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CN-122014803-A - J-shaped movement transmission valve

CN122014803ACN 122014803 ACN122014803 ACN 122014803ACN-122014803-A

Abstract

The invention discloses a J-shaped motion transmission valve, which particularly relates to the technical field of valves, and comprises a valve body, a valve plate, a support piece, a damping cylinder, a cam joint, a movable connecting piece, a push rod and an elastic support piece, wherein a first hollow space is formed in the valve body, a channel is formed in the side wall of the valve body, the channel is communicated with the first hollow space, the valve plate is arranged in the first hollow space, one end of the support piece is slidably connected with the valve body, a penetrating space is formed in the middle position of the support piece, at least two damping gaskets are arranged on the support piece, the damping cylinder is connected with one end of the support piece far away from the valve body, and one end of the damping cylinder is fixedly connected in the penetrating space.

Inventors

  • SHAO JIA
  • LI HUAN

Assignees

  • 靖江佳晟真空技术有限公司

Dates

Publication Date
20260512
Application Date
20260211

Claims (10)

  1. 1. The J-shaped motion transmission valve comprises a valve body (10), a valve plate (20), a supporting piece (30), a damping cylinder (40), a cam joint (50), a movable connecting piece (60), a push rod (70) and an elastic supporting piece (80), and is characterized in that a first hollow space is formed in the valve body (10), a channel (11) is formed in the side wall of the valve body (10), the channel (11) is communicated with the first hollow space, and the valve plate (20) is arranged in the first hollow space; One end of the supporting piece (30) is connected with the valve body (10), a penetrating space (31) is formed in the middle of the supporting piece (30), the damping cylinder (40) is connected with one end of the valve body (10) far away from the supporting piece (30), one end of the damping cylinder (40) is fixedly connected in the penetrating space (31), and one end of the damping cylinder (40) far away from the penetrating space (31) is arranged outside the penetrating space (31); the cam section (50) is connected to the shock absorbing cylinder (40), the cam section (50) is linked by the shock absorbing cylinder (40), the cam section (50) is provided with an arc through groove (51), the movable connecting piece (60) is in sliding connection with the arc through groove (51), one end of the push rod (70) is arranged in the penetrating space (31), the push rod (70) is connected with the movable connecting piece (60), and one end of the push rod (70) far away from the movable connecting piece (60) penetrates out of the supporting piece (30) to be fixedly connected with the valve plate (20); The elastic support piece (80) is slidably connected in the penetrating space (31), and the elastic support piece (80) is arranged among the support piece (30), the damping cylinder (40) and the push rod (70).
  2. 2. The J-shaped motion transmission valve according to claim 1, wherein the support piece (30) comprises two groups of support blocks (30-1) and a connecting block (30-2), the two groups of support blocks (30-1) are symmetrically arranged at intervals, the support piece (30) is provided with at least two damping gaskets (32), one end of the support block (30-1) is connected with the valve body (10), a sliding groove (30-11) is formed in the inner wall of the support block (30-1), the sliding groove (30-11) is a kidney-shaped groove, and the damping gaskets (32) are fixedly connected to the inner side of the end part of the sliding groove (30-11); The connecting block (30-2) is connected to one end of the supporting block (30-1), a penetrating space (31) is formed between the connecting block (30-2) and the supporting block (30-1), and one end of the push rod (70) is inserted into the connecting block (30-2).
  3. 3. The J-shaped motion transmission valve according to claim 2, wherein the damping cylinder (40) comprises a cylinder body (40-1), a first cover plate (40-4), a first damping ring (40-5), a piston structure (40-6) and a second damping ring (40-7), the cylinder body (40-1) is connected with the supporting piece (30), a second hollow space is formed in the cylinder body (40-1), a first air nozzle (40-2) and a second air nozzle (40-3) are connected in the cylinder body (40-1), and the first air nozzle (40-2) and the second air nozzle (40-3) are arranged at intervals; The first cover plate (40-4) is connected to the end of the cylinder body (40-1), and the first cover plate (40-4) is arranged outside the through space (31) and is used for sealing one end of the second hollow space; The first damping ring (40-5) is fixedly connected to the inner wall of the first cover plate (40-4), and the first damping ring (40-5) is arranged in the second hollow space; The piston structure (40-6) is slidably connected in a second hollow space, the second hollow space in the cylinder body (40-1) is divided into a first space (40-11) and a second space (40-12), the first space (40-11) is communicated with the first air nozzle (40-2), the second space (40-12) is communicated with the second air nozzle (40-3), the piston structure (40-6) is connected with the cam section (50), and the piston structure (40-6) is contacted with the elastic supporting piece (80); The second damping ring (40-7) is fixedly sleeved on the piston structure (40-6); The magnetic ring (40-8) is fixedly connected to the piston structure (40-6); And the magnetic ring sensor (40-9) is fixedly connected to the cylinder body (40-1).
