02) on the j carriers (2), and the j carriers (2) sequentially drive through the m process chambers (1).
  2. 2. The method according to claim 1, wherein the removing the first accumulated film layer and the second accumulated film layer of the outer wall surface of the ith batch carrier (2) is specifically: And when the thickness of at least one of the second accumulated film layer and the first accumulated film layer of the ith batch of carriers (2) reaches a threshold value, removing the first accumulated film layer and the second accumulated film layer on the outer wall surface of the ith batch of carriers (2).
  3. 3. The method according to claim 2, wherein the method of making the thickness of at least one of the second cumulative film layer and the first cumulative film layer of the ith lot carrier (2) reach a threshold value comprises: And accumulating the first accumulated film layer and the second accumulated film layer of the ith carrier (2) through the process coating procedure so that the thickness of at least one of the second accumulated film layer and the first accumulated film layer of the ith carrier (2) reaches the threshold value.
  4. 4. A method according to claim 3, wherein j > m; The thickness of at least one of the second accumulated film layer and the first accumulated film layer of the ith batch of carriers (2) reaches a threshold value, namely the thickness of the first accumulated film layer reaches the threshold value.
  5. 5. The method according to claim 1, wherein j > m; When j/m is an integer, n=j/m, and when j/m is a non-integer, n is the smallest positive integer greater than j/m.
  6. 6. Method according to claim 1, characterized in that j > m, the number of at least one batch of carriers (2) being equal to m.
  7. 7. The method according to any one of claims 1 to 6, wherein after the i-th batch of carriers (2) performs the cleaning pre-plating process and the at least one process plating process, the method further comprises: and alternately executing the cleaning pre-coating process and the at least one process coating process on each batch of carriers (2) except the ith batch of carriers (2) until the n batches of carriers (2) complete the cleaning pre-coating process and the at least one process coating process all once.
  8. 8. The method according to claim 7, wherein the cleaning pre-plating process is performed in a sequence of multiple batches of carriers (2), wherein the difference between the second cumulative film thickness in the former batch of carriers (2) and the second cumulative film thickness in the latter batch of carriers (2) is equal to the film thickness accumulated by the process plating process at one time in two adjacent batches of carriers (2).
  9. 9. The method according to any one of claims 1 to 6, wherein after the ith lot of carriers (2) is driven out of the process chamber (1) to complete the cleaning pre-plating process of the ith lot of carriers (2), the cleaning pre-plating process is performed once for each lot of carriers (2) except the ith lot of carriers (2) before the j lots of carriers (2) are sequentially driven through the m process chambers (1) by placing the substrates (02) on the j lots of carriers (2).
  10. 10. The method according to claim 1, wherein the inner wall surfaces of the m process chambers (1) each have a first cumulative film layer, the outer wall surfaces of the j carriers (2) each have a second cumulative film layer, comprising: The inner wall surfaces of the m process chambers (1) and the outer wall surfaces of the j carriers (2) are in a clean state, and the j carriers (2) sequentially pass through the m process chambers (1); Plating the first protective film layer on the inner wall surface of the process chamber (1) and the outer wall surfaces of the j carriers (2); And executing the process film plating procedure to thicken the first protective film layer on the inner wall surface of the process chamber (1) so as to accumulate the first protective film layer as the first accumulated film layer, and thickening the first protective film layer on the outer wall surface of the j carriers (2) so as to accumulate the first protective film layer as the second accumulated film layer.
  11. 11. A coating apparatus, characterized in that the coating apparatus (01) is configured to perform the method according to any one of claims 1 to 10, and further comprises an RPS device (5), wherein an air outlet of the RPS device (5) is capable of communicating with the process chamber (1), and the RPS device (5) is configured to introduce plasma gas into the process chamber (1) to remove the first accumulated film layer and the second accumulated film layer on the outer wall surface of the ith carrier (2).
  12. 12. Coating apparatus according to claim 11, characterized in that the coating apparatus (01) further comprises a baffle (6), said baffle (6) being arranged in at least one process chamber (1), said baffle (6) being arranged opposite and spaced from the air outlet of the RPS device (5).
  13. 13. The coating equipment according to claim 11, wherein the coating equipment (01) further comprises a radio frequency power supply (7), an upper electrode plate (8) and a lower electrode plate (9), the upper electrode plate (8) and the lower electrode plate (9) are arranged in the process chamber (1), the upper electrode plate (8) and the lower electrode plate (9) are arranged at intervals in the vertical direction, the radio frequency power supply (7) is electrically connected with the upper electrode plate (8) and the lower electrode plate (9), a gap between the upper electrode plate (8) and the lower electrode plate (9) is used for passing through a carrier (2), gas generated by the RPS device (5) can pass through the gap, and the radio frequency power supply (7) is started while the RPS device (5) is started.
