CN-122013140-A - Connecting device and processing chamber comprising same

CN122013140ACN 122013140 ACN122013140 ACN 122013140ACN-122013140-A

Abstract

The invention provides a connecting device and a processing chamber comprising the same, wherein the connecting device is arranged at the outer side part of an upper cover of the processing chamber in a mode that the first surface of the connecting device penetrates through the inner side wall of the upper cover, the connecting device comprises a connecting part and a connecting pipeline, the connecting part is positioned at the second surface of the connecting device opposite to the first surface and used for connecting an opening and closing device for opening and closing the upper cover, the connecting pipeline is positioned in the connecting device, the first end of the connecting pipeline is positioned at the first surface of the connecting device, and the second end of the connecting pipeline is positioned at the surface of the connecting device except the first surface and used for enabling heat exchange fluid to flow into and/or flow out of the processing chamber.

Inventors

HUANG LINGWU
SONG XIUJING
Wu Tairun
Che Dongyi
LI DONGHAO
JIN ZHUQIAN
Jin Guanxi

Assignees

盛吉盛(韩国)半导体科技有限公司

Dates

Publication Date: 20260512
Application Date: 20241101

Claims (11)

1. A connecting device is characterized in that, Is arranged on the outer side of the upper cover in a way that the first surface penetrates to the inner side wall of the upper cover of the processing chamber, Wherein, the connecting device includes: a connection part located on a second surface of the connection device opposite to the first surface for connecting an opening and closing device for opening and closing the upper cover, and And a connecting pipeline positioned inside the connecting device, wherein a first end is positioned on the first surface of the connecting device, and a second end is positioned on a surface of the connecting device except the first surface, and the connecting pipeline is used for enabling heat exchange fluid to flow into and/or flow out of the processing chamber.
2. The connection device according to claim 1, wherein, The connection part is a shaft protruding outward from the second surface of the connection device to be rotatably connected with the opening and closing device.
3. The connection device according to claim 1, wherein, A port is configured at the second end of the connecting tube for connection to an external fluid source.
4. A connection device according to claim 3, wherein, At a place of the surface of the connection device for disposing the port, a receiving portion recessed toward the inside of the connection device is formed to receive the port.
5. The connection device according to claim 4, wherein, The receiving portion penetrates laterally thereof to at least one of surfaces of the connection device other than the first surface.
6. The connection device according to claim 1, wherein, The connecting pipeline includes: a supply line for supplying a heat exchange fluid, and And the discharge pipeline is used for discharging the heat exchange fluid.
7. The connection device according to claim 6, wherein, The first end of the supply line and the first end of the discharge line are bifurcated into a plurality of branches, respectively.
8. The connection device according to claim 7, wherein, Control valves are respectively arranged on the branches to switch the branches.
9. The connection device according to claim 1, wherein, Further comprising a holder portion located at any one of the surfaces of the connection device other than the first surface to receive a cable.
10. The connection device according to claim 1, wherein, The connecting device is formed by more than one material selected from aluminum alloy, copper, nickel, stainless steel, ferrite and silver.
11. A processing chamber is characterized in that, Comprising a connection device according to any one of claims 1 to 10.

Description

Connecting device and processing chamber comprising same Technical Field The present invention relates to a connection device and a processing chamber including the same, and more particularly, to an integrated multifunctional connection device capable of connecting an opening and closing device, a fluid source, and a storage cable, and a processing chamber including the same. Background With the development of semiconductor technology, the complexity of semiconductor processing technology is increasing. In order to satisfy various conditions required in carrying out these semiconductor processing processes, the structure of the semiconductor processing apparatus becomes more and more complex, resulting in more and more difficult assembly, operation, maintenance, overhaul, etc. of the semiconductor processing apparatus. Taking chemical vapor deposition (Chemical Vapor Deposition; CVD) as an example, the outer shape of the processing chamber is substantially composed of a case having an open upper portion and a Lid (Lid cover) having an open upper portion for opening and closing the case. Wherein, be provided with base plate supporting bench (Supporter), base plate Heater (Heater), base plate Lift (Lift) etc. in the casing, the upper cover is provided with Shower head (Shower head), shower head heating device, process gas adjusting device etc.. In particular, since the upper cover is an openable and closable member, and the outer walls of both sides thereof are normally connected to an opening and closing device (for example, a piston cylinder or the like), a connection structure for connecting the opening and closing device needs to be provided on the outer side thereof. In addition, the chemical vapor deposition process needs to be performed under vacuum and high temperature conditions, and thus, the process chamber needs to be equipped with various lines for vacuum pumping, heat exchange, and the like. Therefore, not only the cables and the pipelines of the device or the system which are responsible for each function inside and outside the processing chamber are complicated, but also a plurality of holes are required to be formed on the shell and/or the upper cover so as to penetrate the cables and the pipelines to connect the device or the system inside and outside the processing chamber, thus being unfavorable for the overall sealing performance of the processing chamber and the stability under the interference of external factors. Accordingly, there is a need for an integrated multifunctional connection device capable of connecting an opening and closing device, connecting a fluid source, and receiving a cable, and a processing chamber including the same, to reduce difficulties in assembling, operating, maintaining, repairing, etc. of a semiconductor processing apparatus. Disclosure of Invention Technical problem The invention aims to provide a connecting device which can be connected with an opening and closing device, a connecting fluid source and a connecting cable. Another object of the present invention is to provide a process chamber provided with the connecting device of the present invention. Technical proposal One embodiment of the present invention provides a connection device disposed on an outer side of an upper cover of a process chamber so that a first surface thereof penetrates through an inner side wall of the upper cover, wherein the connection device includes a connection portion provided on a second surface of the connection device opposite to the first surface for connecting an opening/closing device for opening/closing the upper cover, and a connection pipe provided inside the connection device, the first end being provided on the first surface of the connection device, and the second end being provided on a surface of the connection device other than the first surface for allowing a heat exchange fluid to flow into and/or out of the process chamber. In one embodiment of the present invention, the connection part may be a shaft protruding outward from the second surface of the connection device to be rotatably connected with the opening and closing device. In one embodiment of the invention, a port for connection to an external fluid source may be provided at the second end of the connecting line. In one embodiment of the present invention, a receiving portion recessed toward the inside of the connection device may be formed at a place of the surface of the connection device where the port is disposed, to receive the port. In one embodiment of the present invention, the receiving portion may penetrate laterally thereof to at least one of surfaces of the connection device other than the first surface. In one embodiment of the present invention, the connection line may include a supply line for supplying the heat exchange fluid, and a discharge line for discharging the heat exchange fluid. In one embodiment of the invention, the first end of the supply line and the first end of the d