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CN-122013302-A - Charging system of Czochralski crystal growing furnace

CN122013302ACN 122013302 ACN122013302 ACN 122013302ACN-122013302-A

Abstract

The invention discloses a charging system of a Czochralski single crystal furnace, which comprises a barrel, wherein the upper end of the barrel is provided with a barrel cover, a quantitative blanking assembly is arranged in the barrel, the quantitative blanking assembly comprises a blanking hopper fixedly connected in the barrel, a blanking port is arranged at the inner bottom of the blanking hopper, rotating rods are connected with the inner walls of the left side and the right side of the barrel in a common rotating mode, a disc is fixedly connected to the rotating rods, an arc-shaped groove is arranged at the lower end of the blanking hopper, the blanking port penetrates through the arc-shaped groove, and the side wall of the disc is positioned in the arc-shaped groove and is tightly attached to the inner wall of the arc-shaped groove. The invention realizes the flexible adjustment of accurate quantitative blanking and feeding amount of raw materials, can clean the blanking plugging component without dead angle, completes the action switching of quantitative blanking and cleaning of the residual materials through the linkage of a single power source, simplifies the system structure, improves the sealing performance, ensures the feeding stability and the operation convenience, and effectively improves the yield and the production efficiency of finished products of monocrystalline silicon crystal pulling.

Inventors

  • SHAO HONGCHEN
  • HUANG DEJUN
  • BAO JUN

Assignees

  • 安徽联效科技有限公司

Dates

Publication Date
20260512
Application Date
20260302

Claims (7)

  1. 1. A czochralski crystal growing furnace charging system, comprising: the automatic feeding device comprises a barrel (1), wherein a barrel cover (2) is arranged at the upper end of the barrel (1), a quantitative blanking assembly is arranged in the barrel (1), the quantitative blanking assembly comprises a blanking hopper (19) fixedly connected in the barrel (1), a blanking port is arranged at the inner bottom of the blanking hopper (19), a rotating rod (16) is connected to the inner walls of the left side and the right side of the barrel (1) in a common rotating mode, a disc (18) is fixedly connected to the rotating rod (16), an arc-shaped groove is arranged at the lower end of the blanking hopper (19), the blanking port penetrates through the arc-shaped groove, the side wall of the disc (18) is positioned in the arc-shaped groove and is clung to the inner wall of the arc-shaped groove, two storage cavities (27) are arranged in the disc (18), and feed inlets (24) are formed in the opposite sides of the two storage cavities (27); Unloading subassembly, unloading subassembly is used for adding quantitative raw materials, unloading subassembly is including setting up mushroom piece (23) in barrel (1), mushroom piece (23) and the inner wall sliding connection of barrel (1), the upper end fixedly connected with second round bar (22) of mushroom piece (23), two connecting rods (20) of fixedly connected with on second round bar (22), two connecting rods (20) run through blanking hopper (19) and common fixedly connected with first round bar (21), through pushing down first round bar (21) for mushroom piece (23) moves down, opens the bottom of barrel (1).
  2. 2. The charging system of a Czochralski single crystal growing furnace of claim 1, further comprising a downward moving assembly, wherein the downward moving assembly comprises a first motor (9) arranged on a cylinder cover (2), a first gear (8) is arranged on an output shaft of the first motor (9), a sliding rail (5) is fixedly connected to the cylinder cover (2), a sliding block (6) is slidingly connected to the sliding rail (5), a rack (7) is fixedly connected to the sliding block (6), the rack (7) is meshed with the first gear (8), and the rack (7) penetrates through the cylinder cover (2) and is fixedly connected with the upper end of a first round rod (21).
  3. 3. The charging system of the Czochralski single crystal furnace of claim 2, wherein two first fixing blocks (3) are fixedly connected to the outer side of the cylinder cover (2), two second fixing blocks are fixedly connected to the outer wall of the cylinder body (1), hydraulic cylinders (4) are mounted on the second fixing blocks, and the telescopic ends of the two hydraulic cylinders (4) are fixedly connected with the lower ends of the first fixing blocks (3).
  4. 4. The charging system of a Czochralski single crystal furnace according to claim 1, wherein space adjusting assemblies are arranged in the two storage cavities (27), each space adjusting assembly comprises an electromagnet (25) embedded on the inner walls of the left side and the right side of the storage cavity (27), two adjusting plates (26) are arranged in the storage cavity (27), the two electromagnets (25) are elastically connected with the adjacent sides of the corresponding adjusting plates (26) through second springs, and the two adjusting plates (26) are slidably connected with the inner walls of the front side and the rear side of the storage cavity (27).
  5. 5. The Czochralski crystal growing furnace charging system of claim 4, wherein each adjusting plate (26) is provided with an adjusting groove (28) on one side close to the feed inlet (24), each adjusting groove (28) is internally and slidably connected with a clinging block (30), each clinging block (30) is elastically connected with the inner bottom of the corresponding adjusting groove (28) through a first spring (29), the inner walls of the opposite sides of the two storage cavities (27) are inclined planes, one side, far away from the adjusting groove (28), of each clinging block (30) is an inclined plane, and under the action of the first spring (29), the inclined planes of the clinging blocks (30) are always attached to the inclined planes of the storage cavities (27) during space adjustment.
  6. 6. The Czochralski crystal growing furnace charging system of claim 1, further comprising a scraping assembly, wherein after the mushroom blocks (23) move downwards to be completely discharged, residual raw materials on the mushroom blocks (23) are scraped, the scraping assembly comprises a toothed ring (10) which is rotationally connected to the outer side of the barrel (1), the lower end of the toothed ring (10) is fixedly connected with a plurality of vertical rods (15), a plurality of vertical rods (15) are fixedly connected with U-shaped blocks (32), each U-shaped block (32) is rotationally connected with a rotating shaft (31), each rotating shaft (31) is elastically connected with each U-shaped block (32) through a torsion spring (33), each rotating shaft (31) is fixedly connected with a scraping rod (34), the lower end of each mushroom block (23) is fixedly connected with a baffle ring (35), and when the lower end of the barrel (1) is plugged by the mushroom blocks (23), the baffle ring limits the scraping rods (34).
  7. 7. The Czochralski crystal growing furnace charging system of claim 6, further comprising a driving assembly, wherein the driving assembly comprises a second motor (11) arranged on the outer side of the barrel (1), two mounting blocks are fixedly connected on the outer side of the barrel (1), a thin rod is fixedly connected on the adjacent sides of the two mounting blocks in a rotating mode, the thin rod is fixedly connected with an output shaft of the second motor (11), bevel gears (17) are arranged on the rotating rod (16) and the thin rod, a one-way bearing is arranged between the rotating rod (16) and the bevel gears (17), a transmission rod (12) is arranged below the mounting blocks in a penetrating and rotating mode, a second gear (13) meshed with each other is arranged on the transmission rod (12) and the thin rod, a second one-way bearing is arranged between the transmission rod (12) and the second gear (13), a third gear (14) is fixedly connected on the transmission rod (12), and the third gear (14) is meshed with the toothed ring (10).

