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CN-122015256-A - Air quantity balancing method for clean room with flammable and explosive gas release risk

CN122015256ACN 122015256 ACN122015256 ACN 122015256ACN-122015256-A

Abstract

The invention discloses an air quantity balancing method for a clean room with a flammable and explosive gas release risk, belongs to the technical field of industrial clean production factory building design, and is used for solving one of the problems that a clean room ventilation fresh air system with the flammable and explosive gas release risk is large in investment or high in energy consumption and cannot easily control air quantity balancing. The air quantity balancing method comprises the steps of dividing independent fireproof units in a clean area, arranging an exhaust system of a main room of the independent fireproof units, arranging a fresh air system, arranging a fresh air channel and a control system, and operating the system. The air quantity balancing method for the clean room with the flammable and explosive gas release risk can effectively control the diffusion of the flammable and explosive gas, improve the safety level of a clean factory building, reduce equipment investment and reduce the energy consumption of system operation.

Inventors

  • LI CHUANYAN

Assignees

  • 世源科技工程有限公司

Dates

Publication Date
20260512
Application Date
20260122

Claims (10)

  1. 1. A method for balancing the air quantity of a clean room with the risk of releasing flammable and explosive gases, which is characterized by comprising the following steps: S100, dividing independent fireproof units (101) in a clean area; s200, arranging an exhaust system of a main chamber (1012) of the independent fireproof unit; S300, arranging a fresh air system; s400, arranging a fresh air channel and a control system; s500, when the system is operated in a normal state and a commercial power stopping state, the main chamber (1012) of the independent fireproof unit maintains the air volume balance of the positive pressure difference value P1, and when a gas release accident occurs, the main chamber (1012) of the independent fireproof unit maintains the air volume balance of the zero pressure difference value.
  2. 2. The method for balancing the air volume of a clean room with a risk of releasing flammable and explosive gases according to claim 1, wherein S100 comprises: The area where the release of flammable and explosive gases may occur in the clean area is isolated from other areas (102) of the clean area and a separate fire prevention unit (101) is formed, wherein the separate fire prevention unit (101) comprises a separate fire prevention unit upper interlayer (1011) and a separate fire prevention unit main room (1012).
  3. 3. The method for balancing the air volume of a clean room with a risk of releasing flammable and explosive gases according to claim 2, wherein the exhaust system in S200 comprises a process exhaust system (201) and a non-process exhaust system.
  4. 4. The method for balancing the air volume of a clean room with a risk of releasing flammable and explosive gases according to claim 3, wherein S200 further comprises: S210, determining values of Lg1 and Lge1, wherein Lg1 is the air exhaust quantity of the process waste gas exhaust system (201) in a normal state to the main chamber (1012) of the independent fireproof unit, and Lge is the air exhaust quantity of the process waste gas exhaust system (201) in a power-off-mains state to the main chamber (1012) of the independent fireproof unit when the process waste gas exhaust system (201) works by using an emergency power supply.
  5. 5. The method for balancing the air volume of a clean room with a risk of releasing flammable and explosive gases according to claim 4, wherein S200 further comprises: s220, setting values of Nv and Lv, wherein Nv is the exhaust air quantity of the main chamber of the independent fireproof unit with good ventilation times, and Lv is the exhaust air quantity of the main chamber of the independent fireproof unit with minimum ventilation times when an accident occurs.
  6. 6. The method for balancing the air volume of a clean room with a risk of releasing flammable and explosive gases according to claim 5, wherein S200 further comprises: S230 arranges a non-process exhaust plenum for the independent fire protection unit main chamber (1012).
  7. 7. The method for balancing the air volume of a clean room with a risk of releasing flammable and explosive gases according to claim 6, wherein S230 specifically comprises: S231 when lg1=0 and Lge 1=0, the non-process exhaust gas exhaust system of the main chamber (1012) of the independent fire prevention unit is arranged according to the values of Nv and Lv.
  8. 8. The method according to claim 7, wherein S231 further comprises arranging a normal exhaust system (202) and a standby exhaust system (204) such that Lp1=Lbp=nv and Lp1+Lbp > Lv, wherein Lp1 is an exhaust amount of the normal exhaust system and Lbp is an exhaust amount of the standby exhaust system.
  9. 9. The method for balancing the air volume of a clean room with a risk of releasing flammable and explosive gases according to claim 8, wherein S300 further comprises: s310, determining the value of positive pressure air quantity Lz of a main room of the independent fireproof unit according to a positive pressure difference value P1 required by a normal state in the clean room; S320, arranging a clean fresh air treatment system (301), wherein the clean fresh air treatment system (301) can meet the conditions that Lx1 is more than or equal to Lp1+Lz=nv+Lz and Lxe1 is more than or equal to Lp1+Lz=nv+Lz, wherein Lx1 is the fresh air quantity which is shared to an independent fireproof unit in a normal state of a fresh air treatment unit, and Lxe1 is the fresh air quantity which is shared to the independent fireproof unit in a power-off-mains state of the fresh air treatment unit; S310, a clean fresh air processing system (301) is arranged, so that fresh air quantity provided by the clean fresh air processing system (301) to the independent fireproof unit main room (1012) in a normal state and a commercial power stopping state can enable the independent fireproof unit main room (1012) to maintain a positive pressure difference value P1.
  10. 10. The method for balancing the air volume of a clean room with a risk of releasing flammable and explosive gases according to any one of claims 1 to 9, wherein S400 includes: A first differential pressure sensor (402) is arranged in the independent fire prevention unit main chamber (1012), and the first differential pressure sensor (402) is set to be a positive pressure difference value P1.

