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CN-122015417-A - Gas-water separation cooling system of oven based on process cooling water cooling

CN122015417ACN 122015417 ACN122015417 ACN 122015417ACN-122015417-A

Abstract

The invention discloses a gas-water separation cooling system of an oven based on process cooling water cooling, relates to a cooling water control technology, and solves the technical problem that the production is influenced by downtime of a plant PCW system caused by the fact that the existing CDA enters a plant PCW return pipeline. The system comprises a water tank, a water inlet component, a water drainage component, an exhaust component and a liquid level sensing component, wherein a water inlet of the water tank is connected with a water outlet of an oven cooling pipeline through the water inlet component, the exhaust component is installed at a gas inlet of the water tank, the liquid level sensing component is installed at one side of the water tank, one end of the liquid level sensing component is connected with the exhaust component, the other end of the liquid level sensing component is connected with the bottom of the water tank, a water outlet of the water tank is connected with a water return port of a PCW system through the water drainage component, and a water outlet of the PCW system is connected with a water inlet of the oven cooling pipeline. The invention realizes the accurate control of CDA discharge of the process cooling water return pipeline, and ensures the safe and stable operation of the oven cooling system.

Inventors

  • WEI YIPENG
  • CHEN YICHAO
  • Wei Fajing

Assignees

  • 志圣科技（广州）有限公司

Dates

Publication Date
20260512
Application Date
20260303

Claims (10)

