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CN-122014877-A - Diaphragm for semiconductor diaphragm type flow control component and semiconductor flow control component

CN122014877ACN 122014877 ACN122014877 ACN 122014877ACN-122014877-A

Abstract

The invention discloses a diaphragm for a semiconductor diaphragm type flow control component and a semiconductor flow control component, wherein the diaphragm is arranged between a valve body and a valve cover of the flow control component and is used for isolating and sealing fluid flowing in the valve body from the outside, and the diaphragm comprises a functional operation area, a rebound area and a sealing area; the functional operation area is correspondingly arranged below the valve rod, the whole valve rod is of an arc-shaped structure, the convex surface of the functional operation area faces the inside of the valve body, the rebound area is deformed from the edge of the functional operation area to the direction away from the valve body and is arranged in an arc-shaped structure so as to provide rebound space for the functional operation area, and the sealing area extends in a horizontal trend from the free end of the rebound area to the direction away from the functional operation area. The invention can effectively disperse alternating stress generated by repeated opening and closing of the valve, eliminates stress concentration at the transition part of the structure, reduces fatigue microcracks and irreversible plastic deformation, and remarkably prolongs the service life of the diaphragm.

Inventors

  • Request for anonymity
  • Request for anonymity

Assignees

  • 星奇(上海)半导体有限公司

Dates

Publication Date
20260512
Application Date
20260416

Claims (10)

  1. 1. A diaphragm for a semiconductor diaphragm-type flow control member, disposed between a valve body and a valve cover of the flow control member, for sealing a fluid flowing inside the valve body from the outside, and for opening and closing an access passage inside the valve body under an external force to realize a cut-off on-off control, comprising: The functional operation area is correspondingly arranged below the valve rod, the whole functional operation area is of an arc-shaped structure, and the convex surface of the functional operation area faces the inside of the valve body, so that the direction of deformation of the diaphragm caused by compression in the opening and closing process of the valve body is consistent with the direction of acting force exerted by the valve rod; the rebound area is deformed in an arc-shaped structure from the edge of the functional operation area to a direction away from the valve body, so as to provide rebound space for the functional operation area; The sealing area extends from the free end of the rebound area to a direction away from the functional operation area in a horizontal trend, and the sealing area is used for being clamped between the valve body and the valve cover.
  2. 2. The diaphragm of claim 1 wherein the functional operating area comprises a central sealing area covering at least a valve seat disposed at a fluid inlet port inside the valve body.
  3. 3. The diaphragm of claim 1 wherein said rebound zone comprises a peak projecting away from said valve body, said peak having a first arc disposed proximate said functional operation zone, a second arc disposed proximate said peak, and a third arc disposed proximate said sealing zone; the difference in arc radii between the first, second and third arcs is no more than 30% of the maximum arc radius; And/or the arc radiuses of the first arc, the second arc and the third arc are 10% -15% of the diameter of the diaphragm.
  4. 4. A diaphragm according to claim 3 wherein the rebound region comprises at least two peaks and at least one valley, the peaks and valleys being connected end to form the rebound region in the form of a wave.
  5. 5. The diaphragm of claim 4, wherein the distance of the peaks and/or the valleys from the plane of the valve seat is set based on a flow value of the flow control component.
  6. 6. The diaphragm of claim 4 wherein the longitudinal height of a plurality of said peaks decreases from closer to said functional operational area to farther from said functional operational area.
  7. 7. The diaphragm of claim 4 wherein the longitudinal distance of a plurality of said peaks to said sealing region decreases from closer to said functional operating region to farther from said functional operating region.
  8. 8. The diaphragm of claim 4 wherein the central angle of the peaks or the valleys is 75 ° -95 °.
  9. 9. The membrane according to claim 1, wherein the membrane is integrally formed from an elastic metal sheet of at least nickel-based alloy, cobalt-based alloy, and stainless steel; and/or the thickness of the membrane is 0.06mm-0.2mm.
  10. 10. A semiconductor fluidic component, comprising: the valve body is provided with a medium inlet and outlet channel; The valve cover is fixedly connected to the opening of the valve body; The diaphragm of any one of claims 1-9, said diaphragm being sandwiched between said valve body and valve cover to seal the fluid circulating within said valve body from the outside; the driving assembly is fixed on the valve body, and a valve rod of the driving assembly is positioned above the diaphragm and corresponds to the functional operation area of the diaphragm and is used for driving the diaphragm to move so as to open and close the medium inlet and outlet passage.

