CN-122015015-A - System and method for using inflammable and explosive gas

Abstract

The embodiment of the disclosure provides a flammable and explosive gas using system and method, the system comprises a gas supply module, a gas utilization module, a pumping and exhausting processing module and a control module, wherein the gas utilization module is respectively connected with the gas supply module and the pumping and exhausting processing module, the gas supply module is used for supplying the flammable and explosive gas to the gas utilization module, a reaction cavity of the gas utilization module is in a negative pressure environment, the pumping and exhausting processing module comprises pumping and exhausting equipment, the pumping and exhausting equipment is used for pumping and exhausting gas from a reaction cavity, an oxygen concentration detection device is arranged at a gas outlet of the pumping and exhausting equipment, the oxygen concentration detection device indirectly detects the oxygen concentration in the reaction cavity by detecting the concentration of oxygen at the gas outlet of the pumping and exhausting equipment, and the control module is used for judging whether the gas utilization module is in a safe use range of the flammable and explosive gas or not according to the oxygen concentration, and controlling the gas supply module to stop supplying the flammable and explosive gas to the gas utilization module if the detected oxygen concentration is not in the safe use range of the flammable and explosive gas. Provides a safe use scheme of flammable and explosive gas under the negative pressure environment.

Inventors

• CHEN YE
• YANG BOJIN
• HAO BAOTONG

Assignees

• 深圳市新凯来技术有限公司

Dates

Publication Date

20260512

Application Date

20241101

Claims (17)

