CN-122013185-A - Composite coating for special nano alternate coherent growth for honeycomb composite material processing and preparation method thereof

CN122013185ACN 122013185 ACN122013185 ACN 122013185ACN-122013185-A

Abstract

The invention discloses a special nano alternate co-grown composite coating for honeycomb composite material processing and a preparation method thereof. The mismatch degree mismatch value between the ZrN layer and the AlTiSiN layer is |delta| <5%, the formed AlTiSiN/ZrN alternating layer coating has the characteristics of high surface toughness, excellent anti-adhesion and wear resistance, a TiAlN transition layer is deposited in a gradual change mode, a coating structure is enabled to continuously and gradually transition through gradual change of target current, substrate bias and gas flow, the residual stress of the coating is low, the bonding strength is high, high Al and Zr elements are doped in the coating, the oxidation resistance of the coating can be ensured, the friction coefficient of the coating can be reduced, adhesive wear is reduced in the process of cutting honeycomb composite materials, and the TiAlN transition layer and the AlTiSiN functional layer with compact continuous gradual change structures are used as supports of the AlTiSiN/ZrN of the multilayer nanometer alternating layer, so that the bonding strength, the fracture toughness, the wear resistance and the oxidation resistance of the coating are improved, and the service life of a cutter are prolonged.

Inventors

TAO YU
LIU JUNBO
LI CHAOYONG
HU YUXIN
ZHAO JIANFENG
DING QI
LU HENGYU

Assignees

四川大学
高端航空装备技术创新中心(四川)有限公司

Dates

Publication Date: 20260512
Application Date: 20260312

Claims (10)

1. A special nano alternately co-grown composite coating for honeycomb composite material processing is characterized in that the composite coating sequentially comprises an AlTiSiN/ZrN alternating layer, an AlTiSiN functional layer and a TiAlN transition layer from outside to inside.
2. The special nano alternately co-grown composite coating for honeycomb composite material processing as set forth in claim 1, wherein in the AlTiSiN/ZrN alternating layers, the thickness of a single AlTiSiN nano layer is 5-20 nm, the thickness of a single ZrN nano layer is 20-40 nm, the lattice mismatch degree of the AlTiSiN nano layer and the ZrN nano layer is less than 5%, the thickness of AlTiSiN functional layer is 20-50 nm, the thickness of TiAlN transition layer is 500-1000 nm, and the total thickness of the composite coating is 2-5 μm.
3. A method for preparing the special nano alternate co-grown composite coating for honeycomb composite material processing according to any one of claims 1-2, which is characterized by comprising the following steps: step one, grinding and polishing a substrate, cleaning and drying the substrate, loading the substrate into a coating furnace chamber, adjusting the distance between the substrate and a target, and preprocessing the substrate; Step two, introducing nitrogen into a coating furnace chamber, and adopting continuous variable bias to deposit a TiAlN transition layer on the substrate; Step three, depositing an AlTiSiN functional layer on the TiAlN transition layer according to constant parameters; And fourthly, depositing AlTiSiN and ZrN on the AlTiSiN functional layer sequentially for multiple times according to the sequence of AlTiSiN-ZrN-AlTiSiN-ZrN to form a nano alternate multilayer AlTiSiN/ZrN coating, and finally obtaining the special nano alternate co-grown composite coating for honeycomb composite material processing.
4. The method for preparing the special nano alternate co-grown composite coating for honeycomb composite material processing according to claim 3, wherein in the first step, a substrate is polished by a 800-mesh, 1500-mesh and 3000-mesh diamond grinding disc and diamond grinding paste in sequence, and then the substrate is cleaned for 10-20 min in deionized water by an ultrasonic cleaner, and then dried for 1-2 h in an oven at 50-70 ℃.
5. The method for preparing the special nano alternate Co-grown composite coating for honeycomb composite material processing as claimed in claim 3, wherein in the first step, the substrate is one of a WC-Co hard alloy substrate, a metal ceramic substrate and a high-speed steel substrate.
6. The method for preparing the special nano alternate co-grown composite coating for honeycomb composite material processing according to claim 3, wherein in the first step, the distance between a substrate and a target is 40-50 mm, the pretreatment parameters are that the vacuum degree of a deposition chamber is kept at 3.0 multiplied by 10 -3 Pa, the substrate is bombarded with Ar plasma for 20-30 min under the bias voltage of-640 to-700V, the argon flow is 300-400 sccm, and the substrate temperature is 460-550 ℃.
7. The method for preparing the special nano alternate co-grown composite coating for honeycomb composite material processing according to claim 3, wherein in the second step, the specific parameters of the deposited TiAlN transition layer are that the nitrogen flow is 300-600 sccm, the target material is Ti 50 Al 50 , the target current is 100-120A, the deposition time is 5-20 min, and the substrate bias is gradually increased from 10-20V to 20-80V at an increasing speed of 0.4-1V/min.
8. The method for preparing the special nano alternate co-grown composite coating for processing the honeycomb composite material, which is characterized in that in the third step, the parameters of the deposited TiAlN transition layer are that the target material is a Ti 99.9 target and an Al 82 Si 18 target, the current of the Ti 99.9 target is 100-130A, the current of the Al 82 Si 18 target is 130-170A, the substrate bias is minus 30-50V, and the deposition time is 5-10 min.
9. The method for preparing the special nano alternate co-grown composite coating for honeycomb composite material processing according to claim 3, wherein in the fourth step, the parameters of depositing a plurality of layers of AlTiSiN/ZrN coatings are that the targets are Ti 99.9 targets, al 82 Si 18 targets and Zr 99 targets, the current of Ti 99.9 targets is 100-120A, the current of Al 82 Si 18 targets is 130-170A, the current of Zr 99 targets is 130-180A, the substrate bias is-30-50V, the alternate coatings are deposited by using an alternate switching target power supply, the Ti 99.9 targets and the Al 82 Si 18 targets are electrified to deposit AlTiSiN layers, the monolayer deposition time is 60-120 s, the two targets are closed, then the Zr 99 targets are electrified to deposit the ZrN coatings, the monolayer deposition time is 400-800 s, and the process is repeated 10-40 times.
10. The preparation method of the special nano alternate co-grown composite coating for honeycomb composite material processing is characterized in that an AlN layer is deposited on a TiAlN transition layer by adopting an atomic deposition method after the second step and before the third step, and the preparation method specifically comprises the steps of transferring a substrate on which the TiAlN transition layer is deposited into an atomic layer deposition system, sequentially introducing N 2 , gaseous trimethylaluminum, ammonia and N 2 under the vacuum degree of less than or equal to 5 multiplied by -4 Pa, sequentially introducing N 2 , gaseous trimethylaluminum, ammonia and N 2 for 5-30 sccm, sequentially introducing N 2 , gaseous trimethylaluminum, ammonia and N 2 for 5-10 s, 10-20 s, 5-10 s and completing atomic layer deposition at the temperature of 350-400 ℃ to form an AlN layer with the thickness of 10-30 nm.

