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CN-122014872-A - Valve plate sealing assembly resistant to plasmas and preparation method and application thereof

CN122014872ACN 122014872 ACN122014872 ACN 122014872ACN-122014872-A

Abstract

The invention relates to the technical field of semiconductor equipment manufacture and sealing, and particularly discloses a plasma-resistant valve plate sealing assembly, and a preparation method and application thereof; the assembly comprises a metal matrix, an elastic sealing element, a PFA isolation belt and an infiltration body therebetween, wherein the elastic sealing element with a specific shape is firstly arranged in an outer annular groove during preparation, then PFA melt in an inner annular groove is subjected to hot press molding, the PFA melt and the surface layer of the elastic sealing element are mutually infiltrated and fused to form a transition layer, namely the infiltration body, the interface is tightly combined without gaps, and finally flash is quickly cooled and removed, so that a valve plate sealing assembly finished product is obtained.

Inventors

  • CUI ZHE
  • YE YIN
  • HE SHUPENG
  • LI JIAPING
  • SUN XIAOHENG

Assignees

  • 上海熹贾精密技术有限公司
  • 沈阳富创精密设备股份有限公司

Dates

Publication Date
20260512
Application Date
20260413

Claims (9)

  1. 1. The valve plate sealing assembly is characterized in that an annular boss is arranged between the outer layer annular groove and the inner layer annular groove, and the top surface of the annular boss is higher than the bottom of the outer layer annular groove and lower than the sealing matching surface of the metal substrate; the elastic seal comprises a PFA component; The PFA isolation belt comprises a PFA matrix and an infiltration body; The PFA matrix is embedded in the inner annular groove; the infiltration body extends from the PFA matrix to the elastic sealing element through the annular boss surface and is integrally connected with the elastic sealing element.
  2. 2. A method of making a plasma resistant valve plate seal assembly of claim 1, said method comprising the steps of: and installing the elastic sealing element in an outer annular groove of the metal matrix, applying pressure to the PFA melt in the inner annular groove, cooling the component blank to a cooling temperature after pressure maintaining molding, and removing flash from the component blank to obtain a valve plate sealing component finished product.
  3. 3. The method for preparing the valve plate sealing assembly resistant to the plasmas, according to claim 2, wherein the elastic sealing element is obtained by mixing perfluoroether crude rubber, PFA micro powder and an auxiliary agent to form a mixed rubber, extruding the mixed rubber to form a rubber strip, and performing primary vulcanization and secondary vulcanization on the rubber strip.
  4. 4. The method for preparing a plasma-resistant valve plate sealing assembly according to claim 3, wherein the mass ratio of the perfluoroether raw rubber to the PFA micro powder is 100:5-15.
  5. 5. The method of claim 2, wherein the PFA melt temperature is 350-380 ℃.
  6. 6. The method of claim 2, wherein the PFA melt further comprises 2, 2-bis (3-amino-4-hydroxyphenyl) hexafluoropropane, a fluorounsaturated carboxylate, and a peroxide.
  7. 7. The method of claim 2, wherein the dwell pressure is 120-140MPa and the dwell time is 25-40s.
  8. 8. The method of claim 2, wherein the cooling time is 10-20s and the cooling temperature is 150-240 ℃.
  9. 9. Use of the plasma resistant valve plate seal assembly of claim 1 in a semiconductor.

Description

Valve plate sealing assembly resistant to plasmas and preparation method and application thereof Technical Field The invention relates to the technical field of semiconductor equipment manufacture and sealing, in particular to a plasma-resistant valve plate sealing assembly, and a preparation method and application thereof. Background Currently, in multiple processes for semiconductor fabrication, such as etching, deposition, and Plasma ashing, highly reactive plasmas (Plasma) are generated within the process chamber. These plasmas also create physical/chemical etching of components within the chamber, particularly dynamic seals such as valves, while processing wafers. Conventional valve plate seals typically rely on elastic deformation of rubber (e.g., perfluoroether rubber, silicone) to achieve sealing, and while rubber materials provide good seal support and fit, they have poor resistance to plasma etching. The contact sites of rubber and metal base materials are gradually etched after long-term exposure to plasma, so that the bonding strength and the fixing strength of the materials are obviously weakened, sealing failure is further caused, even particle pollution is generated, and the processing yield of wafers and the working stability of equipment are seriously affected. In order to improve the corrosion resistance of seals, in the prior art, the following approaches are generally taken: (1) Fluoroplastic (such as PFA and PTFE) is coated or attached on a metal substrate as a sacrificial protection device, however, the simple coating or attaching method often has the problem of insufficient binding force, particularly in the dynamic valve opening and closing process, the fluoroplastic layer is easily peeled off or damaged from rubber or a metal substrate, and plasma can still invade through a tiny gap to corrode the rubber structure inside; (2) The perfluoroether rubber is modified, but the weather resistance of the rubber matrix is limited, so that even if the perfluoroether rubber is modified, the corrosion resistance of the whole rubber can not be obviously improved; (3) Inorganic filler is added into the perfluoroether rubber, but the inorganic filler is poor in compatibility in a rubber matrix and easy to agglomerate, so that the processability of the rubber is reduced, and the use requirement of a high-end sealing scene cannot be met. Therefore, there is a great need for a method of high strength, seamless bonding of a molded protective layer to a rubber seal body to significantly extend the useful life of the assembly. Disclosure of Invention In order to solve the technical problems in the background art, the invention provides a plasma-resistant valve plate sealing assembly, which comprises a metal matrix, an elastic sealing element and a PFA isolation belt, wherein an outer annular groove and an inner annular groove are formed in a sealing matching surface of the metal matrix, the elastic sealing element is embedded in the outer annular groove, an annular boss is arranged between the outer annular groove and the inner annular groove, and the top surface of the annular boss is higher than the bottom of the outer annular groove and lower than the sealing matching surface of the metal matrix; the elastic seal comprises a PFA component; The PFA isolation belt comprises a PFA matrix and an infiltration body; The PFA matrix is embedded in the inner annular groove; the infiltration body extends from the PFA matrix to the elastic sealing element through the annular boss surface and is integrally connected with the elastic sealing element. In the invention, the joint of the elastic sealing element (in the embodiment, the sealing rubber ring) and the metal matrix is protected by the infiltration body (see the region with the reference numeral 131 in fig. 3), so that the erosion of plasma can be effectively avoided, and the elastic sealing element can play a long-acting sealing and supporting role; When the elastic sealing element is embedded in the outer annular groove (see the area with the reference number 11 in fig. 1), the PFA matrix is embedded in the inner annular groove (see the area with the reference number 12 in fig. 1), and the outer annular groove and the inner annular groove have certain physical anchoring effects on the inlay, so that the inlay is not required to be fixed by an adhesive; The PFA isolation belt is particularly adopted because PFA is used as a branched fluoroplastic compared with other fluoroplastics, has perfluoroalkoxy side chains, and molecular chains are mutually entangled, so that the PFA can not generate serious dust generation phenomenon along with plasma erosion in the actual use process, and can be well applied to the field of semiconductors. The invention also provides a preparation method of the plasma-resistant valve plate sealing assembly, which comprises the following steps: and installing the elastic sealing element in an outer annular groove of the metal mat