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CN-122014857-A - Vertical valve

CN122014857ACN 122014857 ACN122014857 ACN 122014857ACN-122014857-A

Abstract

The invention discloses a vertical valve which comprises a valve plate, at least one first driving structure and at least one second driving structure, wherein the second driving structure and the first driving structure are symmetrically arranged, an interval space is formed between the second driving structure and the first driving structure, the second driving structure and the first driving structure are connected with the valve plate together, the second driving structure and the first driving structure are synchronously linked with the valve plate to move along a straight line, the valve plate opens or closes an exhaust port on the wall of a process chamber, when the exhaust port is opened, gas exhausted from the exhaust port is exhausted from the interval space, thereby overcoming the technical problems that the gas is exhausted unevenly, the convection unbalance of the gas influences the forming quality of a wafer, the gas consumption is increased, the necessary flow time is forced to be prolonged, and the processing efficiency is reduced.

Inventors

  • SHAO JIA
  • LI HUAN

Assignees

  • 靖江佳晟真空技术有限公司

Dates

Publication Date
20260512
Application Date
20260211

Claims (10)

  1. 1. A vertical valve, comprising: A valve plate; at least one first driving structure; And at least one second driving structure, the second driving structure and the first driving structure are symmetrically arranged, a spacing space is formed between the second driving structure and the first driving structure, the second driving structure and the first driving structure are connected together to the valve plate, the second driving structure and the first driving structure synchronously link the valve plate to move along a straight line, the valve plate opens or closes an exhaust port on the wall of the process chamber, and when the exhaust port is opened, the gas exhausted from the exhaust port is exhausted from the spacing space.
  2. 2. A vertical valve according to claim 1, wherein said valve plate comprises an intermediate blocking area for opening or closing said exhaust port; and at least two extension arms symmetrically connected to the intermediate blocking area, one for connection with the first drive structure and the other for connection with the second drive structure.
  3. 3. The vertical valve of claim 1, wherein the first drive structure and the second drive structure are identical in structure and comprise a valve body assembly having a first space and a second space thereon; The driving piece is partially arranged in the first space and connected with the valve body assembly, and the driving piece is partially arranged outside the first space; The screw rod assembly is arranged in the second space and connected with the valve body assembly, one end of the screw rod assembly protrudes out of the second space and is connected with the driving piece, and the screw rod assembly is in linkage action by the driving piece; and one end of the main shaft structure is connected with the screw rod assembly, and the other end of the main shaft structure penetrates out of the second space and the process chamber wall and is connected with the valve plate.
  4. 4. A vertical valve according to claim 3, wherein said valve body assembly comprises a valve body having said first space and said second space thereon, said first space and said second space being spaced apart; the two side cover plates are symmetrically connected to the valve body and used for blocking the first space and the second space; and a housing coupled to the valve body for housing another portion of the driving member.
  5. 5. A vertical valve according to claim 3, wherein said actuator comprises a motor disposed in said first space and connected to said valve body assembly; the first belt wheel is connected to the motor and is arranged outside the first space; The second belt wheel is connected to the screw rod assembly and is arranged at intervals with the first belt wheel; and a belt body connecting the first pulley and the second pulley.
  6. 6. A vertical valve according to claim 5, wherein the screw assembly comprises a screw disposed in the second space with one end protruding from the second space and connected to the second pulley; the first baffle ring is connected to one end of the screw rod and is abutted against the limiting step on the screw rod; The second baffle ring is connected to one end of the screw rod and is arranged at intervals with the first baffle ring; the lock nut is connected to the screw rod and limits the second baffle ring; The bearing is connected to the valve body assembly and is connected with the first baffle ring, the second baffle ring and the screw rod; the bearing seat is arranged in the second space, connected to the valve body assembly and connected to the other end of the lead screw; The screw nut is arranged in the second space and is in threaded connection with the screw; the screw rod seat is arranged in the second space, connected to the screw rod nut and used for being connected with one end of the main shaft structure; and the linear guide piece is arranged in the second space, connected to the valve body assembly and connected with the screw rod seat.
  7. 7. The vertical valve of claim 6, wherein the screw seat comprises a base, a boss, a valve seat and a valve seat, wherein the base is sleeved on the screw and is arranged at intervals with the screw, one end of the base is connected with the screw nut, and the boss is connected to the base and is connected with one end of the main shaft structure; the linear guide piece comprises a linear guide rail, a sliding block and a limit stop block, wherein the linear guide rail is connected to the valve body assembly and is arranged in parallel with the lead screw at intervals, the sliding block is connected with the linear guide rail in a sliding mode, the sliding block is arranged at a positioning spigot on the base and is connected with the base, and the limit stop block is connected to the linear guide rail and is arranged at intervals with the sliding block and used for blocking the sliding block.
  8. 8. A vertical valve according to claim 3 or 7, wherein the spindle structure comprises a spindle, one end of which is connected with the screw assembly, and the other end of which passes out of the second space and the process chamber wall and is connected with the valve plate; And the corrugated pipe is sleeved on the main shaft, one end of the corrugated pipe is connected with the main shaft, and the other end of the corrugated pipe is abutted against the wall of the process chamber.
  9. 9. The vertical valve according to claim 8, further comprising two protection members disposed in the second space and connected to the valve body assembly for protecting the spindle structure; the protection piece comprises a connecting block and a connecting rod, wherein the connecting block is used for being connected with the valve body assembly; and the protection block is connected with the connecting block, an arc-shaped surface is arranged on one side wall of the protection block, the arc-shaped surface faces the corrugated pipe, and the protection block surrounds the corrugated pipe.
  10. 10. The vertical valve of claim 9, further comprising a heat dissipating structure disposed on the valve body assembly for dissipating heat; the heat dissipation structure comprises a fan, a first air inlet, a second air inlet and a first air outlet, wherein the fan is connected to the valve body, is arranged in the first space and faces to an air vent on the valve body and is used for circulating air; and at least two ventilation air channels are arranged on the valve body at intervals and are communicated with the first space and the second space.

