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CN-122013176-A - Method for manufacturing pump member and vacuum pump

CN122013176ACN 122013176 ACN122013176 ACN 122013176ACN-122013176-A

Abstract

The embodiment of the application discloses a manufacturing method of a pump component and a vacuum pump. The manufacturing method of the pump component comprises the steps of providing a base material and a cladding material for manufacturing the pump component, wherein the pump component comprises at least one of a stator and a rotor of a vacuum pump, the base material is provided with a cladding area and a protection area, placing the cladding material in the cladding area, fusing the cladding material and the base material in a laser cladding treatment mode to form a cladding layer, controlling the temperature of the protection area to be 70-90 ℃ in the laser cladding treatment process, and processing the base material and the cladding layer to obtain the pump component. The cladding material is melted into the cladding layer metallurgically bonded with the cladding region of the base material by utilizing laser cladding treatment, and the temperature of the protection region is controlled to be 70-90 ℃ in the laser cladding treatment process, so that the thermal stress can be reduced, the risk of cracking in the protection region is reduced, and the deformation of the protection region is controlled to be less than or equal to 0.7mm.

Inventors

  • WANG XIN
  • YIN XIANGXING

Assignees

  • 北京通嘉宏瑞科技有限公司

Dates

Publication Date
20260512
Application Date
20260227

Claims (10)

  1. 1. A method of manufacturing a pump assembly, comprising: Providing a substrate and cladding material for making a pump component, the pump component comprising at least one of a stator and a rotor of a vacuum pump, the substrate having a cladding region and a protection region; Placing the cladding material in the cladding region, and fusing the cladding material and the base material in a laser cladding treatment mode to form a cladding layer, wherein the temperature of the protection region is controlled to be 70-90 ℃ in the laser cladding treatment process; and processing the base material and the cladding layer to obtain the pump component.
  2. 2. The method of manufacturing a pump member according to claim 1, wherein the initial thickness of the cladding layer obtained by the laser cladding treatment is 0.8mm to 1.5mm, and/or, After the processing treatment, the thickness of the cladding layer is 0.2 mm-0.4 mm, and/or, After the processing treatment, the surface roughness Ra of the cladding layer is less than or equal to 1.6 mu m.
  3. 3. The method for producing a pump member according to claim 1, wherein the clad material has a particle size distribution of 53 μm to 150 μm, and/or, The apparent density of the cladding material is more than or equal to 4.0g/cm 3 , and/or, The flowability of the cladding material is less than or equal to 16s/50g, and/or, The purity of the cladding material is more than or equal to 99.9 percent.
  4. 4. The method for manufacturing a pump member according to claim 1, wherein the cladding material comprises 20.0 wt.% to 23.0 wt.% Cr, not less than 61.0 wt.% Ni, not less than 8.0 wt.% Mo, not more than 10.0 wt.% Nb, not more than 3.15 wt.% to 4.15 wt.% Nb, not more than 5.0 wt.% Fe, or The cladding material comprises, by mass, not less than 57.0% of Ni, 15.0% to 17.0% of Mo, 15.0% to 16.0% of Cr, not more than 5.0% of Fe and 3.0% to 4.5% of W.
  5. 5. The method of manufacturing a pump member according to claim 1, wherein the temperature of the protection region is controlled by using a temperature control device during the laser cladding process; The temperature control device comprises a cooling row, a temperature monitoring module, a switch module and a control module, wherein the temperature monitoring module and the switch module are electrically connected with the control module, the cooling row is used for bearing the base material, a cooling channel for cooling liquid to flow is formed in the cooling row, the temperature monitoring module is used for detecting the temperature of the protection area, and the switch module is used for controlling the on and off of the cooling channel.
  6. 6. The method of manufacturing a pump component according to claim 1, wherein the processing treatment includes a cooling treatment and a finishing treatment, and a cooling rate of the cooling treatment is 5 ℃ per minute or less.
  7. 7. The method of manufacturing a pump member according to any one of claims 1 to 6, characterized in that the method of manufacturing a pump member further comprises: machining the cladding region to thin the cladding region by 0.2mm to 0.4mm before placing the cladding material in the cladding region, and/or, The method of manufacturing a pump component further includes: And (3) carrying out pretreatment on the cladding region before the cladding material is placed in the cladding region, wherein the pretreatment comprises oil removal treatment, rust removal treatment and roughening treatment, and after the roughening treatment, the surface roughness Ra of the cladding region is 0.8-3.2 mu m.
  8. 8. The method of manufacturing a pump member according to any one of claims 1 to 6, characterized in that the method of manufacturing a pump member further comprises: And after the processing treatment, performing sealing and curing treatment on the cladding layer by using a sealing agent so as to form a sealing layer on the surface of the cladding layer.
  9. 9. The method of manufacturing a pump member according to claim 8, wherein the sealant comprises at least one of a silicone resin sealant and a polyimide sealant, and/or, The closed curing process includes a coating process and a curing process, and/or, The thickness of the sealing layer is 1.5-2.5 mu m.
  10. 10. A vacuum pump comprising a pump part produced by the method for producing a pump part according to any one of claims 1 to 9.