Description

Composite coating for special nano alternate coherent growth for honeycomb composite material processing and preparation method thereof Technical Field The invention belongs to the technical field of material coatings, and particularly relates to a special nano alternate co-grown composite coating for honeycomb composite material processing and a preparation method thereof. Background The honeycomb composite material is taken as a typical lightweight structural material, has the core advantages of high specific strength, high specific rigidity, excellent fatigue resistance, remarkable weight reduction effect and the like, becomes a key core material in the high-end manufacturing fields of aerospace, rail transit, new energy equipment and the like, and is widely applied to manufacturing of key components such as aircraft wing wallboard, spacecraft solar wing baseplate, high-speed train body structure and the like. However, the processing characteristics of the honeycomb composite material are doubly limited by the structure and the material composition of the honeycomb composite material, and the processing difficulty of the honeycomb composite material far exceeds that of the traditional homogeneous material is faced. The honeycomb core has the characteristics of low rigidity and anisotropy due to the porous structure, and the problems of cutter abrasion, tipping, chip accumulation and the like are easily caused due to rapid high-frequency intermittent impact of the honeycomb structure in the machining processes of cutting, drilling, contour forming and the like, so that the service life of the cutter is obviously shortened, the machining cost is increased, the machining defect is further aggravated due to the attenuation of the cutter performance, the dimensional accuracy, the surface quality and the mechanical performance of a component are seriously influenced, and even the component is scrapped, so that the large-scale application and the performance exertion of the honeycomb composite in high-end equipment are restricted. At present, the conventional cutter coating such as TiAlN, crN and the like improves the cutter performance to a certain extent, but is still insufficient in coping with honeycomb processing. The TiAlN coating has high hardness, general toughness and higher affinity with titanium alloy, and the single-layer ZrN coating has good toughness, but insufficient hardness and oxidation resistance. Although the traditional multilayer coating design (such as TiAlN/ZrN) can combine the advantages of the two, the bias voltage is constant when the coating is deposited, so that defects such as vacancies and holes are generated during deposition, the interlayer interface is usually a non-coherent interface, the stress is concentrated, and the crack is easy to be a source of crack initiation and propagation under high-frequency impact and high stress. In recent years, nano-multilayer coatings exhibit excellent mechanical properties due to their interfacial effects. If the adjacent layers can realize coherent growth, the interface combination can be greatly strengthened, dislocation crossing is blocked, and the impact toughness and hardness of the coating are improved. Therefore, development of the nano alternating composite coating with the coherent growth interface aiming at the cutting characteristics of the honeycomb composite material has important significance in improving the processing efficiency and quality. Disclosure of Invention It is an object of the present invention to address at least the above problems and/or disadvantages and to provide at least the advantages described below. To achieve these objects and other advantages and in accordance with the purpose of the invention, a composite coating for special nanometer alternate coherent growth for honeycomb composite material processing is provided, wherein the composite coating sequentially comprises an AlTiSiN/ZrN alternate layer, an AlTiSiN functional layer and a TiAlN transition layer from outside to inside. Preferably, in the AlTiSiN/ZrN alternating layers, the thickness of a single AlTiSiN nano layer is 5-20 nm, the thickness of a single ZrN nano layer is 20-40 nm, the lattice mismatch degree of the AlTiSiN nano layer and the ZrN nano layer is less than 5%, the thickness of the AlTiSiN functional layer is 20-50 nm, the thickness of the TiAlN transition layer is 500-1000 nm, and the total thickness of the composite coating is 2-5 mu m. A preparation method of a special nano alternate co-grown composite coating for honeycomb composite material processing comprises the following steps: step one, grinding and polishing a substrate, cleaning and drying the substrate, loading the substrate into a coating furnace chamber, adjusting the distance between the substrate and a target, and preprocessing the substrate; Step two, introducing nitrogen into a coating furnace chamber, and adopting continuous variable bias to deposit a TiAlN transit