Description

Vertical valve Technical Field The invention relates to the technical field of valves, in particular to a vertical valve. Background In semiconductor and precision manufacturing processes, the gas flow dynamics inside the process chamber is one of the core factors determining the process efficiency and the product quality, and traditionally, process optimization is focused on the flow field design of the gas injection stage, however, the gas behavior of the exhaust stage also has a significant effect on the process results; The ideal gas flow state ensures that the gas distribution near the surface of the wafer is highly uniform, which is the basis for realizing the synchronous and stable chemical reaction of the surface of the wafer, and the principle is not only suitable for the gas inlet stage, but also throughout the whole process of gas discharge, if the outlet position is improperly designed or the flow channel morphology is changed due to the fact that a valve is in the action process, the gas flow is possibly caused to be asymmetric, the asymmetry can prevent the gas from being efficiently discharged, or an uneven flow velocity field is formed, the direct consequence is that the gas residence time of different areas of the wafer is different, the reaction uniformity is influenced due to the unbalanced convection condition, so that the forming quality of the wafer is influenced, in addition, the problems also lead to the increase of the process gas consumption, the necessary flow time is forced to be prolonged, and the processing efficiency is reduced. Disclosure of Invention Aiming at the defects existing in the related art, the purpose is to provide a vertical valve to solve the technical problems that the gas discharge is uneven, the convection of the gas is unbalanced, the forming quality of a wafer is affected, the gas consumption is increased, the necessary flow time is forced to be prolonged, and the processing efficiency is reduced in the related art; the technical scheme for realizing the purpose is that the vertical valve comprises: A valve plate; at least one first driving structure; And at least one second driving structure, the second driving structure and the first driving structure are symmetrically arranged, a spacing space is formed between the second driving structure and the first driving structure, the second driving structure and the first driving structure are connected together to the valve plate, the second driving structure and the first driving structure synchronously link the valve plate to move along a straight line, the valve plate opens or closes an exhaust port on the wall of the process chamber, and when the exhaust port is opened, the gas exhausted from the exhaust port is exhausted from the spacing space. Further, the valve plate comprises an intermediate blocking area for opening or closing the exhaust port; and at least two extension arms symmetrically connected to the intermediate blocking area, one for connection with the first drive structure and the other for connection with the second drive structure. The first driving structure and the second driving structure are the same in structure and comprise a valve body assembly, wherein the valve body assembly is provided with a first space and a second space; The driving piece is partially arranged in the first space and connected with the valve body assembly, and the driving piece is partially arranged outside the first space; The screw rod assembly is arranged in the second space and connected with the valve body assembly, one end of the screw rod assembly protrudes out of the second space and is connected with the driving piece, and the screw rod assembly is in linkage action by the driving piece; and one end of the main shaft structure is connected with the screw rod assembly, and the other end of the main shaft structure penetrates out of the second space and the process chamber wall and is connected with the valve plate. The valve body assembly comprises a valve body, a valve seat and a valve seat, wherein the valve body is provided with a first space and a second space, and the first space and the second space are arranged at intervals; the two side cover plates are symmetrically connected to the valve body and used for blocking the first space and the second space; and a housing coupled to the valve body for housing another portion of the driving member. The driving piece comprises a motor, a first valve body component and a second valve body component, wherein the motor is arranged in the first space and is connected with the first valve body component; the first belt wheel is connected to the motor and is arranged outside the first space; The second belt wheel is connected to the screw rod assembly and is arranged at intervals with the first belt wheel; and a belt body connecting the first pulley and the second pulley. The screw rod assembly comprises a screw rod, a first belt wheel and a second belt wheel