  1. 1. The gas-water separation cooling system of the oven based on process cooling water cooling is characterized by comprising a water tank (1), a water inlet component, a water discharge component, an exhaust component and a liquid level sensing component, wherein a water inlet of the water tank (1) is connected with a water outlet of an oven cooling pipeline (3) through the water inlet component, the exhaust component is arranged at an air inlet of the water tank (1), the liquid level sensing component (2) is arranged at one side of the water tank (1), one end of the liquid level sensing component is connected with the exhaust component, the other end of the liquid level sensing component is connected with the bottom of the water tank (1), a water outlet of the water tank (1) is connected with a water return port of a PCW system (2) through the water discharge component, and a water outlet of the PCW system (2) is connected with a water inlet of the oven cooling pipeline (3); Setting a second liquid level, a third liquid level and a fourth liquid level, acquiring a real-time liquid level of the water tank (1), triggering a first drainage and exhaust strategy when the real-time liquid level is larger than or equal to the second liquid level and smaller than the third liquid level, triggering a second drainage and exhaust strategy when the real-time liquid level is larger than or equal to the third liquid level and smaller than the fourth liquid level, and triggering a third drainage and exhaust strategy when the real-time liquid level is larger than or equal to the fourth liquid level.
  2. 2. The water-air separation cooling system of the process cooling water-based oven according to claim 1, wherein the exhaust assembly comprises a first four-way pipe (40), a second four-way pipe (41), a third four-way pipe (42), a pressure relief safety valve (43), an air inlet electromagnetic valve (44), an exhaust electromagnetic valve (45), a manual pressure relief valve (46) and a pressure display switch (47); The device is characterized in that a first port of the first four-way pipe (40) is fixedly connected with an air inlet of the water tank (1), a second port of the first four-way pipe (40) is fixedly connected with an air outlet of the CDA manufacturing device through an air inlet electromagnetic valve (44), a third port of the first four-way pipe (40) is fixedly connected with a first port of the second four-way pipe (41), a pressure relief safety valve (43) is fixedly connected with a second port of the second four-way pipe (41), an air outlet of the pressure relief safety valve (43) is fixedly connected with a first exhaust pipe (49), a third port of the second four-way pipe (41) is fixedly connected with an air outlet electromagnetic valve (45), an air outlet of the air outlet electromagnetic valve (45) is fixedly connected with a second exhaust pipe (50), a fourth port of the second four-way pipe (41) is fixedly connected with a first port of the third four-way pipe (42), a second port of the third four-way pipe (42) is fixedly connected with an air inlet of the liquid level sensing assembly (2) through an air guide pipe (48), a fourth port of the third four-way pipe (42) is fixedly connected with an air inlet electromagnetic valve (46), a pressure display valve (47) is fixedly connected with the air inlet electromagnetic valve (45) and the air inlet electromagnetic valve (47) are electrically connected with the air inlet electromagnetic valve (45).
  3. 3. The gas-water separation cooling system of the process cooling water cooling-based oven according to claim 2, wherein the liquid level sensing assembly comprises a tube body (20), one end of the tube body (20) is connected with a second port of a third four-way pipe (42) through an air duct (48), the other end of the tube body (20) is fixedly connected with the bottom of the water tank (1), a fourth liquid level sensor (21), a third liquid level sensor (22), a second liquid level sensor (23) and a first liquid level sensor (24) are arranged in the tube body (20) from top to bottom, and the fourth liquid level sensor (21), the third liquid level sensor (22), the second liquid level sensor (23) and the first liquid level sensor (24) are all electrically connected with the controller.
  4. 4. The gas-water separation cooling system of the oven based on process cooling water cooling according to claim 1, wherein the water inlet assembly comprises a first water inlet pipe (10), a second water inlet pipe (11) and a plurality of water inlet branch pipes (12), one end of the first water inlet pipe (10) is connected with a water inlet of a water tank (1), the other end of the first water inlet pipe (10) is fixedly connected with a second water inlet pipe (11) which is transversely arranged, the second water inlet pipe (11) is fixedly connected with a plurality of water inlet branch pipes (12), a check valve (13) is installed on the water inlet branch pipes (12), and one end of the water inlet branch pipes (12) is connected with a water outlet of an oven cooling pipeline (3).
  5. 5. The gas-water separation cooling system of the oven based on process cooling water cooling according to claim 1, wherein the water drainage assembly comprises a water drainage pipe (30) and a water drainage electromagnetic valve (31), one end of the water drainage pipe (30) is connected with a water outlet of the water tank (1), the other end of the water drainage pipe (30) is connected with a water return port of the PCW system (2), the water drainage electromagnetic valve (31) is installed on the water drainage pipe (30), and the water drainage electromagnetic valve (31) is electrically connected with the controller.
  6. 6. The process cooling water based oven gas-water separation cooling system according to claim 1, wherein the first drain and exhaust strategy is to open a drain solenoid valve (31) of the drain assembly while closing an exhaust solenoid valve (45) of the exhaust assembly to stop exhausting and drain water of the water tank (1) into the PCW system (2) by CDA in a pipe, and to close the drain solenoid valve (31) of the drain assembly while opening the exhaust solenoid valve (45) when the real-time liquid level is equal to a preset first liquid level.
  7. 7. The process cooling water based oven gas-water separation cooling system according to claim 1, wherein the second drainage and exhaust strategy is to close an exhaust solenoid valve (45) of the exhaust assembly, open a drain solenoid valve (31) of the drain assembly, open an intake solenoid valve (44) of the exhaust assembly to feed CDA to force water in a water tank (1) to drain into a PCW system (2), and close the drain solenoid valve (31) of the drain assembly while opening the exhaust solenoid valve (45) when the real-time liquid level is equal to a preset first liquid level.
  8. 8. The process cooling water based oven gas-water separation cooling system of claim 1 wherein the third exhaust strategy is immediate shut down and manually troubleshooted.
  9. 9. The system according to claim 1, characterized in that the real-time pressure inside the tank (1) is obtained, and when the real-time pressure is greater than a preset pressure threshold, the air inlet solenoid valve (44) of the air exhaust assembly is closed, and the air exhaust solenoid valve (45) of the air exhaust assembly is opened.
  10. 10. The process cooling water based oven gas-water separation cooling system according to claim 9, wherein when the real time pressure is greater than a preset pressure threshold and the real time liquid level is greater than or equal to a third liquid level and less than a fourth liquid level, an air intake solenoid valve (44) of the air exhaust assembly is closed and an air exhaust solenoid valve (45) of the air exhaust assembly is opened.

