CN-122015331-A - Control method, control device, equipment and medium of semiconductor temperature control system

CN122015331ACN 122015331 ACN122015331 ACN 122015331ACN-122015331-A

Abstract

The invention discloses a control method, a control device, equipment and a medium of a semiconductor temperature control system, wherein the control method firstly utilizes a temperature detection module to collect working temperature of an object to be detected, acquires an absolute value of an error between the working temperature and a target temperature, then carries out superposition processing on outputs of a first proportional control unit, an integral control unit and a differential control unit when the absolute value of the error is larger than a preset temperature error threshold value, determines the output as a rough adjustment output control quantity, and at least determines the output of the integral control unit corresponding to the first moment as a fine adjustment output control quantity when the absolute value of the error is smaller than or equal to the preset temperature error threshold value, and finally drives a semiconductor refrigeration module to carry out temperature regulation according to the rough adjustment output control quantity or the fine adjustment output control quantity. By using the method, after the absolute value of the error enters a tiny preset temperature error threshold value, the method is switched to a fine tuning algorithm, and the ultra-high-precision constant temperature maintenance is completed through optimized integral control and output limiting.

Inventors

BAI YANJIE
ZHANG FANGXING
YU MIAO
JI SHENGQIANG
RUAN BOWEN
HuangFu Shengnan
MA NING
SHI RUI
DING XU

Assignees

北京大学长三角光电科学研究院

Dates

Publication Date: 20260512
Application Date: 20260206

Claims (10)

1. The control method of the semiconductor temperature control system is characterized in that the semiconductor temperature control system comprises a temperature detection module, a semiconductor refrigeration module and a control module, wherein the control module is respectively and electrically connected with the temperature detection module and the semiconductor refrigeration module, and the temperature detection module and the semiconductor refrigeration module are attached to the surface of an object to be tested; The control method comprises the following steps: Collecting the working temperature of the object to be detected by using the temperature detection module, and obtaining an absolute value of an error between the working temperature and a target temperature; When the absolute value of the error is larger than a preset temperature error threshold value, the outputs of the first proportional control unit, the integral control unit and the differential control unit are subjected to superposition processing, and the output is determined to be coarse adjustment output control quantity; Determining the output of the integral control unit corresponding to at least a first moment as a fine adjustment output control quantity when the absolute value of the error is smaller than or equal to the preset temperature error threshold value, wherein the first moment is a jump moment when the absolute value of the error changes from being larger than the preset temperature error threshold value to being smaller than or equal to the preset temperature error threshold value; And driving the semiconductor refrigeration module to regulate and control the temperature according to the coarse adjustment output control quantity or the fine adjustment output control quantity so as to enable the working temperature to change towards the target temperature.
2. The control method according to claim 1, characterized in that when the absolute value of the error is less than or equal to the preset temperature error threshold, determining at least the output of the integral control unit corresponding to the first time as a fine-tuning output control amount includes: when the absolute value of the error is smaller than or equal to the preset temperature error threshold value, according to a calculation formula Determining the fine tuning output control quantity u 2 , wherein K i represents an integral coefficient corresponding to the integral control unit, t 1 represents the first moment, Represents the integral value of the absolute value of the error over a time range of 0 to t 1 .
3. The control method of claim 1, wherein the control module further comprises a second proportional control unit, wherein a proportional coefficient corresponding to the second proportional control unit is greater than a proportional coefficient corresponding to the first proportional control unit; when the absolute value of the error is smaller than or equal to the preset temperature error threshold, determining the output of the integral control unit corresponding to at least the first moment as a fine tuning output control quantity, wherein the fine tuning output control quantity comprises the following steps: and when the absolute value of the error is smaller than or equal to the preset temperature error threshold value, performing superposition processing on the output of the second proportional control unit and the output of the integral control unit corresponding to the first moment, and determining the output as the fine adjustment output control quantity.
4. A control method according to claim 3, wherein the second proportional control unit corresponds to a scale factor in the range of 5-5.5.
5. The control method according to claim 1, wherein driving the semiconductor refrigeration module to perform temperature regulation so that the operating temperature is changed toward the target temperature in accordance with the coarse adjustment output control amount or the fine adjustment output control amount, comprises: Determining a pulse width modulation waveform according to the coarse tuning output control amount or the fine tuning output control amount; and driving the semiconductor refrigeration module to regulate and control the temperature based on the pulse width modulation waveform so as to change the working temperature towards the target temperature.
6. The control method according to claim 5, characterized in that determining a pulse width modulation waveform based on the coarse adjustment output control amount or the fine adjustment output control amount, comprises: determining a first target modulation duty cycle according to the coarse tuning output control amount; calculating to obtain a first modulation pulse width according to the product of a preset pulse frequency value and the first target modulation duty cycle; and determining the pulse width modulation waveform corresponding to coarse adjustment according to the first modulation pulse width, the preset pulse frequency value and the first target modulation duty ratio.
7. The control method according to claim 5, characterized in that determining a pulse width modulation waveform based on the coarse adjustment output control amount or the fine adjustment output control amount, comprises: Determining a second target modulation duty ratio according to the fine tuning output control quantity; Calculating to obtain a first modulation pulse frequency according to a preset pulse width value and the ratio of the second target modulation duty ratio; and determining the pulse width modulation waveform corresponding to fine modulation according to the first modulation pulse frequency, the preset pulse width value and the second target modulation duty ratio.
8. The control device of the semiconductor temperature control system is characterized by comprising a temperature detection module, a semiconductor refrigeration module and a control module, wherein the control module is respectively and electrically connected with the temperature detection module and the semiconductor refrigeration module, and the temperature detection module and the semiconductor refrigeration module are attached to the surface of an object to be tested; The control device includes: The data acquisition module is used for acquiring the working temperature of the object to be detected by using the temperature detection module and acquiring an absolute value of an error between the working temperature and a target temperature; the coarse tuning output module is used for carrying out superposition processing on the outputs of the first proportional control unit, the integral control unit and the differential control unit when the absolute value of the error is larger than a preset temperature error threshold value, and determining the output as coarse tuning output control quantity; the fine tuning output module is used for determining the output of the integral control unit corresponding to at least a first moment as a fine tuning output control quantity when the absolute value of the error is smaller than or equal to the preset temperature error threshold value, wherein the first moment is a jump moment when the absolute value of the error is changed from being larger than the preset temperature error threshold value to being smaller than or equal to the preset temperature error threshold value; and the temperature regulation and control module is used for driving the semiconductor refrigeration module to regulate and control the temperature according to the coarse regulation output control quantity or the fine regulation output control quantity so as to enable the working temperature to change towards the target temperature.
9. A terminal device, comprising: one or more processors; a storage means for storing one or more programs; When executed by the one or more processors, causes the one or more processors to implement the method of controlling a semiconductor temperature control system as recited in any one of claims 1-7.
10. A computer-readable storage medium, on which a computer program is stored, characterized in that the program, when being executed by a processor, implements a control method of a semiconductor temperature control system according to any one of claims 1-7.

