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CN-122013144-A - Gas preheating device of chemical vapor deposition furnace

CN122013144ACN 122013144 ACN122013144 ACN 122013144ACN-122013144-A

Abstract

The invention discloses a gas preheating device of a chemical vapor deposition furnace, which belongs to the technical field of chemical vapor deposition and comprises a base, wherein one side of the upper end of the base is fixedly provided with a filter box, the upper end of the filter box is fixedly provided with an air inlet pipe, one side of the filter box is provided with a fan, the fan is communicated with the filter box through a first conveying pipe, one end of the fan, which is far away from the conveying pipe, is provided with a second conveying pipe, and the filter screen is fixedly arranged in the filter box.

Inventors

  • WU KUI
  • SONG KEFU
  • YU HAIYONG

Assignees

  • 湖北芯火半导体科技有限公司

Dates

Publication Date
20260512
Application Date
20260330

Claims (10)

  1. 1. A gas preheating device of a chemical vapor deposition furnace comprises a base (1) and is characterized in that a filter box (5) is fixed on one side of the upper end of the base (1), an air inlet pipe (8) is fixedly arranged at the upper end of the filter box (5), a fan (3) is arranged on one side of the filter box (5), the fan (3) is communicated with the filter box (5) through a conveying pipe I (4), a conveying pipe II (9) is arranged at one end, far away from the conveying pipe I (4), of the fan (3), a filter screen (7) is fixedly arranged in the filter box (5), a cleaning component (6) is arranged at the position, corresponding to the filter screen (7), of the filter box (5), of the inner part, far away from the fan (3), of the conveying pipe II (9), a preheating component (2) is arranged; The preheating assembly (2) comprises a preheating box (21), one end of a conveying pipe II (9) is far away from a fan (3) and is provided with the preheating box (21), one side inside the preheating box (21) is provided with a preheating cavity I (22), the other side of the preheating cavity I (22) is provided with a preheating cavity III (24), a preheating cavity II (23) is arranged between the preheating cavity III (24) and the preheating cavity I (22), through grooves (26) are formed in the upper side between the preheating cavity II (23) and the preheating cavity I (22) and the lower side between the preheating cavity II (23) and the preheating cavity III (24), heating pipes (28) are respectively and fixedly arranged in the preheating cavity I (22), spiral blades (27) are fixedly arranged on the surfaces of the heating pipes (28), spiral channels (29) are formed between the spiral blades (27) and the inner walls of the preheating cavity, heating wires (210) are fixedly arranged on the spiral blades (27), and an air outlet pipe (25) is fixedly arranged on the upper side of one end of the preheating pipe II (9) far away from the conveying pipe II.
  2. 2. The chemical vapor deposition furnace gas preheating device according to claim 1, wherein the preheating component (2) further comprises a baffle plate (211), the baffle plate (211) is fixedly arranged in the through groove (26), a plurality of ventilation grooves (213) are formed in the baffle plate (211), a rotating plate (212) is rotatably connected to one side of the baffle plate (211) at the position corresponding to the ventilation grooves (213), the rotating plate (212) is connected with the preheating box (21) through a rotating rod (214), an arc-shaped rod (216) is fixedly arranged at the position corresponding to the rotating rod (214) at one end of the baffle plate (211), a side plate (215) is fixedly arranged at the position corresponding to the arc-shaped rod (216) at one end of the rotating rod (214), and a spring (217) is sleeved outside the arc-shaped rod (216) at the upper side of the side plate (215).
  3. 3. The gas preheating device for the chemical vapor deposition furnace, as claimed in claim 1, is characterized in that a rubber sealing gasket is arranged between the spiral blade (27) and the inner wall of the preheating cavity, and a connecting flange is fixedly connected to the upper end of the air inlet pipe (8).
  4. 4. The chemical vapor deposition furnace gas preheating device according to claim 1, wherein a PLC controller is configured at the lower side of the front end of the preheating box (21), the heating pipe (28) and the heating wire (210) are electrically connected with the PLC controller, and the PLC controller can be used for realizing accurate start and stop and power adjustment of the heating pipe (28) and the heating wire (210).
  5. 5. The chemical vapor deposition furnace gas preheating device as claimed in claim 2, wherein the lower end of the arc-shaped rod (216) is fixedly provided with a limiting plate, the side plate (215) is provided with a sliding hole corresponding to the arc-shaped rod (216), and the arc-shaped rod (216) is fixedly connected to the side edge of the baffle plate (211) by taking the rotating rod (214) as a circle center.
  6. 6. The chemical vapor deposition furnace gas preheating device according to claim 1, wherein the cleaning assembly (6) comprises a fixed box (62), the upper side of one end of the filter box (5) is fixedly provided with the fixed box (62), one end of the fixed box (62) is provided with a motor (64), the output end of the motor (64) is in transmission connection with a screw rod (65), one side of the surface of the screw rod (65) is in threaded connection with a sliding plate (66), a movable seat (63) is arranged in the filter box (5) and corresponds to the filter screen (7), the lower end of the movable seat (63) is provided with a cleaning brush (61), and the movable seat (63) is connected with the sliding plate (66) through a connecting rod (67).
  7. 7. The chemical vapor deposition furnace gas preheating device according to claim 6, wherein the cleaning assembly (6) further comprises a chip removal port (68), the chip removal port (68) is formed in a position, corresponding to the filter screen (7), of one end of the filter box (5), the sealing plate (69) is fixedly arranged in a position, corresponding to the chip removal port (68), of one end of the filter box (5) through bolt connection, and the lower end of the chip removal port (68) is flush with the upper end of the filter screen (7).
  8. 8. The chemical vapor deposition furnace gas preheating device according to claim 7, wherein the cleaning assembly (6) further comprises a collecting box (610), the collecting box (610) is arranged at the position, corresponding to the chip removal port (68), of the upper end of the base (1), a groove (611) corresponding to the collecting box (610) is formed at the upper end of the base (1), and an inclined plane hopper (612) is fixedly connected at the position, corresponding to the chip removal port (68), of one end of the base (1).
  9. 9. The chemical vapor deposition furnace gas preheating device as claimed in claim 6, wherein the lower end of the cleaning brush (61) is tightly attached to the upper end of the filter screen (7), sliding holes corresponding to the connecting rods (67) are formed on two sides of one end of the base (1), and the side edges of the connecting rods (67) are tightly attached to the inner walls of the sliding holes.
  10. 10. The chemical vapor deposition furnace gas preheating device as claimed in claim 7, wherein handles are fixedly connected to one end of the sealing plate (69) and the upper sides of the two ends of the collecting box (610), and the side edges of the collecting box (610) are tightly attached to the inner wall of the groove (611) after the lower end of the collecting box (610) is placed into the groove (611).