Description

Gas-water separation cooling system of oven based on process cooling water cooling Technical Field The invention relates to a cooling water control technology, in particular to a gas-water separation cooling system of an oven based on process cooling water cooling. Background PCW (Process Cooling Water) process cooling water is an indispensable system in high-tech industries (such as semiconductors and panels), and has the main functions of providing stable temperature, circularly cooling production equipment and a dust-free room, preventing the equipment from being overheated and damaged, and maintaining the environmental temperature and humidity. The system generally uses deionized water (RO water) or soft water, and the system is matched with an ice water machine through a heat exchanger to cool the warm water for recycling, so that a closed loop is formed, and the stable process is ensured. Before the temperature rising of the oven, CDA (compressed dry air) is introduced to discharge the process cooling water in the water cooler, so that the process cooling water in the water cooler is prevented from evaporating and absorbing heat during the temperature rising of the oven, the energy consumption of the oven is increased, and meanwhile, the damage of a cooling pipeline caused by overhigh internal pressure due to steam generation is prevented. However, when CDA enters a plant PCW water return pipeline, a plant PCW system is down to influence production. Disclosure of Invention The invention aims to solve the technical problems that the prior art is insufficient, a gas-water separation cooling system of an oven based on process cooling water cooling is provided, and the technical problems that the production is influenced due to the fact that the existing CDA enters a factory PCW water return pipeline and the factory PCW system is down are solved. The invention relates to a gas-water separation cooling system of an oven based on process cooling water cooling, which comprises a water tank, a water inlet component, a water drainage component, an exhaust component and a liquid level sensing component, wherein a water inlet of the water tank is connected with a water outlet of an oven cooling pipeline through the water inlet component, the exhaust component is arranged at an air inlet of the water tank, the liquid level sensing component is arranged at one side of the water tank, one end of the liquid level sensing component is connected with the exhaust component, the other end of the liquid level sensing component is connected with the bottom of the water tank, a water outlet of the water tank is connected with a water return port of a PCW system through the water drainage component, and a water outlet of the PCW system is connected with a water inlet of the oven cooling pipeline; Setting a second liquid level, a third liquid level and a fourth liquid level, acquiring the real-time liquid level of the water tank, triggering a first drainage and exhaust strategy when the real-time liquid level is larger than or equal to the second liquid level and smaller than the third liquid level, triggering a second drainage and exhaust strategy when the real-time liquid level is larger than or equal to the third liquid level and smaller than the fourth liquid level, and triggering a third drainage and exhaust strategy when the real-time liquid level is larger than or equal to the fourth liquid level. The exhaust assembly comprises a first four-way pipe, a second four-way pipe, a third four-way pipe, a pressure relief safety valve, an air inlet electromagnetic valve, an exhaust electromagnetic valve, a manual pressure relief valve and a pressure display switch; The first port of the first four-way pipe is fixedly connected with the air inlet of the water tank, the second port of the first four-way pipe is fixedly connected with the air outlet of the CDA manufacturing device through an air inlet electromagnetic valve, the third port of the first four-way pipe is fixedly connected with the first port of the second four-way pipe, the second port of the second four-way pipe is fixedly connected with a pressure relief safety valve, the air outlet of the pressure relief safety valve is fixedly connected with a first exhaust pipe, the third port of the second four-way pipe is fixedly connected with an air outlet electromagnetic valve, the air outlet of the air outlet electromagnetic valve is fixedly connected with a second exhaust pipe, the fourth port of the second four-way pipe is fixedly connected with the first port of the third four-way pipe, the fourth port of the third four-way pipe is fixedly connected with a manual pressure relief valve through an air guide pipe and the air inlet of the liquid level sensing assembly, the third port of the third four-way pipe is provided with a pressure display switch, and the pressure display switch, the air outlet electromagnetic valve and the air inlet electromagnetic valve are all el