Description

Diaphragm for semiconductor diaphragm type flow control component and semiconductor flow control component Technical Field The invention relates to the technical field of valves, in particular to a diaphragm for a semiconductor diaphragm type flow control component and the semiconductor flow control component. Background In the prior art, the diaphragm is a core key component of the diaphragm valve, has the functions of opening and closing control, medium isolation, pressure sealing and the like, and is an executing component for realizing valve opening and closing and a safety barrier for isolating a medium and a driving component. The stress distribution improvement and the sealing effect improvement are realized mainly through the design of specific shapes such as a convex spherical surface, a plane and the like and the optimization of a sealing surface. The valve body is characterized in that the valve body is provided with a valve seat, a valve body cavity medium is arranged in the valve body cavity, the valve body cavity medium is communicated with a valve rod, the valve body cavity medium is communicated with a valve body cavity medium, the valve body cavity medium is communicated with the valve body cavity medium, and the valve body cavity medium is communicated with the valve body cavity medium. However, existing diaphragm valve diaphragms have significant shortcomings in practical conditions, the service life of which is limited by multiple factors, wherein permanent deformation (inability to rebound) is the most critical and irreversible mechanical damage that leads to diaphragm failure. The permanent deformation refers to that the original elastic recovery capability of the diaphragm material is lost under the action of long-term or extreme stress, the original shape cannot be recovered when the valve is opened, the diaphragm is mainly initiated by mechanical stress and fatigue damage, the repeated opening and closing of the valve enables the diaphragm to bear alternating stress, local stress concentration is easy to occur at the transition part and the clamping area of the structure, fatigue microcracks can occur after the stress exceeds the load limit of the material, the fatigue microcracks further develop into visible cracks to cause failure, and in addition, the diaphragm is subjected to extrusion stress with far exceeding design values in the moment due to the false operation such as over-travel and the like, so that irreversible plastic deformation is caused, and the rebound capability is thoroughly lost. After the diaphragm is permanently deformed, the valve is not tightly closed and internal leakage occurs, meanwhile, the flow regulation precision is damaged, the corresponding relation between the operation action and the fluid control is lost, the existing diaphragm is difficult to resist the permanent deformation through the structure or the material characteristic of the existing diaphragm under the severe working conditions of high temperature, high pressure difference or frequent operation, the service life cannot be effectively prolonged, and the running reliability of a system is difficult to guarantee. Based on this, a new solution is needed. Disclosure of Invention In view of the above, embodiments of the present invention provide a membrane for a semiconductor diaphragm type flow control component and a semiconductor flow control component, so as to at least solve the problem of low lifetime of the existing valve membrane. The embodiment of the invention provides the following technical scheme: The embodiment of the invention provides a diaphragm for a semiconductor diaphragm type flow control component, which is arranged between a valve body and a valve cover of the flow control component and is used for isolating and sealing fluid flowing in the valve body from the outside, and the diaphragm can open and close an inlet and outlet channel in the valve body under the action of external force so as to realize cut-off on-off control, and comprises the following components: The functional operation area is correspondingly arranged below the valve rod, the whole functional operation area is of an arc-shaped structure, and the convex surface of the functional operation area faces the inside of the valve body; the rebound area is deformed in an arc-shaped structure from the edge of the functional operation area to a direction away from the valve body, so as to provide rebound space for the functional operation area; The sealing area extends from the free end of the rebound area to a direction away from the functional operation area in a horizontal trend, and the sealing area is used for being clamped between the valve body and the valve cover. Preferably, the functional operating region comprises a central sealing region covering at least a valve seat provided inside the valve body at the fluid inlet passage opening. Preferably, the rebound area comprises a peak protruding towards t