Description

Gas preheating device of chemical vapor deposition furnace Technical Field The invention belongs to the technical field of chemical vapor deposition, and particularly relates to a gas preheating device of a chemical vapor deposition furnace. Background Chemical vapor deposition is an important thin film deposition technique widely used for preparing semiconductor materials, optical materials and functional materials. In the CVD process, the reaction gas is preheated to a certain temperature by a heater in the furnace, and is decomposed and deposited on a cold substrate to form a thin film. The preheating device is a key component in the CVD process and is directly related to the quality and efficiency of the deposited film. The preheating cavity of the gas preheating device of the existing chemical vapor deposition furnace is mostly in an in-line or simple cavity structure, gas is easy to form short-circuit flow, rapidly passes along the inner wall, has short flow path and insufficient heat exchange, has poor preheating effect, lacks a filter screen cleaning function, is easy to block after long-term use, not only affects gas circulation, but also reduces filtering and preheating efficiency, and further affects process stability and product quality. Disclosure of Invention In order to solve the problems in the prior art, the invention provides a gas preheating device of a chemical vapor deposition furnace, which aims to improve the time of gas passing through a preheating cavity and improve the preheating effect. The gas preheating device of the chemical vapor deposition furnace comprises a base, wherein one side of the upper end of the base is fixedly provided with a filter box, the upper end of the filter box is fixedly provided with an air inlet pipe, one side of the filter box is provided with a fan, the fan is communicated with the filter box through a first conveying pipe, one end, far away from the conveying pipe, of the fan is provided with a second conveying pipe, the inside of the filter box is fixedly provided with a filter screen, the inside of the filter box is provided with a cleaning assembly at a position corresponding to the filter screen, and one end, far away from the fan, of the conveying pipe is provided with a preheating assembly; The preheating assembly comprises a preheating box, a preheating box is arranged at one end, far away from the fan, of the conveying pipe II, a preheating cavity I is arranged on one side, which is arranged on the other side, of the preheating box, a preheating cavity III is arranged between the preheating cavity III and the preheating cavity I, through grooves are formed in the upper side between the preheating cavity II and the preheating cavity I and the lower side between the preheating cavity II and the preheating cavity III, heating pipes are fixedly arranged in the preheating cavity I, the preheating cavity II and the preheating cavity III, spiral blades are fixedly arranged on the surfaces of the heating pipes, spiral channels are formed between the spiral blades and the inner wall of the preheating cavity, heating wires are fixedly arranged on the spiral blades, and an air outlet pipe is fixedly arranged on the upper side, far away from the conveying pipe II, of the preheating box. Preferably, the preheating assembly further comprises a baffle, a plurality of ventilation grooves are formed in the baffle, the baffle is rotatably connected with a rotating plate at the position corresponding to the ventilation grooves on one side of the baffle, the rotating plate is connected with the preheating box through a rotating rod, an arc-shaped rod is fixedly arranged at the position corresponding to the rotating rod on one end of the baffle, a side plate is fixedly arranged at the position corresponding to the arc-shaped rod on one end of the rotating rod, and a spring is sleeved outside the arc-shaped rod on the upper side of the side plate. Preferably, a rubber sealing gasket is arranged between the spiral blade and the inner wall of the preheating cavity, and a connecting flange is fixedly connected to the upper end of the air inlet pipe. Preferably, a PLC controller is configured at the lower side of the front end of the preheating box, the heating pipe and the heating wire are electrically connected with the PLC controller, and the PLC controller can be used for realizing accurate start and stop and power adjustment of the heating pipe and the heating wire. Preferably, the lower end of the arc-shaped rod is fixedly provided with a limiting plate, a sliding hole corresponding to the arc-shaped rod is formed in the side plate, and the arc-shaped rod is fixedly connected to the side edge of the baffle plate by taking the rotating rod as the center of a circle. Preferably, the cleaning assembly comprises a fixed box, a fixed box is fixed on the upper side of one end of the filter box, a motor is installed at one end of the fixed box, a screw is connected to t