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CN-122015255-A - Fresh air ventilation method for industrial clean factory building

CN122015255ACN 122015255 ACN122015255 ACN 122015255ACN-122015255-A

Abstract

The invention discloses a fresh air ventilation method for an industrial clean factory building, belongs to the technical field of industrial clean production factory building design, and is used for solving one of the problems that an accident handling ventilation fresh air system of the industrial clean factory building is large in investment, high in energy consumption and not easy to control air quantity balance. The fresh air ventilation method for the industrial clean factory building comprises the steps of separating independent rooms, isolating areas where flammable and explosive gases possibly leak from other areas in the clean factory building to form the independent rooms, configuring a ventilation system, and configuring a fresh air system, wherein a fresh air channel and a control system are arranged. The fresh air ventilation method for the industrial clean factory building can effectively control the diffusion of inflammable and explosive gases, improve the safety level of the clean factory building, reduce equipment investment and reduce the energy consumption of system operation.

Inventors

  • LI CHUANYAN

Assignees

  • 世源科技工程有限公司

Dates

Publication Date
20260512
Application Date
20260122

Claims (10)

  1. 1. The fresh air ventilation method for the industrial clean factory building is characterized by comprising the following steps of: s100, separating independent rooms (101), namely isolating a risk area where flammable and explosive gases possibly leak from other areas in a clean factory building to form the independent rooms (101); S200, configuring a ventilation system; s300, configuring a fresh air system: S400, a fresh air channel and a control system are arranged.
  2. 2. The method of fresh air ventilation for an industrial clean building according to claim 1, wherein step S200 includes: s210, an independent clean air conditioner return air system is arranged in the independent room (101), and comprises an independent return air channel (202), return air louvers (203) and a dry coil (204).
  3. 3. The method of fresh air ventilation of an industrial clean building according to claim 2, wherein step S200 further comprises: S220 is configured with a process waste gas exhaust system (301), and the process waste gas exhaust system comprises the steps of setting the process waste gas exhaust systems in independent rooms (101) according to the process waste gas amount generated by process equipment in the independent rooms (101), wherein Lg1 is the exhaust air quantity of the process waste gas exhaust system in the independent rooms (101) in a normal state, and Lge is the exhaust air quantity of the process waste gas exhaust system in the independent rooms (101) when the process waste gas exhaust system works by using an emergency power supply in a power-off state.
  4. 4. A method of fresh air ventilation of an industrial clean room according to claim 3, characterized in that in step S220, the process exhaust air exhaust system of the independent room (101) is provided separately.
  5. 5. The method of fresh air ventilation of an industrial clean building according to claim 4, wherein step S300 comprises: S310, configuring a clean fresh air processing system, namely setting a positive pressure value required by a clean room (12), and configuring fresh air capacity of the fresh air system according to the exhaust amount of the process exhaust air exhaust system (301) and the air quantity required by keeping the positive pressure in the clean room (12).
  6. 6. The method of claim 5, wherein the step S310 includes: S311 is configured with a clean fresh air handling unit (601), so that the fresh air quantity Lx1 which is shared to the independent room when the clean fresh air handling unit is started is at least equal to the fresh air quantity L1 of the independent room in a normal state, and the L1 is equal to the sum of the exhaust air quantity Lg1 of the process waste gas in the normal state and the indoor positive pressure air quantity Lz of the independent room.
  7. 7. The method of fresh air ventilation of an industrial clean building of claim 6, wherein step S310 further comprises: S312, configuring an emergency power supply clean fresh air handling unit (6011), configuring an emergency power supply for part of the clean fresh air handling unit (601), and enabling fresh air volume Lxe of the emergency power supply clean fresh air handling unit to be at least equal to fresh air volume L2 of an independent room in a power-off state when the emergency power supply clean fresh air handling unit is started, wherein L2 is equal to the sum of process waste gas exhaust volume Lge1 in the power-off state and indoor positive pressure air volume Lz of the independent room.
  8. 8. The method of fresh air ventilation of an industrial clean building of claim 7, wherein step S310 further comprises: s313 is configured with a standby clean fresh air handling unit (602), and the standby clean fresh air handling unit (602) comprises at least one standby clean fresh air handling machine connected with an emergency source.
  9. 9. The method of fresh air ventilation for an industrial clean building according to claim 8, wherein step S400 includes: S410, a first fresh air flow control part is arranged in the independent room (101), and the first fresh air flow control part is used for adjusting the value of the Lx1 or Lxe.
  10. 10. The method for fresh air ventilation of an industrial clean room according to claim 9, further comprising S500 operating the system to shut down a fan filter unit (201) of the independent room (101) and independently control an air volume balance in the independent room (1012) during an accident condition and a power-off accident condition.