Description

Control method, control device, equipment and medium of semiconductor temperature control system Technical Field The embodiment of the invention relates to the technical field of semiconductors, in particular to a control method, a control device, equipment and a medium of a semiconductor temperature control system. Background The semiconductor refrigerator has been widely used in the fields of precision lasers, medical detection instruments, high-sensitivity sensors, optical communication devices, and the like by virtue of the advantages of small volume, no noise in operation, rapid response, and the like. In such high-end application scenarios, temperature stability is a key factor in determining the overall performance index of the device. And the existing semiconductor temperature control technology generally adopts a singlechip to collect temperature signals, finishes control quantity calculation by means of a PID algorithm, generates Pulse Width Modulation (PWM) waveforms by a timer, and drives a semiconductor refrigerator to realize heating or refrigerating operation. However, with the continuous improvement of the requirements of the precision laser and other fields on the temperature control precision, the limitation of the traditional whole-process unified PID control scheme is increasingly prominent, that is, the same set of PID parameters and PWM regulation logic are adopted in the whole process of heating, cooling or constant temperature. And, in order to ensure the temperature rise and reduction rate, a larger scale factor is usually set in the PID algorithm, but this can make the adjustment granularity of PWM output too large after the adjustment enters a steady state. When the temperature approaches the target temperature and is in a micro error interval, the conventional algorithm lacks a targeted micro-stepping adjustment mechanism, the adjustment resolution of the PWM duty ratio is insufficient to offset micro environmental thermal disturbance, and finally the temperature is caused to vibrate repeatedly and slightly near the target temperature, so that high-precision temperature constant control cannot be realized, stability in a higher temperature control precision range cannot be realized, and an extremely narrow steady-state window cannot be maintained. Disclosure of Invention The embodiment of the invention provides a control method, a control device, equipment and a medium of a semiconductor temperature control system, which realize the design of a high-precision semiconductor temperature control algorithm, are special for PWM fine-tuning control logic in a steady-state interval, switch to a high-resolution fine-tuning algorithm after the absolute value of an error enters a tiny preset temperature error threshold value, and finish the constant temperature maintenance of ultra-high precision such as +/-0.002 ℃ for 24 hours through optimized integral control and output limiting, namely, the stability is within a temperature control precision range of +/-0.002 ℃ and maintain an extremely narrow steady-state window of +/-0.002 ℃. In a first aspect, an embodiment of the present invention provides a control method of a semiconductor temperature control system, where the semiconductor temperature control system includes a temperature detection module, a semiconductor refrigeration module, and a control module, where the control module is electrically connected with the temperature detection module and the semiconductor refrigeration module, respectively, and the temperature detection module and the semiconductor refrigeration module are attached to a surface of an object to be tested; The control method comprises the following steps: Collecting the working temperature of the object to be detected by using the temperature detection module, and obtaining an absolute value of an error between the working temperature and a target temperature; When the absolute value of the error is larger than a preset temperature error threshold value, the outputs of the first proportional control unit, the integral control unit and the differential control unit are subjected to superposition processing, and the output is determined to be coarse adjustment output control quantity; Determining the output of the integral control unit corresponding to at least a first moment as a fine adjustment output control quantity when the absolute value of the error is smaller than or equal to the preset temperature error threshold value, wherein the first moment is a jump moment when the absolute value of the error changes from being larger than the preset temperature error threshold value to being smaller than or equal to the preset temperature error threshold value; And driving the semiconductor refrigeration module to regulate and control the temperature according to the coarse adjustment output control quantity or the fine adjustment output control quantity so as to enable the working temperature to change towards the