  14. 14. The plating apparatus according to claim 13, wherein a roughened layer (10) formed by a sand blast or shot blast process is formed on at least one of the inner wall surface of the process chamber (1), the surface of the side heating plate mounted on the inner wall surface of the process chamber (1), and the surface of the upper electrode plate (8), the roughened layer (10) serving to improve film adhesion on at least one of the inner wall surface of the process chamber (1), the surface of the side heating plate, and the surface of the upper electrode plate (8).
  15. 15. The plating apparatus according to claim 14, wherein the roughened layer (10) is formed on at least one of a lower surface of the upper electrode plate (8) and an inner surface of the side heating plate.
  16. 16. Coating apparatus according to claim 14, characterized in that the roughness of the roughened layer (10) is in the range of 6.3 μm to 50 μm.

Description

Method for cleaning and pre-coating film of film coating equipment and film coating equipment Technical Field The application relates to the technical field of coating equipment, in particular to a cleaning and pre-coating method of coating equipment and the coating equipment. Background In the process of producing the battery piece, the substrate can be placed on the carrier and then sequentially passes through a plurality of process chambers, and in the process chambers, the substrate can be subjected to film coating treatment, and the quality of the film coating determines the electric conversion efficiency of the battery piece. In the related art, after the too thick silicon film is deposited on the inner wall surface of the process chamber and the outer wall surface of the carrier, the inner wall surface of the process chamber and the outer wall surface of the carrier are cleaned to remove the too thick silicon film, so that the dust problem caused by the too thick silicon film in the process of coating the substrate is avoided. After the cleaning is finished, the inner wall surface of the process chamber and the outer wall surface of the carrier are subjected to pre-coating treatment, namely, a silicon film with proper thickness is coated on the inner wall surface of the process chamber and the outer wall surface of the carrier, so that the inner wall surface of the process chamber and the outer wall surface of the carrier are provided with an amorphous silicon protective film which is the same as the film layer of the process coating of the substrate when the process coating of the substrate is carried out later, and pollution caused by the inner wall surface of the process chamber and the outer wall surface of the carrier facing the film layer of the substrate is avoided. Thereby ensuring the coating quality of the battery piece. The specific cleaning and pre-coating process is that the carrier is divided into a plurality of batches, each batch is internally provided with the carrier, so that the carriers of the plurality of batches sequentially drive into the process chamber, then the outer wall surface of the carrier and the inner wall surface of the process chamber are cleaned, after the cleaning is finished, the carriers of the plurality of batches sequentially drive into the process chamber, so that the pre-coating is carried out on the inner wall surfaces of the carrier and the process chamber, thereby completing the cleaning and pre-coating of all the carriers and the process chamber, and then the process coating is carried out. However, in this cleaning and pre-plating method, the process plating occurs after all carriers are cleaned and pre-plated, and excessive time is consumed in unnecessary carrier transportation and pre-plating processes. Disclosure of Invention The cleaning and pre-coating method of the coating equipment and the coating equipment provided by the embodiment of the application are used for reducing unnecessary carrier transmission time and pre-coating time when the carrier and the process chamber are cleaned and pre-coated. In a first aspect, an embodiment of the present application provides a cleaning and pre-coating method for a coating apparatus, where the coating apparatus includes m process chambers, j carriers and a conveying device for conveying the carriers, the j carriers are divided into n batches, the number of carriers in each batch is less than or equal to m, where n is greater than or equal to 2, and m, j, n are positive integers, and the method includes: the inner wall surfaces of the m process chambers are provided with first accumulated film layers, and the outer wall surfaces of the j carriers are provided with second accumulated film layers; When m process chambers are empty, the ith carrier is driven into the process chamber, and one carrier corresponds to one process chamber, wherein i is more than or equal to 1 and less than or equal to n, and i is an integer; Removing the first accumulated film layer and the second accumulated film layer on the outer wall surface of the ith carrier; plating a first protective film layer on the inner wall surface of the process chamber and the outer wall surface of the ith carrier; The ith batch of carriers are driven out of the process chamber to complete the cleaning pre-coating process of the ith batch of carriers; and performing at least one process coating procedure, wherein the process coating procedure is to place the substrate on j carriers, and the j carriers sequentially drive through m process chambers. In the cleaning and pre-coating method of the coating equipment provided by the embodiment of the application, the carrier can be driven into the process chamber or driven out of the process chamber under the action of the conveying device. When the process chamber is empty, the ith lot of carriers is driven into the process chamber and one carrier is located in a separate process chamber. And then removin