Description

Fresh air ventilation method for industrial clean factory building Technical Field The invention belongs to the technical field of industrial clean production factory building design, and relates to a fresh air ventilation method for an industrial clean factory building. Background With the rapid development of electronic technology, the application of clean factory buildings is becoming more and more popular. In the clean factory building, the air conditioner room is arranged in a centralized manner according to the whole factory building or layering, and a plurality of MAU units and standby units are arranged in the air conditioner room. MAU unit integrated primary filter (G4), medium efficiency filter (F7/F8), high efficiency filter (H13), chemical filter, two-stage surface cooling coil, preheating and reheating hot water coil, humidifier (water spray chamber or wet film or high pressure micro mist humidification etc.), fan etc. functional section, outdoor air is sent into clean zone of each production process after concentrated cooling, dehumidifying or heating and humidifying treatment, guaranteeing relative humidity, fresh air volume and positive pressure difference value required by workshop. In addition, a dry coil (DCC) and a Fan Filter Unit (FFU) are also arranged in the clean workshop to realize air circulation, wherein the DCC is responsible for processing the heat load of the workshop, and the FFU is used for balancing indoor heating value and guaranteeing the circulating air quantity meeting the requirement of cleanliness. In the epitaxial production process of semiconductor products, hydrogen is used as a reaction carrier gas, and the hydrogen leakage risk is possibly caused by defects of parts such as welding seams, cracks, valves, joints and the like, or by human misoperation, accidental impact on pipelines and the like of a hydrogen-related pipeline system. Once hydrogen leakage occurs in a clean workshop, serious accidents such as explosion, fire disaster, suffocation of personnel, equipment damage, environmental pollution, casualties and the like are extremely easy to occur. In view of the large floor area of the clean workshops, indoor ventilation (for example, the clean room needs to reach the standard of air exhaust amount of 12 times per hour) needs to be completed rapidly after leakage occurs, and the indoor zero-pressure state needs to be maintained to avoid outward spreading of flammable and explosive gas or infiltration of unclean air, so that the accurate matching of the fresh air supply amount and the air exhaust amount needs to be ensured during ventilation. Because the cost of the accident exhaust system is higher in the whole deployment of the clean workshop, and the balance control difficulty of fresh air and exhaust air is higher, if the accident handling ventilation fresh air system is configured, the equipment investment and the operation cost are required to be higher, and the air quantity balance in the clean room with inflammable and explosive gas leakage is difficult to control. Disclosure of Invention In view of the above analysis, the invention aims to provide a clean room ventilation fresh air system and a fresh air ventilation method, so as to solve one of the problems of large investment, high energy consumption and difficult control of air quantity balance of an accident handling ventilation fresh air system of an industrial clean factory building. The aim of the invention is mainly achieved by the following technical scheme. The invention provides a fresh air ventilation method for an industrial clean factory building, which comprises the following steps: S100, separating independent rooms, namely separating a risk area in which flammable and explosive gas leakage possibly occurs in the clean factory building from other areas to form the independent rooms; S200, configuring a ventilation system; s300, configuring a fresh air system: S400, a fresh air channel and a control system are arranged. Further, step S200 includes: s210, an independent clean air conditioner return air system is arranged in the independent room, and comprises an independent return air channel, a return air shutter and a dry coil pipe. Further, step S200 further includes: S220, configuring a process waste gas exhaust system, wherein the process waste gas exhaust system comprises process waste gas exhaust systems Lg1 and Lge1 according to the process waste gas amount generated by process equipment in an independent room, wherein Lg1 is the process waste gas exhaust volume of the process waste gas exhaust system in the independent room in a normal state, and Lge is the process waste gas exhaust volume of the process waste gas exhaust system working in the independent room by using an emergency power supply when the process waste gas exhaust system is in a power-off state. Further, in step S220, the process exhaust system of the independent room is separately provided. Further, step S300 incl