1. 1. The inflammable and explosive gas using system is characterized by comprising a gas supply module, a gas utilization module, a pumping and exhausting processing module and a control module; The gas utilization module is respectively connected with the gas supply module and the pumping and exhausting processing module, and is used for providing inflammable and explosive gas for the gas utilization module, wherein the inflammable and explosive gas reacts in a reaction cavity of the gas utilization module, and the reaction cavity is in a negative pressure environment when working; The pumping device is used for pumping gas from the reaction cavity, an oxygen concentration detection device is arranged at the gas outlet of the pumping device, and the oxygen concentration detection device indirectly detects the oxygen concentration in the reaction cavity by detecting the concentration of oxygen at the gas outlet of the pumping device; The control module is used for judging whether the oxygen concentration is in the safe use range of the flammable and explosive gas or not according to the oxygen concentration, and if the oxygen concentration is not detected to be in the safe use range of the flammable and explosive gas, the gas supply module is controlled to stop supplying the flammable and explosive gas to the gas utilization module.
2. 2. The system of claim 1, wherein the gas supply module comprises a first gas supply conduit and a plurality of second gas supply conduits seamlessly connected to the first gas supply conduit, the plurality of second gas supply conduits being for diverting the combustible and explosive gases delivered by the first gas supply conduit; The air outlets of the second air supply pipelines are respectively connected with the air inlet of the reaction cavity and are used for providing inflammable and explosive gas for the reaction cavity; The air supply module comprises a first cabinet body and a second cabinet body which are sealed relatively, and at least part of the first air supply pipeline is positioned in the first cabinet body; the negative pressure pumping equipment is connected with the first cabinet body and the second cabinet body and is used for pumping and exhausting gas in the first cabinet body and the second cabinet body so that the internal air pressure of the first cabinet body and the second cabinet body is negative pressure; The first cabinet body and the second cabinet body are explosion-proof cabinets; The first cabinet body and the second cabinet body top are equipped with inflammable and explosive gas detection sensor respectively.
3. 3. The system of claim 2, wherein the air supply module further comprises an air inlet valve, a pressure regulating device and a pipeline vacuum measurement and control device connected with the first pipeline, wherein the air inlet valve, the pressure regulating device and the pipeline vacuum measurement and control device are positioned in the first cabinet, The air inlet main valve is used for controlling the on-off of flammable and explosive gas in the first pipeline; the pressure regulating device is used for detecting and regulating the pressure of flammable and explosive gas passing through the pressure regulating device so as to adapt to the pressure environment of the first pipeline and the reaction cavity; The pipeline vacuum measurement and control device is used for detecting the vacuum degree in the pipeline when the inflammable and explosive gas is not introduced, and judging whether the vacuum degree meets the condition of introducing the inflammable and explosive gas.
4. 4. The system of claim 3, wherein the gas supply module further comprises a gas mass flow controller and a normally closed valve disposed in each of the second gas supply lines, wherein, The gas flow quality controller is used for controlling the gas flow of the second gas supply pipeline, and the normally closed valve is used for disconnecting the supply of flammable and explosive gas of the second gas supply pipeline; the gas mass flow controller and the normally closed valve are located in the second tank.
5. 5. The system of claim 3, wherein the reaction chamber comprises a plurality of gas inlets, the plurality of gas inlets of the reaction chamber being in one-to-one correspondence with the gas outlets of the plurality of second conduits; The reaction cavity comprises a plurality of areas, each area corresponds to at least one air inlet of the reaction cavity, and the air inlets of the reaction cavities corresponding to the areas are not multiplexed.
6. 6. The system according to any one of claims 2-5, wherein the first and second cabinets are provided with negative pressure pumping sensors, respectively, for detecting pumping pressure of the negative pressure pumping device.
7. 7. The system of claim 4, wherein the control module is further configured to control the intake manifold valve and each of the normally closed valves to close based on the received alarm signal from the flammable and explosive gas detection sensor.
8. 8. The system of claim 1, wherein the pump out treatment module further comprises a treatment device, and an exhaust conduit connecting the pump out device and the treatment device, wherein the flammable and explosive gas in the exhaust conduit is in a positive pressure environment; the treatment equipment is connected with the pumping equipment and is used for carrying out safety treatment on flammable and explosive gases exhausted by the pumping equipment; The pumping equipment, the treatment equipment and the exhaust pipeline are positioned in a third cabinet body which is relatively sealed, wherein the air in the third cabinet body is pumped and exhausted through the negative pressure pumping equipment so that the inside of the third cabinet body is in a negative pressure environment; and a flammable and explosive gas detection sensor is arranged at the top of the third cabinet body.
9. 9. The system of claim 8, wherein the pump outlet treatment module further comprises a pump outlet total valve; The pumping and exhausting total valve is arranged in a connecting channel of the pumping and exhausting equipment and the reaction cavity and used for controlling the on-off of a gas channel between the pumping and exhausting equipment and the reaction cavity.
10. 10. The system of any one of claims 1-5, wherein the gas pressure within the reaction chamber is less than 4000pa.
11. 11. The system of any one of claims 1-5, wherein the oxygen concentration within the reaction chamber is less than 1%.
12. 12. The system according to any one of claims 2-5, wherein, The first pipeline arranged outside the first cabinet body and the second cabinet body is a seamless pipe, and the second pipeline arranged outside the second cabinet body is a seamless pipe.
13. 13. The system of claim 2, wherein the control module is further configured to determine whether the negative pressure pumping state is abnormal according to a negative pressure pumping state signal transmitted by a negative pressure pumping sensor corresponding to the negative pressure pumping device, and if the negative pressure pumping state is determined to be abnormal, control the intake main valve to be closed.
14. 14. A method for using flammable and explosive gas, which is used for the flammable and explosive gas safety system according to any one of claims 1-13, wherein the flammable and explosive gas safety system comprises a gas supply module, a gas utilization module and a pumping and exhausting treatment module, the gas utilization module comprises a reaction cavity in a negative pressure environment, the pumping and exhausting treatment module comprises pumping and exhausting equipment and an oxygen concentration detection device, and the method comprises the following steps: When the inflammable and explosive gas is introduced into the reaction cavity and is in a working state, the reacted gas is pumped and exhausted from the reaction cavity by utilizing pumping equipment; the method comprises the steps of obtaining the oxygen concentration in the gas from an oxygen concentration detection device, and judging whether the gas is in a safe use range of flammable and explosive gas according to the oxygen concentration, wherein the oxygen concentration detection device detects the oxygen concentration in the gas exhausted by a pumping device, and the oxygen concentration in the gas exhausted by the pumping device is equal to the oxygen concentration in the reaction cavity; and controlling the gas supply module to stop supplying the flammable and explosive gas to the gas utilization module in response to detecting that the oxygen concentration exceeds a safe use range.
15. 15. The method of claim 14, wherein the gas supply module comprises a first conduit disposed within the first cabinet and a plurality of second conduits disposed within the second cabinet, the flammable and explosive gas in the first conduit and the second conduits being in a positive pressure environment, the method further comprising: detecting whether a negative pressure pumping state for pumping the negative pressure of the first cabinet body and the second cabinet body meets a first preset condition or not according to the received air supply instruction; Controlling the operation of the processing equipment in response to the detection result, wherein the processing equipment is communicated with the pumping equipment through an exhaust pipeline; When the treatment equipment normally operates, controlling the pumping equipment to operate, and controlling the pumping total valve to open so that the pumping equipment is communicated with the gas channel of the reaction cavity; responding to the fact that the pumping equipment is in a normal running state, controlling a normally closed valve in the second pipeline to be opened, and enabling the second pipeline to be communicated with the reaction cavity; When the pressure in the reaction cavity, the pressure in the second pipeline and the oxygen concentration detected by the oxygen concentration detection device meet the preset air supply condition, the air inlet main valve in the first pipeline is controlled to be opened, and flammable and explosive gas is supplied to the second pipeline through the first pipeline, so that the reaction cavity enters a working state.
16. 16. The method of claim 15, wherein the pumping apparatus, the processing apparatus, and the exhaust conduit are disposed in a third cabinet, and wherein the negative pressure pumping apparatus pumps gas from the first, second, and third cabinets such that the first, second, and third cabinets are at a negative pressure therein, the method further comprising: When the flammable and explosive gas using system is in a gas supply state, if one or more of the following occurs is detected, the gas inlet main valve is controlled to be closed, and the supply of the flammable and explosive gas is stopped: one or more of the first cabinet body, the second cabinet body and the third cabinet body is/are abnormal in negative pressure pumping state; The pressure in the reaction cavity does not meet the preset air supply condition.
17. 17. The method of claim 16, wherein the method further comprises: and in response to detecting alarm signals of one or more corresponding flammable and explosive gas detection sensors in the first cabinet body, the second cabinet body and the third cabinet body, controlling an air inlet main valve in the first pipeline to be closed so as to stop supplying flammable and explosive gas, and controlling normally closed valves in the second pipelines to be closed.