Description

Air quantity balancing method for clean room with flammable and explosive gas release risk Technical Field The invention belongs to the technical field of industrial clean production factory building design, and relates to an air quantity balancing method for a clean room with a flammable and explosive gas release risk. Background With the increasing degree of automation in electronic manufacturing, clean rooms in electronic workshops typically require AGV charging rooms, such as flat panel displays and semiconductor projects. However, the AGV charging involves the risk that the rechargeable battery may release flammable and explosive gases, and once the situation of releasing flammable and explosive gases occurs in the clean room, serious accidents such as explosion, fire disaster, suffocation of personnel, equipment damage, environmental pollution, casualties and the like are extremely easy to occur. For the clean area related to the risk of flammable and explosive release, indoor ventilation (for example, the clean room needs to reach the exhaust standard of 12 times/h) is required to be completed rapidly after the flammable and explosive gas is released, and an indoor zero-pressure state is required to be maintained, so that the flammable and explosive gas is prevented from spreading outwards or being permeated by unclean air, the floor area of the clean room is large, the cost of arranging an accident exhaust system in the whole clean room is high, the clean room is in a positive pressure environment in a normal state and a commercial power stopping state, the difficulty of controlling air quantity balance is also large, and the actual requirement is difficult to be accurately matched. Disclosure of Invention In view of the above analysis, the invention aims to provide a clean room ventilation fresh air system and a fresh air ventilation method, so as to solve one of the problems of large investment, high energy consumption and difficult control of air quantity balance of an accident handling ventilation fresh air system of an industrial clean factory building. The aim of the invention is mainly achieved by the following technical scheme. The invention provides an air quantity balancing method of a clean room with the risk of releasing flammable and explosive gases, which comprises the following steps: S100, dividing independent fireproof units in a clean area; S200, arranging an exhaust system of a main room of the independent fireproof unit; S300, arranging a fresh air system; s400, arranging a fresh air channel and a control system; S500, when the system is operated in a normal state and a commercial power stopping state, the main chamber of the independent fireproof unit maintains the air volume balance of the positive pressure difference value P1, and when the gas release accident occurs, the main chamber of the independent fireproof unit maintains the air volume balance of the zero pressure difference value. Further, S100 includes: the area where the release risk of flammable and explosive gases possibly occurs in the clean area is isolated from other areas of the clean area, and independent fireproof units are formed, wherein each independent fireproof unit comprises an independent fireproof unit upper interlayer and an independent fireproof unit main room. Further, the exhaust system in S200 includes a process exhaust system and a non-process exhaust system. Further, S200 further includes: S210, determining values of Lg1 and Lge1, wherein Lg1 is the air discharge quantity of the process waste gas exhaust system in a normal state and an accident state to the main chamber of the independent fireproof unit, and Lge1 is the air discharge quantity of the process waste gas exhaust system in a power-off state and a power-on accident state to the main chamber of the independent fireproof unit when the process waste gas exhaust system works by using an emergency power supply. Further, S200 further includes: s220, setting values of Nv and Lv, wherein Nv is the exhaust air quantity of the main chamber of the independent fireproof unit with good ventilation times, and Lv is the exhaust air quantity of the main chamber of the independent fireproof unit with minimum ventilation times when an accident occurs. Further, S200 further includes: s230, arranging a non-process waste gas exhaust system aiming at the main chamber of the independent fireproof unit; further, S230 specifically includes: S231 when lg1=0 and Lge 1=0, the non-process exhaust gas exhaust system of the main chamber of the independent fire prevention unit is arranged according to the values of Nv and Lv. Further, S231 comprises the step of arranging a normal exhaust system and a standby exhaust system so that Lp1=Lbp=nv and Lp1+Lbp is larger than or equal to Lv, wherein Lp1 is the exhaust amount of the normal exhaust system and Lbp is the exhaust amount of the standby exhaust system. Further, S300 further includes: s310, determining the value