Description

Method for manufacturing pump member and vacuum pump Technical Field The application relates to the technical field of vacuum equipment manufacturing, in particular to a manufacturing method of a pump component and a vacuum pump. Background In the semiconductor or panel industry, a dry pump is used as a key vacuum obtaining device, and a stator and a rotor of the dry pump need to bear a severe environment with ultrahigh temperature and strong corrosion in a special etching process. At present, the stator and the rotor of the dry pump are usually made of spheroidal graphite cast iron materials, and in order to improve the performances of corrosion resistance, high temperature resistance, wear resistance and the like, the surfaces of the stator and the rotor of the dry pump are usually treated by adopting traditional processes such as electroplating, chemical plating or spraying, however, the traditional processes have obvious defects. The coating formed by the spraying process has lower bonding strength with the base material, is easy to fall off under the high-temperature and corrosion environment for a long time, and the electroplating and chemical plating processes can not meet the severe requirements of the industries such as semiconductors on ultrahigh temperature and strong corrosion capability although the bonding strength is relatively high, and the wear resistance and compactness of the coating are poor, so that the service life of a dry pump is influenced. As an advanced surface strengthening technology, the laser cladding technology has the characteristics of high bonding strength between the cladding layer and the substrate, strong corrosion resistance, strong ultrahigh temperature resistance, strong wear resistance and the like. However, the laser cladding process has the over-high temperature (the molten pool area exceeds 1000 ℃) in the cladding process, and if cladding is carried out on the whole working area of the stator and the rotor of the pump, larger deformation can be generated, so that the application of the technology on the stator and the rotor of the dry pump with extremely high precision requirements is influenced. Disclosure of Invention The application provides a manufacturing method of a pump component and a vacuum pump, and aims to solve the problem that the deformation of the pump component obtained through laser cladding process treatment is large. The application provides a method for manufacturing a pump component, which comprises the following steps: Providing a substrate and cladding material for making a pump component, the pump component comprising at least one of a stator and a rotor of a vacuum pump, the substrate having a cladding region and a protection region; Placing the cladding material in the cladding region, and fusing the cladding material and the base material in a laser cladding treatment mode to form a cladding layer, wherein the temperature of the protection region is controlled to be 70-90 ℃ in the laser cladding treatment process; and processing the base material and the cladding layer to obtain the pump component. Optionally, in some embodiments of the present application, the initial thickness of the cladding layer obtained by the laser cladding treatment is 0.8mm to 1.5mm, and/or, After the processing treatment, the thickness of the cladding layer is 0.2 mm-0.4 mm, and/or, After the processing treatment, the surface roughness Ra of the cladding layer is less than or equal to 1.6 mu m. Optionally, in some embodiments of the application, the cladding material has a particle size distribution of 53 μm to 150 μm, and/or, The apparent density of the cladding material is more than or equal to 4.0g/cm 3, and/or, The flowability of the cladding material is less than or equal to 16s/50g, and/or, The purity of the cladding material is more than or equal to 99.9 percent. Optionally, in some embodiments of the present application, the cladding material comprises, by mass, 20.0wt% to 23.0wt% Cr, not less than 61.0wt% Ni, 8.0wt% to 10.0wt% Mo, 3.15wt% to 4.15wt% Nb, not more than 5.0wt% Fe, or The cladding material comprises, by mass, not less than 57.0% of Ni, 15.0% to 17.0% of Mo, 15.0% to 16.0% of Cr, not more than 5.0% of Fe and 3.0% to 4.5% of W. Optionally, in some embodiments of the present application, the temperature of the protection zone is controlled by using a temperature control device during the laser cladding process; The temperature control device comprises a cooling row, a temperature monitoring module, a switch module and a control module, wherein the temperature monitoring module and the switch module are electrically connected with the control module, the cooling row is used for bearing the base material, a cooling channel for cooling liquid to flow is formed in the cooling row, the temperature monitoring module is used for detecting the temperature of the protection area, and the switch module is used for controlling the on and off of the coo