CN-122015412-A - Precise temperature control method and device for vacuum optical equipment

CN122015412ACN 122015412 ACN122015412 ACN 122015412ACN-122015412-A

Abstract

The invention provides a precise temperature control method and equipment for vacuum optical equipment, wherein the precise temperature control method and equipment comprises a mechanical refrigeration unit, a gas-nitrogen circulation unit and a heat exchange unit, the mechanical refrigeration unit comprises a compressor and a refrigerant circulation pipeline and is used for generating cold energy, the gas-nitrogen circulation unit comprises a gas-nitrogen fan, a gas-nitrogen circulation pipeline and a temperature control bottom plate arranged in a vacuum cabin and is used for transmitting the cold energy to the vacuum cabin, and a heat conducting medium is arranged in the heat exchange unit and is used for indirectly transmitting the cold energy generated by the refrigeration unit to the gas-nitrogen circulation unit. The technical problems that the prior optical equipment cannot simultaneously give consideration to higher temperature control precision and cannot pollute an optical element after refrigerant leakage when performing high and low temperature tests in a vacuum environment are solved. The invention can be widely applied to optical element test in vacuum environment.

Inventors

WANG ZHONGQING
FENG PENG
WEI QISONG
WEI ZHIBIN
MA YUELAN

Assignees

兰州驭星科技有限责任公司

Dates

Publication Date: 20260512
Application Date: 20260310

Claims (9)

1. A precise temperature control device for vacuum optical equipment is characterized by comprising a mechanical refrigeration unit, a gas-nitrogen circulation unit and a heat exchange unit, wherein the mechanical refrigeration unit comprises a compressor and a refrigerant circulation pipeline and is used for generating cold energy, the gas-nitrogen circulation unit comprises a gas-nitrogen fan, a gas-nitrogen circulation pipeline and a temperature control bottom plate arranged in a vacuum cabin and is used for transmitting the cold energy to the vacuum cabin, and a heat conducting medium is arranged in the heat exchange unit and is used for indirectly transmitting the cold energy generated by the refrigeration unit to the gas-nitrogen circulation unit.
2. The precision temperature control device for vacuum optical equipment according to claim 1, wherein the heat exchange unit adopts a closed type oil tank, the heat conducting medium adopts silicone oil, and a space above the liquid level of the silicone oil in the closed type oil tank is filled with nitrogen.
3. The precision temperature control device for vacuum optical equipment according to claim 2, wherein a refrigeration coil pipe communicated with the refrigerant circulation pipeline and a gas nitrogen circulation coil pipe communicated with the gas nitrogen circulation pipeline are respectively arranged in the closed type oil tank, and the refrigeration coil pipe and the gas nitrogen circulation coil pipe exchange heat through the heat conducting medium.
4. The precision temperature control apparatus for vacuum optical apparatus according to claim 1, wherein a hot bypass valve, a cold bypass valve and a refrigeration expansion valve are provided on a refrigerant circulation line of the mechanical refrigeration unit for adjusting a flow rate of refrigerant into the refrigeration coil.
5. The precision temperature control device for vacuum optical equipment according to claim 2, wherein a heater is provided on the gas-nitrogen circulation line between the closed type oil tank and the vacuum chamber.
6. The precision temperature control device for a vacuum optical device according to claim 1, wherein the gas-nitrogen circulation line is provided with a gas-replenishing valve and a gas-evacuating valve, the gas-replenishing valve being in communication with a gas-nitrogen source, the gas-replenishing valve and the gas-evacuating valve being for regulating a pressure in the gas-nitrogen circulation line.
7. A precision temperature control method for a vacuum optical apparatus using the apparatus of claims 1-6, comprising the steps of: The method comprises the following steps of S1, generating cold energy through a compressor of a mechanical refrigeration unit, enabling a refrigerant to enter a refrigeration coil through a refrigeration expansion valve, evaporating and absorbing heat of the refrigerant in a closed oil tank filled with a heat conducting medium, and reducing the temperature of the heat conducting medium; s2, cold energy transfer, namely driving nitrogen to flow through a nitrogen circulation coil by a nitrogen fan, and performing heat exchange with the heat conducting medium in the closed oil tank to reduce the temperature of the nitrogen; and S3, performing temperature control, namely enabling low-temperature nitrogen to flow through a gas-nitrogen circulation pipeline and enter the vacuum cabin, and cooling the temperature control bottom plate to realize temperature control in a vacuum environment.
8. The precise temperature control method for a vacuum optical apparatus according to claim 7, further comprising a precise temperature adjustment method: Simultaneously, the heater on the gas-nitrogen circulation pipeline is controlled to carry out fine compensation heating on the nitrogen subjected to heat exchange of the heat conducting medium, and the accurate temperature adjustment of the temperature control bottom plate is realized by a matching mode of rough adjustment of the cold quantity and fine adjustment of the heating.
9. The precision temperature control method for a vacuum optical apparatus according to claim 7, further comprising a safety monitoring method of: the vacuum degree in the vacuum cabin is monitored in real time by arranging a vacuum measuring gauge on the vacuum cabin; The pressure and temperature in the gas-nitrogen circulating pipeline are monitored through a gas-nitrogen pipeline inlet pressure temperature measuring device, when the pressure exceeds a set value, the pressure is relieved through an exhaust valve, and when the pressure is lower than the set value, nitrogen is supplemented from a gas-nitrogen source through a gas supplementing valve.