Description

System and method for using inflammable and explosive gas Technical Field Embodiments of the present disclosure relate to the field of semiconductor technology, and in particular, to a system and method for using flammable and explosive gases. Background The use of flammable and explosive gases, which may include hydrogen, methane, nitric oxide, etc., is desirable in semiconductor processing. For example, hydrogen may be introduced during the growth of semiconductor materials in order to reduce semiconductor impurities and defects. However, hydrogen has the characteristics of small molecular weight, easy permeation, low ignition energy, hydrogen embrittlement and the like, and is high in risk hazard. With the gradual increase of the hydrogen flow, the risk is also increased. The safety of the flammable and explosive gas using system is the biggest problem in the using process of the flammable and explosive gas. In some application scenarios, the flammable and explosive gas may be in a negative pressure environment when in use, and at present, no risk detection scheme for detecting the risk in the negative pressure use environment exists, so how to detect the risk in the negative pressure environment is a problem to be solved urgently. Disclosure of Invention Embodiments of the present disclosure provide a flammable and explosive gas usage system and method. According to the first aspect, the embodiment of the disclosure provides a flammable and explosive gas using system, which comprises a gas supply module, a gas utilization module, a pumping and exhausting processing module and a control module, wherein the gas utilization module is respectively connected with the gas supply module and the pumping and exhausting processing module, the gas supply module is used for supplying the flammable and explosive gas to the gas utilization module, the flammable and explosive gas is flammable and explosive gas, the flammable and explosive gas reacts in a reaction cavity of the gas utilization module, the reaction cavity is in a negative pressure environment when being supplied with gas, the pumping and exhausting processing module comprises pumping and exhausting equipment, the pumping and exhausting equipment is used for pumping and exhausting gas from the reaction cavity, an oxygen concentration detection device is arranged at a gas outlet of the pumping and exhausting equipment, the oxygen concentration detection device is used for indirectly detecting the oxygen concentration in the reaction cavity by detecting the oxygen concentration at a gas outlet of the pumping and exhausting equipment, and the control module is used for judging whether the flammable and explosive gas is in a safe use range of the flammable and explosive gas or not according to the oxygen concentration, and the control module is used for stopping the supply of the flammable and explosive gas to the reaction module if the detected oxygen concentration is not in the safe use range of the flammable and explosive gas. According to the scheme, the reaction cavity in the negative pressure environment is connected with the pumping equipment, the pumping equipment pumps gas in the reaction cavity, the oxygen concentration detection device is arranged at the gas outlet of the pumping equipment, and the gas output by the gas outlet of the pumping equipment is pressurized and is in the positive pressure environment, so that the oxygen concentration in the negative pressure environment can be detected under the positive pressure environment, the safety risk of flammable and explosive gas in the reaction cavity in the negative pressure environment is identified, and the control module is used for controlling the supply of the flammable and explosive gas to be cut off when the safety risk is identified. The flammable and explosive gas use system provides a safety risk detection and control scheme when the flammable and explosive gas is used in a negative pressure environment, and can reduce the safety risk in the use process of the flammable and explosive gas. With reference to the first aspect, in some embodiments of the flammable and explosive gas using system provided in the first aspect, the gas supply module includes a first gas supply pipe and a plurality of second gas supply pipes seamlessly connected to the first gas supply pipe, the plurality of second gas supply pipes are used for splitting the flammable and explosive gas conveyed by the first gas supply pipe, gas outlets of the plurality of second gas supply pipes are respectively connected with a gas inlet of the reaction cavity and used for providing the flammable and explosive gas to the reaction cavity, the gas supply module includes a first relatively sealed cabinet body and a second cabinet body, at least part of the first gas supply pipe is located in the first cabinet body, at least part of each second gas supply pipe is located in the second cabinet body, a negative pressure pumping dev