  4. 4. A J-shaped motion transmission valve as defined in claim 3 wherein the piston structure (40-6) comprises a piston (40-61), a press block (40-62), a piston rod (40-64), a first seal ring (40-65) and a second seal ring (40-66), the piston (40-61) is slidably connected in the second hollow space, and at least one set of first connecting bolts (40-63) are connected between the piston (40-61) and the press block (40-62) and between the cam section (50) and the piston structure (40-6), and the first connecting bolts (40-63) compress the magnetic ring (40-8) between the piston (40-61) and the press block (40-62); One end of the piston rod (40-64) is fixedly connected with the piston (40-61), one end of the piston rod (40-64) far away from the piston (40-61) is contacted with an elastic supporting piece (80), two ends of the piston rod (40-64) are respectively sleeved and connected with a sleeved push rod (70) and a cam joint (50), and the piston rod (40-64) and the piston (40-61) are sleeved and connected with a second damping ring (40-7); The first sealing ring (40-65) is sleeved between the piston (40-61) and the cylinder (40-1), and the second sealing ring (40-66) is sleeved between the cylinder (40-1) and the piston rod (40-64).
  5. 5. The J-shaped motion transmission valve as recited in claim 4, further comprising a self-locking member (40-10) fixedly connected to the side wall of the cylinder body (40-1), wherein a clamping groove (40-61-1) is formed in the outer side of the piston (40-61), and the self-locking member (40-10) is used for being clamped with the clamping groove (40-61-1) on the piston (40-61) when the valve plate (20) closes the channel (11).
  6. 6. The J-shaped motion transmission valve as set forth in claim 5, wherein the self-locking member (40-10) comprises a side seat (40-10-1) and a locking piece (40-10-3), the side seat (40-10-1) is fixedly connected to the outer wall of the cylinder body (40-1), and a first stepped through hole (40-10-11) is formed in the side seat (40-10-1); A first spring (40-10-2) is movably inserted in the first step through hole (40-10-11), and one end of the first spring (40-10-2) protrudes out of the first step through hole (40-10-11); A second step through hole (40-1-1) is formed in the cylinder body (40-1), the locking block (40-10-3) is connected in the second step through hole (40-1-1), and the cylinder body (40-1) is in clamping connection with the clamping groove (40-61-1) through the locking block (40-10-3); a third sealing ring (40-10-4) is connected between the side seat (40-10-1) and the locking block (40-10-3), and a fourth sealing ring (40-10-5) is connected between the locking block (40-10-3) and the cylinder body (40-1).
  7. 7. The J-shaped motion transmission valve as recited in claim 4, wherein the cam section (50) comprises a circular block (50-1) and a convex plate (50-2), the circular block (50-1) is fixedly connected with the first connecting bolt (40-63), the convex plate (50-2) is fixedly connected to the top of the circular block (50-1), an arc through groove (51) is formed in the convex plate (50-2), and the convex plate (50-2) is connected with one end of the push rod (70) in an inserting mode.
  8. 8. The J-shaped motion transmission valve as recited in claim 7, wherein the movable connecting piece (60) comprises a bearing (60-1) and a pin shaft (60-2), the movable connecting piece (60) slides in the arc-shaped through groove (51), the movable connecting piece (60) is fixedly connected with the push rod (70), the bearing (60-1) and the convex plate (50-2) through the pin shaft (60-2), and two ends and the middle part of the arc-shaped through groove (51) are respectively an opening section (51-1), a closing section (51-2) and a transition section (51-3).
  9. 9. A J-motion transfer valve according to claim 3, wherein the resilient support (80) comprises a bellows assembly (81) and a second spring (82), and the bellows assembly (81) is inserted into the through space (31), the bellows assembly (81) being inserted between the support (30) and the push rod (70), the second spring (82) being connected between the piston structure (40-6) and the bellows assembly (81); The corrugated pipe assembly (81) comprises a corrugated pipe (81-1) and a corrugated pipe outer seat (81-4), the corrugated pipe (81-1) is sleeved on the outer side of the push rod (70), one end of the corrugated pipe (81-1) is connected with the supporting piece (30), and one end, far away from the supporting piece (30), of the corrugated pipe (81-1) is contacted with the protrusion (70-1) on the push rod (70); a fifth sealing ring (81-2) is connected between the corrugated pipe (81-1) and the supporting piece (30), and a sixth sealing ring (81-3) is connected between the corrugated pipe (81-1) and the push rod (70); One end of the outer corrugated pipe seat (81-4) is in contact with the push rod (70), one end, far away from the push rod (70), of the outer corrugated pipe seat (81-4) is fixedly sleeved on the outer side of the corrugated pipe (81-1), at least one group of second connecting bolts (81-5) are connected between the outer corrugated pipe seat (81-4) and the push rod (70), two groups of mutually symmetrical annular sleeves (81-6) are arranged on the outer corrugated pipe seat (81-4), and the two groups of annular sleeves (81-6) are in one-to-one sliding connection with the two groups of sliding grooves (30-11).
  10. 10. The J-shaped motion transmission valve according to claim 4, wherein two groups of second cover plates (90) which are symmetrical to each other are connected between the connecting block (30-2) and the damping cylinder (40), the two groups of second cover plates (90) are connected between the two groups of supporting blocks (30-1), and the two groups of second cover plates (90) and the two groups of supporting blocks (30-1) cover the penetrating space (31); When the valve is opened, the piston (40-61) is positioned at the lower end of the damping cylinder (40), the second spring (82) releases the elastic force, the connection mode of the push rod (70) and the cam section (50) is in a first state, and at the moment, the movable connecting piece (60) is positioned at the opening section of the cam section; When the valve is closed, the piston (40-61) is positioned at the upper end of the shock absorption cylinder (40), the second spring (82) is stressed and compressed, the connection mode of the push rod (70) and the cam section (50) is in a second state, and at the moment, the movable connecting piece (60) is positioned at the closing section of the cam section (50).