Description

Precise temperature control method and device for vacuum optical equipment Technical Field The invention relates to the field of temperature control, in particular to a precise temperature control method for vacuum optical equipment and equipment thereof. Background In the prior art, liquid nitrogen or a mechanical refrigerating unit is generally used for internal refrigeration of the thermal vacuum equipment, but the vacuum optical equipment has high requirements on temperature control precision, and meanwhile, the optical mirror surface cannot be polluted after the cooling plate or the pipeline-carried cooling medium in the vacuum cabin leaks accidentally. The liquid nitrogen pipeline becomes nitrogen after leakage, and the optical equipment mirror surface cannot be polluted, so that the liquid nitrogen pipeline is often preferentially used for cooling. However, the temperature control by simply utilizing liquid nitrogen has the problems of difficult adjustment and large temperature control deviation, and the temperature control precision of the temperature control device is difficult to meet the high-precision test requirement of optical equipment in a vacuum environment. On the other hand, although the temperature control precision of the traditional mechanical refrigerating unit is high, once the secondary refrigerant leaks in the vacuum cabin, the secondary refrigerant volatilizes or adheres to the optical mirror surface, serious pollution is caused, even the optical element is scrapped, and high use risk exists. In view of the above problems, some improvements have been proposed in the prior art. For example, chinese patent application publication No. CN113566441a discloses a large-scale high-low temperature environment simulation test system with double cold sources, which uses a mechanical refrigerating unit and a liquid nitrogen supply system as double cold sources, and gasifies liquid nitrogen into gas nitrogen through a gas nitrogen generating and stabilizing system, and provides a cold source for an insulation box together with a refrigerating machine system. The scheme mainly aims at improving the redundancy capacity of the system, and when one path of cold source fails, the other path can continue to work, and the scheme belongs to the technical idea of parallel backup disaster. Although the scheme realizes the dual configuration of the cold sources, the cold sources are simply connected in parallel, and the mechanical refrigeration and the gas-nitrogen refrigeration are relatively independent, so that the core technical problem of how to simultaneously consider the requirements of high-precision temperature control and high cleanliness under the specific application scene of the vacuum optical equipment is not solved. Disclosure of Invention Aiming at the technical problems that the prior optical equipment cannot simultaneously give consideration to higher temperature control precision and cannot pollute an optical element after refrigerant leakage when high and low temperature tests are carried out in a vacuum environment, the invention provides a precise temperature control method for the vacuum optical equipment and equipment thereof, wherein the precise temperature control method has higher temperature control precision and can prevent the refrigerant from damaging the optical element when a pipeline leaks. The technical scheme includes that the precise temperature control equipment for the vacuum optical equipment comprises a mechanical refrigeration unit, a gas-nitrogen circulation unit and a heat exchange unit, wherein the mechanical refrigeration unit comprises a compressor and a refrigerant circulation pipeline and is used for generating cold energy, the gas-nitrogen circulation unit comprises a gas-nitrogen fan, a gas-nitrogen circulation pipeline and a temperature control bottom plate arranged in a vacuum cabin and is used for transmitting the cold energy to the vacuum cabin, and a heat conducting medium is arranged in the heat exchange unit and is used for indirectly transmitting the cold energy generated by the refrigeration unit to the gas-nitrogen circulation unit. Preferably, the heat exchange unit adopts a closed oil tank, the heat conducting medium adopts silicone oil, and a space above the liquid level of the silicone oil in the closed oil tank is filled with nitrogen. Preferably, the closed oil tank is internally provided with a refrigeration coil pipe communicated with the refrigerant circulation pipeline and a gas nitrogen circulation coil pipe communicated with the gas nitrogen circulation pipeline, and the refrigeration coil pipe and the gas nitrogen circulation coil pipe exchange heat through the heat conducting medium. Preferably, a hot bypass valve, a cold bypass valve and a refrigeration expansion valve are arranged on a refrigerant circulation pipeline of the mechanical refrigeration unit, and are used for adjusting the flow rate of the refrigerant entering the r