Description

Charging system of Czochralski crystal growing furnace Technical Field The invention relates to the technical field of semiconductor processing, in particular to a charging system of a Czochralski crystal growing furnace. Background The Czochralski single crystal furnace is core equipment for preparing monocrystalline silicon, the monocrystalline silicon is used as a key base material in the field of semiconductors, and the accurate, continuous and clean feeding of raw materials in the preparation process directly influences the crystal quality, the crystal pulling efficiency and the yield of the monocrystalline silicon. In the Czochralski crystal pulling process, polysilicon raw materials are quantitatively supplemented into a crucible of the single crystal furnace to maintain the stable liquid level of the silicon melt in the crucible, so that the problems of fluctuation of the diameter of a crystal rod, crystal defects and the like caused by uneven raw material supplementation are avoided, and a charging system of the single crystal furnace becomes a key component for guaranteeing the stability of the crystal pulling process. The charging system of the existing Czochralski crystal growing furnace mostly adopts a hopper gate plate type, spiral feeding type or gravity blanking type structure, and can realize basic raw material conveying, but the charging system still has a plurality of technical defects in practical application, and is difficult to meet the requirements of a high-precision crystal pulling process. Firstly, the quantitative precision of the traditional feeding system is low, the blanking quantity is controlled by a flashboard structure depending on the flashboard opening and closing stroke, the blanking quantity deviation is easily caused by the granularity and the stacking density of raw materials, the problem that the raw materials adhere to a spiral groove exists in the spiral feeding structure, the actual blanking quantity is inconsistent with a theoretical value, the accurate quantitative feeding of the raw materials cannot be realized, secondly, the feeding quantity of a part of the feeding system is fixed, only a single-specification crystal pulling process can be adapted, when the feeding quantity of a crucible needs to be adjusted and the crystal pulling specification needs to be replaced, the quantitative part needs to be detached and replaced, the operation is complex, the universality of equipment is reduced, and the production operation and maintenance cost is increased. Therefore, there is a need to design a Czochralski crystal growing furnace charging system to address the above issues. Disclosure of Invention The invention aims to solve the defects in the prior art, and provides a charging system of a Czochralski single crystal furnace, which realizes the accurate quantitative blanking of raw materials and the flexible adjustment of charging quantity, can clean dead-angle-free residual materials of a blanking plugging component, completes the action switching of quantitative blanking and residual material cleaning through single power source linkage, simplifies the system structure, improves the sealing performance, ensures the charging stability and the operation convenience, and effectively improves the yield and the production efficiency of finished products of monocrystalline silicon crystal pulling. In order to achieve the above purpose, the present invention adopts the following technical scheme: The utility model provides a straight pull single crystal furnace charging system, includes the barrel, the upper end of barrel is equipped with the cover, be equipped with quantitative blanking subassembly in the barrel, quantitative blanking subassembly includes the blanking fill of fixed connection in the barrel, the inner bottom of blanking fill is equipped with the blanking mouth, the inner wall of the left and right sides of barrel rotates jointly and is connected with the bull stick, fixedly connected with disc on the bull stick, the lower extreme of blanking fill is equipped with the arc wall, the blanking mouth runs through the arc wall, the lateral wall of disc is located the arc wall and hugs closely with the inner wall of arc wall, be equipped with two storage chamber in the disc, two the opposite sides of storage chamber all is equipped with the feed inlet; The blanking assembly is used for adding quantitative raw materials, the blanking assembly comprises mushroom blocks arranged in a barrel, the mushroom blocks are in sliding connection with the inner wall of the barrel, the upper ends of the mushroom blocks are fixedly connected with second round rods, two connecting rods are fixedly connected to the second round rods, the two connecting rods penetrate through a blanking hopper and are fixedly connected with first round rods together, and the mushroom blocks move downwards by pressing the first round rods, so that the bottoms of the barrel are opened. Preferabl