Description

J-shaped movement transmission valve Technical Field The invention relates to the technical field of valves, in particular to a J-shaped motion transmission valve. Background The vacuum chambers in the semiconductor device are usually arranged in an in-line or cluster combination, gas is required to be exchanged in different chambers when the wafer is processed, and the chambers are vacuumized firstly and then ionized process gas is released in the process of exchanging the gas so as to perform etching process on the surface of the wafer; The process gas is required to be pumped out from the chamber after the process is completed, the chamber is communicated with the atmosphere and then enters the next process, a vacuum gate valve is arranged at the transmission cavity (TM end) of the vacuum chamber, and the on-off of the vacuum chamber communicated with the atmosphere is realized by controlling the position of a sealing valve plate of the gate valve. Along with the development of semiconductor technology, the size of a semiconductor wafer is smaller, and the sealing performance requirement on a vacuum chamber is also improved; In the traditional PRESYS transmission valve, a valve plate direct-up and down type transmission mode is adopted, one cylinder realizes the lifting action of the valve plate, and the other cylinder realizes the contact/separation of the valve plate with/from the valve body; The traditional VAT transmission valve adopts the L-Motion technology, the valve plate is firstly vertically moved to the closed position, the valve plate is basically not contacted with the valve body during the period, friction particles are reduced, and in the final movement stage, the valve plate is horizontally pushed to the valve body, at the moment, a sealing element on the valve plate is contacted with the valve body with basically the same pressure, so that the tightness is ensured; However, the transmission modes of the two transmission valves adopt a hard connection mode (hard connection is realized, for example, a telescopic shaft on a cylinder is connected with a push rod through a bolt, and an elastic buffer structure is not arranged), so that the transmission valves vibrate relatively more when being opened or closed. Therefore, a J-shaped motion transfer valve is proposed to address the above-mentioned problems. Disclosure of Invention In order to overcome the above-mentioned drawbacks of the prior art, the present invention provides a J-shaped motion transfer valve to solve the above-mentioned problems of the prior art. In order to achieve the purpose, the invention provides the technical scheme that the J-shaped motion transmission valve comprises a valve body, a valve plate, a supporting piece, a damping cylinder, a cam joint, a movable connecting piece, a push rod and an elastic supporting piece, wherein a first hollow space is formed in the valve body, a channel is formed in the side wall of the valve body, the channel is communicated with the first hollow space, and the valve plate is arranged in the first hollow space; One end of the supporting piece is connected with the valve body, a penetrating space is formed in the middle of the supporting piece, the damping cylinder is connected with one end, far away from the valve body, of the supporting piece, one end of the damping cylinder is fixedly connected in the penetrating space, and one end, far away from the penetrating space, of the damping cylinder is arranged outside the penetrating space; The cam section is connected to the shock absorbing cylinder and is linked by the shock absorbing cylinder, the cam section is provided with an arc through groove, the movable connecting piece is in sliding connection with the arc through groove, one end of the push rod is arranged in the penetrating space and is connected with the movable connecting piece, and one end of the push rod, far away from the movable connecting piece, penetrates out of the supporting piece and is fixedly connected with the valve plate; the elastic support piece is connected in the penetrating space in a sliding mode, and the elastic support piece is arranged between the support piece, the damping cylinder and the push rod. Preferably, the supporting piece comprises two groups of supporting blocks and connecting blocks, the two groups of supporting blocks are symmetrically arranged at intervals, the supporting piece is provided with at least two damping gaskets, one end of each supporting block is connected with the valve body, the inner wall of each supporting block is provided with a sliding groove, each sliding groove is a kidney-shaped groove, and the inner side of the end part of each sliding groove is fixedly connected with the damping gasket; The connecting block is connected at the one end of supporting shoe, just set up the space that runs through between connecting block and the supporting shoe, the one end of push rod is pegged graft in the connecting block. By ad